摘要:
A nonvolatile memory device includes source and drain regions formed in a semiconductor substrate, and an insulating film formed on a channel region between the source region and the drain region in the semiconductor substrate. The nonvolatile memory device also includes a dielectric film formed above the channel region to store electric charge, and a control gate formed on the dielectric film. Compressive stress in the channel region is equal to or less than 50 MPa.
摘要:
A nonvolatile memory device includes source and drain regions formed in a semiconductor substrate, and an insulating film formed on a channel region between the source region and the drain region in the semiconductor substrate. The nonvolatile memory device also includes a dielectric film formed above the channel region to store electric charge, and a control gate formed on the dielectric film. Compressive stress in the channel region is equal to or less than 50 MPa.
摘要:
A memory cell array includes a plurality of memory cells each of which has a control gate and a floating gate. A programming circuit operates in a first programming mode followed by a second programming mode. In the first programming mode, the programming circuit applies a first program pulse to first memory cells while progressively increasing a programming capability of the first program pulse until threshold voltages of the first memory cells become higher than or equal to a first reference voltage. In the second programming mode, the programming circuit applies a second program pulse to second memory cells included in the first memory cells and having threshold voltages lower than a second reference voltage that is higher than the first reference voltage until the threshold voltages of the second memory cells become higher than or equal to the second reference voltage.
摘要:
An apparatus for testing a defect, includes a semiconductor element. In the semiconductor element, a conductive film is formed on an STI (shallow trench isolation) insulating film, which fills a shallow trench extending into a semiconductor region, through an insulating film in an ordinary state, and the shallow trench is not completely or sufficiently filled with the STI insulating film in a defective state. Also, the apparatus includes a control circuit configured to set a test mode in response to a test mode designation signal, a first voltage applying circuit configured to output a first voltage to the conductive film in the test mode, and a second voltage applying circuit configured to output a second voltage to the semiconductor region in the test mode. The first voltage is higher than the second voltage, and a voltage difference between the first voltage and the second voltage is sufficient to cause breakdown between the conductive film and the semiconductor region in the defective state.
摘要:
An apparatus for testing a defect, includes a semiconductor element. In the semiconductor element, a conductive film is formed on an STI (shallow trench isolation) insulating film, which fills a shallow trench extending into a semiconductor region, opposing said semiconductor region through an insulating film in an ordinary state, and the shallow trench is not completely or sufficiently filled with the STI insulating film in a defective state. Also, the apparatus includes a control circuit configured to set a test mode in response to a test mode designation signal, a first voltage applying circuit configured to output a first voltage to the conductive film in the test mode, and a second voltage applying circuit configured to output a second voltage to the semiconductor region in the test mode. The first voltage is higher than the second voltage, and a voltage difference between the first voltage and the second voltage is sufficient to cause breakdown between the conductive film and the semiconductor region in the defective state.
摘要:
A memory cell array includes a plurality of memory cells each of which has a control gate and a floating gate. A programming circuit operates in a first programming mode followed by a second programming mode. In the first programming mode, the programming circuit applies a first program pulse to first memory cells while progressively increasing a programming capability of the first program pulse until threshold voltages of the first memory cells become higher than or equal to a first reference voltage. In the second programming mode, the programming circuit applies a second program pulse to second memory cells included in the first memory cells and having threshold voltages lower than a second reference voltage that is higher than the first reference voltage until the threshold voltages of the second memory cells become higher than or equal to the second reference voltage.
摘要:
A silicon layer doped with an impurity for a floating gate, a protective layer, a silicon nitride layer of a laminated hard mask and a first NSG layer are formed into a desired pattern, on which a second NSG layer is formed and left as a side wall. With the second NSG layer as a mask, the silicon nitride layer is etched. Using the remaining silicon nitride layer as a mask, the silicon layer is etched to form a silicon pattern whose surface is covered with a second protective layer, and the silicon nitride layer is etched out. Accordingly, it is possible to prevent a damage at the surface of the floating gate at the time of forming the floating gate using doped polysilicon.
摘要:
A light source apparatus includes a discharge lamp including a light-emitting container having a cavity in which a discharge medium is enclosed, and a pair of electrodes disposed such that respective tip portions thereof oppose each other in the cavity, and a driving unit that supplies a driving current to the pair of electrodes. The driving current is generated by modulating amplitude of alternating current having a frequency not lower than 1 kHz and not higher than 10 GHz, such that a first section and a second section in which the amplitude is smaller than in the first section are alternately repeated.
摘要:
In a work system for substrates which includes plural working machines conveying circuit substrates through two paths and in which the circuit substrates are conveyed through the two paths from the working machine disposed upstream out of the plural working machines to the working machine disposed downstream, a circuit substrate of which the work result is not good is conveyed to the downstream working machine earlier than the circuit substrate of which the work result is good in a state in which the circuit substrate of which the work result is good and the circuit substrate of which the work result is not good are able to be conveyed to the downstream working machine by the upstream working machine.
摘要:
In a nuclear power plant, a corrosion-resistant oxide film on a surface of the metal component of a reactor structure is exposed to a high-temperature water, the corrosion-resistant oxide film containing an oxide having a property of a P-type semiconductor, and a catalytic substance having a property of an N-type semiconductor is deposited on the oxide film. The oxide film maintains the property of the P-type semiconductor.