公开(公告)号：US07338900B2

公开(公告)日：2008-03-04

申请号：US11140362

申请日：2005-05-31

申请人： Eiichi Mizuno ,  Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

发明人： Eiichi Mizuno ,  Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

IPC分类号： H01L21/44 ,  H01L21/31

CPC分类号： H01L21/28568 ,  C23C16/34 ,  H01L21/28556

摘要： A method for forming a tungsten nitride film including a first material gas supply step of supplying a first material gas composed of a tungsten compound gas, a reduction step of supplying a reducing gas, a second material gas supply step of supplying a second material gas composed of a tungsten compound gas, and a nitridation step of supplying a nitriding gas. Since a step of depositing tungsten on a substrate 5, and a step of forming tungsten nitride are performed separately, by varying the flow rate of each gas, the pressure when each gas is supplied, and the supply time, or the number of times each step is performed and the order in which the steps are performed, the quantity of tungsten deposited and the quantity of tungsten nitride formed can be controlled easily.

摘要翻译： 一种形成氮化钨膜的方法，包括：供给由钨化合物气体构成的第一原料气体的第一原料气体供给工序，供给还原气体的还原工序;第二原料气体供给工序， 的钨化合物气体，以及氮化步骤，供给氮化气体。 由于在基板5上沉积钨的步骤和形成氮化钨的步骤是通过改变每种气体的流量，每个气体的供给时的压力，供给时间或每个气体的次数， 执行步骤，并且可以容易地控制步骤的顺序，钨沉积的量和形成的氮化钨的量。

公开(公告)号：US20050221625A1

公开(公告)日：2005-10-06

申请号：US11140362

申请日：2005-05-31

申请人： Eiichi Mizuno ,  Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

发明人： Eiichi Mizuno ,  Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

IPC分类号： C23C16/34 ,  H01L21/285 ,  H01L21/469 ,  H01L21/4763

CPC分类号： H01L21/28568 ,  C23C16/34 ,  H01L21/28556

摘要： A method for forming a tungsten nitride film including a first material gas supply step of supplying a first material gas composed of a tungsten compound gas, a reduction step of supplying a reducing gas, a second material gas supply step of supplying a second material gas composed of a tungsten compound gas, and a nitridation step of supplying a nitriding gas. Since a step of depositing tungsten on a substrate 5, and a step of forming tungsten nitride are performed separately, by varying the flow rate of each gas, the pressure when each gas is supplied, and the supply time, or the number of times each step is performed and the order in which the steps are performed, the quantity of tungsten deposited and the quantity of tungsten nitride formed can be controlled easily.

摘要翻译： 一种形成氮化钨膜的方法，包括：供给由钨化合物气体构成的第一原料气体的第一原料气体供给工序，供给还原气体的还原工序;第二原料气体供给工序， 的钨化合物气体，以及氮化步骤，供给氮化气体。 由于在基板5上沉积钨的步骤和形成氮化钨的步骤是通过改变每种气体的流量，每个气体的供给时的压力，供给时间或每个气体的次数， 执行步骤，并且可以容易地控制步骤的顺序，钨沉积的量和形成的氮化钨的量。

公开(公告)号：US07790590B2

公开(公告)日：2010-09-07

申请号：US11886428

申请日：2006-03-13

申请人： Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

发明人： Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

IPC分类号： H01L21/20 ,  H01L21/44

CPC分类号： H01L21/76849 ,  C23C16/0218 ,  C23C16/14 ,  H01L21/28562 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： A substrate provided thereon with an electrical insulating film which carries holes or the like filled with a Cu-containing electrical interconnection film is subjected to a pre-treatment in which the surface of the electrical insulating film and that of the Cu-containing electrical interconnection film are treated at a temperature of not more than 300° C. using, in a predetermined state, a gas of a compound containing an atom selected from the group consisting of N, H and Si atoms within the chemical formula thereof, before selectively forming a W-capping film on the electrical interconnection film. After the completion of the pre-treatment, a W-capping film is selectively formed on the electrical interconnection film and then an upper Cu electrical interconnection is further formed.

摘要翻译： 在其上设置有带有填充有含Cu电互连膜的孔等的电绝缘膜的基板经受预处理，其中电绝缘膜的表面和含Cu电互连膜的表面 在不超过300℃的温度下，在预定状态下，在选择性地形成其中之前，含有选自由N，H和Si原子组成的组的化合物的化合物的气体 电气互连膜上的W覆盖膜。 在预处理完成之后，在电互连膜上选择性地形成W覆盖膜，然后进一步形成上部Cu电互连。

公开(公告)号：US20090232984A1

公开(公告)日：2009-09-17

申请号：US11886425

申请日：2006-03-13

申请人： Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

发明人： Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

IPC分类号： C23C16/44 ,  C23C16/00

CPC分类号： C23C16/34 ,  C23C16/44 ,  C23C16/452

摘要： In a vacuum chamber 42 comprising a film forming chamber 44 and a catalyst chamber 46 including a catalyst source 48 located opposed to a substrate S, the film forming chamber 44 is connected to the catalyst chamber 46 through an opening 47, the catalyst source being displace at a position satisfying ω≧θ, where ω is an angle included between the shortest linear line connecting the periphery of a substrate on the substrate supporting stage with the periphery of the opening and the substrate and where θ is an angle included between the shortest linear line connecting the periphery of the substrate with the edge of the catalyst source and the substrate. By using such a film forming apparatus, a radical produced at the catalyst source can be prevented from being deactivated so that the reaction between a source gas and the radical will be efficiently performed to form the desired film.

摘要翻译： 在包括成膜室44的真空室42和包括与基板S相对的催化剂源48的催化剂室46中，成膜室44通过开口47连接到催化剂室46，催化剂源位移 在满足omega =θ的位置处，其中ω是包括在连接基板支撑台上的基板的周边与开口的周边和基板之间的最短线性线之间的角度，其中θ是包括在最短的 将基板的周边与催化剂源的边缘和基板连接的线性线。 通过使用这样的成膜装置，可以防止在催化剂源产生的自由基失活，从而有效地进行源气体与自由基之间的反应，形成所需的膜。

公开(公告)号：US20080311741A1

公开(公告)日：2008-12-18

申请号：US11886428

申请日：2006-03-13

申请人： Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

发明人： Narishi Gonohe ,  Masamichi Harada ,  Nobuyuki Kato

IPC分类号： H01L21/768

CPC分类号： H01L21/76849 ,  C23C16/0218 ,  C23C16/14 ,  H01L21/28562 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： A substrate provided thereon with an electrical insulating film which carries holes or the like filled with a Cu-containing electrical interconnection film is subjected to a pre-treatment in which the surface of the electrical insulating film and that of the Cu-containing electrical interconnection film are treated at a temperature of not more than 300° C. using, in a predetermined state, a gas of a compound containing an atom selected from the group consisting of N, H and Si atoms within the chemical formula thereof, before selectively forming a W-capping film on the electrical interconnection film. After the completion of the pre-treatment, a W-capping film is selectively formed on the electrical interconnection film and then an upper Cu electrical interconnection is further formed.

摘要翻译： 在其上设置有带有填充有含Cu电互连膜的孔等的电绝缘膜的基板经受预处理，其中电绝缘膜的表面和含Cu电互连膜的表面 在不超过300℃的温度下，在预定状态下，在选择性地形成其中之前，含有选自由N，H和Si原子组成的组的化合物的化合物的气体 电气互连膜上的W覆盖膜。 在预处理完成之后，在电互连膜上选择性地形成W覆盖膜，然后进一步形成上部Cu电互连。

公开(公告)号：US09433542B2

公开(公告)日：2016-09-06

申请号：US14002762

申请日：2012-02-27

申请人： Nobuyuki Kato ,  Tatsuya Tamura ,  Toshihisa Hayashi ,  Masashi Kitagawa

发明人： Nobuyuki Kato ,  Tatsuya Tamura ,  Toshihisa Hayashi ,  Masashi Kitagawa

IPC分类号： A61F13/475 ,  A61F13/533 ,  A61F13/537 ,  A61F13/15 ,  A61F13/535 ,  A61F13/539 ,  A61F13/47

CPC分类号： A61F13/537 ,  A61F13/15617 ,  A61F13/15731 ,  A61F13/4704 ,  A61F13/4756 ,  A61F13/535 ,  A61F13/539 ,  Y10T156/1041

摘要： The absorbent article of the present invention comprises: a liquid-pervious surface sheet, a liquid-impervious backside sheet provided at the position opposing said surface sheet, and an absorption body provided between said surface sheet and said backside sheet, wherein the absorbent article comprises an endless compressed groove, surrounding a central part of said absorbent article, which is formed in said surface sheet and said absorption body in the thickness direction, and a plurality of concave parts, provided inside and outside said compressed groove, which are formed in said surface sheet and said absorption body in the thickness direction, and an uncompressed region bordering inner and outer edges of the compressed groove, wherein the closest distance between said compressed groove and the nearest concave parts is greater than the distance between adjacent ones of those same concave parts.

摘要翻译： 本发明的吸收性物品包括：透液性表面片，设置在与所述表面片相对的位置处的不透液性背面片，以及设置在所述表面片和所述背面片之间的吸收体，其中，所述吸收性物品包含 围绕形成在所述表面片和所述吸收体的厚度方向的所述吸收性物品的中心部分的无端压缩槽，以及设置在所述压缩槽的内部和外部的多个凹部， 表面片和所述吸收体在厚度方向上，以及与所述压缩槽的内边缘和外边缘接合的未压缩区域，其中所述压缩槽和最近的凹入部分之间的最近距离大于相邻的相同凹部 部分。

公开(公告)号：US08684712B2

公开(公告)日：2014-04-01

申请号：US12776456

申请日：2010-05-10

申请人： Hiroyasu Honda ,  Hideki Miyata ,  Nobuyuki Kato

发明人： Hiroyasu Honda ,  Hideki Miyata ,  Nobuyuki Kato

IPC分类号： F01C1/02 ,  F03C2/00

CPC分类号： F04C2/102 ,  F04C2/084 ,  F04C2240/50 ,  F05C2225/00

摘要： A plurality of convex portions that protrude radially outward from a plurality of positions separated in the circumferential direction are provided on the outer peripheral surface of a driven gear. Each convex portion has, in the circumferential direction of the driven gear, a rising surface that rises from a minimum diameter position to a maximum diameter position in the direction opposite the rotational direction of the driven gear, and a falling surface that falls from that maximum diameter position to a minimum diameter position that is adjacent to and in back of that maximum diameter position with respect to the rotational direction of the driven gear. The circumferential length of the falling surface is greater than the circumferential length of the rising surface.

摘要翻译： 在从动齿轮的外周面设置有从圆周方向分离的多个位置向径向外侧突出的多个凸部。 每个凸部在从动齿轮的圆周方向上具有从与从动齿轮的旋转方向相反的方向从最小直径位置升高到最大直径位置的上升面，以及从该最大直径位置落下的下降面 直径位置相对于从动齿轮的旋转方向相邻于该最大直径位置的最小直径位置。 落下面的圆周长度大于上升面的圆周长度。

公开(公告)号：US20130317470A1

公开(公告)日：2013-11-28

申请号：US13976233

申请日：2011-12-27

申请人： Nobuyuki Kato ,  Masahiro Kashiwagi ,  Tatsuya Tamura ,  Masashi Kitagawa

发明人： Nobuyuki Kato ,  Masahiro Kashiwagi ,  Tatsuya Tamura ,  Masashi Kitagawa

IPC分类号： A61F13/551 ,  A61F13/15

CPC分类号： A61F13/5514 ,  A61F13/15577 ,  A61F13/15747

摘要： An absorbent article package is individually packaged by folding a packaging sheet and an absorbent article in a state where the absorbent article is arranged on the packaging sheet. In a state where the individually-packaged absorbent article is opened, in the packaging sheet and the absorbent article, a first folding line based on which the absorbent article and the packaging sheet are folded towards the topsheet side, and a second folding line based on which the absorbent article and the packaging sheet are folded towards the backsheet side are formed adjacent to each other in the longitudinal direction.

摘要翻译： 通过在吸收性物品配置在包装片上的状态下折叠包装片和吸收性物品，分别包装吸收性物品包装。 在打开单独包装的吸收性物品的状态下，在包装用片材和吸收性物品中，将吸收性物品和包装用片材朝向顶片侧折叠的第一折叠线和基于 所述吸收性物品和所述包装用薄片朝向所述背面侧折叠而形成为在长度方向上彼此相邻地形成。

公开(公告)号：US20110129868A1

公开(公告)日：2011-06-02

申请号：US13054905

申请日：2009-09-01

申请人： Nobuyuki Kato ,  Masanori Ikeda

发明人： Nobuyuki Kato ,  Masanori Ikeda

IPC分类号： C12Q1/02 ,  C12N15/87 ,  C12N5/071 ,  C12N7/00

CPC分类号： G01N33/5008 ,  A61K31/00 ,  C07K14/005 ,  C12N7/00 ,  C12N15/86 ,  C12N2770/24222 ,  C12N2770/24243 ,  C12N2770/24252 ,  G01N2333/186

摘要： According to the present invention, an HCV replicon-replicating cell is produced by a production method including a step of introducing RNA containing an HCV replicon sequence and a selectable marker gene sequence into a Li23 cell or a cured cell derived from a Li23 cell. Further, a full-length HCV RNA-replicating cell is produced by a production method including a step of introducing RNA containing a full-length HCV genome sequence and a selectable marker gene sequence into a Li23 cell or a cured cell derived from a Li23 cell. The use of these cells enables the construction of an HCV life cycle reproduction system that is derived from a cell line other than the HuH-7 cell line and that has capabilities equivalent to those of an HCV life cycle reproduction system derived from the HuH-7 cell line.

摘要翻译： 根据本发明，通过包括将含有HCV复制子序列和选择标记基因序列的RNA引入到Li23细胞或来自Li23细胞的固化细胞的步骤的制备方法制备HCV复制子复制细胞。 此外，通过包括将含有全长HCV基因组序列和选择性标记基因序列的RNA引入到Li23细胞或源自Li23细胞的固化细胞的步骤的制备方法制备全长HCV RNA复制细胞 。 这些细胞的使用使得能够构建来自除了HuH-7细胞系之外的细胞系的HCV生命周期再生系统，并且具有与源自HuH-7的HCV生命周期再生系统相当的能力 细胞系。

公开(公告)号：US20100290941A1

公开(公告)日：2010-11-18

申请号：US12776456

申请日：2010-05-10

申请人： Hiroyasu HONDA ,  Hideki Miyata ,  Nobuyuki Kato

发明人： Hiroyasu HONDA ,  Hideki Miyata ,  Nobuyuki Kato

IPC分类号： F01C1/18

CPC分类号： F04C2/102 ,  F04C2/084 ,  F04C2240/50 ,  F05C2225/00

摘要： A plurality of convex portions that protrude radially outward from a plurality of positions separated in the circumferential direction are provided on the outer peripheral surface of a driven gear. Each convex portion has, in the circumferential direction of the driven gear, a rising surface that rises from a minimum diameter position to a maximum diameter position in the direction opposite the rotational direction of the driven gear, and a falling surface that falls from that maximum diameter position to a minimum diameter position that is adjacent to and in back of that maximum diameter position with respect to the rotational direction of the driven gear. The circumferential length of the falling surface is greater than the circumferential length of the rising surface.

摘要翻译： 在从动齿轮的外周面设置有从圆周方向分离的多个位置向径向外侧突出的多个凸部。 每个凸部在从动齿轮的圆周方向上具有从与从动齿轮的旋转方向相反的方向从最小直径位置升高到最大直径位置的上升面，以及从该最大直径位置落下的下降面 直径位置相对于从动齿轮的旋转方向相邻于该最大直径位置的最小直径位置。 落下面的圆周长度大于上升面的圆周长度。