公开(公告)号：US06852194B2

公开(公告)日：2005-02-08

申请号：US10147990

申请日：2002-05-20

申请人： Minoru Matsushita ,  Yasushi Kodashima ,  Toshikazu Kumai

发明人： Minoru Matsushita ,  Yasushi Kodashima ,  Toshikazu Kumai

IPC分类号： C23C16/54 ,  H01L21/00 ,  H01L21/677 ,  C23F1/00 ,  C23C16/00

CPC分类号： H01L21/67745 ,  C23C16/54 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67184 ,  H01L21/67742 ,  Y10S414/139

摘要： Processing apparatus is disclosed, that comprises substrate container holding table that can hold substrate container that contains plurality of target substrates, first transferring chamber, disposed adjacent to the substrate container holding table, that maintains the interior at first pressure, first processing unit group, disposed around the first transferring chamber, that processes target substrate at the first pressure, first transferring mechanism, disposed in the first transferring chamber, that transfers target substrate, second transferring chamber, disposed adjacent to the first transferring chamber, that maintains the interior at second pressure, second processing unit group, disposed around the second transferring chamber, that processes target substrate at the second pressure, and second transferring mechanism, disposed in the second transferring chamber, wherein the first transferring mechanism and/or the second transferring mechanism has at least two transferring arms.

摘要翻译： 公开了一种处理装置，其包括可容纳多个目标基板的基板容器的基板容器保持台，第一处理单元组，第一处理单元组，设置在基板容器保持台附近设置的第一传送室 围绕第一传送室，处理设置在第一传送室中的第一压力下的目标基板，第一传送机构，传送目标基板，邻近第一传送室设置的第二传送室，其将内部维持在第二压力 第二处理单元组，设置在第二转印室周围，处理第二压力下的目标基板;以及第二转印机构，设置在第二转印室中，其中第一转印机构和/或第二转印机构具有至少两个 转移武器

公开(公告)号：US20050003660A1

公开(公告)日：2005-01-06

申请号：US10488187

申请日：2002-08-29

申请人： Shigemi Murakawa ,  Minoru Matsushita ,  Shigenori Ozaki

发明人： Shigemi Murakawa ,  Minoru Matsushita ,  Shigenori Ozaki

IPC分类号： H01L23/522 ,  H01L21/314 ,  H01L21/318 ,  H01L21/3205 ,  H01L21/768 ,  H01L23/52 ,  H01L21/4763

CPC分类号： H01L21/76834 ,  H01L21/02332 ,  H01L21/0234 ,  H01L21/3105 ,  H01L21/3144 ,  H01L21/3185 ,  H01L21/76801 ,  H01L21/76807 ,  H01L21/76826 ,  H01L21/76829 ,  H01L21/76831

摘要： A hole which is to be a part of an interconnection (wiring) hole (21) is formed penetrating through a second insulating layer (13) and a third insulating layer (14) made of porous silicon oxide film, by etching. Further, a second groove (23) is formed on the third insulating layer (14) using a second stopper film (20), by etching. Further, direct nitriding of a silicon oxide film applying an RLSA plasma processing deice is carried out on the side wall of the interconnection hole (21) and the second groove (23), and a barrier layer (25) made of SiN film is formed. Here, the second stopper film (20) and the barrier layer (25) are formed by the same direct nitriding.

摘要翻译： 通过蚀刻，穿过第二绝缘层（13）和由多孔氧化硅膜制成的第三绝缘层（14），形成作为互连（布线）孔（21）的一部分的孔。 此外，通过蚀刻，使用第二阻挡膜（20）在第三绝缘层（14）上形成第二凹槽（23）。 此外，在互连孔（21）和第二槽（23）的侧壁上进行施加RLSA等离子体处理剂的氧化硅膜的直接氮化，形成由SiN膜形成的阻挡层（25） 。 这里，通过相同的直接氮化形成第二阻挡膜（20）和阻挡层（25）。

公开(公告)号：US20070097458A1

公开(公告)日：2007-05-03

申请号：US11258906

申请日：2005-10-27

申请人： Hiroyuki Harada ,  Masayuki Yamada ,  Yasuyuki Hirai ,  Minoru Matsushita

发明人： Hiroyuki Harada ,  Masayuki Yamada ,  Yasuyuki Hirai ,  Minoru Matsushita

IPC分类号： H04N1/04

CPC分类号： H04N1/00567 ,  H04N1/00588 ,  H04N1/00591 ,  H04N1/0062 ,  H04N1/00631

摘要： An original document feed tray 11 is positioned above an original document output tray 15. When an original document is set on the original document feed tray, the original document feed tray is upwardly moved from a home position by a tray drive mechanism 24 to position the uppermost original document sheet at an original document transportable position at which the original document can be transported to an original document transport mechanism 12. When the original document feed tray is lifted in accordance with the reduction of the original document on the original document feed tray after commencement of the original document transport, so as to position the uppermost original document sheet on the original document feed tray at the original document transportable position, and the entire original document on the original document feed tray has been transported, the original document feed tray is lifted to the original document tray upper withdrawal position, above the position at which the entire original document on the original document feed tray was transported.

摘要翻译： 原稿送纸托盘11位于原稿输出托盘15的上方。当​​将原始文件放置在原稿送纸盘上时，原稿供纸托盘通过托盘驱动机构24从原始位置向上移动，以将 最原始的原稿在原始文件可搬运位置，原稿可以运送到原始文件传送机构12.当原始文件进纸托盘按照原始文件进纸托盘上的原始文件的缩小被提升时， 原始文件传送开始，以将最上面的原始文件放置在原始文件进纸托盘上的原始文件传送位置，并且原稿文件传送托盘上的整个原始文档已经被传送，原稿进纸盘是 提升到原始文件托盘上部提取位置，位于上方的位置 原始文件馈送托盘上的原始文件全部被运送。

公开(公告)号：US06860849B2

公开(公告)日：2005-03-01

申请号：US09848301

申请日：2001-05-04

申请人： Minoru Matsushita ,  Kikuo Iwasaka ,  Tadashi Kasai ,  Hideo Nanba

发明人： Minoru Matsushita ,  Kikuo Iwasaka ,  Tadashi Kasai ,  Hideo Nanba

IPC分类号： A61B1/005 ,  A61L29/08 ,  A61L29/12 ,  B32B1/08 ,  B32B3/10

CPC分类号： B32B27/08 ,  A61B1/00071 ,  A61B1/005 ,  A61L29/085 ,  A61L29/12 ,  B32B1/08 ,  B32B3/10 ,  B32B3/30 ,  B32B7/02 ,  B32B27/32 ,  B32B27/36 ,  B32B27/40 ,  B32B2307/51 ,  B32B2597/00 ,  C08L75/04 ,  C08L27/12 ,  C08L25/06 ,  C08L23/00 ,  C08L67/00

摘要： A flexible tube for an endoscope has an elongated tubular core body, and an outer cover which is provided over the core body. The outer cover is composed of an inner layer, an outer layer and at least one intermediate layer. In this flexible tube, any one of the layers is different from one of the other layers in its property. Further, at least one of the layers has a thickness-varying region where the thickness of the layer varies in its longitudinal direction. In addition, the inner layer of the outer cover has projections which are integrally formed on the inner layer so that the projections project into holes and/or the recesses formed on the core body. This structure makes it possible to produce a flexible tube for an endoscope that has high durability, high flexibility and high chemical resistance as well as excellent operationability.

摘要翻译： 用于内窥镜的柔性管具有细长的管状芯体和设置在芯体上的外盖。 外盖由内层，外层和至少一层中间层构成。 在这种柔性管中，任何一个层在其性质上与其它层之一不同。 此外，层中的至少一个具有厚度变化区域，其中层的厚度在其纵向方向上变化。 此外，外盖的内层具有一体地形成在内层上的凸起，使得凸起突出到形成在芯体上的孔和/或凹部中。 该结构使得可以制造具有高耐久性，高柔韧性和高耐化学性以及优异的可操作性的用于内窥镜的柔性管。

公开(公告)号：US07605957B2

公开(公告)日：2009-10-20

申请号：US11258906

申请日：2005-10-27

申请人： Hiroyuki Harada ,  Masayuki Yamada ,  Yasuyuki Hirai ,  Minoru Matsushita

发明人： Hiroyuki Harada ,  Masayuki Yamada ,  Yasuyuki Hirai ,  Minoru Matsushita

IPC分类号： H04N1/04

CPC分类号： H04N1/00567 ,  H04N1/00588 ,  H04N1/00591 ,  H04N1/0062 ,  H04N1/00631

摘要： An original document feed tray is positioned above an original document output tray. When original documents are set on the original document feed tray, the original document feed tray is moved upwardly from a home position to a position where the uppermost original document sheet can be transported to an original document transport mechanism. When the original document feed tray is lifted in accordance with the reduction of the original documents on the original document feed tray after the original documents are transported to the original document transport mechanism, the original document feed tray is lifted to a position, above the position where all original documents on the original document feed tray were transported to the original document transport mechanism.

摘要翻译： 原始文档进纸托盘位于原稿输出托盘的上方。 当原始文件进纸托盘上放置原始文档时，原稿进纸托盘从原始位置向上移动到最上面的原始文档纸张可以运送到原始文档传送机构的位置。 当原始文件进纸托盘在原始文件传送到原始文件传送机构之后按照原稿文件传送机构上原稿的缩小被提起时，原稿进纸托盘被提升到位置上方的位置 其中原始文件进纸托盘上的所有原始文件都被运送到原始文件传输机构。

公开(公告)号：US06846286B2

公开(公告)日：2005-01-25

申请号：US10150927

申请日：2002-05-21

申请人： Naoki Suzuki ,  Kazuki Sumiyama ,  Naoshi Koizumi ,  Akira Sugiyama ,  Tetsuya Tarumoto ,  Toshiyuki Hashiyama ,  Motoko Kawamura ,  Takayuki Enomoto ,  Minoru Matsushita ,  Tetsuya Nakamura ,  Kenichi Ohara ,  Satoshi Takami

发明人： Naoki Suzuki ,  Kazuki Sumiyama ,  Naoshi Koizumi ,  Akira Sugiyama ,  Tetsuya Tarumoto ,  Toshiyuki Hashiyama ,  Motoko Kawamura ,  Takayuki Enomoto ,  Minoru Matsushita ,  Tetsuya Nakamura ,  Kenichi Ohara ,  Satoshi Takami

IPC分类号： A61B1/005 ,  A61B1/05 ,  A61B8/12

CPC分类号： A61B8/4488 ,  A61B1/00071 ,  A61B1/00098 ,  A61B1/0052 ,  A61B1/0055 ,  A61B1/05 ,  A61B5/06 ,  A61B5/064 ,  A61B8/12 ,  A61B8/4254 ,  A61B8/445 ,  A61B8/4466

摘要： An endoscope system is provided, including an endoscope having a flexible inserting tube to be inserted into a human body and a plurality of bending sensors distributed over the flexible inserting tube along the longitudinal direction thereof. Each of the bending sensors detects the local bending state of the flexible inserting tube at the location the bending sensor are provided. A computer adapted to receive data on the local bending state from each of the plurality of bending sensors is also provided. The computer generates a graphical image representing the geometrical configuration of the flexible inserting tube from the data on the local bending states. A monitor connected to the computer to display the graphical image generated by the computer.

摘要翻译： 本发明提供一种内窥镜系统，其具备内窥镜，该内窥镜具有插入人体的柔性插管和沿其长度方向分布在挠性插管上的多个弯曲传感器。 每个弯曲传感器在设置弯曲传感器的位置处检测柔性插入管的局部弯曲状态。 还提供了适于从多个弯曲传感器中的每一个接收局部弯曲状态的数据的计算机。 计算机从局部弯曲状态的数据生成表示柔性插入管的几何构型的图形图像。 连接到计算机的显示器，显示计算机生成的图形图像。

公开(公告)号：US06540669B2

公开(公告)日：2003-04-01

申请号：US09942720

申请日：2001-08-31

申请人： Masanao Abe ,  Shinji Hayakawa ,  Kikuo Iwasaka ,  Minoru Matsushita

发明人： Masanao Abe ,  Shinji Hayakawa ,  Kikuo Iwasaka ,  Minoru Matsushita

IPC分类号： A61B100

CPC分类号： G02B23/2476 ,  A61B1/0055

摘要： An flexible tube for an endoscope having excellent resilience and durability is disclosed. The flexible tube is composed of a tubular core boy obtained by covering the outer periphery of a coil with a reticular tube of a braided thin wires and an outer cover formed of a synthetic resin and provided over the outer periphery of the tubular core boy. At least one of the thin wires has a coating layer and the flexible outer cover has a portion which is in contact with the coating layer of the thin wire of the reticular tube, in which the coating layer is formed of a material containing the material of the portion of the outer cover, and the material of the coating layer has a higher melting point than that of the material of the portion of the outer cover. The outer cover may be formed into a multi-layered structure including an inner layer, an intermediate layer and an outer layer.

公开(公告)号：US06520214B1

公开(公告)日：2003-02-18

申请号：US09547674

申请日：2000-04-12

申请人： Akira Sugiyama ,  Tadashi Kasai ,  Masanao Abe ,  Minoru Matsushita ,  Hideo Nanba ,  Shinji Hayakawa ,  Kikuo Iwasaka ,  Naoya Ouchi ,  Kenichi Ohara ,  Tomoko Iwasaki

发明人： Akira Sugiyama ,  Tadashi Kasai ,  Masanao Abe ,  Minoru Matsushita ,  Hideo Nanba ,  Shinji Hayakawa ,  Kikuo Iwasaka ,  Naoya Ouchi ,  Kenichi Ohara ,  Tomoko Iwasaki

IPC分类号： F16L1100

CPC分类号： B32B15/14 ,  A61B1/00071 ,  A61B1/0011 ,  A61B1/00142 ,  A61B1/005 ,  B29C37/0082 ,  B29D23/001 ,  B29L2023/007 ,  B29L2023/22 ,  B29L2031/7542 ,  B32B1/08 ,  B32B15/18 ,  B32B15/20 ,  B32B27/12 ,  B32B27/40 ,  B32B2262/103 ,  B32B2311/12 ,  B32B2311/30 ,  B32B2375/00 ,  B32B2535/00 ,  B32B2597/00 ,  D04C1/06 ,  F16L11/088 ,  Y10S600/92

摘要： A flexible tube for an endoscope is provided with a spirally-wound tube, a braided tube covering the spirally-wound tube, and a sheath provided on the braided tube. The sheath material is fused and coated on the braided tube to form the sheath. When the sheath material is fused and applied on the braided tube, the sheath material passes through interstices of the braided tube, at the positions facing the clearances between windings, to form a plurality of protruded portions which protruded inward with respect to the braided tube.

摘要翻译： 用于内窥镜的柔性管设置有螺旋卷绕管，覆盖螺旋卷绕管的编织管和设置在编织管上的护套。 将护套材料熔合并涂覆在编织管上以形成护套。 当护套材料熔合并施加在编织管上时，护套材料穿过编织管的间隙，在面对绕组间隙的位置处形成相对于编织管向内突出的多个突出部分。

公开(公告)号：US06458075B1

公开(公告)日：2002-10-01

申请号：US09559411

申请日：2000-04-26

申请人： Akira Sugiyama ,  Kikuo Iwasaka ,  Masanao Abe ,  Minoru Matsushita

发明人： Akira Sugiyama ,  Kikuo Iwasaka ,  Masanao Abe ,  Minoru Matsushita

IPC分类号： A61B100

CPC分类号： B32B15/14 ,  A61B1/00071 ,  A61B1/0011 ,  A61B1/005 ,  B29C47/0026 ,  B29C47/021 ,  B32B1/08 ,  B32B5/028 ,  B32B15/18 ,  B32B15/20 ,  B32B27/08 ,  B32B27/12 ,  B32B2262/103 ,  B32B2311/12 ,  B32B2311/30 ,  B32B2535/00 ,  B32B2597/00 ,  F16L11/088 ,  G02B23/2476

摘要： An endoscopic flexible tube that allows for easy fabrication of a jacket of a multi-layered structure that is adequately protected against separation of overlying layers. Two adjacent layers in the multi-layered structure portion of the jacket are integrally combined via an area that comprises a mixture of the constituent materials of the two layers.

摘要翻译： 内窥镜柔性管，其允许容易地制造多层结构的护套，其被充分保护以防止上覆层的分离。 外壳的多层结构部分中的两个相邻层通过包含两层构成材料的混合物的区域整体地组合。