公开(公告)号：US07190007B2

公开(公告)日：2007-03-13

申请号：US10710821

申请日：2004-08-05

申请人： Matthew J. Breitwisch ,  Chung H. Lam ,  Randy W. Mann ,  Dale W. Martin

发明人： Matthew J. Breitwisch ,  Chung H. Lam ,  Randy W. Mann ,  Dale W. Martin

IPC分类号： H01L29/47

CPC分类号： H01L21/764 ,  H01L21/76283 ,  H01L21/76289 ,  H01L29/78654

摘要： The present invention provides a method of forming an ultra-thin and uniform layer of Si including the steps of providing a substrate having semiconducting regions separated by insulating regions; implanting dopants into the substrate to provide an etch differential doped portion in the semiconducting regions underlying an upper Si-containing surface of the semiconducting regions; forming a trench in the substrate including the semiconducting regions and the insulating regions; removing the etch differential doped portion from the semiconductor regions to produce a cavity underlying the upper surface of the semiconducting regions; and filling the trench with a trench dielectric, wherein the trench dielectric material encloses the cavity underlying the upper Si-containing surface of the semiconducting regions. The upper Si-containing surface of the semiconducting regions has a uniform thickness of less than about 100 Å.

摘要翻译： 本发明提供一种形成超薄且均匀的Si层的方法，包括以下步骤：提供具有由绝缘区分隔开的半导体区域的衬底; 将掺杂剂注入衬底中以在半导体区域的上部含Si表面下方的半导体区域中提供蚀刻差分掺杂部分; 在包括半导体区域和绝缘区域的衬底中形成沟槽; 从所述半导体区域去除所述蚀刻差分掺杂部分以在所述半导体区域的上表面下方形成空腔; 以及用沟槽电介质填充所述沟槽，其中所述沟槽电介质材料包围在所述半导体区域的所述上部含Si表面之下的空腔。 半导体区域的上部含Si表面具有小于约的均匀厚度。

公开(公告)号：US06881672B2

公开(公告)日：2005-04-19

申请号：US10723700

申请日：2003-11-26

申请人： Matthew J. Breitwisch ,  Jeffrey S. Brown ,  Terence B. Hook ,  Randy W. Mann ,  Christopher S. Putnam ,  Mohammad I. Younus

发明人： Matthew J. Breitwisch ,  Jeffrey S. Brown ,  Terence B. Hook ,  Randy W. Mann ,  Christopher S. Putnam ,  Mohammad I. Younus

IPC分类号： H01L21/8238 ,  H01L21/44

CPC分类号： H01L21/823871 ,  H01L21/823842

摘要： A selectively silicided semiconductor structure and a method for fabricating same is disclosed herein. The semiconductor structure has silicide present on the polysilicon line between the N+ diffusion or N+ active area and the P+ diffusion or active area at the N+/P+ junction of the polysilicon line, and silicide is not present on the N+ active area and the P+ active area. The presence of this selective silicidation creates a beneficial low-resistance connection between the N+ region of the polysilicon line and the P+ region of the polysilicon line. The absence of silicidation on the N+ and P+ active areas, specifically on the PFET and NFET structures, prevents current leakage associated with the silicidation of devices.

摘要翻译： 本文公开了选择性硅化半导体结构及其制造方法。 半导体结构在多晶硅线路上存在硅化物，N +扩散区域或N +有源区域与多晶硅线路的N + / P +结处的P +扩散区域或有源区域之间存在硅化物，而N +有源区域和P +活性区域上不存在硅化物 区。 这种选择性硅化的存在在多晶硅线的N +区和多晶硅线的P +区之间产生有益的低电阻连接。 在N +和P +有源区，特别是PFET和NFET结构上不存在硅化，可防止与器件硅化相关的电流泄漏。

公开(公告)号：US06778449B2

公开(公告)日：2004-08-17

申请号：US10064302

申请日：2002-07-01

申请人： Matthew J. Breitwisch ,  Jeffrey S. Brown ,  Randy W. Mann ,  Jeffrey H. Oppold

发明人： Matthew J. Breitwisch ,  Jeffrey S. Brown ,  Randy W. Mann ,  Jeffrey H. Oppold

IPC分类号： G11C700

CPC分类号： G11C29/50 ,  G11C11/41 ,  G11C2029/5006

摘要： A method and structure for a test structure that has an array of cells connected together by conductive lines. The conductive lines connect the cells together as if they were a single cell. The conductive lines can include common word line; a common bit line; a common bit line complement line, a common N-well voltage line, a common interior ground line, a common interior voltage line, and/or a common ground line.

摘要翻译： 用于具有通过导线连接在一起的单元阵列的测试结构的方法和结构。 导线将电池连接在一起，就像它们是单个电池一样。 导线可以包括通用字线; 一个普通的位线 公共位线补码线，公共N阱电压线，公共内部地线，公共内部电压线和/或公共接地线。

公开(公告)号：US06700163B2

公开(公告)日：2004-03-02

申请号：US09683278

申请日：2001-12-07

申请人： Matthew J. Breitwisch ,  Jeffrey S. Brown ,  Terence B. Hook ,  Randy W. Mann ,  Christopher S. Putnam ,  Mohammad I. Younus

发明人： Matthew J. Breitwisch ,  Jeffrey S. Brown ,  Terence B. Hook ,  Randy W. Mann ,  Christopher S. Putnam ,  Mohammad I. Younus

IPC分类号： H01L2976

CPC分类号： H01L21/823871 ,  H01L21/823842

摘要： A selectively silicided semiconductor structure and a method for fabricating same is disclosed herein. The semiconductor structure has suicide present on the polysilicon line between the N+ diffusion or N+ active area and the P+ diffusion or active area at the N+/P+ junction of the polysilicon line, and silicide is not present on the N+ active area and the P+ active area. The presence of this selective silicidation creates a beneficial low-resistance connection between the N+ region of the polysilicon line and the P+ region of the polysilicon line. The absence of silicidation on the N+ and P+ active areas, specifically on the PFET and NFET structures, prevents current leakage associated with the silicidation of devices.

摘要翻译： 本文公开了选择性硅化半导体结构及其制造方法。 半导体结构在N +扩散或N +有源区域之间的多晶硅线路上存在自杀，并且在多晶硅线路的N + / P +结处的P +扩散或有源区域存在自杀，并且在N +有源区域和P +活性区域上不存在硅化物 区。 这种选择性硅化的存在在多晶硅线的N +区和多晶硅线的P +区之间产生有益的低电阻连接。 在N +和P +有源区，特别是PFET和NFET结构上不存在硅化，可防止与器件硅化相关的电流泄漏。

公开(公告)号：US06825530B1

公开(公告)日：2004-11-30

申请号：US10250190

申请日：2003-06-11

申请人： Jeffrey S. Brown ,  Chung H. Lam ,  Randy W. Mann ,  Jeffery H Oppold

发明人： Jeffrey S. Brown ,  Chung H. Lam ,  Randy W. Mann ,  Jeffery H Oppold

IPC分类号： H01L2976

CPC分类号： H01L29/1037 ,  H01L21/823412 ,  H01L21/823493 ,  H01L29/78

摘要： A zero threshold voltage (ZVt) pFET (104) and a method of making the same. The ZVt pFET is made by implanting a p-type substrate (112) with a retrograde n-well (116) so that a pocket (136) of the p-type substrate material remains adjacent the surface of the substrate. This is accomplished using an n-well mask (168) having a pocket-masking region (184) in the aperture (180) corresponding to the ZVt pFET. The n-well may be formed by first creating a ring-shaped precursor n-well (116′) and then annealing the substrate so as to cause the regions of the lower portion (140′) of the precursor n-well to merge with one another to isolate the pocket of p-type substrate material. After the n-well and isolated pocket of p-type substrate material have been formed, remaining structures of the ZVt pFET may be formed, such as a gate insulator (128), gate (132), source (120), and drain (124).

摘要翻译： 零阈值电压（ZVt）pFET（104）及其制造方法。 ZVt pFET通过用逆向n阱（116）注入p型衬底（112），使得p型衬底材料的凹口（136）保持邻近衬底的表面而制成。 这是通过在对应于ZVt pFET的孔径（180）中具有口罩掩蔽区域（184）的n阱掩模（168）来实现的。 可以通过首先产生环形前体n阱（116'）然后对衬底退火以使前体n阱的下部（140'）的区域与 彼此隔开p型衬底材料的口袋。 在已经形成p型衬底材料的n阱和隔离袋之后，可以形成ZVt pFET的剩余结构，例如栅极绝缘体（128），栅极（132），源极（120）和漏极（ 124）。

公开(公告)号：US07005334B2

公开(公告)日：2006-02-28

申请号：US10845835

申请日：2004-05-14

申请人： Jeffrey S. Brown ,  Chung H. Lam ,  Randy W. Mann ,  Jeffery H. Oppold

发明人： Jeffrey S. Brown ,  Chung H. Lam ,  Randy W. Mann ,  Jeffery H. Oppold

IPC分类号： H01L21/336

CPC分类号： H01L29/1037 ,  H01L21/823412 ,  H01L21/823493 ,  H01L29/78

摘要： A zero threshold voltage (ZVt) pFET (104) and a method of making the same. The ZVt pFET is made by implanting a p-type substrate (112) with a retrograde n-well (116) so that a pocket (136) of the p-type substrate material remains adjacent the surface of the substrate. This is accomplished using an n-well mask (168) having a pocket-masking region (184) in the aperture (180) corresponding to the ZVt pFET. The n-well may be formed by first creating a ring-shaped precursor n-well (116′) and then annealing the substrate so as to cause the regions of the lower portion (140′) of the precursor n-well to merge with one another to isolate the pocket of p-type substrate material. After the n-well and isolated pocket of p-type substrate material have been formed, remaining structures of the ZVt pFET may be formed, such as a gate insulator (128), gate (132), source (120), and drain (124).

摘要翻译： 零阈值电压（ZVt）pFET（104）及其制造方法。 ZVt pFET通过用逆向n阱（116）注入p型衬底（112），使得p型衬底材料的凹口（136）保持邻近衬底的表面而制成。 这是通过在对应于ZVt pFET的孔径（180）中具有口罩掩蔽区域（184）的n阱掩模（168）来实现的。 可以通过首先产生环形前体n阱（116'）然后对衬底退火以使前体n阱的下部（140'）的区域与 彼此隔开p型衬底材料的口袋。 在已经形成p型衬底材料的n阱和隔离袋之后，可以形成ZVt pFET的剩余结构，例如栅极绝缘体（128），栅极（132），源极（120）和漏极（ 124）。

公开(公告)号：US08569116B2

公开(公告)日：2013-10-29

申请号：US13171228

申请日：2011-06-28

申请人： Randy W. Mann ,  Kingsuk Maitra ,  Anurag Mittal

发明人： Randy W. Mann ,  Kingsuk Maitra ,  Anurag Mittal

IPC分类号： H01L21/82 ,  H01L21/479 ,  H01L21/44

CPC分类号： H01L23/62 ,  H01L23/5256 ,  H01L2924/0002 ,  H01L2924/00

摘要： Methods of fabricating an integrated circuit with a fin-based fuse, and the resulting integrated circuit with a fin-based fuse are provided. In the method, a fin is created from a layer of semiconductor material and has a first end and a second end. The method provides for forming a conductive path on the fin from its first end to its second end. The conductive path is electrically connected to a programming device that is capable of selectively directing a programming current through the conductive path to cause a structural change in the conductive path to increase resistance across the conductive path.

摘要翻译： 提供了制造具有鳍式保险丝的集成电路的方法，以及所得到的具有鳍式保险丝的集成电路。 在该方法中，由半导体材料层产生翅片并具有第一端和第二端。 该方法提供了在翅片上从其第一端到其第二端形成导电路径。 导电路径电连接到编程设备，该编程设备能够选择性地将编程电流引导通过导电路径，从而导致导电路径中的结构变化，以增加穿过导电路径的电阻。

公开(公告)号：US07696034B2

公开(公告)日：2010-04-13

申请号：US12128077

申请日：2008-05-28

申请人： Peter J. Geiss ,  Marwan H. Khater ,  Qizhi Liu ,  Randy W. Mann ,  Robert J. Purtell ,  Beth Ann Rainey ,  Jae-Sung Rieh ,  Andreas D. Stricker

发明人： Peter J. Geiss ,  Marwan H. Khater ,  Qizhi Liu ,  Randy W. Mann ,  Robert J. Purtell ,  Beth Ann Rainey ,  Jae-Sung Rieh ,  Andreas D. Stricker

IPC分类号： H01L21/8238

CPC分类号： H01L29/66242 ,  H01L21/28518 ,  H01L21/8249 ,  H01L27/0623 ,  H01L29/0804 ,  H01L29/456 ,  H01L29/7371

摘要： Methods for fabricating a heterojunction bipolar transistor having a raised extrinsic base is provided in which the base resistance is reduced by forming a silicide atop the raised extrinsic base that extends to the emitter region in a self-aligned manner. The silicide formation is incorporated into a BiCMOS process flow after the raised extrinsic base has been formed. The present invention also provides a heterojunction bipolar transistor having a raised extrinsic base and a silicide located atop the raised extrinsic base. The silicide atop the raised extrinsic base extends to the emitter in a self-aligned manner. The emitter is separated from the silicide by a spacer.

摘要翻译： 提供了制造具有凸起非本征基极的异质结双极晶体管的方法，其中通过在以自对准方式延伸到发射极区域的凸起的外部基极之上形成硅化物来降低基极电阻。 在形成凸起的外基之后，将硅化物形成结合到BiCMOS工艺流程中。 本发明还提供了一种异质结双极晶体管，其具有凸起的外部基极和位于凸起外部基极顶部的硅化物。 凸起的外基极上面的硅化物以自对准的方式延伸到发射极。 发射极通过间隔物与硅化物分离。

公开(公告)号：US06967351B2

公开(公告)日：2005-11-22

申请号：US10011351

申请日：2001-12-04

申请人： David M. Fried ,  Randy W. Mann ,  K. Paul Muller ,  Edward J. Nowak

发明人： David M. Fried ,  Randy W. Mann ,  K. Paul Muller ,  Edward J. Nowak

IPC分类号： H01L21/8244 ,  H01L21/84 ,  H01L27/12 ,  H01L29/04

CPC分类号： H01L27/11 ,  H01L21/84 ,  H01L27/1203 ,  H01L29/785 ,  Y10S257/903

摘要： The present invention provides a device design and method for forming the same that results in Fin Field Effect Transistors having different gains without negatively impacting device density. The present invention forms relatively low gain FinFET transistors in a low carrier mobility plane and relatively high gain FinFET transistors in a high carrier mobility plane. Thus formed, the FinFETs formed in the high mobility plane have a relatively higher gain than the FinFETs formed in the low mobility plane. The embodiments are of particular application to the design and fabrication of a Static Random Access Memory (SRAM) cell. In this application, the bodies of the n-type FinFETs used as transfer devices are formed along the {110} plane. The bodies of the n-type FinFETs and p-type FinFETs used as the storage latch are formed along the {100}. Thus formed, the transfer devices will have a gain approximately half that of the n-type storage latch devices, facilitating proper SRAM operation.

摘要翻译： 本发明提供了一种用于形成它的器件设计和方法，其导致Fin场效应晶体管具有不同的增益而不会不利地影响器件密度。 本发明在低载流子迁移率平面中形成相对较低的增益FinFET晶体管，并在高载流子迁移率平面内形成相对较高的增益FinFET晶体管。 如此形成的，在高迁移率平面中形成的FinFET具有比在低迁移率平面中形成的FinFET更高的增益。 这些实施例特别适用于静态随机存取存储器（SRAM）单元的设计和制造。 在这种应用中，用作转移装置的n型FinFET的主体沿{110}平面形成。 用作存储锁存器的n型FinFET和p型FinFET的主体沿{100}形成。 如此形成的，传送装置的增益大约是n型存储锁存装置的增益的一半，有利于适当的SRAM操作。

公开(公告)号：US06815751B2

公开(公告)日：2004-11-09

申请号：US10064301

申请日：2002-07-01

申请人： Jeffrey S. Brown ,  Randy W. Mann

发明人： Jeffrey S. Brown ,  Randy W. Mann

IPC分类号： H01L218234

CPC分类号： H01L27/10861 ,  H01L27/0207 ,  H01L27/1203

摘要： Capacitor structures that have increased capacitance without compromising cell area are provided as well as methods for fabricating the same. A first capacitor structure includes insulating material present in holes that are formed in a semiconductor substrate, where the insulating material is thicker on the bottom wall of each capacitor hole as compared to the sidewalls of each hole. In another capacitor structure, deep capacitor holes are provided that have an isolation implant region present beneath each hole.