公开(公告)号：US06686591B2

公开(公告)日：2004-02-03

申请号：US10048430

申请日：2002-01-31

申请人： Minoru Ito ,  Norimichi Anazawa

发明人： Minoru Ito ,  Norimichi Anazawa

IPC分类号： H01J37256

CPC分类号： H01J37/244 ,  G01N23/04 ,  G03F1/86 ,  H01J37/26 ,  H01J2237/2446 ,  H01J2237/2817

摘要： An electronic beam transmitting through a mask is detected by a detector in which a plurality of elements is aligned in a plurality of lines while an image signal is transferred by the detector synchronously with movement of the mask, and high resolution due to a short wavelength of the electronic beam can be effectively utilized as well as an image signal is transferred at right angles to a line of the detector synchronously with same time detection of pixels in a direction of the line, so that an inspection of a mask with high resolution at high speed would be achieved, and furthermore, it would be achieved to produce an image scanned in a straight line with the extremely high accuracy without zigzag scan when a stage with an easy structure is used.

摘要翻译： 通过掩模发射的电子束通过检测器检测，其中多个元件在多条线中对齐，同时由扫描仪与扫描仪的移动同步地传输图像信号，并且由于短波长的高分辨率 可以有效地利用电子束，并且与线的方向上的像素的相同时间检测同步地将图像信号以直角传送到检测器的线，从而以高分辨率检测高分辨率的掩模 并且此外，当使用具有简单结构的平台时，可以实现以非常高的准确度在直线上扫描的图像，而没有锯齿形扫描。

公开(公告)号：US07375328B2

公开(公告)日：2008-05-20

申请号：US11293148

申请日：2005-12-05

申请人： Akira Yonezawa ,  Tatenori Jinriki ,  Jun Nitta ,  Norimichi Anazawa ,  Ryuichi Shimizu

发明人： Akira Yonezawa ,  Tatenori Jinriki ,  Jun Nitta ,  Norimichi Anazawa ,  Ryuichi Shimizu

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/185 ,  B08B7/0057 ,  H01J37/28 ,  H01J2237/022

摘要： A charged particle beam apparatus comprising a preparatory evacuation chamber (15 in FIG. 1A) into which a sample (12) is conveyed and which is preliminarily evacuated, an ultraviolet irradiation unit (21) which is disposed in the preparatory evacuation chamber (15) and which irradiates the surface of the sample (12) conveyed into the preparatory evacuation chamber (15), with ultraviolet rays for a predetermined time period, and a sample chamber (16) into which the sample (12) is conveyed in the preliminarily evacuated state of the preparatory evacuation chamber (15) or from which the sample (12) is conveyed into the preparatory evacuation chamber (15), wherein the ultraviolet irradiation of the sample (12) by the ultraviolet irradiation unit (21) is performed before the conveyance of the sample (12) into the sample chamber (16), or/and after the conveyance thereof from the sample chamber (16), thereby to remove contamination on the surface of the sample (12).

摘要翻译： 一种带电粒子束装置，包括：预先抽真空室（图1A中的15），其中输送样品（12）并预先抽真空;紫外线照射单元（21），设置在预备抽空室 ），并且用紫外线照射经预定的时间段的被输送到预备抽空室（15）的样品（12）的表面，以及将样品（12）预先传送到的样品室 预备排空室（15）的抽真空状态或将样品（12）从该排空状态输送到预备抽空室（15）中，其中紫外线照射单元（21）对样品（12）的紫外线照射在 将样品（12）输送到样品室（16）中，或者在从样品室（16）传送之后，从而去除样品表面上的污染物 （12）。

公开(公告)号：US20090212660A1

公开(公告)日：2009-08-27

申请号：US11912137

申请日：2006-04-20

申请人： Masaya Iwaki ,  Tomoko Iwaki ,  Koji Akashi ,  Norimichi Anazawa ,  Ken-ichi Kobayashi

发明人： Masaya Iwaki ,  Tomoko Iwaki ,  Koji Akashi ,  Norimichi Anazawa ,  Ken-ichi Kobayashi

IPC分类号： H02N2/00 ,  H01L41/22

CPC分类号： H02N2/007 ,  Y10T29/42

摘要： [Purpose] The present invention relates to an ultrasonic motor having a stator which includes a piezoelectric element for moving a rotor in a prescribed direction by applying a predetermined ultrasonic voltage thereto, and the rotor which is fixed to the stator by a frictional force, and a method for manufacturing an ultrasonic motor, and it has for its purpose to attain decrease of dust appearance by enhancement of a wear resistance, a different hardness, or the like in such a way that a contact part of at least either of a stator and a rotor which constitute the ultrasonic motor is irradiated with ions.[Constitution] An ultrasonic motor characterized in that either or both of contact parts of a stator and a rotor is/are irradiated with ions, thereby to enhance a wear resistance of the contact part or parts.

摘要翻译： 超声波电动机技术领域本发明涉及具有定子的超声波电动机，该定子包括：通过施加规定的超声波电压使规定的方向上的转子向规定的方向移动的压电元件和通过摩擦力固定在定子上的转子， 一种超声波马达的制造方法，其目的是通过提高耐磨性，不同的硬度等来降低灰尘外观，使得定子和 用离子照射构成超声波马达的转子。 [结构]一种超声波马达，其特征在于，定子和转子的接触部中的任一个或两者被离子照射，从而提高接触部件的耐磨性。

公开(公告)号：US20060138363A1

公开(公告)日：2006-06-29

申请号：US11293148

申请日：2005-12-05

申请人： Akira Yonezawa ,  Tatenori Jinriki ,  Jun Nitta ,  Norimichi Anazawa ,  Ryuichi Shimizu

发明人： Akira Yonezawa ,  Tatenori Jinriki ,  Jun Nitta ,  Norimichi Anazawa ,  Ryuichi Shimizu

IPC分类号： G01J3/10

CPC分类号： H01J37/185 ,  B08B7/0057 ,  H01J37/28 ,  H01J2237/022

摘要： A charged particle beam apparatus comprising a preparatory evacuation chamber (15 in FIG. 1A) into which a sample (12) is conveyed and which is preliminarily evacuated, an ultraviolet irradiation unit (21) which is disposed in the preparatory evacuation chamber (15) and which irradiates the surface of the sample (12) conveyed into the preparatory evacuation chamber (15), with ultraviolet rays for a predetermined time period, and a sample chamber (16) into which the sample (12) is conveyed in the preliminarily evacuated state of the preparatory evacuation chamber (15) or from which the sample (12) is conveyed into the preparatory evacuation chamber (15), wherein the ultraviolet irradiation of the sample (12) by the ultraviolet irradiation unit (21) is performed before the conveyance of the sample (12) into the sample chamber (16), or/and after the conveyance thereof from the sample chamber (16), thereby to remove contamination on the surface of the sample (12).

摘要翻译： 一种带电粒子束装置，包括：预先抽真空室（图1A中的15），其中输送样品（12）并预先抽真空;紫外线照射单元（21），设置在预备抽空室 ），并且用紫外线照射经预定的时间段的被输送到预备抽空室（15）的样品（12）的表面，以及将样品（12）预先传送到的样品室 预备排空室（15）的抽真空状态或将样品（12）从该排空状态输送到预备抽空室（15）中，其中紫外线照射单元（21）对样品（12）的紫外线照射在 将样品（12）输送到样品室（16）中，或者在从样品室（16）传送之后，从而去除样品表面上的污染物 （12）。

公开(公告)号：US5057689A

公开(公告)日：1991-10-15

申请号：US583541

申请日：1990-09-17

申请人： Noboru Nomura ,  Hideo Nakagawa ,  Taichi Koizumi ,  Kenji Harafuji ,  Mitsuhiro Okuni ,  Norimichi Anazawa

发明人： Noboru Nomura ,  Hideo Nakagawa ,  Taichi Koizumi ,  Kenji Harafuji ,  Mitsuhiro Okuni ,  Norimichi Anazawa

IPC分类号： H01J37/141 ,  H01J37/153

CPC分类号： H01J37/141 ,  H01J37/153

摘要： A scanning electron microscope is disclosed in which an objective lens includes a first pole piece and a second pole piece. The first pole piece is provided with a hole through which an electron beam passes, and is disposed between an electron gun for emitting the electron beam and the second pole piece. The second pole piece has a planar portion on which a specimen is placed, and the second pole piece being mounted on a supporting block movable in a plane substantially perpendicular to the projecting direction of the electron beam.

公开(公告)号：US4488045A

公开(公告)日：1984-12-11

申请号：US412215

申请日：1982-08-27

申请人： Norimichi Anazawa ,  Masahiko Okunuki ,  Ryuzo Aihara

发明人： Norimichi Anazawa ,  Masahiko Okunuki ,  Ryuzo Aihara

IPC分类号： H01J37/08 ,  H01J3/04 ,  H01J27/02 ,  H01J27/26 ,  H01J49/16

CPC分类号： H01J27/26

摘要： A reservoir containing a material to be ionized has in its bottom a capillary extending outwardly in symmetrical with the optical axis of an ion source, and has a needle extending coaxially through said capillary in said reservoir so that the apex end of the needle projects slightly beyond the exterior surface of the reservoir. Intensive electric field at the apex end of the needle is formed by an extracting electrode disposed in facing the needle. An electric current is supplied through conductive wires or filaments supporting the reservoir for heating the reservoir. As a result, the liquid material to be ionized in the reservoir seeps smoothly through the capillary of the reservoir toward the apex end of the needle for field evaporation and ionization.

摘要翻译： 包含待离子化的材料的储存器在其底部具有向外延伸的毛细管，其与离子源的光轴对称，并且具有同轴地延伸穿过所述储存器中的毛细管的针，使得针的顶端略微超过 储存器的外表面。 针的顶端处的强电场由设置在针上的提取电极形成。 通过支撑储存器的导电丝或细丝供应电流来加热储存器。 结果，在储存器中被离子化的液体材料通过储存器的毛细管顺畅地渗透到针的顶端，用于场蒸发和离子化。

公开(公告)号：US20100006756A1

公开(公告)日：2010-01-14

申请号：US11917838

申请日：2006-06-15

申请人： Norimichi Anazawa ,  Jun Nitta ,  Michio Ohshima ,  Tatenori Jinriki ,  Naoyuki Nakamura ,  Akira Yonezawa ,  Ken-ichi Kobayashi ,  Hao Zhang

发明人： Norimichi Anazawa ,  Jun Nitta ,  Michio Ohshima ,  Tatenori Jinriki ,  Naoyuki Nakamura ,  Akira Yonezawa ,  Ken-ichi Kobayashi ,  Hao Zhang

IPC分类号： G01N23/225

CPC分类号： H01J37/026 ,  H01J37/28 ,  H01J2237/0047 ,  H01J2237/16 ,  H01J2237/18 ,  H01J2237/26 ,  H01J2237/3175

摘要： When the surface of a semiconductor wafer, a photomask or the like sample is charged by irradiation with a charged particle beam, the charging is liable to hamper image observation, inspection and handling. Therefore, the sample and the surface or vicinity of the sample being charged by an electron beam or the like is held in an atmosphere or a reduced pressure atmosphere or in a predetermined gaseous atmosphere within a preliminary evacuation chamber, a sample chamber or the like, containing a soft X-ray generator which irradiates the sample or the vicinity thereof with soft X-rays which are controlled to generate positive ions and negative ions and remove charges on the surface of the sample.

摘要翻译： 当通过照射带电粒子束来对半导体晶片，光掩模等样品的表面进行充电时，充电将妨碍图像观察，检查和处理。 因此，将样品和被电子束等充电的样品的表面或附近保持在预抽真空室，样品室等中的气氛或减压气氛中或预定的气体气氛中， 含有软X射线发生器，用软X射线照射样品或其附近，该X射线被控制以产生正离子和负离子并去除样品表面上的电荷。

公开(公告)号：US07409309B2

公开(公告)日：2008-08-05

申请号：US11270813

申请日：2005-11-10

申请人： Jun Nitta ,  Katuyuki Takahashi ,  Norimichi Anazawa

发明人： Jun Nitta ,  Katuyuki Takahashi ,  Norimichi Anazawa

IPC分类号： G01B11/02 ,  G06F17/00

CPC分类号： G03F7/70625 ,  G01B15/00 ,  G03F1/84

摘要： A method of deciding the quality of a measurement value of the line width, the line interval or the like of a pattern on an object to-be-measured, including acquiring the signal intensity distribution of the pattern on the object to-be-measured, detecting the edge positions of the pattern from the acquired signal intensity distribution, detecting the taper widths of the edge parts of the pattern from the acquired signal intensity distribution, and deciding that the measurement value calculated on the basis of the detected edge positions is correct, when the detected taper widths fall within a predetermined range set beforehand. In this way, it is permitted to automatically decide the defective measurement of the line width of the pattern, or the like, attributed to an unclear image due to inferior focusing in an image photographing mode, an unclear image due to an image drift ascribable to charging-up, or the like.

摘要翻译： 确定要测量对象上的图案的线宽，线间隔等的测量值的质量的方法，包括获取要被测量对象上的图案的信号强度分布 从获取的信号强度分布中检测图案的边缘位置，从所获取的信号强度分布中检测图案的边缘部分的锥形宽度，并且确定基于检测到的边缘位置计算出的测量值是正确的 当检测到的锥度宽度落在预先设定的预定范围内时。 以这种方式，允许自动地确定归因于图像拍摄模式中的聚焦不良的图像的线宽等的不良测量，由于图像漂移导致的不清楚的图像归因于 充电等。

公开(公告)号：US20060109486A1

公开(公告)日：2006-05-25

申请号：US11270813

申请日：2005-11-10

申请人： Jun Nitta ,  Katuyuki Takahashi ,  Norimichi Anazawa

发明人： Jun Nitta ,  Katuyuki Takahashi ,  Norimichi Anazawa

IPC分类号： G01B11/04

CPC分类号： G03F7/70625 ,  G01B15/00 ,  G03F1/84

摘要： A method of deciding a measurement value as decides the quality of the measurement value of the line width, the line interval or the like of a pattern on an object to-be-measured, comprising the steps of acquiring the signal intensity distribution of the pattern on the object to-be-measured (2 in FIG. 1), detecting the edge positions of the pattern from the acquired signal intensity distribution, detecting the taper widths of the edge parts of the pattern from the acquired signal intensity distribution, and deciding that the measurement value calculated on the basis of the detected edge positions is correct, when the detected taper widths fall within a predetermined range set beforehand. In this way, it is permitted to automatically decide the defective measurement of the line width of the pattern, or the like, attributed to an unclear image due to inferior focusing in an image photographing mode, an unclear image due to an image drift ascribable to charging-up, or the like.

摘要翻译： 决定测量值的方法，用于决定待测对象上的图案的线宽，线间隔等的测量值的质量，包括以下步骤：获取图案的信号强度分布 在被测量物体（图1中的2）中，根据取得的信号强度分布检测图案的边缘位置，从获取的信号强度分布中检测图案的边缘部分的锥形宽度， 当检测到的锥度宽度落在预先设定的预定范围内时，基于检测到的边缘位置计算出的测量值是正确的。 以这种方式，允许自动地确定由于由于图像拍摄模式中的聚焦不良而导致的不清楚的图像的图案的线宽等的有缺陷的测量，由于图像漂移导致的不清楚的图像归因于 充电等。