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公开(公告)号：US08503701B2
公开(公告)日：2013-08-06
申请号：US12911449
申请日：2010-10-25
CPC分类号： H04R23/008 , H04R23/006
摘要： A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is fabricated on a silicon substrate using a combination of surface and bulk micromachining techniques. A 1 mm×2 mm microphone diaphragm, made of polysilicon, has stiffeners and hinge supports to ensure that it responds like a rigid body on flexible hinges. The diaphragm is designed to respond to pressure gradients, giving it a first order directional response to incident sound. This mechanical structure is integrated with a compact optoelectronic readout system that displays results based on optical interferometry.
摘要翻译： 一种麦克风，其具有用于使用衍射光栅将振动膜的声音引起的运动转换为电子信号的光学部件。 具有数字化指状物的麦克风使用表面和体微加工技术的组合在硅衬底上制造。 由多晶硅制成的1 mm×2 mm麦克风隔膜具有加强件和铰链支撑，以确保其在柔性铰链上像刚体一样响应。 隔膜设计用于响应压力梯度，给予其对入射声音的一级定向响应。 该机械结构与紧凑型光电读出系统集成，该系统基于光学干涉测量显示结果。
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公开(公告)号：US07826629B2
公开(公告)日：2010-11-02
申请号：US11335137
申请日：2006-01-19
CPC分类号： H04R23/008 , H04R23/006
摘要： A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is fabricated on a silicon substrate using a combination of surface and bulk micromachining techniques. A 1 mm×2 mm microphone diaphragm, made of polysilicon, has stiffeners and hinge supports to ensure that it responds like a rigid body on flexible hinges. The diaphragm is designed to respond to pressure gradients, giving it a first order directional response to incident sound. This mechanical structure is integrated with a compact optoelectronic readout system that displays results based on optical interferometry.
摘要翻译： 一种麦克风，其具有用于使用衍射光栅将振动膜的声音引起的运动转换为电子信号的光学部件。 具有数字化指状物的麦克风使用表面和体微加工技术的组合在硅衬底上制造。 由多晶硅制成的1 mm×2 mm麦克风隔膜具有加强件和铰链支撑，以确保其在柔性铰链上像刚体一样响应。 隔膜设计用于响应压力梯度，给予其对入射声音的一级定向响应。 该机械结构与紧凑型光电读出系统集成，该系统基于光学干涉测量显示结果。
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公开(公告)号：US20100268089A1
公开(公告)日：2010-10-21
申请号：US12827959
申请日：2010-06-30
申请人： F. Levent Degertekin
发明人： F. Levent Degertekin
CPC分类号： B06B1/0292 , G01N29/2406
摘要： Multiple electrode element capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. Some embodiments can include a forward or side looking catheter device having a plurality of cMUT arrays for transmitting and receiving ultrasonic energy. The forward or side looking intravascular device can generally comprise a plurality of cMUT arrays being disposed on a substrate in a spaced apart arrangement. The cMUT arrays can be disposed at differing locations on the substrate. The plurality of cMUT arrays can each comprise a plurality of cMUT elements. At least a portion of the plurality of cMUT elements can comprise a flexible membrane disposed above the substrate and a multiple element electrode. The multiple element electrode can comprise a plurality of electrode elements. The plurality of electrode elements can be shaped and sized to have a width less than the width of the membrane, and be further configured to operatively shape the membrane in a reception state to receive ultrasonic energy and a transmission state to transmit ultrasonic energy. Other aspects, features, and embodiments are also claimed and described.
摘要翻译： 提供了多电极元件电容微加工超声波换能器（“cMUT”）器件及其制造方法。 一些实施例可以包括具有多个用于发射和接收超声波能量的多个cMUT阵列的前向或侧视导管装置。 正向或侧面血管内装置通常可以包括以间隔开的布置设置在基底上的多个cMUT阵列。 cMUT阵列可以设置在基板上的不同位置。 多个cMUT阵列可以各自包括多个cMUT元件。 多个cMUT元件的至少一部分可以包括设置在基板上方的柔性膜和多元件电极。 多元件电极可以包括多个电极元件。 多个电极元件的形状和尺寸可以具有小于膜的宽度的宽度，并且还可以被配置成在接收状态下可操作地使膜成形以接收超声能量和透射状态以传输超声波能量。 还要求和描述其他方面，特征和实施例。
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公开(公告)号：US20100249605A1
公开(公告)日：2010-09-30
申请号：US12610334
申请日：2009-11-01
申请人： F. Levent Degertekin
发明人： F. Levent Degertekin
IPC分类号： A61B8/14
CPC分类号： B06B1/0292
摘要： Harmonic capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. In a preferred embodiment, a harmonic cMUT device generally comprises a membrane having a non-uniform mass distribution. A mass load positioned along the membrane can be utilized to alter the mass distribution of the membrane. The mass load can be a part of the membrane and formed of the same material or a different material as the membrane. The mass load can be positioned to correspond with a vibration mode of the membrane, and also to adjust or shift a vibration mode of the membrane. The mass load can also be positioned at predetermined locations along the membrane to control the harmonic vibrations of the membrane. A cMUT can also comprise a cavity defined by the membrane, a first electrode proximate the membrane, and a second electrode proximate a substrate. Other embodiments are also claimed and described.
摘要翻译： 提供谐波电容微机械超声波换能器（“cMUT”）装置及其制造方法。 在优选实施例中，谐波cMUT装置通常包括具有不均匀质量分布的膜。 可以利用沿膜定位的质量负载来改变膜的质量分布。 质量负载可以是膜的一部分，并且由与膜相同的材料或不同的材料形成。 质量负载可以被定位成对应于膜的振动模式，并且还可以调节或移动膜的振动模式。 质量负载也可以沿着膜定位在预定位置以控制膜的谐波振动。 cMUT还可以包括由膜限定的腔，邻近膜的第一电极和靠近衬底的第二电极。 还要求保护和描述其它实施例。
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公开(公告)号：US07714274B2
公开(公告)日：2010-05-11
申请号：US11854703
申请日：2007-09-13
CPC分类号： H01M8/0631
摘要： Apparatus for transporting a fluid, atomizers, reactors, integrated fuel processing apparatus, combinations thereof, methods of atomizing reactants, methods of moving fluids, methods of reverse-flow in a reactor, and combinations thereof, are provided. One exemplary apparatus for transporting a fluid, among others, includes: a channel for receiving a fluid; a sensor for determining an internal condition of the fluid in the channel; and a channel actuator in communication with the sensor for changing a cross-sectional area of the channel based on the internal condition, wherein the change in cross-sectional area controls a parameter selected from a pressure and a fluid flow.
摘要翻译： 提供了用于输送流体的装置，雾化器，反应器，集成燃料处理装置，其组合，雾化反应物的方法，移动流体的方法，反应器中的逆流方法及其组合。 一种用于运输流体的示例性装置，其中包括：用于接收流体的通道; 用于确定所述通道中的所述流体的内部状态的传感器; 以及与所述传感器连通的通道致动器，其基于所述内部条件改变所述通道的横截面面积，其中所述横截面积的变化控制从压力和流体流动中选择的参数。
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公开(公告)号：US07557342B2
公开(公告)日：2009-07-07
申请号：US11594489
申请日：2006-11-08
CPC分类号： B05B17/0638 , B01L3/0268 , B01L2400/0439 , B05B5/025 , F23D11/32 , H01J49/0018 , H01J49/165
摘要： Electrospray systems, electrospray structures, removable electrospray structures, methods of operating electrospray systems, and methods of fabricating electrospray systems, are disclosed.
摘要翻译： 公开了电喷雾系统，电喷雾结构，可移除电喷雾结构，操作电喷雾系统的方法以及制造电喷雾系统的方法。
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7.发明授权Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections 有权具有通过晶圆通孔连接的电容微加工超声换能器元件阵列公开(公告)号：US06430109B1
公开(公告)日：2002-08-06
申请号：US09667203
申请日：2000-09-21
IPC分类号： H04R1900
CPC分类号： H01L21/76898 , B06B1/0292 , H01L23/481 , H01L2224/05568 , H01L2224/05573 , H01L2224/131 , H01L2224/16145 , H01L2924/00014 , H01L2924/014 , H01L2224/05599
摘要： There is described a cMUT array with transducer elements which include a plurality of cells with membranes formed on one surface of a wafer. Voltages applied between said spaced electrodes drive said membranes. The voltages applied to said electrodes are applied from the opposite surface of the wafer through the wafer and through vias formed in the wafer.
摘要翻译： 描述了具有换能器元件的cMUT阵列，其包括形成在晶片的一个表面上的膜的多个单元。 施加在所述间隔开的电极之间的电压驱动所述膜。 施加到所述电极的电压从晶片的相对表面通过晶片和通过形成在晶片中的通孔施加。
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8.发明授权Micromachined rayleigh, lamb, and bulk wave capacitive ultrasonic transducers 失效微机械式蓝光，羊肉和体波电容式超声波换能器公开(公告)号：US06295247B1
公开(公告)日：2001-09-25
申请号：US09411784
申请日：1999-10-01
IPC分类号： H04R1700
CPC分类号： H03H9/125 , B06B1/0292 , H03H9/46
摘要： A micromachined capacitive ultrasonic transducer is used to generate and detect Rayleigh, Lamb, and bulk waves in a solid substrate. The transducer contains a substrate with a conductive back electrode, a support material on the substrate, a membrane supported above the substrate by the support material, and a conductive film on the membrane. The support material contains parallel edges defining elongated gaps over which the membrane is supported. Unsupported free regions of the membrane above the gaps are vibrated by applying an electrical signal between the conductive film and conductive back electrode, and stresses are coupled into the substrate at the attachment edges of the membrane. Acoustic modes of the substrate are excited by the stresses, and ultrasonic waves propagate in a direction perpendicular to the parallel edges. By properly choosing the membrane width, material, and thickness, the gap separation distance, and the support material height and thickness, a particular acoustic mode can be selected for a required operating frequency. The gaps may be separated by a distance equal to the wavelength or half-wavelength of the desired acoustic mode. Alternately, the gaps may be grouped, with each group separated by a wavelength or half-wavelength. The transducer can be used in many applications, including filtering and chemical sensing.
摘要翻译： 微机电容式超声换能器用于在固体基底中产生和检测瑞利，羔羊和体波。 传感器包含具有导电背电极的基板，基板上的支撑材料，通过支撑材料支撑在基板上的膜，以及膜上的导电膜。 支撑材料包含限定细长间隙的平行边缘，膜被支撑在该间隙上。 通过在导电膜和导电背电极之间施加电信号来振动间隙上方的膜的不受支撑的自由区域，并且应力在膜的附着边缘耦合到衬底中。 衬底的声学模式被应力激发，超声波在垂直于平行边缘的方向上传播。 通过适当选择膜宽度，材料和厚度，间隙间隔距离和支撑材料的高度和厚度，可以为所需的工作频率选择特定的声学模式。 间隙可以分开等于所需声学模式的波长或半波长的距离。 或者，可以将间隙分组，每组被波长或半波长分开。 传感器可用于许多应用，包括过滤和化学传感。
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9.发明授权Compact, energy-efficient ultrasound imaging probes using CMUT arrays with integrated electronics 有权使用集成电路的CMUT阵列的紧凑，节能的超声成像探头公开(公告)号：US08891334B2
公开(公告)日：2014-11-18
申请号：US13412465
申请日：2012-03-05
CPC分类号： B06B1/0215 , B06B1/0292 , B06B2201/20 , B06B2201/76 , G01S7/5202 , G01S7/52025 , G01S7/52096 , G01S15/8925 , G01S15/8993 , H04R17/00
摘要： A CMUT on CMOS imaging chip is disclosed. The imaging chip can use direct connection, CMOS architecture to minimize both internal and external connection complexity. Intelligent power management can enable the chip to be used for various imaging applications with strict power constraints, including forward-looking intra-vascular ultrasound imaging. The chip can use digital logic to control transmit and receive events to minimize power consumption and maximize image resolution. The chip can be integrated into a probe, or catheter, and requires minimal external connections. The chip can comprise integrated temperature control to prevent overheating.
摘要翻译： 公开了CMOS成像芯片上的CMUT。 成像芯片可以使用直接连接，CMOS架构来最大限度地减少内部和外部的连接复杂性。 智能电源管理可以将芯片用于具有严格功率限制的各种成像应用，包括前瞻性血管内超声成像。 该芯片可以使用数字逻辑来控制发送和接收事件以最小化功耗并最大化图像分辨率。 芯片可以集成到探头或导管中，并且需要最少的外部连接。 该芯片可以包括集成的温度控制以防止过热。
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10.发明申请COMPACT, ENERGY-EFFICIENT ULTRASOUND IMAGING PROBES USING CMUT ARRAYS WITH INTEGRATED ELECTRONICS 有权使用集成电子的CMUT阵列的精简超能量超声成像探头公开(公告)号：US20130128702A1
公开(公告)日：2013-05-23
申请号：US13471426
申请日：2012-05-14
IPC分类号： G01S15/89
CPC分类号： G01S15/89 , A61B8/12 , A61B8/445 , A61B8/4488 , A61B8/4494 , B06B1/0292 , G01S7/52047 , G01S7/5208 , G01S15/8913 , G01S15/8922 , G01S15/8925 , G01S15/8927 , G01S15/8993
摘要： A CMUT on CMOS imaging chip is disclosed. The imaging chip can use direct connection, CMOS architecture to minimize external connections and minimize chip cross-section. The CMOS architecture can enable substantially the entire chip area to be utilized for element placement. The chip can utilize arbitrarily selected transmit (Tx) and receive (Rx) element arrays to improve image quality, while reducing sampling time. The chip can comprise a plurality of dummy elements dispersed throughout the Tx and Rx elements to reduce cross-talk. The chip can utilize batch firing techniques to increase transmit power using sparse Tx arrays. The chip can comprise hexagonal Tx and or Rx subarrays for improved image quality with reduce sample sizes. The chip can utilize electrode geometry, bias voltage, and polarity to create phased and amplitude apodized arrays of Tx and Rx elements.
摘要翻译： 公开了CMOS成像芯片上的CMUT。 成像芯片可以使用直接连接，CMOS架构来最小化外部连接并最大限度地减少芯片横截面。 CMOS架构可以实现基本上整个芯片区域用于元件放置。 芯片可以利用任意选择的发送（Tx）和接收（Rx）元素阵列来提高图像质量，同时减少采样时间。 芯片可以包括分散在Tx和Rx元件中的多个虚拟元件以减少串扰。 该芯片可以利用批量点火技术来增加使用稀疏Tx阵列的发射功率。 该芯片可以包括六边形Tx和/或Rx子阵列，以改善图像质量，减少样本大小。 该芯片可以利用电极几何形状，偏置电压和极性来产生Tx和Rx元件的相位和振幅变迹数组。
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