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115 条记录 (耗时 0.027 秒)

    Method for forming a tunable piezoelectric microresonator
    1.
    发明授权
    Method for forming a tunable piezoelectric microresonator 有权
    形成可调谐压电微谐振器的方法

    公开(公告)号：US07179392B2

    公开(公告)日：2007-02-20

    申请号：US10794527

    申请日：2004-03-05

    申请人： Philippe Robert ,  Grégory Caruyer ,  Pascal Ancey ,  Guillaume Bouche

    发明人： Philippe Robert ,  Grégory Caruyer ,  Pascal Ancey ,  Guillaume Bouche

    IPC分类号： H01L41/08

    CPC分类号： H03H9/173 ,  H03H3/04 ,  H03H2003/0414 ,  Y10T29/42

    摘要： A process for manufacturing a resonator including the steps of: forming on an insulating substrate a first portion of a conductive material and a second portion of another material on the first portion; forming an insulating layer having its upper surface flush with the upper part of the second portion; forming by a succession of depositions and etchings a beam of a conductive material above the second portion, the beam ends being on the insulating layer on either side of the second portion, the upper surface of the second portion being exposed on either side of the beam, a third portion of a piezoelectric material on the beam and a fourth portion of a conductive material on the third portion above the beam portion located above the second portion; and removing the second portion.

    摘要翻译： 一种用于制造谐振器的方法，包括以下步骤：在绝缘基板上形成第一部分上的导电材料的第一部分和另一材料的第二部分; 形成其上表面与所述第二部分的上部齐平的绝缘层; 通过一系列沉积和蚀刻形成第二部分上方的导电材料束，光束端在第二部分的任一侧上的绝缘层上，第二部分的上表面暴露在光束的任一侧上 ，所述梁上的压电材料的第三部分和位于所述第二部分上方的所述梁部分上方的所述第三部分上的导电材料的第四部分; 并移除第二部分。

    Bulk acoustic resonator with matched resonance frequency and fabrication process
    2.
    发明授权
    Bulk acoustic resonator with matched resonance frequency and fabrication process 有权
    具有匹配谐振频率和制造工艺的体声波谐振器

    公开(公告)号：US07310029B2

    公开(公告)日：2007-12-18

    申请号：US10883690

    申请日：2004-07-06

    申请人： Philippe Robert ,  Pascal Ancey ,  Grégory Caruyer

    发明人： Philippe Robert ,  Pascal Ancey ,  Grégory Caruyer

    IPC分类号： H03H9/15 ,  H03H9/54

    CPC分类号： H03H9/173 ,  H03H3/04 ,  H03H9/175 ,  H03H2009/02181 ,  Y10T29/42

    摘要： The resonator comprises a piezoelectric layer arranged between two electrodes. An electrical heating resistor is arranged in thermal contact with at least one of the electrodes. Temporary heating of the electrode enables the material constituting the electrode to be partially evaporated, so as to thin the electrode and thus adjust the resonance frequency. Measurement of the resonance frequency in the course of evaporation enables the heating to be interrupted when the required resonance frequency is obtained. One of the electrodes can be arranged on a substrate formed by an acoustic Bragg grating. The resonator can comprise a substrate comprising a cavity whereon one of the electrodes is at least partially arranged.

    摘要翻译： 谐振器包括布置在两个电极之间的压电层。 电加热电阻器布置成与至少一个电极热接触。 电极的暂时加热使得构成电极的材料部分蒸发，从而使电极变薄，从而调节谐振频率。 在蒸发过程中谐振频率的测量使得当获得所需的共振频率时能够中断加热。 一个电极可以布置在由声布拉格光栅形成的基板上。 谐振器可以包括基底，其包括其中一个电极至少部分地布置的空腔。

    Bulk acoustic resonator with matched resonance frequency and fabrication process
    3.
    发明申请
    Bulk acoustic resonator with matched resonance frequency and fabrication process 有权
    具有匹配谐振频率和制造工艺的体声波谐振器

    公开(公告)号：US20050028336A1

    公开(公告)日：2005-02-10

    申请号：US10883690

    申请日：2004-07-06

    申请人： Philippe Robert ,  Pascal Ancey ,  Gregory Caruyer

    发明人： Philippe Robert ,  Pascal Ancey ,  Gregory Caruyer

    IPC分类号： H03H3/04 ,  H03H9/17 ,  H04R17/00 ,  H04R25/00

    CPC分类号： H03H9/173 ,  H03H3/04 ,  H03H9/175 ,  H03H2009/02181 ,  Y10T29/42

    摘要： The resonator comprises a piezoelectric layer arranged between two electrodes. An electrical heating resistor is arranged in thermal contact with at least one of the electrodes. Temporary heating of the electrode enables the material constituting the electrode to be partially evaporated, so as to thin the electrode and thus adjust the resonance frequency. Measurement of the resonance frequency in the course of evaporation enables the heating to be interrupted when the required resonance frequency is obtained. One of the electrodes can be arranged on a substrate formed by an acoustic Bragg grating. The resonator can comprise a substrate comprising a cavity whereon one of the electrodes is at least partially arranged.

    摘要翻译： 谐振器包括布置在两个电极之间的压电层。 电加热电阻器布置成与至少一个电极热接触。 电极的暂时加热使得构成电极的材料部分蒸发，从而使电极变薄，从而调节谐振频率。 在蒸发过程中谐振频率的测量使得当获得所需的共振频率时能够中断加热。 一个电极可以布置在由声布拉格光栅形成的基板上。 谐振器可以包括基底，其包括其中一个电极至少部分地布置的空腔。

    Gyrometer with reduced parasitic capacitances
    4.
    发明授权
    Gyrometer with reduced parasitic capacitances 有权
    降低寄生电容的Gyrometer

    公开(公告)号：US09448070B2

    公开(公告)日：2016-09-20

    申请号：US13459618

    申请日：2012-04-30

    申请人： Arnaud Walther ,  Bernard Diem ,  Philippe Robert ,  Jerome Willemin

    发明人： Arnaud Walther ,  Bernard Diem ,  Philippe Robert ,  Jerome Willemin

    IPC分类号： G01C19/56 ,  G01C19/5762 ,  G01C19/5712

    CPC分类号： G01C19/5762 ,  G01C19/5712

    摘要： Gyrometer including a substrate and an inertial mass suspended above the substrate, the inertial mass including an excitation part and a detection part, means of moving the excitation part is movable in at least one direction contained in the plane of the inertial mass, and capacitive detection device detecting movement of the detection part outside the plane of the mass. The capacitive detection device includes comprising at least one suspended electrode, located above the detection part located facing the substrate so as to form a variable capacitor with the detection part, the electrode being held above the detection part by at least one pillar passing through the inertial mass.

    摘要翻译： 包括衬底和悬浮在衬底上的惯性块的测微计，包括激励部分和检测部分的惯性质量块，使激发部分移动的装置可以在包含在惯性质量平面中的至少一个方向上移动，并且电容检测 设备检测检测部件在质量平面外的运动。 所述电容检测装置包括至少一个悬置电极，位于所述检测部分的与所述基板相对的位置上，以便与所述检测部分形成可变电容器，所述电极通过至少一个通过所述惯性的柱的所述检测部分 质量

    Resonant inertial microsensor with variable thickness produced by surface engineering
    6.
    发明授权
    Resonant inertial microsensor with variable thickness produced by surface engineering 有权
    通过表面工程生产的具有不同厚度的谐振惯性微传感器

    公开(公告)号：US08783107B2

    公开(公告)日：2014-07-22

    申请号：US11724795

    申请日：2007-03-15

    申请人： Philippe Robert ,  Laurent Duraffour

    发明人： Philippe Robert ,  Laurent Duraffour

    IPC分类号： G01P15/097

    CPC分类号： G01P15/097 ,  G01C19/574 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/0802

    摘要： The invention relates to a surface-type MEMS resonant sensor, comprising a resonator (4) with excitation in a plane, which sensor comprises: a first, so-called thick area (2), having a first thickness (E1), forming a seismic mass; and a second, thin area (4), having a second thickness (E2), lower than the first, for detection.

    摘要翻译： 本发明涉及一种表面型MEMS谐振传感器，其包括在平面中具有激发的谐振器（4），该传感器包括：具有第一厚度（E1）的第一所谓的厚区域（2），形成第一厚度 地震质量 以及具有比第一厚度低的第二厚度（E2）的第二薄区域（4）用于检测。

    Method for releasing the suspended structure of a NEMS and/or NEMS component
    7.
    发明授权
    Method for releasing the suspended structure of a NEMS and/or NEMS component 有权
    释放NEMS和/或NEMS组件的挂起结构的方法

    公开(公告)号：US08211729B2

    公开(公告)日：2012-07-03

    申请号：US12793156

    申请日：2010-06-03

    申请人： Cecilia Dupre ,  Philippe Robert

    发明人： Cecilia Dupre ,  Philippe Robert

    IPC分类号： H01L21/302

    CPC分类号： B81C1/00476 ,  B81B2203/0109 ,  B81C1/00246 ,  B81C2201/0109 ,  B81C2201/056 ,  B81C2203/0728 ,  H01L21/84 ,  H03H3/0073 ,  H03H9/2463 ,  H03H2009/02314

    摘要： A method for making a microelectronic device comprising at least one electromechanical component provided with a mobile structure, the method comprising the steps of: forming in at least one fine semiconducting thin layer lying on a supporting layer, at least one bar bound to a block, said bar being intended to form a mobile structure of an electromechanical component, withdrawing a portion of the supporting layer under said bar, forming at least one passivation layer based on dielectric material around said bar, forming an encapsulation layer around the bar and covering said passivation layer, the method further comprising steps of: making metal contact and/or interconnection areas, and then suppressing the encapsulation layer around said bar.

    摘要翻译： 一种用于制造微电子器件的方法，所述微电子器件包括至少一个提供有移动结构的机电元件，所述方法包括以下步骤：在位于支撑层上的至少一个精细半导体薄层中形成至少一个与块结合的条， 所述杆旨在形成机电部件的移动结构，在所述杆下方撤回支撑层的一部分，基于围绕所述杆的电介质材料形成至少一个钝化层，围绕所述棒形成包封层并覆盖所述钝化 该方法还包括以下步骤：制造金属接触和/或互连区域，然后抑制围绕所述条的封装层。

    MEMS/NEMS structure comprising a partially monocrystalline anchor and method for manufacturing same
    8.
    发明授权
    MEMS/NEMS structure comprising a partially monocrystalline anchor and method for manufacturing same 有权
    包括部分单晶锚的MEMS / NEMS结构及其制造方法

    公开(公告)号：US07981715B2

    公开(公告)日：2011-07-19

    申请号：US12498598

    申请日：2009-07-07

    申请人： Philippe Robert

    发明人： Philippe Robert

    IPC分类号： H01L21/00

    CPC分类号： B81C1/00039 ,  B81B2203/0307

    摘要： The invention relates to a method for producing a MEMS/NEMS structure from a substrate made in a monocrystalline semiconductor material, the structure comprising a flexible mechanical element connected to the substrate by at least one anchoring zone, the method comprising the following steps: the formation of a protection layer on one face of the substrate, the protection layer being made in a monocrystalline material different from the material of the substrate, etching of the protection layer and the substrate in order to produce at least one cavity, the etching being done so as to leave an overhang made in the material of the protection layer on the edges of the cavity, filling in of the cavity with an electrically insulating material in order to obtain an insulating anchoring portion, epitaxy of a semiconductor material from the protection layer and the electrically insulating material in order to obtain a layer designed to produce the flexible mechanical element, liberation of the flexible mechanical element while allowing at least a portion of said overhang to remain.

    摘要翻译： 本发明涉及从由单晶半导体材料制成的衬底制造MEMS / NEMS结构的方法，该结构包括通过至少一个锚定区连接到衬底的柔性机械元件，该方法包括以下步骤：形成 在衬底的一个表面上的保护层，保护层制成不同于衬底的材料的单晶材料，蚀刻保护层和衬底以产生至少一个空腔，蚀刻是这样做的 为了在空腔的边缘留下在保护层的材料上产生的悬垂，用电绝缘材料填充空腔，以便获得绝缘锚固部分，从保护层和半导体材料的外延生长 电绝缘材料，以获得设计用于生产柔性机械元件的层，释放 柔性机械元件，同时允许所述突出部的至少一部分保留。

    Force measuring device having a rigid stem
    10.
    发明授权
    Force measuring device having a rigid stem 有权
    力测量装置具有刚性杆

    公开(公告)号：US07716975B2

    公开(公告)日：2010-05-18

    申请号：US11913509

    申请日：2006-05-03

    申请人： Patrice Rey ,  Philippe Robert

    发明人： Patrice Rey ,  Philippe Robert

    IPC分类号： G01M17/02

    CPC分类号： G01L1/18 ,  G01L5/162

    摘要： A force measuring device has a rigid stem joined to an essentially flat deformable membrane. The membrane includes detectors for detecting a deformation of the membrane. A portion of the stem comes in contact with an element capable of being subjected to the action of a force. The stem has slots forming anchoring means for interacting with the element. The force measuring device is for use, in particular, in improving the transmission of loads to the deformable membrane.

    摘要翻译： 力测量装置具有连接到基本上平坦的可变形膜的刚性杆。 膜包括用于检测膜的变形的检测器。 杆的一部分与能够受到力的作用的元件接触。 杆具有形成用于与元件相互作用的锚固装置的槽。 该力测量装置特别用于改进对可变形膜的载荷的传递。