公开(公告)号：US08709283B2

公开(公告)日：2014-04-29

申请号：US13500803

申请日：2010-12-16

申请人： Masatsugu Masuda ,  Masamichi Harada ,  Hitoshi Matsushita ,  Kenji Terashima

发明人： Masatsugu Masuda ,  Masamichi Harada ,  Hitoshi Matsushita ,  Kenji Terashima

IPC分类号： C09K11/64 ,  C09K11/08 ,  C09K11/62 ,  H01L33/50 ,  G02F1/13357 ,  C09K11/77 ,  G02F1/1335

CPC分类号： H01L33/504 ,  C09K11/0883 ,  C09K11/7734 ,  G02F1/1336 ,  G02F1/133603 ,  H01L33/502 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/48257 ,  Y10T428/2982 ,  H01L2924/00014

摘要： A phosphor as a divalent europium-activated oxynitride green light emitting phosphor which is a β-type SiAlON substantially represented by a general formula (A): EuaSibAlcOdNe (where a, b, c, d, and e are numbers satisfying 0.005≦a≦0.4, b+c=12, and d+e=16), and having an average particle size (d1) (determined by an air permeability method) of 9 to 16 μm, a median diameter (50% D) in particle size distribution of 12.5 to 35 μm, 50% D/d1 of 1.4 to 2.2, and an absorptance at 600 nm of not more than 8.0%, and a light emitting apparatus, a BL light source apparatus, and a liquid crystal display device using the same are provided, to provide a light emitting apparatus with a high efficiency and a stable characteristic and a liquid crystal display apparatus using the same by using the β-type SiAlON having controlled dispersibility and improved transparency.

摘要翻译： 作为基本上由通式（A）表示的基本上由通式（A）表示的SiAlON的二价铕活化的氮氧化物绿色发光荧光体的荧光体：EuaSibAlcOdNe（其中a，b，c，d和e是满足0.005＆nlE的数; a，n = e，0.4，b + c = 12，d + e = 16），平均粒径（d1）（透气度法测定）为9〜16μm，中值粒径（50％D） 粒径分布为12.5〜35μm，50％D / d1为1.4〜2.2，吸收率为600nm以下为8.0％以下，发光装置，BL光源装置以及液晶显示装置 提供了使用它们以提供具有高效率和稳定特性的发光装置，以及使用具有受控分散性和改进的透明度的“SiAlON”的液晶显示装置。

公开(公告)号：US20120194762A1

公开(公告)日：2012-08-02

申请号：US13500803

申请日：2010-12-16

申请人： Masatsugu Masuda ,  Masamichi Harada ,  Hitoshi Matsushita ,  Kenji Terashima

发明人： Masatsugu Masuda ,  Masamichi Harada ,  Hitoshi Matsushita ,  Kenji Terashima

IPC分类号： G02F1/1335 ,  C01B33/00 ,  H01L33/44

CPC分类号： H01L33/504 ,  C09K11/0883 ,  C09K11/7734 ,  G02F1/1336 ,  G02F1/133603 ,  H01L33/502 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/48257 ,  Y10T428/2982 ,  H01L2924/00014

摘要： A phosphor as a divalent europium-activated oxynitride green light emitting phosphor which is a β-type SiAlON substantially represented by a general formula (A): EuaSibAlcOdNe (where a, b, c, d, and e are numbers satisfying 0.005≦a≦0.4, b+c=12, and d+e=16), and having an average particle size (d1) (determined by an air permeability method) of 9 to 16 μm, a median diameter (50% D) in particle size distribution of 12.5 to 35 μm, 50% D/d1 of 1.4 to 2.2, and an absorptance at 600 nm of not more than 8.0%, and a light emitting apparatus, a BL light source apparatus, and a liquid crystal display device using the same are provided, to provide a light emitting apparatus with a high efficiency and a stable characteristic and a liquid crystal display apparatus using the same by using the β-type SiAlON having controlled dispersibility and improved transparency.

摘要翻译： 作为基本上由通式（A）表示的基本上由通式（A）表示的SiAlON的二价铕活化的氮氧化物绿色发光荧光体的荧光体：EuaSibAlcOdNe（其中a，b，c，d和e是满足0.005＆nlE的数; a，n = e，0.4，b + c = 12，d + e = 16），平均粒径（d1）（透气度法测定）为9〜16μm，中值粒径（50％D） 粒径分布为12.5〜35μm，50％D / d1为1.4〜2.2，吸收率为600nm以下为8.0％以下，发光装置，BL光源装置以及液晶显示装置 提供了使用它们以提供具有高效率和稳定特性的发光装置，以及使用具有受控分散性和改进的透明度的“SiAlON”的液晶显示装置。

公开(公告)号：US20130037846A1

公开(公告)日：2013-02-14

申请号：US13655148

申请日：2011-04-05

申请人： Masamichi Harada ,  Toyonori Uemura ,  Hiroshi Fukunaga ,  Hitoshi Matsushita ,  Kenji Terashima

发明人： Masamichi Harada ,  Toyonori Uemura ,  Hiroshi Fukunaga ,  Hitoshi Matsushita ,  Kenji Terashima

IPC分类号： C09K11/79 ,  C09K11/80 ,  H01L33/50

CPC分类号： C09K11/0883 ,  C09K11/7734 ,  H01L33/502 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/48257 ,  H01L2224/73265 ,  H01L2924/181 ,  H01L2924/00014 ,  H01L2924/00012

摘要： The present invention relates to a divalent europium-activated nitride red light emitting phosphor substantially represented by a general formula: (MI1-xEux)MIISiN3 (1) (in the formula (1), MI is an alkaline-earth metal element and represents at least one element selected from the group consisting of Mg, Ca, Sr, and Ba; MII is a trivalent metal element and represents at least one element selected from the group consisting of Al, Ga, In, Sc, Y, La, Gd, and Lu; and x is the number satisfying 0.001≦x≦0.10), in which the electrical conductivity of a supernatant liquid of the solution containing 10 parts by mass of pure water with respect to 1 part by mass of the red light emitting phosphor is not more than 10 mS/cm.

摘要翻译： 本发明涉及一种基本上由通式（MI1-xEux）MIISiN3（1）表示的二价铕活化氮化物红色发光荧光体（式（1）中，MI为碱土金属元素， 选自Mg，Ca，Sr和Ba中的至少一种元素; MII是三价金属元素，并且表示选自Al，Ga，In，Sc，Y，La，Gd中的至少一种元素， 和Lu; x是满足0.001＆nlE; x＆nlE; 0.10）的数量，其中相对于1质量份的红色发光荧光体，含有10质量份纯水的溶液的上清液的电导率 不超过10 mS / cm。

公开(公告)号：US20110084609A1

公开(公告)日：2011-04-14

申请号：US12885073

申请日：2010-09-17

申请人： Yoshinobu KAWAGUCHI ,  Kenichi Yoshimura ,  Masamichi Harada ,  Katsuhiko Kishimoto

发明人： Yoshinobu KAWAGUCHI ,  Kenichi Yoshimura ,  Masamichi Harada ,  Katsuhiko Kishimoto

IPC分类号： B60Q1/08 ,  H05B37/02

CPC分类号： F21V23/0442 ,  F21S41/14 ,  F21S41/16 ,  F21S45/10 ,  F21V9/30 ,  F21W2102/00 ,  F21Y2115/30 ,  H01S5/005

摘要： An illumination device improved in safety to the eye is provided. The illumination device includes: a semiconductor laser element to serve as an excitation light source which emits laser light; a fluorescent plate which contains a fluorescent substance for emitting light of a desired color and is irradiated with laser light emitted from the semiconductor laser element; a light receiving element part which detects light reflected from the fluorescent plate; and a light source control part which controls laser light emitted from the semiconductor laser element based on a detection signal from the light receiving element part.

摘要翻译： 提供了一种提高眼睛安全性的照明装置。 照明装置包括：半导体激光元件，用作发射激光的激发光源; 荧光板，其包含用于发射所需颜色的光的荧光物质，并且用从所述半导体激光元件发射的激光照射; 检测从荧光板反射的光的受光元件部; 以及光源控制部，其基于来自所述受光元件部的检测信号，控制从所述半导体激光元件发出的激光。

公开(公告)号：US07790590B2

公开(公告)日：2010-09-07

申请号：US11886428

申请日：2006-03-13

申请人： Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

发明人： Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

IPC分类号： H01L21/20 ,  H01L21/44

CPC分类号： H01L21/76849 ,  C23C16/0218 ,  C23C16/14 ,  H01L21/28562 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： A substrate provided thereon with an electrical insulating film which carries holes or the like filled with a Cu-containing electrical interconnection film is subjected to a pre-treatment in which the surface of the electrical insulating film and that of the Cu-containing electrical interconnection film are treated at a temperature of not more than 300° C. using, in a predetermined state, a gas of a compound containing an atom selected from the group consisting of N, H and Si atoms within the chemical formula thereof, before selectively forming a W-capping film on the electrical interconnection film. After the completion of the pre-treatment, a W-capping film is selectively formed on the electrical interconnection film and then an upper Cu electrical interconnection is further formed.

摘要翻译： 在其上设置有带有填充有含Cu电互连膜的孔等的电绝缘膜的基板经受预处理，其中电绝缘膜的表面和含Cu电互连膜的表面 在不超过300℃的温度下，在预定状态下，在选择性地形成其中之前，含有选自由N，H和Si原子组成的组的化合物的化合物的气体 电气互连膜上的W覆盖膜。 在预处理完成之后，在电互连膜上选择性地形成W覆盖膜，然后进一步形成上部Cu电互连。

公开(公告)号：US20090194781A1

公开(公告)日：2009-08-06

申请号：US12354068

申请日：2009-01-15

申请人： Masamichi Harada

发明人： Masamichi Harada

IPC分类号： H01L33/00 ,  C09K11/70

CPC分类号： H01L33/504 ,  C09K11/025 ,  C09K11/7734 ,  H01L2933/0091 ,  H05B33/14 ,  H05B33/20

摘要： A wavelength conversion member provided with a composite phosphor obtained by coating surfaces of phosphor particles with coating material particles and has an average particle diameter of the coating material of not more than 1/10 of an average particle diameter of the phosphor particles, and a light emitting device using the same. It is possible to control dispersibility of the phosphor particles in the wavelength conversion member, and it is possible to provide a light emitting device free from color variability and having good light emission efficiency by combining the wavelength conversion member with a semiconductor light emitting element.

摘要翻译： 一种波长转换部件，其具有通过用涂料粒子涂布荧光体粒子的表面而得到的复合荧光体，并且所述涂料的平均粒径为所述荧光体粒子的平均粒径的1/10以下， 发光装置。 可以控制荧光体颗粒在波长转换构件中的分散性，并且可以通过组合波长转换构件和半导体发光元件来提供不具有颜色变化并且具有良好发光效率的发光装置。

公开(公告)号：US07338900B2

公开(公告)日：2008-03-04

申请号：US11140362

申请日：2005-05-31

申请人： Eiichi Mizuno ,  Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

发明人： Eiichi Mizuno ,  Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

IPC分类号： H01L21/44 ,  H01L21/31

CPC分类号： H01L21/28568 ,  C23C16/34 ,  H01L21/28556

摘要： A method for forming a tungsten nitride film including a first material gas supply step of supplying a first material gas composed of a tungsten compound gas, a reduction step of supplying a reducing gas, a second material gas supply step of supplying a second material gas composed of a tungsten compound gas, and a nitridation step of supplying a nitriding gas. Since a step of depositing tungsten on a substrate 5, and a step of forming tungsten nitride are performed separately, by varying the flow rate of each gas, the pressure when each gas is supplied, and the supply time, or the number of times each step is performed and the order in which the steps are performed, the quantity of tungsten deposited and the quantity of tungsten nitride formed can be controlled easily.

摘要翻译： 一种形成氮化钨膜的方法，包括：供给由钨化合物气体构成的第一原料气体的第一原料气体供给工序，供给还原气体的还原工序;第二原料气体供给工序， 的钨化合物气体，以及氮化步骤，供给氮化气体。 由于在基板5上沉积钨的步骤和形成氮化钨的步骤是通过改变每种气体的流量，每个气体的供给时的压力，供给时间或每个气体的次数， 执行步骤，并且可以容易地控制步骤的顺序，钨沉积的量和形成的氮化钨的量。

公开(公告)号：US09279079B2

公开(公告)日：2016-03-08

申请号：US12155073

申请日：2008-05-29

申请人： Kohsei Takahashi ,  Masamichi Harada ,  Naoto Hirosaki

发明人： Kohsei Takahashi ,  Masamichi Harada ,  Naoto Hirosaki

IPC分类号： C09K11/77 ,  H01L33/50 ,  C09K11/08

CPC分类号： C09K11/7734 ,  C09K11/0883 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/181 ,  H01L2924/00012 ,  H01L2924/00014

摘要： A method of manufacturing a first phosphor of which emission spectrum shape well matches with a color filter of three primary colors of light, a light-emitting device including the first phosphor, and an image display apparatus including the light-emitting device are provided. The light-emitting device includes a semiconductor light-emitting element emitting excitation light and the first phosphor absorbing the excitation light and emitting green light. The first phosphor contains a solid solution of aluminum element and a metal element M selected from the group consisting of Mn, Ce and Eu in crystals of an oxynitride having a β-type Si3N4 crystal structure, an amount of oxygen in the crystals being not higher than 0.8 mass %.

摘要翻译： 提供一种制造发光光谱形状与三原色滤色器良好匹配的第一荧光体的制造方法，包括第一荧光体的发光装置和包括该发光装置的图像显示装置。 发光装置包括发射激发光的半导体发光元件和吸收激发光并发出绿光的第一荧光体。 第一荧光体含有在具有“Si”型晶体结构的氧氮化物的晶体中选择的由Mn，Ce和Eu组成的组中的铝元素和金属元素M的固溶体，晶体中的氧的量不是 高于0.8质量％。

公开(公告)号：US20090232984A1

公开(公告)日：2009-09-17

申请号：US11886425

申请日：2006-03-13

申请人： Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

发明人： Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

IPC分类号： C23C16/44 ,  C23C16/00

CPC分类号： C23C16/34 ,  C23C16/44 ,  C23C16/452

摘要： In a vacuum chamber 42 comprising a film forming chamber 44 and a catalyst chamber 46 including a catalyst source 48 located opposed to a substrate S, the film forming chamber 44 is connected to the catalyst chamber 46 through an opening 47, the catalyst source being displace at a position satisfying ω≧θ, where ω is an angle included between the shortest linear line connecting the periphery of a substrate on the substrate supporting stage with the periphery of the opening and the substrate and where θ is an angle included between the shortest linear line connecting the periphery of the substrate with the edge of the catalyst source and the substrate. By using such a film forming apparatus, a radical produced at the catalyst source can be prevented from being deactivated so that the reaction between a source gas and the radical will be efficiently performed to form the desired film.

摘要翻译： 在包括成膜室44的真空室42和包括与基板S相对的催化剂源48的催化剂室46中，成膜室44通过开口47连接到催化剂室46，催化剂源位移 在满足omega =θ的位置处，其中ω是包括在连接基板支撑台上的基板的周边与开口的周边和基板之间的最短线性线之间的角度，其中θ是包括在最短的 将基板的周边与催化剂源的边缘和基板连接的线性线。 通过使用这样的成膜装置，可以防止在催化剂源产生的自由基失活，从而有效地进行源气体与自由基之间的反应，形成所需的膜。

公开(公告)号：US20080297031A1

公开(公告)日：2008-12-04

申请号：US12155073

申请日：2008-05-29

申请人： Kohsei Takahashi ,  Masamichi Harada ,  Naoto Hirosaki

发明人： Kohsei Takahashi ,  Masamichi Harada ,  Naoto Hirosaki

IPC分类号： H01J1/62 ,  B05D5/06

CPC分类号： C09K11/7734 ,  C09K11/0883 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/181 ,  H01L2924/00012 ,  H01L2924/00014

摘要： A method of manufacturing a first phosphor of which emission spectrum shape well matches with a color filter of three primary colors of light, a light-emitting device including the first phosphor, and an image display apparatus including the light-emitting device are provided. The light-emitting device includes a semiconductor light-emitting element emitting excitation light and the first phosphor absorbing the excitation light and emitting green light. The first phosphor contains a solid solution of aluminum element and a metal element M selected from the group consisting of Mn, Ce and Eu in crystals of an oxynitride having a β-type Si3N4 crystal structure, an amount of oxygen in the crystals being not higher than 0.8 mass %.

摘要翻译： 提供一种制造发光光谱形状与三原色滤色器良好匹配的第一荧光体的制造方法，包括第一荧光体的发光装置和包括该发光装置的图像显示装置。 发光装置包括发射激发光的半导体发光元件和吸收激发光并发出绿光的第一荧光体。 第一荧光体在具有β型Si 3 N 4晶体结构的氧氮化物的晶体中含有铝元素的固溶体和选自Mn，Ce和Eu的金属元素M，晶体中的氧的量不高 大于0.8质量％。