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    Scanning probe microscope and scanning method
    2.
    发明授权
    Scanning probe microscope and scanning method 有权
    扫描探针显微镜和扫描方法

    公开(公告)号：US07456400B2

    公开(公告)日：2008-11-25

    申请号：US11235458

    申请日：2005-09-26

    申请人： Masatsugu Shigeno ,  Yoshiharu Shirakawabe ,  Amiko Nihei ,  Osamu Matsuzawa ,  Naoya Watanabe ,  Akira Inoue

    发明人： Masatsugu Shigeno ,  Yoshiharu Shirakawabe ,  Amiko Nihei ,  Osamu Matsuzawa ,  Naoya Watanabe ,  Akira Inoue

    IPC分类号： G12B21/00

    CPC分类号： G01Q60/32 ,  G01Q10/06 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/852 ,  Y10S977/86 ,  Y10S977/872

    摘要： A scanning probe microscope has a probe needle and a control section that controls relative scanning movement between the probe needle and a surface of a sample in at least one direction parallel to the sample surface and controls relative movement between the probe needle and the sample surface in a direction perpendicular to the sample surface. A vibration source vibrates the probe needle at a vibrating frequency relative to the sample surface. An approach/separation drive section causes the probe needle to relatively approach to and separate from the sample surface at a predetermined distance while the probe needle is vibrated at the vibrating frequency relative to the sample surface by the vibration source. A detection section detects a rate of change in a vibration state of the probe needle in accordance with a distance between the probe needle and the sample surface. An observation section gathers observation data from the sample surface when the rate of change in the vibration state of the probe needle detected by the detection section has exceeded a preselected threshold value.

    摘要翻译： 扫描探针显微镜具有探针和控制部，其控制探针和样品表面之间的平行于样品表面的至少一个方向上的相对扫描运动，并且控制探针与样品表面之间的相对运动 垂直于样品表面的方向。 振动源以相对于样品表面的振动频率振动探针。 接近/分离驱动部分使得探针相对于样品表面以预定距离相对接近和分离，同时探针以振动源相对于样品表面的振动频率振动。 检测部根据探针与样本面的距离来检测探针的振动状态的变化率。 当由检测部检测到的探针的振动状态的变化率超过预选阈值时，观察部分从样本表面收集观察数据。

    Cell detachment method
    3.
    发明授权
    Cell detachment method 有权
    细胞分离法

    公开(公告)号：US08859279B2

    公开(公告)日：2014-10-14

    申请号：US11810768

    申请日：2007-06-07

    申请人： Amiko Nihei ,  Masatsugu Shigeno ,  Yoshiharu Shirakawabe ,  Akira Inoue ,  Osamu Matsuzawa ,  Naoya Watanabe

    发明人： Amiko Nihei ,  Masatsugu Shigeno ,  Yoshiharu Shirakawabe ,  Akira Inoue ,  Osamu Matsuzawa ,  Naoya Watanabe

    IPC分类号： C12N5/00 ,  C12M1/00

    CPC分类号： C12M47/04 ,  C12M33/00

    摘要： A cell detachment method for detaching only a desired cell from a plurality of cells cultured on a substrate under predetermined culture environment conditions by using a scanning probe microscope having a probe, comprising: observing the plural cells; specifying the cell to be detached; moving the probe onto the specified cell; and pressing the prove against the specified cell with a predetermined force so as to detach the cell from the substrate.

    摘要翻译： 一种细胞分离方法，其通过使用具有探针的扫描探针显微镜，在预定的培养环境条件下从仅在基质上培养的多个细胞中仅去除所需细胞，包括：观察所述多个细胞; 指定要分离的单元格; 将探针移动到指定的细胞上; 并用预定的力将证明压在指定的电池上，以将电池与基板分离。

    Cell detachment method
    4.
    发明申请
    Cell detachment method 有权
    细胞分离法

    公开(公告)号：US20070292946A1

    公开(公告)日：2007-12-20

    申请号：US11810768

    申请日：2007-06-07

    申请人： Amiko Nihei ,  Masatsugu Shigeno ,  Yoshiharu Shirakawabe ,  Akira Inoue ,  Osamu Matsuzawa ,  Naoya Watanabe

    发明人： Amiko Nihei ,  Masatsugu Shigeno ,  Yoshiharu Shirakawabe ,  Akira Inoue ,  Osamu Matsuzawa ,  Naoya Watanabe

    IPC分类号： C12M3/00 ,  C12N5/06

    CPC分类号： C12M47/04 ,  C12M33/00

    摘要： A cell detachment method for detaching only a desired cell from a plurality of cells cultured on a substrate under predetermined culture environment conditions by using a scanning probe microscope having a probe, comprising: observing the plural cells; specifying the cell to be detached; moving the probe onto the specified cell; and pressing the prove against the specified cell with a predetermined force so as to detach the cell from the substrate.

    摘要翻译： 一种细胞分离方法，其通过使用具有探针的扫描探针显微镜，在预定的培养环境条件下从仅在基质上培养的多个细胞中仅去除所需细胞，包括：观察所述多个细胞; 指定要分离的单元格; 将探针移动到指定的细胞上; 并用预定的力将证明压在指定的电池上，以将电池与基板分离。

    Scanning probe microscope and scanning method
    6.
    发明申请
    Scanning probe microscope and scanning method 有权
    扫描探针显微镜和扫描方法

    公开(公告)号：US20060113472A1

    公开(公告)日：2006-06-01

    申请号：US11235458

    申请日：2005-09-26

    申请人： Masatsugu Shigeno ,  Yoshiharu Shirakawabe ,  Amiko Nihei ,  Osamu Matsuzawa ,  Naoya Watanabe ,  Akira Inoue

    发明人： Masatsugu Shigeno ,  Yoshiharu Shirakawabe ,  Amiko Nihei ,  Osamu Matsuzawa ,  Naoya Watanabe ,  Akira Inoue

    IPC分类号： G21K7/00

    CPC分类号： G01Q60/32 ,  G01Q10/06 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/852 ,  Y10S977/86 ,  Y10S977/872

    摘要： In order to provide a scanning probe microscope and a scanning method which are capable of accurately approaching or contacting a probe needle and a sample surface irrespective of an irregularities shape of the sample surface, it comprises a probe needle 2 for relatively performing, with respect to a sample surface S, scans in two directions parallel to the sample surface S and a movement in a perpendicular direction of the sample surface S, a detection means 4 for detecting a measurement amount changing in compliance with a distance between the probe needle 2 and the sample surface S, an observation means 6 for gathering an observation data in a point of time at which the probe needle 2 has approached to or contacted with the sample surface S, a control means 5 for controlling the sans in the two directions and the movement in the perpendicular direction and an approach/separation drive section 24 for causing the probe needle 2 to relatively approach to and separate from the sample surface S at a predetermined distance, wherein the detection means 4 detects a change rate of the measurement amount at an approach time and a separation time by the approach/separation drive section 24, and the observation means 6 gathers the observation data when the change rate of the observation amount exceeds a previously set threshold value.

    摘要翻译： 为了提供能够精确地接近或接触探针和样品表面的扫描探针显微镜和扫描方法，而与样品表面的不规则形状无关，其包括用于相对于相对于 样品表面S在平行于样品表面S的两个方向上扫描并沿着样品表面S的垂直方向移动;检测装置4，用于检测测量量根据探针2和 样本表面S，用于在探针2接近或接触样本表面S的时间点收集观察数据的观察装置6，用于控制两个方向上的无效的控制装置5和运动 以及用于使探针2相对于样品su相对接近和分离的接近/分离驱动部24 表面S在预定距离处，其中检测装置4通过接近/分离驱动部分24检测接近时间的测量量和分离时间的变化率，并且观察装置6在变化率 的观察量超过预先设定的阈值。

    Living cell observing cell
    7.
    发明申请
    Living cell observing cell 审中-公开
    活细胞观察细胞

    公开(公告)号：US20070134787A1

    公开(公告)日：2007-06-14

    申请号：US11583197

    申请日：2006-10-19

    申请人： Yoshiharu Shirakawabe ,  Akira Inoue ,  Naoya Watanabe ,  Amiko Nihei

    发明人： Yoshiharu Shirakawabe ,  Akira Inoue ,  Naoya Watanabe ,  Amiko Nihei

    IPC分类号： C12M1/22 ,  C12M1/34

    CPC分类号： C12M25/00 ,  B01L3/5085 ,  C12M21/06 ,  C12M23/10 ,  C12M41/46

    摘要： A living cell observing cell capable of measuring a surface of a membrane of a living cell or a rear surface side thereof and accurately performing structural analysis is provided. The living cell observing cell is used to culture at least one cell in a culture solution and observe the cells. The living cell observing cell includes a container body which stores the culturing solution and a flat location plate which is detachably fixed in the container body and has a plurality of protrusions formed in a predetermined interval on a surface thereof, wherein the cells are located on a plurality of the protrusions.

    摘要翻译： 提供了能够测量活细胞膜或其背面侧的表面的活细胞观察池，并且精确地进行结构分析。 活细胞观察池用于培养培养液中的至少一个细胞并观察细胞。 活细胞观察单元包括存储培养液的容器主体和可拆卸地固定在容器主体中并且在其表面上以预定间隔形成的多个突起的平坦位置板，其中，所述单元位于 多个突起。

    Semiconductor manufacturing device
    8.
    发明授权
    Semiconductor manufacturing device 失效
    半导体制造装置

    公开(公告)号：US06171437B2

    公开(公告)日：2001-01-09

    申请号：US09197585

    申请日：1998-11-23

    申请人： Nobuhiro Shimizu ,  Akira Inoue ,  Yoshiharu Shirakawabe

    发明人： Nobuhiro Shimizu ,  Akira Inoue ,  Yoshiharu Shirakawabe

    IPC分类号： H05H100

    CPC分类号： H01L21/67126 ,  H01L21/67086 ,  H01L21/68721

    摘要： A semiconductor manufacturing device comprises a holder having sealing members and supporting a semiconductor substrate so that an open space is formed above the semiconductor substrate and a sealed space is formed below the semiconductor substrate. The semiconductor substrate has a first main surface exposed to the open space and a second main surface exposed to the sealed space. When the holder is immersed in an etching solution, the first main surface of the semiconductor substrate is exposed to the etching solution and subjected to wet etching while the etching solution does not flow into the sealed space.

    摘要翻译： 半导体制造装置包括具有密封构件并支撑半导体衬底的保持器，使得在半导体衬底上方形成开放空间，并且在半导体衬底之下形成密封空间。 半导体衬底具有暴露于开放空间的第一主表面和暴露于密封空间的第二主表面。 当保持器浸入蚀刻溶液中时，半导体衬底的第一主表面暴露于蚀刻溶液中，并且在蚀刻溶液不流入密封空间的过程中进行湿蚀刻。

    Heated self-detecting type cantilever for atomic force microscope
    9.
    发明授权
    Heated self-detecting type cantilever for atomic force microscope 有权
    原子力显微镜加热自检型悬臂

    公开(公告)号：US06932504B2

    公开(公告)日：2005-08-23

    申请号：US10395683

    申请日：2003-03-24

    申请人： Hiroshi Takahashi ,  Yoshiharu Shirakawabe ,  Tadashi Arai

    发明人： Hiroshi Takahashi ,  Yoshiharu Shirakawabe ,  Tadashi Arai

    IPC分类号： G01K7/02 ,  G01B7/16 ,  G01K1/18 ,  G01Q60/00 ,  G01Q60/36 ,  G01Q60/38 ,  G01B7/28

    CPC分类号： G01Q60/58 ,  G01K1/18 ,  G01Q20/04 ,  Y10S977/867

    摘要： A self-detecting type cantilever for an atomic force microscope (AFM) has an electro-flexural conversion element for converting a flexural amount of the cantilever into an electric current or voltage, a temperature measurement element disposed at a front end portion of the cantilever for measuring a temperature, and a heating element disposed at the front end portion of the cantilever for heating the temperature measurement element. The temperature measurement element and the heating element are superposed with each other on a main face of the cantilever via an electrical insulating layer. As a result, even if the amount of electric energy supplied to the heating element is reduced, it is possible to effectively supply an amount of heat necessary for measurement to the temperature measurement element. Therefore, by minimizing the heat to be supplied to a sample and the cantilever, the respondency of measurement is improved and temperature measurement can be performed with a high degree of accuracy.

    摘要翻译： 用于原子力显微镜（AFM）的自检型悬臂具有用于将悬臂的弯曲量转换为电流或电压的电 - 弯曲转换元件，设置在悬臂的前端部的温度测量元件， 测量温度，以及设置在悬臂前端部分的加热元件，用于加热温度测量元件。 温度测量元件和加热元件经由电绝缘层彼此重叠在悬臂的主面上。 结果，即使供给到加热元件的电能量减少，也可以有效地向测量元件供给测量所需的热量。 因此，通过将供给到样品和悬臂的热量最小化，可以提高测量的响应度，并且可以以高精度进行温度测量。

    Self-detecting type of SPM probe and SPM device
    10.
    发明授权
    Self-detecting type of SPM probe and SPM device 有权
    自检型SPM探头和SPM装置

    公开(公告)号：US06388252B1

    公开(公告)日：2002-05-14

    申请号：US09197584

    申请日：1998-11-19

    申请人： Hiroshi Takahashi ,  Yoshiharu Shirakawabe ,  Nobuhiro Shimizu ,  Michel Despont

    发明人： Hiroshi Takahashi ,  Yoshiharu Shirakawabe ,  Nobuhiro Shimizu ,  Michel Despont

    IPC分类号： G01N2300

    CPC分类号： G01Q60/38 ,  G01Q20/04 ,  G01Q70/06 ,  Y10S977/873

    摘要： A self-detecting type of SPM probe can eliminate influences of a leak current between piezo-resistors each other, between another piezo-resistors opposite to each other, or between the piezo-resistor and the other one, or of a carrier generated by irradiation of light thereto over the piezo-resistors by forming impurity diffusion layers each consisting of a conductive type (n− well regions) reverse to a conductive type of a semiconductor substrate (p-type silicon substrate) on each interface between each of the piezo-resistors and the semiconductor substrate respectively to insulate the elements from one another.

    摘要翻译： SPM探头的自检型可以消除压电电阻之间，彼此相对的另一个压电电阻之间或压敏电阻与另一压电电阻之间的泄漏电流的影响，或消除由辐射产生的载体 通过在每个压电元件之间的每个界面上形成杂质扩散层，每个杂质扩散层由与导电类型的半导体衬底（p型硅衬底）的导电类型相反的导电类型（n-阱区）构成， 电阻器和半导体衬底，以使元件彼此绝缘。