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公开(公告)号：US20050145487A1
公开(公告)日：2005-07-07
申请号：US10511389
申请日：2003-04-11
CPC分类号： H01J37/34 , H01J37/3447
摘要： The invention relates to a coating installation comprising a recipient (1) which is divided into a cathode side (3) and a substrate side (4) by means of a screen (2). The cathode side (3) and the substrate side (4) respectively have a direct extraction outlet (10, 16) and a gas admission (8, 14). The gas admission (8) on the cathode side (3) is connected to a process gas source (9) and the gas admission (14) for the substrate side (4) is connected to a reactive gas source (15).
摘要翻译： 本发明涉及一种涂层装置，其包括借助于屏幕（2）被分为阴极侧（3）和基板侧（4）的接收器（1）。 阴极侧（3）和基板侧（4）分别具有直接提取出口（10,16）和气体入口（8,14）。 阴极侧（3）上的气体进入（8）连接到处理气体源（9），并且用于基板侧（4）的气体进入（14）连接到反应气体源（15）。
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公开(公告)号：US20050236276A1
公开(公告)日：2005-10-27
申请号：US10996812
申请日：2004-11-24
申请人： Albert Kastner , Michael Geisler , Thomas Leipnitz , Jurgen Bruch , Andreas Pflug , Bernd Szyszka
发明人： Albert Kastner , Michael Geisler , Thomas Leipnitz , Jurgen Bruch , Andreas Pflug , Bernd Szyszka
IPC分类号： H01L21/203 , C23C14/00 , C23C14/34 , C23C14/54 , C23C14/56 , H01L21/00 , H01L21/285 , C25D5/00
CPC分类号： C23C14/34 , C23C14/0042 , C23C14/542 , C23C14/56
摘要： A method for coating substrates in inline installations, in which a substrate is moved through at least one coating chamber and during this movement is coated. In this method, first, a model of the coating chamber is formed which takes into consideration the changes of the chamber parameters caused by the movement of the substrate through the coating chamber. Subsequently, the particular position of the substrate within the coating chamber is acquired. The chamber parameters are subsequently set based on the position of the substrate according to the model of the coating chambers.
摘要翻译： 一种在线安装中涂覆基材的方法，其中基底移动通过至少一个涂布室，并且在该运动期间被涂覆。 在该方法中，首先，形成涂覆室的模型，其考虑由基板通过涂覆室的运动引起的室参数的变化。 随后，获取涂层室内基材的特定位置。 随后根据涂层室的模型基于基板的位置来设定腔室参数。
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公开(公告)号：US20070227882A1
公开(公告)日：2007-10-04
申请号：US11692868
申请日：2007-03-28
申请人： Roland Trassl , Michael Geisler , Albert Kastner
发明人： Roland Trassl , Michael Geisler , Albert Kastner
IPC分类号： C23C14/00
CPC分类号： H01J37/3244 , H01J37/34 , H01J37/347 , H01J2237/3325
摘要： The invention relates to a sputter chamber for coating substrates, in which the so-called “picture frame effect” is eliminated or at least largely reduced. The thickness of the coating at the margin of a substrate hereby no longer deviates significantly from the thickness of the coating in the center of the substrate. This is attained thereby that the negative effect of the process gas—or of several process gases—which is introduced into the sputter chamber is equalized by an additional inert or reactive gas. At the margins of the substrates to be coated and on the substrate side facing away from the cathode thus an additional gas stream is generated, which is directed counter to the process gas stream.
摘要翻译： 本发明涉及一种用于涂覆基板的溅射室，其中所谓的“图像帧效应”被消除或至少大大降低。 衬底边缘处的涂层厚度不再显着偏离衬底中心涂层的厚度。 由此可以实现由引入到溅射室中的工艺气体或几种工艺气体的负面影响，由额外的惰性气体或反应性气体均衡。 在待涂覆的基底的边缘和背离阴极的基底侧上，产生另外的气流，其与工艺气体流相反。
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公开(公告)号：US5264099A
公开(公告)日：1993-11-23
申请号：US664790
申请日：1991-03-05
CPC分类号： C03C17/3615 , C03C17/3423 , C03C17/3435 , C03C17/36 , C03C17/3642 , C03C17/366 , C23C14/0641 , C23C14/08 , G02B1/10 , C03C2217/23 , C03C2218/154
摘要： A transparent substrate, such as glass, having a solar control coating consisting of a CrN layer between two SnO, layers. The solar control coating is arranged on the back side of the substrate which will face away from an observer when in place. A sub-oxidic alloy, such as NiCrO is then applied to the solar control coating.
摘要翻译： 具有由两个SnO层之间的CrN层组成的太阳能控制涂层的透明基板，例如玻璃。 太阳能控制涂层布置在基板的背面，当其就位时将远离观察者。 然后将诸如NiCrO的亚氧化合金施加到太阳能控制涂层。
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