公开(公告)号：US06680826B2

公开(公告)日：2004-01-20

申请号：US09810821

申请日：2001-03-16

申请人： Masashi Shiraishi ,  Tamon Kasajima ,  Kai Wu ,  Zhihong Wang ,  Weiguang Zhu ,  Xi Yao

发明人： Masashi Shiraishi ,  Tamon Kasajima ,  Kai Wu ,  Zhihong Wang ,  Weiguang Zhu ,  Xi Yao

IPC分类号： G11B2124

CPC分类号： H01L41/096 ,  G11B5/5552

摘要： A piezoelectric device comprises an integral body of piezoelectric material having a length and width greater than its thickness; wherein the device further includes, in contact with the body, respective pairs of electrodes, wherein the electrodes of each pair are opposed in the thickness direction, wherein the body deflects along said transverse direction when a voltage is applied to the electrode pair. The present invention further provisdes a disk drive suspension and a head gimbal assembly.

摘要翻译： 一种压电装置，包括具有大于其厚度的长度和宽度的压电材料的整体; 其中所述装置还包括与所述主体接触的各对电极，其中每对电极在厚度方向上相对，其中当电压施加到所述电极对时，所述主体沿着所述横向方向偏转。 本发明进一步限制了磁盘驱动器悬架和磁头万向架组件。

公开(公告)号：US06760194B2

公开(公告)日：2004-07-06

申请号：US10369889

申请日：2003-02-19

申请人： Masashi Shiraishi ,  Tamon Kasajima ,  Kai Wu ,  Zhihong Wang ,  Weiguang Zhu ,  Xi Yao

发明人： Masashi Shiraishi ,  Tamon Kasajima ,  Kai Wu ,  Zhihong Wang ,  Weiguang Zhu ,  Xi Yao

IPC分类号： G11B2116

CPC分类号： H01L41/096 ,  G11B5/5552

摘要： A piezoelectric device comprises an integral body of piezoelectric material having a length and width greater than its thickness; wherein the device further includes, in contact with the body, respective pairs of electrodes, wherein the electrodes of each pair are opposed in the thickness direction, wherein the body deflects along said transverse direction when a voltage is applied to the electrode pair. The present invention further provisdes a disk drive suspension and a head gimbal assembly.

公开(公告)号：US06653763B2

公开(公告)日：2003-11-25

申请号：US09811112

申请日：2001-03-16

申请人： Zhihong Wang ,  Tamon Kasajima ,  Masashi Shiraishi ,  Ping Shang ,  Kai Wu

发明人： Zhihong Wang ,  Tamon Kasajima ,  Masashi Shiraishi ,  Ping Shang ,  Kai Wu

IPC分类号： H01L4108

CPC分类号： G11B5/5552 ,  G11B21/106 ,  G11B21/20 ,  H01L41/096 ,  H02N2/10

摘要： A piezoelectric actuator is disclosed including an annular piezoelectric element and a base. There is a gap along the radial direction of the annular piezoelectric element. One of the two ends, i.e., the fixed end of the said annular element, is connected to the base, while the other end is free. The base is made of piezoelectric materials. Furthermore, the annular element is divided into two or more annular parts along the direction of its circumference by the electrode patterns applied on its two opposite surface and/or its polarization directions. When driving voltages are applied, the actuator can generate roughly a rotary motion around the center of the annular piezoelectric element. The annular rotary actuator could be either a single plate or with multilayer structure. The present invention further relates to a dual stage head positioning actuator system of a hard disk drive with a plurality of disks and a plurality of vertically aligned head sliders mounted on distal ends of a plurality of suspensions via the annular piezoelectric actuators.

摘要翻译： 公开了一种压电致动器，其包括环形压电元件和基座。 沿着环形压电元件的径向存在间隙。 两个端部中的一个，即所述环形元件的固定端连接到基座，而另一端是自由的。 基座由压电材料制成。 此外，通过施加在其两个相对表面和/或其偏振方向上的电极图案，环形元件沿其圆周方向被分成两个或更多个环形部分。 当施加驱动电压时，致动器可围绕环形压电元件的中心大致产生旋转运动。 环形旋转致动器可以是单板或具有多层结构。 本发明还涉及具有多个盘的硬盘驱动器的双级头定位致动器系统和经由环形压电致动器安装在多个悬架的远端上的多个垂直对准的头滑块。

公开(公告)号：US06856070B2

公开(公告)日：2005-02-15

申请号：US10632638

申请日：2003-08-01

申请人： Zhihong Wang ,  Tamon Kasajima ,  Masashi Shiraishi ,  Ping Shang ,  Kai Wu

发明人： Zhihong Wang ,  Tamon Kasajima ,  Masashi Shiraishi ,  Ping Shang ,  Kai Wu

IPC分类号： G11B5/55 ,  G11B21/10 ,  G11B21/20 ,  H01L41/04 ,  H01L41/09 ,  H02N2/00 ,  H02N2/10

CPC分类号： G11B5/5552 ,  G11B21/106 ,  G11B21/20 ,  H01L41/096 ,  H02N2/10

摘要： A piezoelectric actuator is disclosed including an annular piezoelectric element and a base. There is a gap along the radial direction of the annular piezoelectric element. One of the two ends, i.e., the fixed end of the said annular element, is connected to the base, while the other end is free. The base is made of piezoelectric materials. Furthermore, the annular element is divided into two or more annular parts along the direction of its circumference by the electrode patterns applied on its two opposite surface and/or its polarization directions. When driving voltages are applied, the actuator can generate roughly a rotary motion around the center of the annular piezoelectric element. The annular rotary actuator could be either a single plate or with multilayer structure. The present invention further relates to a dual stage head positioning actuator system of a hard disk drive with a plurality of disks and a plurality of vertically aligned head sliders mounted on distal ends of a plurality of suspensions via the annular piezoelectric actuators.

摘要翻译： 公开了一种压电致动器，其包括环形压电元件和基座。 沿着环形压电元件的径向存在间隙。 两个端部中的一个，即所述环形元件的固定端连接到基座，而另一端是自由的。 基座由压电材料制成。 此外，通过施加在其两个相对表面和/或其偏振方向上的电极图案，环形元件沿其圆周方向被分成两个或更多个环形部分。 当施加驱动电压时，致动器可围绕环形压电元件的中心大致产生旋转运动。 环形旋转致动器可以是单板或具有多层结构。 本发明还涉及具有多个盘的硬盘驱动器的双级头定位致动器系统和经由环形压电致动器安装在多个悬架的远端上的多个垂直对准的头滑块。

公开(公告)号：US20050255239A1

公开(公告)日：2005-11-17

申请号：US10516059

申请日：2003-05-16

申请人： Weiguang Zhu ,  Zhihong Wang ,  Ooi Tan ,  Changlei Zhao

发明人： Weiguang Zhu ,  Zhihong Wang ,  Ooi Tan ,  Changlei Zhao

IPC分类号： C01G25/00 ,  C04B35/468 ,  C04B35/488 ,  C04B35/493 ,  C04B35/624 ,  G01N27/12 ,  H01L41/318 ,  B05D3/00 ,  B05D5/12

CPC分类号： C04B35/493 ,  B32B2311/08 ,  B82Y30/00 ,  C01G25/006 ,  C01P2004/64 ,  C04B35/4686 ,  C04B35/488 ,  C04B35/624 ,  C04B35/6261 ,  C04B35/62615 ,  C04B35/6264 ,  C04B35/62821 ,  C04B35/62823 ,  C04B2235/3212 ,  C04B2235/3215 ,  C04B2235/3225 ,  C04B2235/3232 ,  C04B2235/3236 ,  C04B2235/3244 ,  C04B2235/3246 ,  C04B2235/3249 ,  C04B2235/3255 ,  C04B2235/3272 ,  C04B2235/3274 ,  C04B2235/3296 ,  C04B2235/5454 ,  C04B2235/604 ,  C04B2235/77 ,  C04B2235/781 ,  C04B2235/9653 ,  C04B2237/346 ,  C04B2237/408 ,  G01N27/127 ,  H01L41/318 ,  Y10T29/42

摘要： A process to produce dense nanocrystalline composites such as ceramic bodies, coatings and multi-layered devices with uniform microstructure is disclosed. The invention utilizes sol-gel solutions to reduce agglomeration of nanocrystalline powders in the production of “green bodies” or intermediate products. This novel use of sol-gel solutions also reduces grain growth and porosity in products during sintering. In finished products, final grain sizes are typically less than 100 nm with densities of the final products approaching 99.5% of theoretical densities. In addition, sintering temperatures required are lower than those in conventional methods, typically less than 1,100° C. While FIG. 1 shows one application of this novel process, this invention has wide application in the manufacture of many other products, particularly for composite coatings and in the production of nanodevices.

摘要翻译： 公开了一种生产致密纳米晶复合材料的方法，例如具有均匀微观结构的陶瓷体，涂层和多层器件。 本发明利用溶胶 - 凝胶溶液来减少“绿体”或中间产品生产中纳米晶体粉末的聚集。 溶胶 - 凝胶溶液的这种新型应用还减少了烧结过程中产物的晶粒生长和孔隙度。 在成品中，最终粒度通常小于100nm，最终产品的密度接近理论密度的99.5％。 此外，所需的烧结温度低于通常小于1100℃的常规方法中的烧结温度。 图1显示了该新方法的一个应用，本发明在许多其它产品的制造中具有广泛的应用，特别是用于复合涂层和纳米器件的生产。

公开(公告)号：US07807216B2

公开(公告)日：2010-10-05

申请号：US10516059

申请日：2003-05-16

申请人： Weiguang Zhu ,  Zhihong Wang ,  Ooi Kiang Tan ,  Changlei Zhao

发明人： Weiguang Zhu ,  Zhihong Wang ,  Ooi Kiang Tan ,  Changlei Zhao

IPC分类号： B05D5/12 ,  B05D3/02 ,  H01L41/22 ,  H04R17/00

CPC分类号： C04B35/493 ,  B32B2311/08 ,  B82Y30/00 ,  C01G25/006 ,  C01P2004/64 ,  C04B35/4686 ,  C04B35/488 ,  C04B35/624 ,  C04B35/6261 ,  C04B35/62615 ,  C04B35/6264 ,  C04B35/62821 ,  C04B35/62823 ,  C04B2235/3212 ,  C04B2235/3215 ,  C04B2235/3225 ,  C04B2235/3232 ,  C04B2235/3236 ,  C04B2235/3244 ,  C04B2235/3246 ,  C04B2235/3249 ,  C04B2235/3255 ,  C04B2235/3272 ,  C04B2235/3274 ,  C04B2235/3296 ,  C04B2235/5454 ,  C04B2235/604 ,  C04B2235/77 ,  C04B2235/781 ,  C04B2235/9653 ,  C04B2237/346 ,  C04B2237/408 ,  G01N27/127 ,  H01L41/318 ,  Y10T29/42

摘要： A process to produce dense nanocrystalline composites such as ceramic bodies, coatings and multi-layered devices with uniform microstructure is disclosed. The invention utilizes sol-gel solutions to reduce agglomeration of nanocrystalline powders in the production of “green bodies” or intermediate products. This novel use of sol-gel solutions also reduces grain growth and porosity in products during sintering. In finished products, final grain sizes are typically less than 100 nm with densities of the final products approaching 99.5% of theoretical densities. In addition, sintering temperatures required are lower than those in conventional methods, typically less than 1,100° C. While FIG. 1 shows one application of this novel process, this invention has wide application in the manufacture of many other products, particularly for composite coatings and in the production of nanodevices.

摘要翻译： 公开了一种生产致密纳米晶复合材料的方法，例如具有均匀微观结构的陶瓷体，涂层和多层器件。 本发明利用溶胶 - 凝胶溶液来减少“绿体”或中间产品生产中纳米晶体粉末的聚集。 溶胶 - 凝胶溶液的这种新型应用还减少了烧结过程中产物的晶粒生长和孔隙度。 在成品中，最终粒度通常小于100nm，最终产品的密度接近理论密度的99.5％。 此外，所需的烧结温度低于通常小于1100℃的常规方法中的烧结温度。 图1显示了该新方法的一个应用，本发明在许多其它产品的制造中具有广泛的应用，特别是用于复合涂层和纳米器件的生产。

公开(公告)号：US06958817B1

公开(公告)日：2005-10-25

申请号：US10917806

申请日：2004-08-13

申请人： Weiguang Zhu ,  Zhihong Wang ,  Chen Chao ,  Ooi Kiang Tan

发明人： Weiguang Zhu ,  Zhihong Wang ,  Chen Chao ,  Ooi Kiang Tan

IPC分类号： G01B9/02

CPC分类号： G01B9/02083 ,  G01B9/0201 ,  G01B2290/35 ,  G01B2290/70

摘要： An interferometer has a source for generating a first beam and a second beam of a coherent monochromatic light having a wavelength λ, optical elements for directing the beams through two different optical paths having a path-length difference, a detector for detection of an interference signal of the beams, and a modulator for additionally varying the path-length difference periodically to allow the interference signal be detected near a path-length difference of λ/4 periodically. A maximum intensity change in the interference signal caused by a small period change of the path-length difference is thus detectable. The maximum intensity change caused by varying the path-length difference by at least λ/2 may also be detectable. The interferometer may be used to measure small vibrations, without pre-calibration and/or a feedback servo system for keeping the path-length difference near λ/4.

摘要翻译： 干涉仪具有用于产生第一光束的源和具有波长λ的相干单色光的第二光束，用于引导光束通过具有路径长度差的两个不同光路的光学元件，用于检测干涉信号的检测器 以及用于周期性地附加地改变路径长度差以允许在λ/ 4的路径长度差周期性附近检测干扰信号的调制器。 因此，可以检测由路径长度差的小周期变化引起的干扰信号的最大强度变化。 通过将路径长度差改变至少λ/ 2引起的最大强度变化也可以是可检测的。 干涉仪可以用于测量小的振动，而不需要预校准和/或用于将路径长度差保持在λ/ 4附近的反馈伺服系统。

公开(公告)号：US20120184251A1

公开(公告)日：2012-07-19

申请号：US13432663

申请日：2012-03-28

申请人： Li Feng ,  Zhihong Wang ,  Lei Shi

发明人： Li Feng ,  Zhihong Wang ,  Lei Shi

IPC分类号： H04W4/14 ,  H04W4/12

CPC分类号： H04W4/14 ,  H04L67/1002 ,  H04L67/1034

摘要： A device and a method for processing a short message service are capable of high-reliably processing a short message service. The device for processing a short message service includes a plurality of access units and a plurality of service processing units, where each of the access units is connected to the plurality of service processing units. The access unit is configured to receive the short message service and send it to one of the service processing units, and send out the processed short message service from the service processing unit . The service processing unit is configured to process the short message service, and send out the processed short message service through one of the access units.

摘要翻译： 用于处理短消息服务的设备和方法能够高可靠地处理短消息服务。 用于处理短消息服务的设备包括多个接入单元和多个业务处理单元，其中每个接入单元连接到多个业务处理单元。 访问单元被配置为接收短消息服务并将其发送到服务处理单元之一，并从服务处理单元发出处理的短消息服务。 服务处理单元被配置为处理短消息服务，并且通过其中一个访问单元发送经处理的短消息服务。

公开(公告)号：US20120034845A1

公开(公告)日：2012-02-09

申请号：US13198635

申请日：2011-08-04

申请人： Xiaoyuan Hu ,  Zhihong Wang ,  Harry Q. Lee ,  Zhize Zhu ,  Jeffrey Drue David ,  Dominic J. Benvegnu ,  Jimin Zhang ,  Wen-Chiang Tu

发明人： Xiaoyuan Hu ,  Zhihong Wang ,  Harry Q. Lee ,  Zhize Zhu ,  Jeffrey Drue David ,  Dominic J. Benvegnu ,  Jimin Zhang ,  Wen-Chiang Tu

IPC分类号： B24B49/00 ,  B24B51/00

CPC分类号： B24B37/013 ,  B24B37/042 ,  B24B37/107 ,  B24B37/205 ,  B24B49/045 ,  B24B49/12

摘要： A method of controlling polishing includes storing a library having a plurality of reference spectra, polishing a substrate, measuring a sequence of spectra of light from the substrate during polishing, for each measured spectrum of the sequence of spectra, finding a best matching reference spectrum using a matching technique other than sum of squared differences to generate a sequence of best matching reference spectra, and determining at least one of a polishing endpoint or an adjustment for a polishing rate based on the sequence of best matching reference spectra. Finding a best matching reference spectrum may include performing a cross-correlation of the measured spectrum with each of two or more of the plurality of reference spectra from the library and selecting a reference spectrum with the greatest correlation to the measured spectrum as a best matching reference spectrum.

摘要翻译： 控制抛光的方法包括：存储具有多个参考光谱的库，抛光衬底，在抛光期间测量来自衬底的光的光谱序列，对于光谱序列的每个测量光谱，使用 除了平方差的和以产生最佳匹配参考光谱的序列之外的匹配技术，以及基于最佳匹配参考光谱的序列来确定抛光终点或抛光速率的调整中的至少一个。 找到最佳匹配的参考光谱可以包括执行所测量的光谱与来自文库的多个参考光谱中的两个或更多个的互相关，并且选择与所测量的光谱具有最大相关性的参考光谱作为最佳匹配参考 光谱。

公开(公告)号：US20120034844A1

公开(公告)日：2012-02-09

申请号：US12851467

申请日：2010-08-05

申请人： Jimin Zhang ,  Zhihong Wang ,  Harry Q. Lee ,  Wen-Chiang Tu

发明人： Jimin Zhang ,  Zhihong Wang ,  Harry Q. Lee ,  Wen-Chiang Tu

IPC分类号： B24B49/12

CPC分类号： B24B37/042 ,  B24B37/013 ,  B24B49/12

摘要： A method of controlling polishing includes storing a library having a plurality of reference spectra, each reference spectrum of the plurality of reference spectra having a stored associated index value, polishing a substrate having a second layer overlying a first layer, measuring a sequence of spectra of light from the substrate during polishing, for each measured spectrum of the sequence of spectra, finding a best matching reference spectrum to generate a sequence of best matching reference spectra, determining the associated index value for each best matching spectrum from the sequence of best matching reference spectra to generate a sequence of index values, detecting exposure of the first layer, fitting a function to a portion of the sequence of index values corresponding to spectra measured after detection of exposure of the first layer, and determining at least one of a polishing endpoint or an adjustment for a polishing rate based on the function.

摘要翻译： 控制抛光的方法包括存储具有多个参考光谱的库，多个参考光谱的每个参考光谱具有存储的相关索引值，抛光具有覆盖第一层的第二层的衬底，测量第 对于光谱序列的每个测量光谱，找到最佳匹配参考光谱以产生最佳匹配参考光谱序列，从最佳匹配参考序列确定每个最佳匹配光谱的相关索引值 光谱以产生索引值序列，检测第一层的曝光，将功能拟合到对应于在检测到第一层的曝光之后测量的光谱的索引值序列的一部分，以及确定抛光终点中的至少一个 或基于该功能的抛光速率的调整。