COBALT METAL PRECURSORS
    4.
    发明申请
    COBALT METAL PRECURSORS 有权
    钴金属前驱体

    公开(公告)号:US20150093890A1

    公开(公告)日:2015-04-02

    申请号:US14040109

    申请日:2013-09-27

    IPC分类号: H01L21/285 H01L29/45

    摘要: A metal precursor and a method comprising decomposing a metal precursor on an integrated circuit device; and forming a metal from the metal precursor, wherein the metal precursor is selected from the group consisting of (i) a Co2(CO)6(R1C≡CR2), wherein R1 and R2 are individually selected from a straight or branched monovalent hydrocarbon group have one to six carbon atoms that may be interrupted and substituted; (ii) a mononuclear cobalt carbonyl nitrosyl; (iii) a cobalt carbonyl bonded to one of a boron, indium, germanium and tin moiety; (iv) a cobalt carbonyl bonded to a mononuclear or binuclear allyl; and (v) a cobalt (II) complex comprising nitrogen-based supporting ligands.

    摘要翻译: 金属前体和包括在集成电路器件上分解金属前体的方法; 以及从所述金属前体形成金属,其中所述金属前体选自(i)Co 2(CO)6(R 1C≡CR2)),其中R 1和R 2分别选自直链或支链一价烃基 具有1-6个可被中断和取代的碳原子; (ii)羰基亚硝酰基单核羰基; (iii)键合到硼,铟,锗和锡部分之一的羰基钴; (iv)键合到单核或双核烯丙基的羰基钴; 和(v)包含氮基支持配体的钴(II)络合物。