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1.发明授权Method of detecting positional displacement between mask and wafer, and exposure apparatus adopting the method 失效检测掩模和晶片之间的位置偏移的方法以及采用该方法的曝光装置
公开(公告)号：US5508527A
公开(公告)日：1996-04-16
申请号：US298316
申请日：1994-09-01
CPC分类号： G03F9/7061 , G01B7/003 , G03F9/7038 , H01L21/681 , B82Y10/00 , G01Q20/02 , G01Q30/02 , G01Q40/02 , G01Q60/38 , G01Q80/00
摘要： A method and apparatus for detecting the relative positional displacement between a mask and a wafer. The mask is provided with a cantilever. The position mark is provided on the wafer so as to face the cantilever. A relative positional displacement between the mask and the wafer is detected from a deformation amount of the cantilever based on a force acting between the position mark and the cantilever upon relative movement of the position mark and the cantilever.
摘要翻译： 一种用于检测掩模和晶片之间的相对位置偏移的方法和装置。 面罩配有悬臂。 在晶片上设置位置标记以面对悬臂。 基于在位置标记和悬臂的相对运动时基于在位置标记和悬臂之间作用的力，从悬臂的变形量检测掩模和晶片之间的相对位置偏移。
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公开(公告)号：US5343460A
公开(公告)日：1994-08-30
申请号：US738427
申请日：1991-07-31
申请人： Toshihiko Miyazaki , Kunihiro Sakai , Hiroyasu Nose , Etsuro Kishi , Ryo Kuroda
发明人： Toshihiko Miyazaki , Kunihiro Sakai , Hiroyasu Nose , Etsuro Kishi , Ryo Kuroda
IPC分类号： G01Q10/00 , G01Q60/10 , G01Q60/18 , G01Q60/22 , G01Q70/14 , G01Q80/00 , G11B7/00 , G11B7/004 , G11B7/0045 , G11B7/005 , G11B7/12 , G11B7/135 , G11B9/00 , G11B9/14 , G11B11/00 , G11B11/08
CPC分类号： G11B7/005 , G11B11/00 , G11B7/00455 , G11B7/0052 , G11B7/12 , G11B7/1384 , G11B9/14 , B82Y10/00 , B82Y20/00 , G01Q80/00
摘要： Information is recorded by providing a recording medium having a recording layer on an electroconductive substrate transmitting an electromagnetic wave and an electroconductive optical probe arranged proximate to the recording medium, and applying a voltage between the substrate and the optical probe. The recorded information is read by irradiating an electromagnetic wave, preferably with a plurality of wavelengths, on the recording layer from the substrate side, and detecting with the optical probe an electromagnetic wave oozed out on the surface of the recording layer.
摘要翻译： 通过在传输电磁波的导电基片上提供具有记录层的记录介质和布置在记录介质附近的导电光学探针，并在基片和光学探针之间施加电压来记录信息。 通过从基板侧在记录层上照射优选具有多个波长的电磁波来读取所记录的信息，并用光学探针检测在记录层的表面上渗出的电磁波。
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3.发明授权Accessing method, and information processing method and information processing device utilizing the same 失效访问方法和信息处理方法以及利用该信息处理方法的信息处理设备
公开(公告)号：US5222060A
公开(公告)日：1993-06-22
申请号：US577551
申请日：1990-09-05
CPC分类号： G11B9/1481 , G11B9/063 , G11B9/14 , B82Y10/00 , Y10S977/849 , Y10S977/861 , Y10S977/872 , Y10S977/947
摘要： An accessing method which is a method for accessing a probe electrode to the standard position of the format pattern relative to a medium having a format pattern having a standard position includes the step of scanning the probe electrode so that the probe electrode crosses over the format pattern and detecting the change in tunnel current which occurs by such scanning, and the step of detecting the standard position of the format pattern based on the change in tunnel current detected and moving the probe electrode to the standard position detected. An information processing method containing the step of scanning the probe electrode along the format pattern and reading the information by detection of the tunnel current and an information processing device therefor are also disclosed.
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4.发明授权Information recording/reproducing method for recording and/or reproducing information on information recording carrier by use of probe electrode 失效用于使用探针电极记录和/或再现关于信息记录载体的信息的信息记录/再现方法
公开(公告)号：US5610898A
公开(公告)日：1997-03-11
申请号：US483862
申请日：1995-06-07
CPC分类号： G11B9/1445 , G11B17/32 , G11B9/1409 , G11B9/1418 , G11B9/1436 , G11B9/1481 , B82Y10/00 , G01Q70/06 , G01Q80/00 , Y10S977/851 , Y10S977/874
摘要： An information recording/reproducing method and apparatus is for carrying out at least one of recording and reproducing information through a probe electrode or through a plurality of probe electrodes on an information recording medium. A probe electrode is disposed on an elastic member. A relative position is so adjusted between the recording medium and the probe electrode that a repulsive force between them is comparative to an elastic force of the elastic member. In case of plural probe electrodes, they are displaced to keep an equal spacing between the recording medium and the respective probe electrodes so that they may have either a zero average or a minimized square sum of displacement. A spacer layer will do for setting a spacing between a probe electrode and the recording medium.
摘要翻译： 信息记录/再现方法和装置用于通过探针电极或通过信息记录介质上的多个探针电极来执行记录和再现信息中的至少一个。 探针电极设置在弹性构件上。 在记录介质和探针电极之间如此调节相对位置，它们之间的排斥力与弹性构件的弹性力相比较。 在多个探针电极的情况下，它们被移位以在记录介质和各个探针电极之间保持相等的间隔，使得它们可以具有零平均值或最小化的平均移位和。 间隔层将用于设置探针电极和记录介质之间的间距。
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5.发明授权Atomic force microscope with a plurality of cantilevers for recording/reproducing information 失效具有用于记录/再现信息的多个悬臂的原子力显微镜
公开(公告)号：US5260926A
公开(公告)日：1993-11-09
申请号：US870335
申请日：1992-04-17
IPC分类号： G01B11/00 , G01B11/30 , G01B21/30 , G01Q20/02 , G01Q20/04 , G01Q30/04 , G01Q30/10 , G01Q60/24 , G01Q60/40 , G01Q70/06 , G01Q70/14 , G01Q80/00 , G11B9/00 , G11B9/14 , G11B7/00
CPC分类号： G11B9/1427 , G11B9/14 , B82Y10/00 , Y10S977/874 , Y10S977/947
摘要： An information processor comprises a plurality of probes disposed so as to face to a recording medium containing an information, and a plurality of elastic members such as cantilevers supporting the respective probes. The processor reads the information by detecting each displacement of the elastic members. For the detection of displacement, the processor has an optical system for radiating a scanning light beam to the elastic members together with an optical system for detecting a reflected light from the elastic members, or alternatively has a means for detecting each displacement individually such as optically integrated optical members or piezoelectric layers provided to the elastic members.
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6.发明授权Information recording/reproducing method, recording carrier and apparatus for recording and/or reproducing information on information recording carrier by use of probe electrode 失效信息记录/再现方法，记录载体和用于使用探针电极记录和/或再现关于信息记录载体的信息的装置
公开(公告)号：US5461605A
公开(公告)日：1995-10-24
申请号：US381289
申请日：1995-01-31
CPC分类号： G11B9/1445 , G11B17/32 , G11B9/1409 , G11B9/1418 , G11B9/1436 , G11B9/1481 , B82Y10/00 , G01Q70/06 , G01Q80/00 , Y10S977/851 , Y10S977/874
摘要： An information recording/reproducing method and apparatus is for carrying out at least one of recording and reproducing information through a probe electrode or through a plurality of probe electrodes on an information recording medium. A probe electrode is disposed on an elastic member. A relative position is so adjusted between the recording medium and the probe electrode that a repulsive force between them is comparative to an elastic force of the elastic member. In case of plural probe electrodes, they are displaced to keep an equal spacing between the recording medium and the respective probe electrodes so that they may have either a zero average or a minimized square sum of displacement. A spacer layer will do for setting a spacing between a probe electrode and the recording medium.
摘要翻译： 信息记录/再现方法和装置用于通过探针电极或通过信息记录介质上的多个探针电极来执行记录和再现信息中的至少一个。 探针电极设置在弹性构件上。 在记录介质和探针电极之间如此调节相对位置，它们之间的排斥力与弹性构件的弹性力相比较。 在多个探针电极的情况下，它们被移位以在记录介质和各个探针电极之间保持相等的间隔，使得它们可以具有零平均值或最小化的平均移位和。 间隔层将用于设置探针电极和记录介质之间的间距。
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7.发明授权Method of access to recording medium, and apparatus and method for processing information 失效访问记录介质的方法，以及用于处理信息的装置和方法
公开(公告)号：US5255259A
公开(公告)日：1993-10-19
申请号：US988162
申请日：1992-12-09
申请人： Katsunori Hatanaka , Osamu Takamatsu , Akihiko Yamano , Ryo Kuroda , Hiroyasu Nose , Toshihiko Miyazaki
发明人： Katsunori Hatanaka , Osamu Takamatsu , Akihiko Yamano , Ryo Kuroda , Hiroyasu Nose , Toshihiko Miyazaki
CPC分类号： G11B19/20 , B82Y10/00 , G11B17/34 , G11B23/0014 , G11B9/1454 , G11B9/1481 , Y10S977/849 , Y10S977/932
摘要： A method of access of a probe electrode to a recording medium having on the surface thereof an edge portion having a level difference larger than a recording recess-projection or having an electron state different from a recording electron state includes steps of detecting the edge portion; causing the probe electrode to scan at a certain angle to the edge portion; and moving the recording medium in a direction along the edge portion. A method for processing information including recording, reproducing, and erasing of information by access of a probe electrode to a recording medium having on the surface thereof an edge portion having a level difference larger than a recording recess-projection or having an electron state different from a recording electron state includes steps of detecting the edge portion; causing the probe electrode to scan at a certain angle to the edge portion; and applying a pulse voltage for recording, or erasing, or a bias voltage for reproducing information between the recording medium and the probe electrode.
摘要翻译： 一种将探针电极接近记录介质的方法，该记录介质的表面具有比记录凹凸大的电平差或具有不同于记录电子态的电子态的边缘部分，包括检测边缘部分的步骤; 使探针电极与边缘部分以一定角度扫描; 以及沿着所述边缘部分的方向移动所述记录介质。 一种用于处理信息的方法，包括通过将探针电极接近记录介质进行信息的记录，再现和擦除，所述记录介质的表面具有比记录凹凸大的电平差或具有不同于 记录电子状态包括检测边缘部分的步骤; 使探针电极与边缘部分以一定角度扫描; 以及施加用于记录或擦除的脉冲电压或用于在记录介质和探针电极之间再现信息的偏置电压。
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8.发明授权
公开(公告)号：US5349735A
公开(公告)日：1994-09-27
申请号：US132161
申请日：1993-10-05
IPC分类号： G01B7/00 , G01B7/34 , G01D5/244 , G01D5/245 , G01N27/00 , G01Q10/04 , G01Q30/04 , G01Q30/06 , G01Q60/00 , G01Q60/10 , G01Q70/00 , G01Q80/00 , G11B9/00 , H01J37/00
CPC分类号： G01B7/003 , G11B9/14 , G11B9/1409 , B82Y10/00 , G01Q70/06 , G01Q80/00 , Y10S977/874 , Y10T29/49764 , Y10T29/49771
摘要： An information detection apparatus is disclosed. A plurality of probes are arranged in the apparatus so as to face a medium which carries an information, Each of the plurality of probes produces a detection signal from the medium. A performance testing device is provided in the apparatus for testing the performance of each of the plurality of probes. A detection device in the apparatus selects the signal from at least one normal probe on the basis of the test result of the testing device and detects the information in accordance with the selected signal. By such the construction in the apparatus, the detection of the information can be continuously effected even if one of the probes is broken.
摘要翻译： 公开了一种信息检测装置。 多个探针被布置在装置中以便面向携带信息的介质。多个探针中的每个探针从介质产生检测信号。 在用于测试多个探针中的每一个的性能的装置中提供性能测试装置。 该装置中的检测装置基于测试装置的测试结果从至少一个正常探针中选择信号，并根据所选择的信号检测信息。 通过这样的装置的结构，即使其中一个探针被破坏，也可以连续地进行信息的检测。
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公开(公告)号：US5132533A
公开(公告)日：1992-07-21
申请号：US621886
申请日：1990-12-05
申请人： Toshimitsu Kawase , Akihiko Yamano , Hiroyasu Nose , Toshihiko Miyazaki , Takahiro Oguchi , Ryo Kuroda
发明人： Toshimitsu Kawase , Akihiko Yamano , Hiroyasu Nose , Toshihiko Miyazaki , Takahiro Oguchi , Ryo Kuroda
CPC分类号： G11B9/1409 , B82Y10/00 , B82Y30/00
摘要： A probe closely positioned to an information carrier in apparatus to effect information reading and/or input on the information carrier is formed by opposing an electrode to an end portion of the probe to be formed. The distance between probe end portion and the electrode is detected to control the position of the electrode with respect to the probe. A voltage is applied to the probe end portion through the electrode under positioning control to form the probe end portion. The probe end portion is formed and may be reformed to maintain reliable performance of the information reading and/or input apparatus.
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公开(公告)号：US5404349A
公开(公告)日：1995-04-04
申请号：US129030
申请日：1993-09-30
CPC分类号： B82Y10/00 , G11B9/1454 , Y10S977/851
摘要： An apparatus capable of detecting a displacement of a probe from a track of a recording medium caused by track fluctuations and vibrations at a recording/reproducing period. For example, a probe is maintained to vibrate at a frequency and in the direction perpendicular to a data train at a amplitude smaller than the width of the data train. In this case, the amplitude of a reproduced signal of the data train changes with the displacement between the probe and the data train. An envelope signal of the reproduced signal is phase detected using as a reference signal the vibration waveform (standard signal) at frequency f.sub.o of the probe, to obtain a signal proportional to the displacement from the data train. Using this signal, it becomes possible to feedback control the probe so as to make it trace the data train.
摘要翻译： 一种能够检测由记录/再现周期的轨迹波动和振动引起的探测器从记录介质的轨迹的位移的装置。 例如，保持探头以比数据列的宽度小的振幅以与数据序列垂直的方向振动。 在这种情况下，数据串的再现信号的幅度随着探针与数据列之间的位移而变化。 使用探头频率fo处的振动波形（标准信号）作为参考信号来相位检测再现信号的包络信号，以获得与数据序列的位移成比例的信号。 使用该信号，可以对探头进行反馈控制，使其跟踪数据列。
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