公开(公告)号：US4444801A

公开(公告)日：1984-04-24

申请号：US338864

申请日：1982-01-12

申请人： Mikio Hongo ,  Masao Mitani ,  Tateoki Miyauchi ,  Masaaki Okunaka ,  Katsuro Mizukoshi

发明人： Mikio Hongo ,  Masao Mitani ,  Tateoki Miyauchi ,  Masaaki Okunaka ,  Katsuro Mizukoshi

IPC分类号： G03F1/72 ,  H05K3/10 ,  H05K3/22 ,  B23K9/00 ,  B05D3/06 ,  G01D9/42 ,  G01D15/10

CPC分类号： G03F1/72 ,  H05K3/105 ,  H05K3/225

摘要： A method and apparatus for correcting transparent defects on a photomask are disclosed. A metal-organic complex solution is applied to a transparent defect portion and its periphery on the photomask. The transparent defect portion is then exposed to a visible ray or ultraviolet ray to deposit a metal, a metal oxide or a composition thereof, while the light transmission quantity through the transparent defect portion is measured. After the measurement falls below a predetermined level relative to the quantity of the transmitted light at the start of exposure, the exposure is terminated to thereby complete the correction of the transparent defects.

摘要翻译： 公开了一种用于校正光掩模上的透明缺陷的方法和装置。 将金属 - 有机络合物溶液施加到光掩模上的透明缺陷部分及其周边。 然后透明的缺陷部分暴露于可见光或紫外线以沉积金属，金属氧化物或其组合物，同时测量通过透明缺陷部分的透光量。 在相对于曝光开始时的透射光量的测量值下降到预定水平之外，终止曝光，从而完成透明缺陷的校正。

公开(公告)号：US4463073A

公开(公告)日：1984-07-31

申请号：US394642

申请日：1982-07-01

申请人： Tateoki Miyauchi ,  Katsuro Mizukoshi ,  Mikio Hongo ,  Masao Mitani ,  Masaaki Okunaka ,  Takao Kawanabe ,  Isao Tanabe

发明人： Tateoki Miyauchi ,  Katsuro Mizukoshi ,  Mikio Hongo ,  Masao Mitani ,  Masaaki Okunaka ,  Takao Kawanabe ,  Isao Tanabe

IPC分类号： G03F1/00 ,  G03F1/72 ,  H01L21/027 ,  H01L21/30 ,  G03F9/00

CPC分类号： G03F1/72 ,  H01L21/30 ,  Y10S430/139 ,  Y10S430/146

摘要： A method and apparatus for repairing defect portions of a photomask. A complex material from which a light shading material can be deposited is applied over the photomask. A white (blank) defect region is irradiated with a continuous wave laser light beam projected in a slit-like light image to thereby convert the complex material into the shading material. After washing, a half-deposited portion formed in a peripheral portion of the light shading region is further deposited by a post-baking process. Those portions of the light shading film which depart from the desired mask pattern are removed together with black (solid) defect portion originally present in the photomask through irradiation with a pulse laser light beam. The pulse laser is constituted by a Dye-laser, while the continuous wave laser is constituted by an Ar-laser. A specific half-mirror which transmits therethrough Ar-laser light while reflecting Dye-laser light is displaceable provided. The white and the black defects are selectively centered on a same optical axis of an optical projection system including a slit and a condenser lens, whereby the white and the black defect portions are each removed through irradiation with the associated laser light projected thereto in a slit-like light image through the same optical projection system.

摘要翻译： 一种用于修复光掩模的缺陷部分的方法和装置。 将光阴影材料沉积的复合材料施加在光掩模上。 用投影在狭缝状光图像中的连续波激光束照射白色（空白）缺陷区域，从而将复合材料转换成遮光材料。 洗涤后，通过后烘烤处理进一步沉积形成在遮光区域的周边部分中的半沉积部分。 通过照射脉冲激光，与原来存在于光掩模中的黑色（实心）缺陷部分一起除去遮光膜的偏离所需掩模图案的那些部分。 脉冲激光由染料激光器构成，而连续波激光由Ar激光器构成。 通过反射染料激光而透过其的Ar激光的特定半反射镜是可置换的。 白色和黑色缺陷选择性地集中在包括狭缝和聚光透镜的光学投影系统的相同光轴上，由此白色和黑色缺陷部分通过照射投射到狭缝中的相关激光而被去除 类似的光图像通过相同的光学投影系统。

公开(公告)号：US4510222A

公开(公告)日：1985-04-09

申请号：US496245

申请日：1983-05-19

申请人： Masaaki Okunaka ,  Katsuro Mizukoshi ,  Mikio Hongo ,  Tateoki Miyauchi

发明人： Masaaki Okunaka ,  Katsuro Mizukoshi ,  Mikio Hongo ,  Tateoki Miyauchi

IPC分类号： C09D1/00 ,  C09D10/00 ,  C09D11/00 ,  G03F1/00 ,  G03F1/72 ,  H01L21/027 ,  G03F9/00

CPC分类号： G03F1/72 ,  G03F1/54 ,  Y10S430/139 ,  Y10S430/146

摘要： A photomask with white defects that have corrected with a film comprising a mixture of silver and tantalum oxide. The film has a good resistance to chemicals.

摘要翻译： 具有用包含银和氧化钽的混合物的膜校正的具有白色缺陷的光掩模。 这部电影对化学品有很好的抵抗力。

公开(公告)号：US06937296B2

公开(公告)日：2005-08-30

申请号：US09944866

申请日：2001-08-31

申请人： Michinobu Mizumura ,  Mikio Hongo ,  Masaaki Okunaka ,  Kaoru Yamada

发明人： Michinobu Mizumura ,  Mikio Hongo ,  Masaaki Okunaka ,  Kaoru Yamada

IPC分类号： G02F1/13 ,  G02F1/1333 ,  G02F1/1337 ,  G02F1/1343 ,  G02F1/1362 ,  G09F9/00 ,  H01L29/786

CPC分类号： G02F1/136259 ,  G02F2001/136263

摘要： Shorting defects between the scan lines and signal lines are repaired during the manufacture of a TFT or other flat panel display unit without causing liquid crystal orientation defects and production yield is thereby improved. In a TFT panel in which scan line 2 bifurcates where scan line 2 and signal line 3 intersect, the lines having a protective insulation film 8 therebetween, one leg of the scan line 2 bifurcation is cut by a laser 9 where a short 7 has been found between lines at the intersection, thereby electrically separating the short. An insulation film material 13 dispensed from a glass pipette 12 is then applied locally to the cut part and surrounding area and cured to form a new insulation film.

摘要翻译： 在TFT或其他平板显示单元的制造期间，在扫描线和信号线之间的短路缺陷被修复，而不引起液晶取向缺陷，从而提高了生产成本。 在其中扫描线2在扫描线2和信号线3相交处分叉的TFT面板中，其间具有保护绝缘膜8的线，扫描线2分支的一条腿被短路7已经被激光9切断 在交叉点的线之间发现，从而电短路。 然后将从玻璃吸管12分配的绝缘膜材料13局部施加到切割部分和周围区域并固化以形成新的绝缘膜。

公开(公告)号：US20050215163A1

公开(公告)日：2005-09-29

申请号：US10878550

申请日：2004-06-29

申请人： Takuo Tamura ,  Mikio Hongo ,  Masaaki Okunaka ,  Shinichi Kato ,  Eiji Matsuzaki ,  Masato Ito ,  Masatomo Terakado

发明人： Takuo Tamura ,  Mikio Hongo ,  Masaaki Okunaka ,  Shinichi Kato ,  Eiji Matsuzaki ,  Masato Ito ,  Masatomo Terakado

IPC分类号： H05B33/10 ,  G09F9/30 ,  H01J9/00 ,  H01L51/50 ,  H05B33/12 ,  H05B33/14 ,  H05B33/22 ,  H05B33/26

CPC分类号： H01L51/56 ,  H01L2251/568

摘要： When any of pixels is not lit in an organic EL display having an organic EL layer between a first electrode and a second electrode, an organic layer of the pixel is observed. If the organic layer of the pixel contains foreign matter, the second electrode is separated into a region in contact with the foreign matter and a region not in contact with both the contact region and the foreign matter. Thus, not-lit display regions are reduced as less as possible, making it possible to manufacture an organic EL display excellent in display performance.

摘要翻译： 当在具有第一电极和第二电极之间的有机EL层的有机EL显示器中没有点亮任何像素时，观察到像素的有机层。 如果像素的有机层含有异物，则将第二电极分离成与异物接触的区域和不与接触区域和异物接触的区域。 因此，尽可能地减少不亮的显示区域，使得可以制造显示性能优异的有机EL显示器。

公开(公告)号：US5883437A

公开(公告)日：1999-03-16

申请号：US580531

申请日：1995-12-28

申请人： Shigenobu Maruyama ,  Mikio Hongo ,  Satoru Todoroki ,  Masaaki Okunaka ,  Hideo Matsuzaki ,  Takanori Ninomiya ,  Kazushi Yoshimura ,  Fumikazu Ito

发明人： Shigenobu Maruyama ,  Mikio Hongo ,  Satoru Todoroki ,  Masaaki Okunaka ,  Hideo Matsuzaki ,  Takanori Ninomiya ,  Kazushi Yoshimura ,  Fumikazu Ito

IPC分类号： G02F1/1362 ,  H01L21/48 ,  H01L23/48 ,  H01L29/40 ,  H01L29/52

CPC分类号： G02F1/136286 ,  H01L21/485 ,  G02F2001/136254 ,  H01L2924/0002

摘要： A method and apparatus for inspecting wirings of an electronic circuit substrate to detect a defect in the wiring and for enabling correction thereof. The inspection method and apparatus include electrostatically coupling at least one electrode to a wiring pattern, applying a time varying voltage between the electrode and wiring pattern at different locations so as to detect a current flow and determine a defect by a variation in the detected current flow at the different locations and a portion of the defect. A defect in the form of a disconnected or half-disconnected point of the wiring may be corrected by supplying a solution of a metal complex to the disconnected or half-disconnected point, heating the solution and end point areas of the disconnected or half-disconnected point by laser light and precipitating a metal thin film establishing a connection of the wiring.

摘要翻译： 一种用于检查电子电路基板的布线以检测布线中的缺陷并使其能够进行校正的方法和装置。 检查方法和装置包括将至少一个电极静电耦合到布线图案，在不同位置在电极和布线图案之间施加时变电压，以便检测电流，并通过检测电流的变化来确定缺陷 在不同的位置和缺陷的一部分。 可以通过将金属复合物的溶液提供给断开或半断开的点来加热接头的断开或半断开点的形式的缺陷，加热解决方案和终点区域的断开或半断开 通过激光点并沉淀建立连线的金属薄膜。

公开(公告)号：US07258586B2

公开(公告)日：2007-08-21

申请号：US10878550

申请日：2004-06-29

申请人： Takuo Tamura ,  Mikio Hongo ,  Masaaki Okunaka ,  Shinichi Kato ,  Eiji Matsuzaki ,  Masato Ito ,  Masatomo Terakado

发明人： Takuo Tamura ,  Mikio Hongo ,  Masaaki Okunaka ,  Shinichi Kato ,  Eiji Matsuzaki ,  Masato Ito ,  Masatomo Terakado

IPC分类号： H01J9/00

CPC分类号： H01L51/56 ,  H01L2251/568

摘要： When any of pixels is not lit in an organic EL display having an organic EL layer between a first electrode and a second electrode, an organic layer of the pixel is observed. If the organic layer of the pixel contains foreign matter, the second electrode is separated into a region in contact with the foreign matter and a region not in contact with both the contact region and the foreign matter. Thus, not-lit display regions are reduced as less as possible, making it possible to manufacture an organic EL display excellent in display performance.

摘要翻译： 当在具有第一电极和第二电极之间的有机EL层的有机EL显示器中没有点亮任何像素时，观察到像素的有机层。 如果像素的有机层含有异物，则将第二电极分离成与异物接触的区域和不与接触区域和异物接触的区域。 因此，尽可能地减少不亮的显示区域，使得可以制造显示性能优异的有机EL显示器。

公开(公告)号：US20080290789A1

公开(公告)日：2008-11-27

申请号：US11870697

申请日：2007-10-11

申请人： Kazuhiko KAI ,  Masaaki Okunaka ,  Naoyuki Ito

发明人： Kazuhiko KAI ,  Masaaki Okunaka ,  Naoyuki Ito

IPC分类号： H01L51/54

CPC分类号： H01L27/3246

摘要： In an organic EL display device comprising a substrate, a plurality of pixel regions in each of which a first electrode, a light emitting material layer, and a second electrode are laminated in this order above the substrate, and a bank film formed above the substrate to separate respective one of the pixel regions from another of the pixel regions adjacent thereto, wherein the bank film has a plurality of openings exposing upper surfaces of the first electrodes to the light emitting material layers in the respective pixel regions, and the second electrode is formed over the a plurality of openings of the bank film in common with the pixel regions, the present invention forms the bank film of an inorganic material and shapes a side wall thereof lying around each of the openings thereof to be sloped at an angle less than 85 degrees (°) with respect to a principal surface of the substrate in order to prevent the deterioration of the light emitting material layer and disconnection of the second electrode at steps of bank film lying in the vicinity of the openings thereof.

摘要翻译： 在包括基板的有机EL显示装置中，在基板上方依次层叠有第一电极，发光材料层和第二电极的多个像素区域，以及形成在基板的上方的堤膜 将相应的一个像素区域与与其相邻的像素区域中的另一个分离，其中该堤膜具有将第一电极的上表面暴露于各个像素区域中的发光材料层的多个开口，并且第二电极为 与像素区域共同形成在堤膜的多个开口上方，本发明形成无机材料的堤膜，并使位于其每个开口周围的侧壁形成为倾斜的角度小于 相对于基板的主面为85度（°），以防止发光材料层的劣化和断开 位于其开口附近的堤膜的台阶处的第二电极。

公开(公告)号：US20060158107A1

公开(公告)日：2006-07-20

申请号：US11378281

申请日：2006-03-20

申请人： Kazuhiko Kai ,  Masaaki Okunaka ,  Naoyuki Ito

发明人： Kazuhiko Kai ,  Masaaki Okunaka ,  Naoyuki Ito

IPC分类号： H01J1/62

CPC分类号： H01L27/3246

摘要： In an organic EL display device comprising a substrate, a plurality of pixel regions in each of which a first electrode, a light emitting material layer, and a second electrode are laminated in this order above the substrate, and a bank film formed above the substrate to separate respective one of the pixel regions from another of the pixel regions adjacent thereto, wherein the bank film has a plurality of openings exposing upper surfaces of the first electrodes to the light emitting material layers in the respective pixel regions, and the second electrode is formed over the a plurality of openings of the bank film in common with the pixel regions, the present invention forms the bank film of an inorganic material and shapes a side wall thereof lying around each of the openings thereof to be sloped at an angle less than 85 degrees (°) with respect to a principal surface of the substrate in order to prevent the deterioration of the light emitting material layer and disconnection of the second electrode at steps of bank film lying in the vicinity of the openings thereof.

摘要翻译： 在包括基板的有机EL显示装置中，在基板上方依次层叠有第一电极，发光材料层和第二电极的多个像素区域，以及形成在基板的上方的堤膜 将相应的一个像素区域与与其相邻的像素区域中的另一个分离，其中该堤膜具有将第一电极的上表面暴露于各个像素区域中的发光材料层的多个开口，并且第二电极为 与像素区域共同形成在堤膜的多个开口上方，本发明形成无机材料的堤膜，并使位于其每个开口周围的侧壁形成为倾斜的角度小于 相对于基板的主面为85度（°），以防止发光材料层的劣化和断开 位于其开口附近的堤膜的台阶处的第二电极。

公开(公告)号：US4495218A

公开(公告)日：1985-01-22

申请号：US534686

申请日：1983-09-22

申请人： Kazufumi Azuma ,  Mitsuo Nakatani ,  Kazuo Nate ,  Masaaki Okunaka ,  Hitoshi Yokono

发明人： Kazufumi Azuma ,  Mitsuo Nakatani ,  Kazuo Nate ,  Masaaki Okunaka ,  Hitoshi Yokono

IPC分类号： C23C16/48 ,  C23C16/24 ,  C23C16/34 ,  C23C16/40 ,  H01L21/205 ,  H01L21/268 ,  H01L21/31 ,  H01L21/314 ,  H01L21/316 ,  H01L21/318 ,  H01L31/04 ,  C23C17/00

CPC分类号： H01L21/02164 ,  C23C16/24 ,  C23C16/345 ,  C23C16/402 ,  H01L21/0217 ,  H01L21/02211 ,  H01L21/02277 ,  H01L21/02381 ,  H01L21/02422 ,  H01L21/02425 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/268 ,  H01L21/2686 ,  H01L21/31612 ,  H01L21/3185 ,  Y10S148/093

摘要： A thin film of a-Si, SiO.sub.2 or Si.sub.3 N.sub.4 can be formed on a substrate using a starting material gas containing at least a polysilane of the formula Si.sub.n H.sub.2n+2 (n=2, 3 or 4) by a chemical vapor deposition method with irradiation with light with high film forming rate at lower temperatures.

摘要翻译： 可以通过化学气相沉积法使用至少含有式SinH2n + 2（n = 2,3或4）的聚硅烷的原料气体在基板上形成a-Si，SiO 2或Si 3 N 4的薄膜 具有在较低温度下具有高成膜速率的光。