摘要:
A process for producing fine phosphor particles having a high crystallinity, having a small amount of aggregated particles and comprising fine particles, thus capable of forming a homogeneous and dense high brightness fluorescent layer when applied to e.g. a cathode ray tube, a fluorescent lamp or PDP, and having a high purity, a uniform chemical composition and excellent emission properties, at a low cost, is provided. A process for producing a phosphor, which comprises heating droplets of a solution containing metal elements constituting the phosphor to carry out pyrolysis to obtain the phosphor, wherein the above heating is carried out in the coexistence of an additive comprising a metal or a metal compound to carry out the pyrolysis at an average crystal growth rate of at least 0.002 &mgr;m3/sec.
摘要:
A novel method for producing a structure having cavities is disclosed. The method comprises a first step of coating a colloidal dispersion liquid on a substrate and then drying to thereby form a layer of colloidal beads on said substrate; a second step of forming a film comprising a metal and/or metal compound on surfaces of said colloidal beads placed on said substrate; and a third step of removing said colloidal beads thereby to form cavities in place of said colloidal beads.
摘要:
A method an apparatus for chemical vapor deposition for producing a thin film. The method includes the steps of: introducing a reactive gas into a reaction chamber wherein a substrate is supported in the reaction chamber; combining charged particles with a component of the reactive gas for ionizing the component; and electrostatically depositing the ionized component onto the substrate in an electric field. Charged particles may be photoelectrons or positive or negative ions produced by discharge. The reactive gas may be solely an ingredient gas containing a component for a thin film or a mixture of the ingredient gas and an oxidizing or reducing gas. The apparatus includes a reaction chamber including a support for a substrate, a device for introducing a reactive gas into the reaction chamber, an electric discharge device, and a device for forming an electric field in the reaction chamber in a direction to the support for the substrate, and an outlet for discharging the reactive gas.
摘要:
A method and an apparatus for removing particles from a surface of an article, such as a semiconductor wafer in a clean room. The particles are supplied with an electric charge. Subsequently, an ultrasonic wave or a gas stream is applied onto the surface of the article while an electric field is applied for driving away the electrically charged particles from the surface, thereby removing particles having a dimension smaller than 1 micrometer from the surface. The presence of a collecting member allows the removal of resulting, floating particles.
摘要:
The present invention provides an Al—C—O based phosphor using neither heavy metal nor rare metal and composed of elements with high environmental compatibility and excellent economic efficiency, wherein the wavelength of the peak intensity of the emission spectrum can be changed without changing the basic composition. An aluminum oxide phosphor which comprises aluminum (Al), carbon (C), and oxygen (O) respectively in an amount of 30 mol %
摘要:
The present invention provides an Al—C—O based phosphor using neither heavy metal nor rare metal and composed of elements with high environmental compatibility and excellent economic efficiency, wherein the wavelength of the peak intensity of the emission spectrum can be changed without changing the basic composition. An aluminum oxide phosphor which comprises aluminum (Al), carbon (C), and oxygen (O) respectively in an amount of 30 mol %
摘要:
A substrate transfer mechanism for transferring a substrate includes a mounting table on which the substrate is mounted; an arm member connected to the mounting table and moving it. The substrate transfer mechanism further includes a temperature control unit for controlling temperature of the mounting table, wherein the temperature control unit forms a temperature gradient in the mounting table. The temperature control unit includes a detector for detecting temperature in an environment or a chamber in which the substrate transfer mechanism is installed a heater for heating the mounting table and a controller for controlling an operation of the heater based on the temperature in the environment or the chamber detected by the detector.
摘要:
Distributed non-charged particles having a desired particle diameter are introduced into a chamber. A photoionizer in which a soft X-ray power is adjustable is attached to the chamber, to charge the particles within the chamber. The power level of the soft X-ray is adjusted by a controller so as to produce singly charged particles. The charged particles are then introduced into a differential mobility analyzer for classification, thus producing monodisperse standard particles having particle diameter of 0.1 to 1.0 μm.
摘要:
An M-C—N—O based phosphor including a group IIIB element (M), carbon (C), nitrogen (O), wherein an amount of the group IIIB element (M) contained is 1%
摘要:
A titanium dioxide dispersion liquid in which the transmittance is 80% or more is manufactured by dispersing titanium dioxide fine particles having an average primary particle diameter of 1 nm or more and 30 nm or lower in a solution containing diglyme which is a solvent and trimethoxypropylsilane which is a dispersant. By doping titanium dioxide fine particles with nitrogen atoms, and then dispersing the same by an atomization device using beads having an average particle diameter of 15 μm or more and 30 μm or lower, a titanium dioxide dispersion liquid capable of maintaining transparency stability over a long period of time is manufactured.