摘要:
A substrate to be processed in a high temperature processing chamber is preheated to avoid the problems associated with thermal shock when the substrate is dropped onto a heated susceptor. Preheating is effected by holding the substrate over a susceptor maintained at or near the processing temperature until the temperature of the substrate approaches the processing temperature. Thus, wafer warping and breakage are greatly reduced, and wafer throughput is improved because of time saved in maintaining the susceptor at constant temperature without cool down and reheat periods.
摘要:
A substrate to be processed in a high temperature processing chamber is preheated to avoid the problems associated with thermal shock when the substrate is dropped onto a heated susceptor. Preheating is effected by holding the substrate over a susceptor maintained at or near the processing temperature until the temperature of the substrate approaches the processing temperature. Thus, wafer warping and breakage are greatly reduced, and wafer throughput is improved because of time saved in maintaining the susceptor at constant temperature without cool down and reheat periods.
摘要:
A substrate to be processed in a high temperature processing chamber is preheated to avoid the problems associated with thermal shock when the substrate is dropped onto a heated susceptor. Preheating is effected by holding the substrate over a susceptor maintained at or near the processing temperature until the temperature of the substrate approaches the processing temperature. Thus, wafer warping and breakage are greatly reduced, and wafer throughput is improved because of time saved in maintaining the susceptor at constant temperature without cool down and reheat periods.
摘要:
An arrangement of short linear heat lamps is provided which allows for localized control of temperature nonuniformities in a substrate during semiconductor processing. A reactor includes a substrate holder positioned between a top bank and a bottom bank of linear heat lamps. Alternatively, only one such bank may be provided. At least one of the banks includes lamps of a plurality of different lengths, at least some of the lengths being shorter than a diameter of the substrate holder. In some configurations, the lamps in a bank are disposed substantially parallel to each other in a repeating pattern. In some other configurations, the lamps in a bank are disposed in a radial direction with respect to a vertical axis of the substrate holder. Power output of the short lamps can be adjusted individually or in groups to provide localized control of temperature of the substrate.
摘要:
A reactor for processing a plurality of workpieces including a support for holding the plurality of workpieces, a first processing zone, one or more radiant heating elements adapted to heat a plurality of workpieces positioned in the first processing zone, a second processing zone, one or more resistive heating elements adapted to heat a plurality of workpieces positioned in the second processing zone, and an apparatus for moving the support between the first processing zone and the second processing zone.
摘要:
This invention relates to a process for producing linear alkyl benzene and linear paraffins, the process including the steps of obtaining a hydrocarbon condensate containing olefins, paraffins and oxygenates from a low temperature Fischer-Tropsch reaction; a) fractionating a desired carbon number distribution from the hydrocarbon condensate to form a fractionated hydrocarbon condensate stream; b) extracting oxygenates from the fractionated hydrocarbon condensate stream from step a) to form a stream containing olefins and paraffins; c) alkylating the stream containing olefins and paraffins from step b) with benzene in the presence of a suitable alkylation catalyst; and d) recovering linear alkyl benzene and linear paraffin.
摘要:
Processing overhead for maintenance of integrity of one or more de-normalized relational databases including an entity-attribute-relationship architecture during updates thereof in a decision support system is expedited by transfer and merger of data by use of standard utilities under control of control files corresponding to the database architecture. Complexity of maintenance of the database as the database architecture is changed is minimized by alteration of the control files but not the utilities or the complex protocols of previously known systems. By thus reducing processing overhead when updating and/or refreshing of the database(s) is to be done, data may be efficiently maintained with improved currency while enhancing availability of the system to the user. Efficiency of the decision support system is improved since de-normalization may be accommodated by the modification of control files which are preferably in the form of SQL statements and thus the database architecture can be readily optimized at will or adaptively for high search efficiency.
摘要:
A hydrocarbon synthesis process (10) includes feeding gaseous reactants (18) into a slurry bed (14), allowing the gaseous reactants (18) to react catalytically, thereby to form liquid and gaseous hydrocarbon products, and subjecting a product mixture comprising liquid product and catalyst particles in a filtration stage to filtration, by passing the liquid product through a filtering medium (30) to separate catalyst particles from the liquid product. The gaseous products are withdrawn (23) and cooled to form a multi-phase product which is separated to produce at least a hydrocarbon condensate stream (88) and a tail-gas stream (84). At least a portion of the hydrocarbon condensate stream (88) is treated (96) to remove oxygenated components therefrom, producing a backflush condensate. From time to time, the filtering medium (30) of the filtration stage is backflushed by passing the backflush condensate through the filtering medium (30).
摘要:
Chemical vapor deposition methods use trisilane and a halogen-containing etchant source (such as chlorine) to selectively deposit Si-containing films over selected regions of mixed substrates. Dopant sources may be intermixed with the trisilane and the etchant source to selectively deposit doped Si-containing films. The selective deposition methods are useful in a variety of applications, such as semiconductor manufacturing.
摘要:
This invention relates to a commercially viable process for extracting oxygenates from a hydrocarbon stream, typically a fraction of the condensation product of a Fischer-Tropsch reaction, while preserving the olefin content of the condensation product. The oxygenate extraction process is a liquid-liquid extraction process that takes place in an extraction column using a polar organic solvent, such as methanol, and water as the solvent, wherein the polar organic solvent and water are added separately to the extraction column.