公开(公告)号：US06513564B2

公开(公告)日：2003-02-04

申请号：US09808814

申请日：2001-03-14

申请人： Michael A. Bryan ,  James K. Kai

发明人： Michael A. Bryan ,  James K. Kai

IPC分类号： B32B3500

CPC分类号： B32B43/006 ,  B28D5/0011 ,  B28D5/0023 ,  B28D5/0064 ,  B28D5/0082 ,  Y10T29/49821 ,  Y10T29/49822 ,  Y10T83/364 ,  Y10T156/1374 ,  Y10T156/1928

摘要： A cleaving tool provides pressurized gas to the edge of a substrate in combination with a sharpened edge to cleave the substrate at a selected interface. The edge of the tool is tapped against the perimeter of a substrate, such as a bonded substrate, and a burst of gas pressure is then applied at approximately the point of contact with the edge of the tool. The combination of mechanical force and gas pressure separates the substrate into two halves at a selected interface, such as a weakened layer in a donor wafer.

公开(公告)号：US06263941B1

公开(公告)日：2001-07-24

申请号：US09370958

申请日：1999-08-10

申请人： Michael A. Bryan ,  James K. Kai

发明人： Michael A. Bryan ,  James K. Kai

IPC分类号： B32B3500

CPC分类号： B32B43/006 ,  B28D5/0011 ,  B28D5/0023 ,  B28D5/0064 ,  B28D5/0082 ,  Y10T29/49821 ,  Y10T29/49822 ,  Y10T83/364 ,  Y10T156/1374 ,  Y10T156/1928

摘要： A cleaving tool provides pressurized gas to the edge of a substrate in combination with a sharpened edge to cleave the substrate at a selected interface. The edge of the tool is tapped against the perimeter of a substrate, such as a bonded substrate, and a burst of gas pressure is then applied at approximately the point of contact with the edge of the tool. The combination of mechanical force and gas pressure separates the substrate into two halves at a selected interface, such as a weakened layer in a donor wafer.

摘要翻译： 切割工具将加压气体与锋利的边缘组合地提供到基底的边缘，以在选定的界面处切割基底。 将工具的边缘与衬底的周边（例如键合衬底）相接合，然后在大约与工具边缘的接触点处施加气体压力脉冲。 机械力和气体压力的组合将基板在选定的界面（例如施主晶片中的弱化层）分离成两半。

公开(公告)号：US06221740B1

公开(公告)日：2001-04-24

申请号：US09371436

申请日：1999-08-10

申请人： Michael A. Bryan ,  James K. Kai

发明人： Michael A. Bryan ,  James K. Kai

IPC分类号： H01L2130

CPC分类号： B32B43/006 ,  B28D5/0011 ,  B28D5/0023 ,  B28D5/0064 ,  B28D5/0082 ,  H01L21/67092 ,  Y10T29/53683 ,  Y10T156/1939 ,  Y10T225/12 ,  Y10T225/18 ,  Y10T225/30 ,  Y10T225/386

摘要： A cleaving tool provides pressurized gas to the edge of a substrate to cleave the substrate at a selected interface. A substrate, such as a bonded substrate, is loaded into the cleaving tool, and two halves of the tool are brought together to apply a selected pressure to the substrate. A compliant pad of selected elastic resistance provides support to the substrate while allowing the substrate to expand during the cleaving process. Bringing the two halves of the tool together also compresses an edge seal against the perimeter of the substrate. A thin tube connected to a high-pressure gas source extends through the edge seal and provides a burst of gas to separate the substrate into at least two sheets. In a further embodiment, the perimeter of the substrate is struck with an edge prior to applying the gas pressure.

摘要翻译： 切割工具将加压气体提供到衬底的边缘以在所选择的界面处切割衬底。 衬底（例如键合衬底）被装载到劈开工具中，并且工具的两半被聚集在一起以将选择的压力施加到衬底上。 所选择的弹性阻力的柔性衬垫提供对衬底的支撑，同时允许衬底在裂开过程期间膨胀。 将工具的两个一半带到一起也可压缩衬底周边的边缘密封。 连接到高压气体源的细管延伸穿过边缘密封件并且提供气泡，以将基底分离成至少两个片。 在另一个实施例中，在施加气体压力之前，衬底的周边被边缘撞击。

公开(公告)号：US06554046B1

公开(公告)日：2003-04-29

申请号：US09723467

申请日：2000-11-27

申请人： Michael A. Bryan ,  James K. Kai

发明人： Michael A. Bryan ,  James K. Kai

IPC分类号： B32B3500

CPC分类号： B32B43/006 ,  B28D5/0011 ,  B28D5/0023 ,  B28D5/0064 ,  B28D5/0082 ,  H01L21/67092 ,  Y10T29/53683 ,  Y10T156/1939 ,  Y10T225/12 ,  Y10T225/18 ,  Y10T225/30 ,  Y10T225/386

摘要： A cleaving tool provides pressurized gas to the edge of a substrate to cleave the substrate at a selected interface. A substrate, such as a bonded substrate, is loaded into the cleaving tool, and two halves of the tool are brought together to apply a selected pressure to the substrate. A compliant pad of selected elastic resistance provides support to the substrate while allowing the substrate to expand during the cleaving process. Bringing the two halves of the tool together also compresses an edge seal against the perimeter of the substrate. A thin tube connected to a high-pressure gas source extends through the edge seal and provides a burst of gas to separate the substrate into at least two sheets. In a further embodiment, the perimeter of the substrate is struck with an edge prior to applying the gas pressure.

摘要翻译： 切割工具将加压气体提供到衬底的边缘以在所选择的界面处切割衬底。 衬底（例如键合衬底）被装载到劈开工具中，并且工具的两半被聚集在一起以将选择的压力施加到衬底上。 所选择的弹性阻力的柔性衬垫提供对衬底的支撑，同时允许衬底在裂开过程期间膨胀。 将工具的两个一半带到一起也可压缩衬底周边的边缘密封。 连接到高压气体源的细管延伸穿过边缘密封件并且提供气泡，以将基底分离成至少两个片。 在另一个实施例中，在施加气体压力之前，衬底的周边被边缘撞击。

公开(公告)号：US07437047B2

公开(公告)日：2008-10-14

申请号：US11796798

申请日：2007-04-30

申请人： Michael A. Bryan ,  Nobuyuki Kambe

发明人： Michael A. Bryan ,  Nobuyuki Kambe

IPC分类号： G02B6/10 ,  H01L21/00

CPC分类号： G02B6/13 ,  G02B6/124 ,  G02B6/125 ,  Y10T428/25

摘要： Photosensitive optical materials are used for establishing more versatile approaches for optical device formation. In some embodiments, unpatterned light is used to shift the index-of-refraction of planar optical structures to shift the index-of-refraction of the photosensitive material to a desired value. This approach can be effective to produce cladding material with a selected index-of-refraction. In additional embodiments gradients in index-of-refraction are formed using photosensitive materials. In further embodiments, the photosensitive materials are patterned within the planar optical structure. Irradiation of the photosensitive material can selectively shift the index-of-refraction of the patterned photosensitive material. By patterning the light used to irradiate the patterned photosensitive material, different optical devices can be selectively activated within the optical structure.

摘要翻译： 光敏光学材料用于建立用于光学器件形成的更通用的方法。 在一些实施例中，使用未图案的光来移动平面光学结构的折射率以将感光材料的折射率移动到期望值。 这种方法可以有效地生产具有选定的折射率的包层材料。 在另外的实施例中，使用光敏材料形成折射率折射率。 在另外的实施例中，感光材料在平面光学结构内图案化。 感光材料的照射可以选择性地移动图案化感光材料的折射率。 通过图案化用于照射图案化感光材料的光，可以在光学结构内选择性地激活不同的光学器件。

公开(公告)号：US20080206963A1

公开(公告)日：2008-08-28

申请号：US12148318

申请日：2008-04-18

申请人： Francois J. Henley ,  Michael A. Bryan ,  William G. En

发明人： Francois J. Henley ,  Michael A. Bryan ,  William G. En

IPC分类号： H01L21/304

CPC分类号： H01L21/26506 ,  H01L21/2658 ,  H01L21/76251 ,  H01L21/76254

摘要： A method of forming substrates, e.g., silicon on insulator, silicon on silicon. The method includes providing a donor substrate, e.g., silicon wafer. The method also includes forming a cleave layer on the donor substrate that contains the cleave plane, the plane of eventual separation. In a specific embodiment, the cleave layer comprising silicon germanium. The method also includes forming a device layer (e.g., epitaxial silicon) on the cleave layer. The method also includes introducing particles into the cleave layer to add stress in the cleave layer. The particles within the cleave layer are then redistributed to form a high concentration region of the particles in the vicinity of the cleave plane, where the redistribution of the particles is carried out in a manner substantially free from microbubble or microcavity formation of the particles in the cleave plane. That is, the particles are generally at a low dose, which is defined herein as a lack of microbubble or microcavity formation in the cleave plane. The method also includes providing selected energy to the donor substrate to cleave the device layer from the cleave layer at the cleave plane, whereupon the selected energy is applied to create a controlled cleaving action to remove the device layer from a portion of the cleave layer in a controlled manner.

公开(公告)号：US07224882B2

公开(公告)日：2007-05-29

申请号：US10620176

申请日：2003-07-15

申请人： Michael A. Bryan ,  Nobuyuki Kambe

发明人： Michael A. Bryan ,  Nobuyuki Kambe

IPC分类号： G02B6/00 ,  H01L21/00

CPC分类号： G02B6/13 ,  G02B6/124 ,  G02B6/125 ,  Y10T428/25

摘要： Photosensitive optical materials are used for establishing more versatile approaches for optical device formation. In some embodiments, unpatterned light is used to shift the index-of-refraction of planar optical structures to shift the index-of-refraction of the photosensitive material to a desired value. This approach can be effective to produce cladding material with a selected index-of-refraction. In additional embodiments gradients in index-of-refraction are formed using, photosensitive materials. In further embodiments, the photosensitive materials are patterned within the planar optical structure. Irradiation of the photosensitive material can selectively shift the index-of-refraction of the patterned photosensitive material. By patterning the light used to irradiate the patterned photosensitive material, different optical devices can be selectively activated within the optical structure.

摘要翻译： 光敏光学材料用于建立用于光学器件形成的更通用的方法。 在一些实施例中，使用未图案的光来移动平面光学结构的折射率以将感光材料的折射率移动到期望值。 这种方法可以有效地生产具有选定的折射率的包层材料。 在另外的实施例中，使用感光材料形成折射率折射率。 在另外的实施例中，感光材料在平面光学结构内图案化。 感光材料的照射可以选择性地移动图案化感光材料的折射率。 通过图案化用于照射图案化感光材料的光，可以在光学结构内选择性地激活不同的光学器件。

公开(公告)号：US06211991B1

公开(公告)日：2001-04-03

申请号：US09098192

申请日：1998-06-16

申请人： Michael A. Bryan

发明人： Michael A. Bryan

IPC分类号： G02F103

CPC分类号： G02F1/1341 ,  G02F1/0305 ,  G02F1/061 ,  G02F1/133365 ,  G02F1/1334

摘要： An improved method and resulting device 10 for fabricating an electro-optical modulator material. The technique includes providing a substrate 509, which has a top surface. A first layer of electrode material 501 is defined overlying the top surface. The method also includes applying a transfer sheet 400, having an electro-optical material 405, to the first layer of electrode material 501, where the electro-optical material is affixed to the first layer of electrode material. A step of removing (e.g., peeling) 801 the transfer sheet from the electro-optical material is included. The removing step leaves a substantial portion of the electro-optical modulator material intact and affixed to the first layer of electrode material. This method generally uses less steps and provides a higher quality element than pre-existing techniques.

摘要翻译： 一种用于制造电光调制器材料的改进方法和所得装置10。 该技术包括提供具有顶表面的基底509。 电极材料501的第一层被限定在顶表面上。 该方法还包括将具有电光材料405的转印片400施加到电极材料501的第一层上，其中电光材料固定在第一层电极材料上。 包括从电光材料去除（例如剥离）801转印片的步骤。 去除步骤使电光调制器材料的大部分完好无损地固定在第一层电极材料上。 该方法通常使用较少的步骤，并提供比先前存在的技术更高质量的元素。

公开(公告)号：US5867404A

公开(公告)日：1999-02-02

申请号：US828469

申请日：1997-03-31

申请人： Michael A. Bryan

发明人： Michael A. Bryan

IPC分类号： B61K9/08 ,  B61L23/04 ,  E01B35/00 ,  G01S5/02 ,  G01S5/14 ,  G01S19/14 ,  G01S19/51 ,  H04B7/185

CPC分类号： B61L23/044 ,  B61K9/08 ,  B61L23/048 ,  E01B35/00 ,  G01S5/0252 ,  B61L2205/04 ,  G01S19/14

摘要： A method for monitoring defects in a railway with a computer system, the computer system includes the steps of determining positional data and status data for a railway, comparing historical status data to the status data to determine a defect for the railway, the defect having a defect type, displaying an image of a particular geographic area on a display that includes a location corresponding to the positional data, determining an icon associated with the defect type, and displaying the icon associated with the defect type on the display.

摘要翻译： 一种用于利用计算机系统监测铁路缺陷的方法，所述计算机系统包括确定铁路的位置数据和状态数据的步骤，将历史状态数据与状态数据进行比较，以确定铁路的缺陷，所述缺陷具有 缺陷类型，在包括与位置数据相对应的位置的显示器上显示特定地理区域的图像，确定与缺陷类型相关联的图标，以及在显示器上显示与缺陷类型相关联的图标。

公开(公告)号：US07164818B2

公开(公告)日：2007-01-16

申请号：US10138754

申请日：2002-05-03

申请人： Michael A. Bryan ,  Elizabeth Anne Nevis

发明人： Michael A. Bryan ,  Elizabeth Anne Nevis

IPC分类号： G02B6/32

CPC分类号： G02B6/12004 ,  G02B6/12002 ,  G02B6/1245 ,  G02B6/132 ,  G02B6/32 ,  G02B2006/12102

摘要： Gradient index lenses are described that are integrated within a planar optical structure. The gradient index lens is optically coupled to a planar optical waveguide. In some embodiments, the gradient index lens with variation in index-of-refraction in one dimension is within an optical fiber. The optical fiber includes cladding at least along the edges of the central plane of the gradient index lens. Methods for forming the integrated structures are described. Further optical structures involving the gradient index lenses are also described.

摘要翻译： 描述了集成在平面光学结构内的渐变折射率透镜。 梯度折射率透镜光学耦合到平面光波导。 在一些实施例中，在一个维度上具有变化的折射率的渐变折射率透镜在光纤内。 光纤包括至少沿着渐变折射率透镜的中心平面的边缘的包层。 描述形成集成结构的方法。 还描述了涉及梯度折射率透镜的其它光学结构。