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公开(公告)号:US06897164B2
公开(公告)日:2005-05-24
申请号:US10076174
申请日:2002-02-14
申请人: Paul F. Baude , Patrick R. Fleming , Michael A. Haase , Tommie W. Kelley , Dawn V. Muyres , Steven Theiss
发明人: Paul F. Baude , Patrick R. Fleming , Michael A. Haase , Tommie W. Kelley , Dawn V. Muyres , Steven Theiss
IPC分类号: H05B33/10 , C23C14/04 , C23C14/24 , C23C14/56 , G03F7/12 , H01L21/336 , H01L21/363 , H01L29/786 , H01L33/00 , H01L51/05 , H01L51/50 , H01L21/31
CPC分类号: H01L51/0011 , C23C14/042 , C23C14/562 , G03F7/12 , H01L51/0081 , H01L51/0087 , Y10S438/942 , Y10S438/943
摘要: Aperture masks and deposition techniques for using aperture masks are described. In addition, techniques for creating aperture masks and other techniques for using the aperture masks are described. The various techniques can be particularly useful in creating circuit elements for electronic displays and low-cost integrated circuits such as radio frequency identification (RFID) circuits. In addition, the techniques can be advantageous in the fabrication of integrated circuits incorporating organic semiconductors, which typically are not compatible with wet processes.
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公开(公告)号:US06821348B2
公开(公告)日:2004-11-23
申请号:US10076005
申请日:2002-02-14
申请人: Paul F. Baude , Patrick R. Fleming , Michael A. Haase , Tommie W. Kelley , Dawn V. Muyres , Steven Theiss
发明人: Paul F. Baude , Patrick R. Fleming , Michael A. Haase , Tommie W. Kelley , Dawn V. Muyres , Steven Theiss
IPC分类号: C23C1600
CPC分类号: C23C14/12 , C23C14/042 , C23C14/562 , G03F7/12 , H01L51/0004 , H01L51/0545 , H05K1/0393 , H05K3/143 , H05K2203/0271 , H05K2203/1545
摘要: In one embodiment, the invention is directed to aperture mask deposition techniques using aperture mask patterns formed in one or more elongated webs of flexible film. The techniques involve sequentially depositing material through mask patterns formed in the film to define layers, or portions of layers, of the circuit. A deposition substrate can also be formed from an elongated web, and the deposition substrate web can be fed through a series of deposition stations. Each deposition station may have an elongated web formed with aperture mask patterns. The elongated web of mask patterns feeds in a direction perpendicular to the deposition substrate web. In this manner, the circuit creation process can be performed in-line. Moreover, the process can be automated to reduce human error and increase throughput.
摘要翻译: 在一个实施例中,本发明涉及使用在一个或多个细长的柔性膜网中形成的孔掩模图案的孔掩模沉积技术。 这些技术涉及通过在膜中形成的掩模图案顺序沉积材料以限定电路的层或层的一部分。 沉积衬底也可以由细长的腹板形成,并且沉积衬底腹板可以通过一系列沉积站进给。 每个沉积站可以具有形成有孔掩模图案的细长腹板。 细长的掩模图形网沿垂直于沉积衬底腹板的方向进给。 以这种方式,可以在线执行电路创建处理。 此外,该过程可以自动化以减少人为错误并增加吞吐量。
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公开(公告)号:US07297361B2
公开(公告)日:2007-11-20
申请号:US10940448
申请日:2004-09-14
申请人: Paul F. Baude , Patrick R. Fleming , Michael A. Haase , Tommie W. Kelley , Dawn V. Muyres , Steven Theiss
发明人: Paul F. Baude , Patrick R. Fleming , Michael A. Haase , Tommie W. Kelley , Dawn V. Muyres , Steven Theiss
CPC分类号: C23C14/12 , C23C14/042 , C23C14/562 , G03F7/12 , H01L51/0004 , H01L51/0545 , H05K1/0393 , H05K3/143 , H05K2203/0271 , H05K2203/1545
摘要: A method for circuit fabrication includes positioning first and second webs of film in proximity to each other, wherein the second web of film defines a deposition mask, and deposition material on the first web of film through the deposition mask pattern defined by the second web of the to create at least a portion of an integrated circuit.
摘要翻译: 一种用于电路制造的方法包括将第一和第二薄膜网彼此靠近地定位,其中第二薄膜网限定了沉积掩模,并且通过由第二网片 电影以创建至少一部分集成电路。
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公开(公告)号:US07241688B2
公开(公告)日:2007-07-10
申请号:US11118811
申请日:2005-04-29
申请人: Paul F. Baude , Patrick R. Fleming , Michael A. Haase , Tommie W. Kelley , Dawn V. Muyres , Steven Theiss
发明人: Paul F. Baude , Patrick R. Fleming , Michael A. Haase , Tommie W. Kelley , Dawn V. Muyres , Steven Theiss
IPC分类号: H01L21/44
CPC分类号: H01L51/0011 , C23C14/042 , C23C14/562 , G03F7/12 , H01L51/0081 , H01L51/0087 , Y10S438/942 , Y10S438/943
摘要: Aperture masks and deposition techniques for using aperture masks are described. In addition, techniques for creating aperture masks and other techniques for using the aperture masks are described. The various techniques can be particularly useful in creating circuit elements for electronic displays and low-cost integrated circuits such as radio frequency identification (RFID) circuits. In addition, the techniques can be advantageous in the fabrication of integrated circuits incorporating organic semiconductors, which typically are not compatible with wet processes.
摘要翻译: 描述了使用孔径掩模的孔径掩模和沉积技术。 此外,描述了用于创建孔径掩模和用于使用孔径掩模的其它技术的技术。 各种技术在产生用于电子显示器的电路元件和诸如射频识别(RFID)电路的低成本集成电路中尤其有用。 此外,这些技术在加入有机半导体的集成电路的制造中是有利的,其通常与湿法不兼容。
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公开(公告)号:US07473652B2
公开(公告)日:2009-01-06
申请号:US11428084
申请日:2006-06-30
申请人: Feng Bai , Todd D. Jones , Kevin M. Lewandowski , Tzu-Chen Lee , Dawn V. Muyres , Tommie W. Kelley
发明人: Feng Bai , Todd D. Jones , Kevin M. Lewandowski , Tzu-Chen Lee , Dawn V. Muyres , Tommie W. Kelley
IPC分类号: H01L21/31 , H01L21/469
CPC分类号: H01L21/02118 , H01G4/18 , H01L21/02282 , H01L21/02348 , H01L21/312 , H01L51/0052 , H01L51/052 , H01L51/0529 , H01L51/0537 , H05K1/162 , Y10T428/31692
摘要: Organic polymers for use in electronic devices, wherein the polymer includes repeat units of the formula: wherein: each R1 is independently H, an aryl group, Cl, Br, I, or an organic group that includes a crosslinkable group; each R2 is independently H, an aryl group or R4; each R3 is independently H or methyl; each R5 is independently an alkyl group, a halogen, or R4; each R4 is independently an organic group that includes at least one CN group and has a molecular weight of about 30 to about 200 per CN group; and n=0-3; with the proviso that at least one repeat unit in the polymer includes an R4. These polymers are useful in electronic devices such as organic thin film transistors.
摘要翻译: 用于电子器件的有机聚合物,其中所述聚合物包括下式的重复单元:其中:每个R 1独立地为H,芳基,Cl,Br,I或包含可交联基团的有机基团; 每个R 2独立地为H,芳基或R 4; 每个R 3独立地为H或甲基; 每个R 5独立地是烷基,卤素或R 4; 每个R 4独立地是包含至少一个CN基团并且每个CN基团的分子量为约30至约200的有机基团; 并且n = 0-3; 条件是聚合物中至少一个重复单元包括R4。 这些聚合物可用于诸如有机薄膜晶体管的电子器件中。
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公开(公告)号:US07098525B2
公开(公告)日:2006-08-29
申请号:US10434377
申请日:2003-05-08
申请人: Feng Bai , Todd D. Jones , Kevin M. Lewandowski , Tzu-Chen Lee , Dawn V. Muyres , Tommie W. Kelley
发明人: Feng Bai , Todd D. Jones , Kevin M. Lewandowski , Tzu-Chen Lee , Dawn V. Muyres , Tommie W. Kelley
IPC分类号: H01L23/58
CPC分类号: H01L21/02118 , H01G4/18 , H01L21/02282 , H01L21/02348 , H01L21/312 , H01L51/0052 , H01L51/052 , H01L51/0529 , H01L51/0537 , H05K1/162 , Y10T428/31692
摘要: Organic polymers for use in electronic devices, wherein the polymer includes repeat units of the formula: wherein: each R1 is independently H, an aryl group, Cl, Br, I, or an organic group that includes a crosslinkable group; each R2 is independently H, an aryl group or R4; each R3 is independently H or methyl; each R5 is independently an alkyl group, a halogen, or R4; each R4 is independently an organic group that includes at least one CN group and has a molecular weight of about 30 to about 200 per CN group; and n=0–3; with the proviso that at least one repeat unit in the polymer includes an R4. These polymers are useful in electronic devices such as organic thin film transistors.
摘要翻译: 用于电子器件的有机聚合物,其中所述聚合物包括下式的重复单元:其中:每个R 1独立地为H,芳基,Cl,Br,I或包括 可交联基团; 每个R 2独立地为H,芳基或R 4; 每个R 3独立地为H或甲基; 每个R 5独立地是烷基,卤素或R 4; 每个R 4独立地是包含至少一个CN基团并且具有每个CN基团约30至约200的分子量的有机基团; 并且n = 0-3; 条件是聚合物中至少一个重复单元包括R 4。 这些聚合物可用于诸如有机薄膜晶体管的电子器件中。
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公开(公告)号:US07279777B2
公开(公告)日:2007-10-09
申请号:US10839193
申请日:2004-05-05
申请人: Feng Bai , Todd D. Jones , Kevin M. Lewandowski , Tzu-Chen Lee , Dawn V. Muyres , Tommie W. Kelley
发明人: Feng Bai , Todd D. Jones , Kevin M. Lewandowski , Tzu-Chen Lee , Dawn V. Muyres , Tommie W. Kelley
IPC分类号: H01L23/58
CPC分类号: H01L21/02118 , C08L33/14 , H01G4/18 , H01L21/312 , H01L51/0052 , H01L51/0516 , H01L51/052 , H01L51/0529 , H01L51/0537 , H05K1/162 , Y10T428/31692
摘要: Organic polymers for use in laminates including capacitors, wherein the polymer includes repeat units of the formula: wherein: each R1 is independently H, an aryl group, Cl, Br, I, or an organic group that includes a crosslinkable group; each R2 is independently H, an aryl group or R4; each R3 is independently H or methyl; each R5 is independently an alkyl group, a halogen, or R4; each R4 is independently an organic group that includes at least one CN group and has a molecular weight of about 30 to about 200 per CN group; and n=0-3; with the proviso that at least one repeat unit in the polymer includes an R4.
摘要翻译: 用于包括电容器的层压体的有机聚合物,其中所述聚合物包括下式的重复单元:其中:每个R 1独立地为H,芳基,Cl,Br,I或有机基团,其中 包括可交联基团; 每个R 2独立地为H,芳基或R 4; 每个R 3独立地为H或甲基; 每个R 5独立地是烷基,卤素或R 4; 每个R 4独立地是包含至少一个CN基团并且具有每个CN基团约30至约200的分子量的有机基团; 并且n = 0-3; 条件是聚合物中至少一个重复单元包括R 4。
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公开(公告)号:US06768132B2
公开(公告)日:2004-07-27
申请号:US10094007
申请日:2002-03-07
申请人: Terrance P. Smith , Mark J. Pellerite , Tommie W. Kelley , Dawn V. Muyres , Dennis E. Vogel , Kim M. Vogel , Larry D. Boardman , Timothy D. Dunbar
发明人: Terrance P. Smith , Mark J. Pellerite , Tommie W. Kelley , Dawn V. Muyres , Dennis E. Vogel , Kim M. Vogel , Larry D. Boardman , Timothy D. Dunbar
IPC分类号: H01L5100
CPC分类号: H01L51/0529 , B82Y10/00 , B82Y30/00 , H01B3/18 , H01L51/0003 , H01L51/0055 , H01L51/0516 , H01L51/0545 , Y10S428/901
摘要: An organic thin film transistor comprising a self-assembled monolayer interposed between a gate dielectric and an organic semiconductor layer. The monolayer is a product of a reaction between the gate dielectric and a precursor to the self-assembled monolayer. The semiconductor layer comprises a material selected from an acene, substituted with at least one electron-donating group, halogen atom, or a combination thereof, or a benzo-annellated acene or polybenzo-annellated acene, which optionally is substituted with at least one electron-donating group, halogen atom, or a combination thereof. Methods of making a thin film transistor and an integrated circuit comprising thin film transistors.
摘要翻译: 一种有机薄膜晶体管,其包括插入在栅极电介质和有机半导体层之间的自组装单层。 单层是栅极电介质和自组装单层的前体之间的反应的产物。 半导体层包括选自被至少一个给电子基团,卤素原子或其组合取代的苯的材料,或任选被至少一个电子所取代的苯并环戊烯化的乙烯或聚苯并环戊烯的乙烯 - 卤素原子或其组合。 制造薄膜晶体管的方法和包括薄膜晶体管的集成电路。
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公开(公告)号:US06617609B2
公开(公告)日:2003-09-09
申请号:US10012655
申请日:2001-11-05
申请人: Tommie W. Kelley , Larry D. Boardman , Timothy D. Dunbar , Todd D. Jones , Dawn V. Muyres , Mark J. Pellerite , Terrance P. Smith
发明人: Tommie W. Kelley , Larry D. Boardman , Timothy D. Dunbar , Todd D. Jones , Dawn V. Muyres , Mark J. Pellerite , Terrance P. Smith
IPC分类号: H01L5100
CPC分类号: H01L21/02126 , H01L21/3122 , H01L21/31691 , H01L51/001 , H01L51/0052 , H01L51/052 , H01L51/0533 , H01L51/0541 , H01L51/0545
摘要: Provided is an organic thin film transistor comprising a siloxane polymeric layer interposed between a gate dielectric and an organic semiconductor layer. An integrated circuit comprising thin film transistors and methods of making a thin film transistor are also provided. The organic thin film transistors of the invention typically exhibit improvement in one or more transistor properties.
摘要翻译: 提供了一种有机薄膜晶体管,其包含介于栅极电介质和有机半导体层之间的硅氧烷聚合物层。 还提供了包括薄膜晶体管的集成电路和制造薄膜晶体管的方法。 本发明的有机薄膜晶体管通常表现出一个或多个晶体管特性的改进。
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公开(公告)号:US06433359B1
公开(公告)日:2002-08-13
申请号:US09947845
申请日:2001-09-06
申请人: Tommie W. Kelley , Dawn V. Muyres , Mark J. Pellerite , Timothy D. Dunbar , Larry D. Boardman , Terrance P. Smith
发明人: Tommie W. Kelley , Dawn V. Muyres , Mark J. Pellerite , Timothy D. Dunbar , Larry D. Boardman , Terrance P. Smith
IPC分类号: H01L3524
CPC分类号: H01L51/0512 , B82Y10/00 , B82Y30/00 , H01L21/31691 , H01L51/0037 , H01L51/0052 , H01L51/0516 , H01L51/0545
摘要: Provided is an organic thin film transistor comprising a self-assembled monolayer interposed between a gate dielectric and an organic semiconductor layer. The monolayer is a product of a reaction between the gate dielectric and a precursor to the self-assembled monolayer. The monolayer precursor composition has the formula: X—Y—Zn, wherein X is H or CH3; Y is a linear or branched C5-C50 aliphatic or cyclic aliphatic connecting group, or C8-C50 group comprising an aromatic group and a C3-C44 aliphatic or cyclic aliphatic connecting group; Z is selected from from —PO3H2, —OPO3H2, benzotriazolyl (—C6H4N3), carbonyloxybenzotriazole (—OC(═O)C6H4N3), oxybenzotriazole (—O—C6H4N3), aminobenzotriazole (—NH—C6H4N3), —CONHOH, —COOH, —OH, —SH, —COSH, —COSeH, —C5H4N, —SeH, —SO3H, —NC, —SiCl(CH3)2, —SiCl2CH3, amino, and phosphinyl; and n is 1, 2, or 3 provided that n=1 when Z is —SiCl(CH3)2 or —SiCl2CH3. Methods of making a thin film transistor and an integrated circuit comprising thin film transistors are also provided.
摘要翻译: 提供了一种有机薄膜晶体管,其包括介于栅极电介质和有机半导体层之间的自组装单层。 单层是栅极电介质和自组装单层的前体之间的反应的产物。 单层前体组合物具有下式:X-Y-Zn,其中X是H或CH 3; Y是直链或支链C 5 -C 50脂族或环状脂族连接基团或包含芳族基团和C 3 -C 44脂族或环状脂族连接基团的C 8 -C 50基团; Z选自-PO 3 H 2,-OPO 3 H 2,苯并三唑基(-C 6 H 4 N 3),羰氧基苯并三唑(-OC(= O)C 6 H 4 N 3),氧苯并三唑(-O-C 6 H 4 N 3),氨基苯并三唑(-NH-C 6 H 4 N 3),-CONHOH,-COOH, -OH,-SH,-COSH,-COSeH,-C5H4N,-SeH,-SO3H,-NC,-SiCl(CH3)2,-SiCl2CH3,氨基和氧膦基; 并且n为1,2或3,条件是当Z为-SiCl(CH 3)2或-SiCl 2 CH 3时n = 1。还提供了制造薄膜晶体管的方法和包括薄膜晶体管的集成电路。
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