摘要:
A process for marking articles, wherein the article to be marked is contacted with at least one marker and the absorption spectrum of the at least one marker in contact with the article has at least one narrow band with a half-height width of
摘要:
A device (110) for determining at least one optical property of a sample (112) is proposed. The device (110) comprises a tuneable excitation light source (114; 410) for applying excitation light (122) to the sample (112). The device (110) furthermore comprises a detector (128, 130; 312) for detecting detection light (132, 136; 314) emerging from the sample (112). The excitation light source (114; 410) comprises a light-emitting diode array (114), which is configured at least partly as a monolithic light-emitting diode array (114). The monolithic light-emitting diode array (114) comprises at least three light-emitting diodes (426) each having a different emission spectrum.
摘要:
A method for detecting differences between physically measurable properties of a sample and a reference sample. A two-dimensional reference field is generated and first and second two-dimensional patterns are produced respectively from the reference sample and the sample. A correction is made to sample response functions to eliminate time-dependent and location-dependent fluctuations of the detector.
摘要:
The present invention relates to a method for determining the identity or non-identity of at least one chemical compound V′ homogeneous y distributed in a medium, by a) exposing the medium containing at least one homogeneously distributed chemical compound V′ to analysis radiation with a variable wavelength λ, and b) determining the spectral measurement function I′(λ) with the aid of the absorbed, reflected, emitted and/or scattered radiation, wherein a correlation function K(δλ,c′,c) is determined according to Equation I K ( δ λ , c ′ , c ) = 1 / N · ∫ - ∞ + ∞ I ′ ( λ , c ′ ) · I ( λ + δ λ , c ) ⅆ λ ( I ) in which K(δλ,c′,c) denotes the correlation depending on the relative shift δλ of the functions I′(λ,c′) and I(λ,c) and the concentrations c′ and c of the at least one chemical compound V′ and V, c′ denotes the concentration of the at least one chemical compound V′ homogeneously distributed in the medium, with a known or suspected identity, c denotes the concentration of the at least one chemical compound V homogeneously distributed in the medium, with a known identity, I′(λ,c′) denotes the measurement function of the at least one homogeneously distributed chemical compound V′ in a medium containing the concentration c′, I(λ,c) denotes the comparison function of the at least one homogeneously distributed chemical compound V in a medium containing the concentration c, and N denotes a normalization factor and identity or non-identity between the compounds V and V′ is determined with the aid of the correlation function K(δλ,c′,c).
摘要:
A process for marking articles, wherein the article to be marked is contacted with at least one marker and the absorption spectrum of the at least one marker in contact with the article has at least one narrow band with a half-height width of
摘要:
A method detecting change of a physically measurable property of a sample due to an environmental effect, including (i) subjecting the sample to the environmental effect for an action time, the environmental effect acting on the sample with a known position-dependent intensity distribution based on a pattern function, (ii) subsequently detecting transmission, reflection, or scattering of analysis radiation by the sample as a function of position coordinates of the sample and wavelength of the analysis radiation, to determine a response function describing intensity of the transmitted, reflected, or scattered analysis radiation as a function of the position coordinates wavelength, (iii) determining correlation of the known position-dependent intensity distribution of the environmental effect, or of the pattern function on which it is based, with the response function by correlation analysis, this correlation being a measure of the change of the physically measurable property of the sample due to the environmental effect.
摘要:
A method is proposed for detecting at least one chemical compound V contained in a medium (312). The method comprises a verification step (420) which is used to determine whether V is contained in the medium (312). The method furthermore comprises an analysis step (424) in which a concentration c of the at least one chemical compound V is determined.The verification step comprises the following substeps: (a1) the medium (312) is exposed to a first analysis radiation (316) of a variable wavelength λ, the wavelength λ assuming at least two different values; (a2) at least one spectral response function A(λ) is generated with the aid of the radiation (324) absorbed and/or emitted and/or reflected and/or scattered by the medium (312) in response to the first analysis radiation (316); (a3) at least one spectral correlation function K(δλ) is formed by spectral comparison of the at least one spectral response function A(λ) with at least one pattern function R(λ+δλ), the at least one pattern function R(λ) representing a spectral measurement function of a medium (312) containing the chemical compound V and δλ being a coordinate shift; (a4) the at least one spectral correlation function K(δλ) is examined in a pattern recognition step (418), and a conclusion is made as to whether the at least one chemical compound V is contained in the medium (312); The analysis step (424) comprises the following substeps: (b1) the medium (312) is exposed to at least one second analysis radiation (318) having at least one excitation wavelength λEX; (b2) at least one spectral analysis function B(λEX,λRES) is generated with the aid of the radiation (326) of the response wavelength λRES absorbed and/or emitted and/or reflected and/or scattered by the medium (312) in response to the second analysis radiation (318) of the wavelength λEX and the concentration c is deduced therefrom.
摘要:
A method for detecting differences between physically measurable properties of a sample and a reference sample. A two-dimensional reference field is generated and first and second two-dimensional patterns are produced respectively from the reference sample and the sample. A correction is made to sample response functions to eliminate time-dependent and location-dependent fluctuations of the detector.
摘要:
A detector (110) for optically detecting at least one object (112) is proposed. The detector (110) comprises at least one optical sensor (114). The optical sensor (114) has at least one sensor region (116). The optical sensor (114) is designed to generate at least one sensor signal in a manner dependent on an illumination of the sensor region (116). The sensor signal, given the same total power of the illumination, is dependent on a geometry of the illumination, in particular on a beam cross section of the illumination on the sensor area (118). The detector (110) furthermore has at least one evaluation device (122). The evaluation device (122) is designed to generate at least one item of geometrical information from the sensor signal, in particular at least one item of geometrical information about the illumination and/or the object (112).
摘要:
The present invention relates to a method of optically imaging a wafer with a photoresist layer, wherein an imaging area on the surface of the wafer is illuminated with light and a fluorescence image is taken in the imaging area based on the fluorescent light irradiated due to the illumination by the excitation light.