Sample measuring device
    5.
    发明申请
    Sample measuring device 有权
    样品测量装置

    公开(公告)号:US20070023655A1

    公开(公告)日:2007-02-01

    申请号:US11477085

    申请日:2006-06-28

    IPC分类号: G21K7/00

    摘要: An object of this invention is to make it easy to adjust a position of the energy beam to irradiate and a position of a focal point of a light collecting mirror part, and to prevent displacement of the light collecting part due to vibration with a simple arrangement. A sample measuring device in accordance with this invention is to measure light generated from a sample W by irradiating electron beams EB on the sample W, and comprises a electron optical column part 23 that converges the electron beams EB, and a light collecting mirror part 31 that is arranged between the electron optical column part 23 and the sample W and that has an energy beam path 312 to pass the electron beams EB converged by the electron optical column part 23 and to irradiate the electron beams EB on the sample W and a mirror face 311 whose focal point F is set on an axis of the energy beam path 312 and that collects the light L generated from the sample W by means of the mirror face 311, wherein the light collecting mirror part 31 is supported by the electron optical column part 23 so that the axis of the electron beams EB coincides with the focal point F.

    摘要翻译: 本发明的目的是使得能够容易地调节照射的能量束的位置和聚光镜部的焦点的位置,并且以简单的布置来防止由于振动引起的聚光部的位移 。 根据本发明的样品测量装置是通过在样品W上照射电子束EB来测量由样品W产生的光,并且包括会聚电子束EB的电子光学柱部分23和聚光反射镜部分31 其布置在电子光学柱部分23和样品W之间,并且具有能量束路径312以使由电子光学柱部分23会聚的电子束EB照射到样品W上的电子束EB和反射镜 其焦点F设置在能量束路径312的轴上并且通过镜面311收集从样本W产生的光L的面311,其中聚光镜部31由电子光学柱支撑 部分23,使得电子束EB的轴线与焦点F一致。

    ATM network time management method

    公开(公告)号:US06438103B1

    公开(公告)日:2002-08-20

    申请号:US08912792

    申请日:1997-08-18

    IPC分类号: H04L1226

    摘要: In an ATM network time management method, a shaping operation is performed to equalize cell flows by generating the arrival time of an ATM cell on the basis of the arrival intervals of input ATM cells, and adding an optimum delay to the arrival time, thereby obtaining an ideal transmission time to. A flag is prepared to indicate whether the value of a timer counter for generating the arrival time of an ATM cell on the basis of the arrival time intervals of input ATM cells has exceeded a maximum timer cycle value. The shaping operation is performed by managing the arrival time of the ATM cell with reference to a relative time in accordance with the state of the flag.

    Sample measuring device
    7.
    发明授权
    Sample measuring device 有权
    样品测量装置

    公开(公告)号:US07589322B2

    公开(公告)日:2009-09-15

    申请号:US11477085

    申请日:2006-06-28

    IPC分类号: G01N23/00

    摘要: An object of this invention is to make it easy to adjust a position of the energy beam to irradiate and a position of a focal point of a light collecting mirror part, and to prevent displacement of the light collecting part due to vibration with a simple arrangement. A sample measuring device in accordance with this invention is to measure light generated from a sample W by irradiating electron beams EB on the sample W, and comprises a electron optical column part 23 that converges the electron beams EB, and a light collecting mirror part 31 that is arranged between the electron optical column part 23 and the sample W and that has an energy beam path 312 to pass the electron beams EB converged by the electron optical column part 23 and to irradiate the electron beams EB on the sample W and a mirror face 311 whose focal point F is set on an axis of the energy beam path 312 and that collects the light L generated from the sample W by means of the mirror face 311, wherein the light collecting mirror part 31 is supported by the electron optical column part 23 so that the axis of the electron beams EB coincides with the focal point F.

    摘要翻译: 本发明的目的是使得能够容易地调节照射的能量束的位置和聚光镜部的焦点的位置,并且以简单的布置来防止由于振动引起的聚光部的位移 。 根据本发明的样品测量装置是通过在样品W上照射电子束EB来测量由样品W产生的光,并且包括会聚电子束EB的电子光学柱部分23和聚光反射镜部分31 其布置在电子光学柱部分23和样品W之间,并且具有能量束路径312以使由电子光学柱部分23会聚的电子束EB照射到样品W上的电子束EB和反射镜 其焦点F设置在能量束路径312的轴上并且通过镜面311收集从样本W产生的光L的面311,其中聚光镜部31由电子光学柱支撑 部分23,使得电子束EB的轴线与焦点F一致。

    Method and apparatus for shaping processing in which discard of ATM cell
effectively performed
    8.
    发明授权
    Method and apparatus for shaping processing in which discard of ATM cell effectively performed 失效
    用于整形处理的方法和装置,其中有效地执行ATM信元的丢弃

    公开(公告)号:US5999515A

    公开(公告)日:1999-12-07

    申请号:US965607

    申请日:1997-11-06

    申请人: Satoshi Ohashi

    发明人: Satoshi Ohashi

    摘要: In a shaping processing apparatus which receives ATM cells as reception ATM cells which contains normal ATM cells and tagging ATM cells, a scheduling unit calculates a transmission time of the reception ATM cell based on a transmission time of a previous ATM cell belonging to a same connection as the reception ATM cell and transmitted immediately before the reception ATM cell and a predetermined time interval. A cell identifying unit identifies a connection number and cell priority of the reception ATM cell. The normal ATM cell has a higher cell priority than the tagging ATM cell. A mapping unit maps the reception ATM cell into a managing table based on the transmission time of the reception ATM cell to store the connection number and cell priority of the reception ATM cell in a storage area of the managing table. The managing table is associated with transmission times. The mapping unit outputs an address corresponding to the storage area as the write address to a shaping processing buffer such that the reception ATM cell is stored in the shaping processing buffer.

    摘要翻译: 在接收ATM信元作为包含正常ATM信元和标记ATM信元的接收ATM信元的整形处理装置中,调度单元基于属于同一连接的先前ATM信元的发送时间来计算接收ATM信元的发送时间 作为接收ATM信元,并且在接收ATM信元之前发送和预定的时间间隔。 小区识别单元识别接收ATM信元的连接数和小区优先级。 普通ATM信元具有比标记ATM信元更高的信元优先级。 映射单元基于接收ATM信元的发送时间将接收ATM信元映射到管理表中,以将接收ATM信元的连接数和小区优先级存储在管理表的存储区域中。 管理表与传输时间相关联。 映射单元将与存储区域对应的地址作为写入地址输出到整形处理缓冲器,使得接收ATM信元存储在整形处理缓冲器中。

    Electrostatic lens for charged particle radiation
    9.
    发明授权
    Electrostatic lens for charged particle radiation 有权
    用于带电粒子辐射的静电透镜

    公开(公告)号:US08669534B2

    公开(公告)日:2014-03-11

    申请号:US12934966

    申请日:2009-03-23

    IPC分类号: H01J37/12

    摘要: Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident side of charged particles form a first electric field area, wherein orbit radii of the charged particles are reduced without exceeding, on the way, the initial orbit radii that are orbit radii at the incident time, and a second electric field area, wherein force in the direction advancing in parallel with a central axis is applied to the charged particles that have passed through the first electric field area. A plurality of electrodes arranged on the projection side form a third electric field area, wherein the orbit radii of the charged particles do not exceed the initial orbit radii on the way and are curved to intersect with a central axis at angles larger than orbit angles defined with respect to the central axis of when the charged particles are projected from the second electric field area.

    摘要翻译: 提供一种用于带电粒子辐射的静电透镜,其具有与磁性透镜相当的透镜性能。 布置在带电粒子的入射侧的多个电极形成第一电场区域,其中带电粒子的轨道半径减小而不超过在入射时为轨道半径的初始轨道半径, 第二电场区域,其中在与中心轴平行的方向上的力施加到已经通过第一电场区域的带电粒子。 布置在投影侧的多个电极形成第三电场区域,其中带电粒子的轨道半径在途中不超过初始轨道半径,并且弯曲成与中心轴相交,角度大于所定义的轨道角度 相对于带电粒子从第二电场区域突出时的中心轴线。

    ELECTROSTATIC LENS FOR CHARGED PARTICLE RADIATION
    10.
    发明申请
    ELECTROSTATIC LENS FOR CHARGED PARTICLE RADIATION 有权
    用于充电颗粒辐射的静电镜

    公开(公告)号:US20130009070A1

    公开(公告)日:2013-01-10

    申请号:US12934966

    申请日:2009-03-23

    IPC分类号: H01J3/18

    摘要: Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident side of charged particles form a first electric field area, wherein orbit radii of the charged particles are reduced without exceeding, on the way, the initial orbit radii that are orbit radii at the incident time, and a second electric field area, wherein force in the direction advancing in parallel with a central axis is applied to the charged particles that have passed through the first electric field area. A plurality of electrodes arranged on the projection side form a third electric field area, wherein the orbit radii of the charged particles do not exceed the initial orbit radii on the way and are curved to intersect with a central axis at angles larger than orbit angles defined with respect to the central axis of when the charged particles are projected from the second electric field area.

    摘要翻译: 提供一种用于带电粒子辐射的静电透镜,其具有与磁性透镜相当的透镜性能。 布置在带电粒子的入射侧的多个电极形成第一电场区域,其中带电粒子的轨道半径减小而不超过在入射时为轨道半径的初始轨道半径, 第二电场区域,其中在与中心轴平行的方向上的力施加到已经通过第一电场区域的带电粒子。 布置在投影侧的多个电极形成第三电场区域,其中带电粒子的轨道半径在途中不超过初始轨道半径,并且弯曲成与中心轴相交,角度大于所定义的轨道角度 相对于带电粒子从第二电场区域突出时的中心轴线。