摘要:
A slurry composition for a chemical mechanical processing process includes about 0.05 to about 0.3 percent by weight of a ceria abrasive, about 0.005 to about 0.04 percent by weight of an anionic surfactant, about 0.0005 to about 0.003 percent by weight of a polyoxyethylene-based nonionic surfactant, about 0.2 to about 1.0 percent by weight of a salt of polyacrylic acid having an average molecular weight substantially greater than a molecular weight of the anionic surfactant, and a remainder of water. In addition, a method of polishing an object layer and a method of manufacturing a semiconductor device using the slurry composition are also provided.
摘要:
A slurry composition for a chemical mechanical processing process includes about 0.05 to about 0.3 percent by weight of a ceria abrasive, about 0.005 to about 0.04 percent by weight of an anionic surfactant, about 0.0005 to about 0.003 percent by weight of a polyoxyethylene-based nonionic surfactant, about 0.2 to about 1.0 percent by weight of a salt of polyacrylic acid having an average molecular weight substantially greater than a molecular weight of the anionic surfactant, and a remainder of water. In addition, a method of polishing an object layer and a method of manufacturing a semiconductor device using the slurry composition are also provided.
摘要:
In a slurry composition for chemical mechanical polishing, a method of preparing the slurry composition and a method of polishing an object using the slurry composition, the slurry composition includes a cerium oxide abrasive particle having a rare earth element other than cerium as a dopant, and an aqueous medium for dispersing the cerium oxide abrasive particle. The cerium oxide abrasive particle doped with the rare earth element may have an enhanced fracture strength as being compared with a pure cerium oxide abrasive particle, and also may reduce an amount of large or agglomerated particles and generation of a scratch on a polished surface of an object.
摘要:
A multi-bit flip-flop includes a plurality of multi-bit flip-flop blocks that share a clock signal. Each of the multi-bit flip-flop blocks includes a single inverter and a plurality of flip-flops. The single inverter generates an inverted clock signal by inverting the clock signal. Each of the flip-flops includes a master latch part and a slave latch part and operates the master latch part and the slave latch part based on the clock signal and the inverted clock signal. Here, the flip-flops are triggered at rising edges of the clock signal. Thus, the multi-bit flip-flop operating as a master-slave flip-flop may minimize (or, reduce) power consumption occurring in a clock path through which the clock signal is transmitted.
摘要:
The present invention relates to granules of a brittle material for room-temperature granule spray in vacuum, and to a method for forming a coating film using same. Particularly, particles having a size of 0.1 to 6 μm are granulated and a coating film may be formed through room-temperature granule spray in vacuum using the granules. The granules of the brittle material according to exemplary embodiments may be used through the vacuum granule injection at room temperature and a coating process may be continuously performed. Since the granules injected through a nozzle have a relatively large mass and thus have a large amount of kinetic energy, the coating film may be formed at a low gas-flow rate, and the forming rate of the coating film may be increased. Therefore, the granules may be useful for forming a ceramic coating film.
摘要:
A cradling apparatus for a portable communication device which sets a cradling angle and provides a sense of click engagement to cradle a housing at a plurality of angles. The cradling apparatus includes a first housing, a second housing cradled at a slant angle while facing the first housing, and a cradling portion provided between the first housing and the second housing such that the cradling portion sets a cradling angle to cradle the second housing at a selected one of a plurality of cradling angles with respect to the first housing and further provides a sense of click engagement.
摘要:
A portable game and digital communication device. The communication device comprises first and second side housings, which include a plurality of keys for video gaming controls. Additionally, the first and second side housings are rotatable about a central axis of the device, such the each of first and second side housings becomes a handle for the device.
摘要:
The present invention relates to an identification mark portion and fabricating method thereof, more particularly, to an identification mark portion introduced in a liquid crystal display panel and a fabricating method thereof, which minimizes the error in verifying an ID of a pad by preventing at least two insulating layers from overlapping each other over the upper part of the pad. The present invention includes an insulating substrate, an ID mark pad including an ID mark on the insulating substrate, and a first insulating layer and a second insulating layer on the insulating substrate wherein the first and second insulating layers expose the ID mark in the ID mark pad. In another aspect, the present invention includes the steps of forming an ID mark pad including an ID mark on an insulating substrate, and forming a first and a second insulating layer which expose the ID mark in the ID mark pad.
摘要:
A fabricating method of an array substrate for a liquid crystal display device includes forming a gate line on a substrate; forming an ohmic contact layer on the substrate; forming a data line and source and drain electrodes on the ohmic contact layer, the source electrode being connected to the data line, the source and drain electrodes facing and spaced apart from each other; forming a passivation layer having a contact hole on the data line and the source and drain electrodes, the contact hole exposing a portion of a side surface of the drain electrode; and forming a pixel electrode on the passivation layer, the pixel electrode being connected to the drain electrode through the contact hole.
摘要:
An array substrate for a liquid crystal display device includes a substrate; gate and data lines perpendicular to each other on the substrate; a thin film transistor connected to the gate and data lines, the thin film transistor having a semiconductor layer, and source and drain electrodes facing and spaced apart from each other; a passivation layer over the gate and data lines and the thin film transistor, the passivation layer having a contact hole exposing a portion of top and side surfaces of the drain electrode; and a pixel electrode on the passivation layer, the pixel electrode connected to the drain electrode through the contact hole.