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    Apparatus for interferometrically measuring the physical properties of test object
    1.
    发明授权
    Apparatus for interferometrically measuring the physical properties of test object 失效
    用于干涉测量被测物体的物理性质的装置

    公开(公告)号：US4072422A

    公开(公告)日：1978-02-07

    申请号：US734245

    申请日：1976-10-20

    申请人： Nobuyoshi Tanaka ,  Mitsuo Takeda ,  Kazuya Matsumoto

    发明人： Nobuyoshi Tanaka ,  Mitsuo Takeda ,  Kazuya Matsumoto

    IPC分类号： G01B9/02

    CPC分类号： G01B9/02007 ,  G01B11/0675 ,  G01B9/02065

    摘要： This disclosure describes an apparatus for interferometrically measuring the physical properties of test object in which a test object having at least two surfaces and a substantial thickness is illuminated by a source of broadband light beam, each of plural wave fronts then formed and having an optical path difference therebetween is split by the transmission of the light beam or by the reflection of the light beam thereby, the split wave fronts are superposed each other respectively to form broadband light interference fringes and the physical properties such as thickness and refractive index of the test object are measured from the broadband light interference fringes, and which is especially provided with means for forming broadband light interference fringe by superposing the split wave fronts tilted to each other, while forming an image of said test object in the position where said interference fringe is formed.

    摘要翻译： 本公开描述了用于对测试对象的物理性质进行干涉测量的装置，其中具有至少两个表面和实质厚度的测试对象被宽带光束源照亮，然后形成多个波前面，并具有光路 它们之间的差异是通过光束的透射或者由于光束的反射而被分开的，所以分开的波前面分别叠加以形成宽带光干涉条纹，并且测试对象的物理特性如厚度和折射率 是从宽带光干涉条纹测量的，并且其特别地设置有用于通过叠加彼此倾斜的分波前沿形成宽带光干涉条纹的装置，同时在形成所述干涉条纹的位置形成所述测试对象的图像 。

    Interferometric optical phase discrimination apparatus
    2.
    发明授权
    Interferometric optical phase discrimination apparatus 失效
    干涉光学相位鉴别装置

    公开(公告)号：US4105335A

    公开(公告)日：1978-08-08

    申请号：US813298

    申请日：1977-07-06

    申请人： Nobuyoshi Tanaka ,  Naoki Ayata ,  Mitsuo Takeda ,  Susumu Matsumura ,  Kazuya Matsumoto

    发明人： Nobuyoshi Tanaka ,  Naoki Ayata ,  Mitsuo Takeda ,  Susumu Matsumura ,  Kazuya Matsumoto

    IPC分类号： G01B9/02 ,  G01B11/06 ,  G02B21/06

    CPC分类号： G01B9/0209 ,  G01B11/06 ,  G01B11/0675

    摘要： Film of a known refractive index whose thickness is to be measured is illuminated by a white light beam. Two wave fronts from both sides of the film are directed to an interferometer. The wave fronts are out of phase in accordance with the thickness of the film. The two wave fronts are amplitude-split, respectively, by the beam splitter of the interferometer. Two of the split wave fronts are tilted by tilting means in the interferometer. The other two split wave fronts, as well as the two tilted wave fronts, are directed to an interference surface. Thus, there is formed a white interference pattern on the interference surface. The white interference pattern has a middle peak and two side peaks. The space interval between these peaks is measured by a scanner. By knowing the peak-to-peak interval, it is possible to discriminate the space interval between both sides of the film.

    摘要翻译： 其厚度被测量的已知折射率的膜被白光束照射。 电影两侧的两个波前被引导到干涉仪。 根据薄膜的厚度，波前是相位相异的。 两个波前分别由干涉仪的分束器进行振幅分割。 两个分波锋面通过倾斜装置在干涉仪中倾斜。 另外两个分裂波阵面以及两个倾斜的波前方向被引导到干涉面。 因此，在干涉面上形成白色干涉图案。 白色干涉图案具有中间峰和两个边峰。 这些峰之间的间隔由扫描仪测量。 通过知道峰到峰间隔，可以区分膜的两侧之间的间隔。

    Method and Apparatus for Measuring Small Displacement
    3.
    发明申请
    Method and Apparatus for Measuring Small Displacement 失效
    测量小位移的方法和装置

    公开(公告)号：US20070219745A1

    公开(公告)日：2007-09-20

    申请号：US11587142

    申请日：2005-04-22

    申请人： Mitsuo Takeda ,  Wei Wang ,  Nobuo Ishii ,  Yoko Miyamoto

    发明人： Mitsuo Takeda ,  Wei Wang ,  Nobuo Ishii ,  Yoko Miyamoto

    IPC分类号： G01B11/25

    CPC分类号： G01B11/002 ,  G01B11/024 ,  G01B11/24 ,  G06T7/001 ,  G06T7/262 ,  G06T7/529 ,  G06T7/579 ,  G06T2207/30136 ,  G06T2207/30164

    摘要： Without using an interferometer, small displacement and/or three-dimensional shape of an object is detected in a noncontact way with high accuracy using pseudo-phase information calculated from e.g., a speckle pattern having a spatially random structure. A speckle image of the test object of the before displacement is obtained, and a spatial frequency spectrum is calculated by executing an N-dimensional Fourier transform for this. The complex analytic signal is obtained by setting the amplitude of frequency spectrum in the half plane including zero frequency in this amplitude distribution to zero, and executing the frequency spectrum amplitude in the half plane of the remainder in the inverse Fourier transform. And then, the amplitude value of this complex analytic signal is replaced with the constant value, a part of the obtained analytic signal domain is clipped, the phase information is calculated by the phase-only correlation function, and the cross-correlation peak in N-dimension is obtained. The displacement magnitude can be obtained by executing the above-mentioned method to the after displacement of the test object, and obtaining the difference of the cross-correlation peak before and after the displacement.

    摘要翻译： 在不使用干涉仪的情况下，使用从例如具有空间随机结构的散斑图案计算的伪相位信息，以非接触方式以非接触方式检测物体的小位移和/或三维形状。 获得前一位移测试对象的斑点图像，并通过执行N维傅立叶变换来计算空间频谱。 通过将该幅度分布中包括零频率的半平面中的频谱的幅度设置为零，并且在逆傅立叶变换中执行余数的半平面中的频谱幅度，获得复数分析信号。 然后，将该复数分析信号的振幅值代入常数值，得到的分析信号域的一部分被剪切，相位信息由相位相关函数计算，N相互相关峰值 - 获得维度。 可以通过对被检体的移位后的上述方法进行位移大小，得到位移前后的互相关峰的差。

    Metal oxide particle and its uses
    4.
    发明申请
    Metal oxide particle and its uses 审中-公开
    金属氧化物颗粒及其用途

    公开(公告)号：US20070154561A1

    公开(公告)日：2007-07-05

    申请号：US10588526

    申请日：2005-02-17

    申请人： Mitsuo Takeda ,  Ryuji Aizawa ,  Yumiko Mori ,  Tomoyuki Kuwamoto

    发明人： Mitsuo Takeda ,  Ryuji Aizawa ,  Yumiko Mori ,  Tomoyuki Kuwamoto

    IPC分类号： A61K9/14 ,  A01N25/00

    CPC分类号： A61K8/19 ,  A61K8/25 ,  A61K8/26 ,  A61K8/27 ,  A61K8/29 ,  A61Q17/04 ,  B82Y30/00 ,  C01F17/0043 ,  C01G9/02 ,  C01G15/00 ,  C01G23/053 ,  C01P2002/52 ,  C01P2002/84 ,  C01P2004/64 ,  C01P2006/60 ,  C01P2006/66

    摘要： An object of the present invention is to provide a metal oxide particle which exercises more excellent ultraviolet absorbency as a matter of course and combines therewith merits of, for example, either being shifted in ultraviolet absorption edge toward the longer wavelength side and being excellent also in the absorption efficiency of a long-wavelength range of ultraviolet rays, or having good transparency and, for example, even in cases where added into or coated onto substrates, not damaging the transparency or hue of the substrates. As a means of achieving this object, a metal oxide particle according to the present invention is a metal oxide particle such that a hetero-element is contained in a particle comprising an oxide of a specific metal element (M), wherein the metal oxide particle is: 1) a metal oxide particle in the form of a fine particle wherein the hetero-element is at least one specific metal element (M′); 2) a metal oxide particle wherein the hetero-element includes at least two specific metal elements (M′); 3) a metal oxide particle wherein: the hetero-element is a more specified metal element (M′) and at least a part thereof is 2 in valence; or the metal element (M) is a more specified metal element and the metal oxide particle is in a specific range in crystal grain diameter in the vertical direction to each of the (002) plane and the (100) plane; or 4) a metal oxide particle wherein: the hetero-element is at least one specific nonmetal element and an acyl group is contained in the particle; or the hetero-element includes at least two specific nonmetal elements; or the hetero-element is at least one specific nonmetal element and a component derived from a metal element (M′) other than the metal element (M) is contained in the particle.

    摘要翻译： 本发明的目的在于提供一种金属氧化物粒子，其当然也可以进行更优异的紫外线吸收性的组合，其特征在于，例如在紫外线吸收边缘向长波长侧偏移， 紫外线的长波长范围的吸收效率，或具有良好透明性的吸收效率，例如甚至在添加到基材上或涂布在基材上的情况下，也不损害基板的透明度或色调。 作为实现该目的的手段，根据本发明的金属氧化物粒子是金属氧化物粒子，使得在包含特定金属元素（M）的氧化物的粒子中含有异质元素，其中金属氧化物粒子 是：1）微细颗粒形式的金属氧化物颗粒，其中异质元素是至少一种特定金属元素（M'）; 2）金属氧化物颗粒，其中异质元素包括至少两种特定金属元素（M'）; 3）一种金属氧化物颗粒，其中：所述异质元素是更加规定的金属元素（M'），并且其至少一部分的价态为2; 或金属元素（M）是更加规定的金属元素，并且金属氧化物粒子在与（002）面和（100）面中的每一个的垂直方向上的晶粒直径的特定范围内; 或4）金属氧化物颗粒，其中：所述异质元素是至少一种特定的非金属元素，并且所述颗粒中包含酰基; 或者异质元素包括至少两种特定的非金属元素; 或异质元素是至少一种特定的非金属元素，并且衍生自金属元素（M'）以外的金属元素（M'）的成分被包含在颗粒中。

    Three-dimensional shape measuring method
    6.
    发明授权
    Three-dimensional shape measuring method 失效
    三维形状测量方法

    公开(公告)号：US06750975B2

    公开(公告)日：2004-06-15

    申请号：US09995128

    申请日：2001-11-27

    申请人： Mitsuo Takeda ,  Teruaki Yogo ,  Hideyuki Tanaka ,  Ruowei Gu

    发明人： Mitsuo Takeda ,  Teruaki Yogo ,  Hideyuki Tanaka ,  Ruowei Gu

    IPC分类号： G01B1124

    CPC分类号： G01B11/2509 ,  G06T7/521

    摘要： A three-dimensional shape measuring method by which measurement of a three-dimensional shape is realized with an improved precision. Grid patterns comprising a plurality of one-dimensional grids 1, 2 and 3, each having a period and direction different from those of the others, are simultaneously projected upon objects to be measured, using different colors for each of the one-dimensional grids 1, 2 and 3. Subsequently, a grid image deformed in accordance with the three-dimensional shapes of the objects to be measured is imaged, the grid image is separated by colors into one-dimensional grid components of each color, a phase for each of the one-dimensional grid components is detected, and then, measurement values of the three-dimensional shapes are obtained on the basis of the detected phases. At the same time, by imaging the objects to be measured by use of white light, color information on the objects to be measured are measured as well.

    摘要翻译： 通过精度实现三维形状的测量的三维形状测量方法。 包含多个一维网格1,2和3的网格图案，每个网格图案具有与其它图形不同的周期和方向，同时投射到待测量的对象上，对于每个一维网格1使用不同的颜色 随后，对要被测量物体的三维形状变形的网格图像进行成像，将网格图像由颜色分隔成每种颜色的一维网格分量，每个颜色的相位 检测一维网格分量，然后基于检测到的相位获得三维形状的测量值。 同时，通过使用白光成像待测量的物体，也测量待测物体上的颜色信息。

    Displacement Detection Method, Displacement Detection Device, Displacement Detection Program, Phase Singularity Matching Method and Phase Singularity Matching Program
    9.
    发明申请
    Displacement Detection Method, Displacement Detection Device, Displacement Detection Program, Phase Singularity Matching Method and Phase Singularity Matching Program 有权
    位移检测方法，位移检测装置，位移检测程序，相位奇异性匹配方法和相位奇异性匹配程序

    公开(公告)号：US20090037137A1

    公开(公告)日：2009-02-05

    申请号：US12162370

    申请日：2007-01-24

    申请人： Mitsuo Takeda ,  Wei Wang ,  Tomoaki Yokozeki ,  Reika Ishijima ,  Yu Qiao

    发明人： Mitsuo Takeda ,  Wei Wang ,  Tomoaki Yokozeki ,  Reika Ishijima ,  Yu Qiao

    IPC分类号： G01B11/00

    CPC分类号： G01B11/002

    摘要： The present invention relates to a displacement detection method for detecting a displacement from phase singularities before and after the displacement, a displacement detection device, a displacement detection program, a feature point matching method and a feature point matching program. The displacement detection method for detecting the displacement from the phase singularities before and after the displacement acquires predetermined specifies the phase singularities based on predetermined elements by acquiring the elements from a phase structure of the phase singularities, and detects positions of the phase singularities. Hence, it is possible to reliably specify the phase singularities before and after the displacement, and easily and reliably detect the displacement. Various displacements, including rotary displacement, are detectable.

    摘要翻译： 本发明涉及一种用于检测位移前后相位奇异性位移的位移检测方法，位移检测装置，位移检测程序，特征点匹配方法和特征点匹配程序。 用于从位移之前和之后的相位奇点检测位移的位移检测方法预先通过从相位奇异点的相位结构获取元素，基于预定元素来指定相位奇点，并检测相位奇点的位置。 因此，可以可靠地指定位移前后的相位奇异性，容易且可靠地检测位移。 可以检测各种位移，包括旋转位移。