摘要:
A scanning imager is described which includes a line camera and a table to mechanically present successive regions of an item to be imaged. The time of exposure of the camera for each successive region presented is controlled by encoding strips connected to the table. Thus, if the table is subjected to motion variations, the encoding strips are likewise affected and vary the exposure time for each analog image pixel scan. To compensate, an exposure correction system is provided which includes an analog voltage generator whose output is related to each successive region exposure time. An A to D conversion circuit is responsive to the analog voltage to normalize the analog image value from the camera so that, in effect, equal exposure images result.
摘要:
A method for efficient multithreaded analysis of a timing graph is described. The method is applicable to multithreaded common path pessimism removal, critical path traversing for timing report generation, and other types of analysis requiring traversal of sub-graphs of timing graph. In order to achieve high efficiency and scalability for parallel multithreaded execution, the number of access locks is minimized. One parent computation thread and multiple child threads are employed. The parent computational thread identifies the tasks for analysis and distributes them among child threads. Each child thread identifies a sub-graph to be analyzed, creates a thread-specific replica of the identified sub-graph, and performs the analysis required. After completing the analysis, the child thread transfers the results back to the main timing graph and waits for next task. As all data structures of each child thread are accessed only by the child thread owing them, no access locks are required for construction and processing of thread specific graph replica of the timing sub-graph. The construction of each thread specific graph replica is performed by the child thread without locking the main timing graph data structures. Access locks are used only for transferring results of the analysis back to the main timing graph where the results computed by all child threads are combined together.
摘要:
A design system for designing complex integrated circuits (ICs), a method of IC design and program product therefor. A layout unit receives a circuit description representing portions in a grid and glyph format. A checking unit checks grid and glyph portions of the design. An elaboration unit generates a target layout from the checked design. A data prep unit prepares the target layout for mask making. A pattern caching unit selectively replaces portions of the design with previously cached results for improved design efficiency.
摘要:
A system and method for processing glyph-based data associated with generating very large scale integrated circuit (VLSI) designs. A system is provide that includes a serialization system for converting an input region of glyph design data into a pseudo-string; and a pattern searching system that identifies matching patterns in the glyph design data by analyzing pseudo-strings generated by the serialization system. Pattern searching may include, e.g., predefined pattern searching and redundant pattern searching.
摘要:
A method, system and computer program product for rendering a mask are disclosed. A method of rendering a mask may comprise: providing an initial mask design for a photolithographic process, the initial mask design including polygons; initially rendering the initial mask design as a coarse mask representation in a pixel based image calculation; identifying an overhang portion; and rendering the overhang portion using a set of subpixels whose artifacts from spatial-localization lie outside a practical resolution of a pseudo lens having a numerical aperture larger than that of a projection lens used in the photolithographic process; and updating the initial rendering based on the overhang portion rendering.
摘要:
A design system for designing complex integrated circuits (ICs), a method of IC design and program product therefor. A layout unit receives a circuit description representing portions in a grid and glyph format. A checking unit checks grid and glyph portions of the design. An elaboration unit generates a target layout from the checked design. A data prep unit prepares the target layout for mask making. A pattern caching unit selectively replaces portions of the design with previously cached results for improved design efficiency.
摘要:
A method for layout design includes steps or acts of: receiving a layout for design of an integrated circuit chip; designing mask shapes for the layout; transmitting the mask shapes to a litho simulator for generating wafer shapes; receiving the wafer shapes; calculating electrically equivalent gate lengths for the wafer shapes; analyzing the gate lengths to check for conformity against a threshold value, wherein the threshold value represents a desired value of electrically equivalent gate lengths; placing markers on the layout at those locations where the gate length violates the threshold value; and generating a histogram of gate lengths for comparing layouts for electrically equivalent gate lengths for layout quality.
摘要:
Methods, and program storage devices, for performing model-based optical proximity correction by providing a region of interest (ROI) having an interaction distance and locating at least one polygon within the ROI. A cut line of sample points representative of a set of vertices, or plurality of cut lines, are generated within the ROI across at least one lateral edge of the polygon(s). An angular position, and first and second portions of the cut line residing on opposing sides of an intersection between the cut line and the lateral edge of the polygon are determined, followed by generating a new ROI by extending the original ROI beyond its interaction distance based on such angular position, and first and second portions of the cut line. In this manner, a variety of new ROIs may be generated, in a variety of different directions, to ultimately correct for optical proximity.
摘要:
Methods, and a program storage device for executing such methods, for performing model-based optical proximity correction by providing a mask matrix having a region of interest (ROI) and locating a plurality of points of interest within the mask matrix. A first polygon having a number of vertices representative of the located points of interest is computed, followed by determining a spatial relation between its vertices and the ROI. The vertices of the first polygon are then pinned to boundaries of and within the ROI such that a second polygon is formed on the ROI. The process is repeated for all vertices of the first polygon such that the second polygon is collapsed onto the ROI. This collapsed second polygon is then used to correct for optical proximity.
摘要:
A method is disclosed for providing associated shapes of an optical lithography mask in relation to predetermined main shapes of the mask. The method includes generating simplified layout patterns from the predetermined main shapes of the mask. Such layout patterns are generated by eliminating detail of the main shapes which leads to unmanufacturable associated shapes while preserving geometrically relevant shape information. The associated shapes are then generated relative to the simplified mask patterns.