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1.发明授权Information recording/reproducing method for recording and/or reproducing information on information recording carrier by use of probe electrode 失效用于使用探针电极记录和/或再现关于信息记录载体的信息的信息记录/再现方法
公开(公告)号：US5610898A
公开(公告)日：1997-03-11
申请号：US483862
申请日：1995-06-07
CPC分类号： G11B9/1445 , G11B17/32 , G11B9/1409 , G11B9/1418 , G11B9/1436 , G11B9/1481 , B82Y10/00 , G01Q70/06 , G01Q80/00 , Y10S977/851 , Y10S977/874
摘要： An information recording/reproducing method and apparatus is for carrying out at least one of recording and reproducing information through a probe electrode or through a plurality of probe electrodes on an information recording medium. A probe electrode is disposed on an elastic member. A relative position is so adjusted between the recording medium and the probe electrode that a repulsive force between them is comparative to an elastic force of the elastic member. In case of plural probe electrodes, they are displaced to keep an equal spacing between the recording medium and the respective probe electrodes so that they may have either a zero average or a minimized square sum of displacement. A spacer layer will do for setting a spacing between a probe electrode and the recording medium.
摘要翻译： 信息记录/再现方法和装置用于通过探针电极或通过信息记录介质上的多个探针电极来执行记录和再现信息中的至少一个。 探针电极设置在弹性构件上。 在记录介质和探针电极之间如此调节相对位置，它们之间的排斥力与弹性构件的弹性力相比较。 在多个探针电极的情况下，它们被移位以在记录介质和各个探针电极之间保持相等的间隔，使得它们可以具有零平均值或最小化的平均移位和。 间隔层将用于设置探针电极和记录介质之间的间距。
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2.发明授权Atomic force microscope with a plurality of cantilevers for recording/reproducing information 失效具有用于记录/再现信息的多个悬臂的原子力显微镜
公开(公告)号：US5260926A
公开(公告)日：1993-11-09
申请号：US870335
申请日：1992-04-17
IPC分类号： G01B11/00 , G01B11/30 , G01B21/30 , G01Q20/02 , G01Q20/04 , G01Q30/04 , G01Q30/10 , G01Q60/24 , G01Q60/40 , G01Q70/06 , G01Q70/14 , G01Q80/00 , G11B9/00 , G11B9/14 , G11B7/00
CPC分类号： G11B9/1427 , G11B9/14 , B82Y10/00 , Y10S977/874 , Y10S977/947
摘要： An information processor comprises a plurality of probes disposed so as to face to a recording medium containing an information, and a plurality of elastic members such as cantilevers supporting the respective probes. The processor reads the information by detecting each displacement of the elastic members. For the detection of displacement, the processor has an optical system for radiating a scanning light beam to the elastic members together with an optical system for detecting a reflected light from the elastic members, or alternatively has a means for detecting each displacement individually such as optically integrated optical members or piezoelectric layers provided to the elastic members.
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3.发明授权Method of detecting positional displacement between mask and wafer, and exposure apparatus adopting the method 失效检测掩模和晶片之间的位置偏移的方法以及采用该方法的曝光装置
公开(公告)号：US5508527A
公开(公告)日：1996-04-16
申请号：US298316
申请日：1994-09-01
CPC分类号： G03F9/7061 , G01B7/003 , G03F9/7038 , H01L21/681 , B82Y10/00 , G01Q20/02 , G01Q30/02 , G01Q40/02 , G01Q60/38 , G01Q80/00
摘要： A method and apparatus for detecting the relative positional displacement between a mask and a wafer. The mask is provided with a cantilever. The position mark is provided on the wafer so as to face the cantilever. A relative positional displacement between the mask and the wafer is detected from a deformation amount of the cantilever based on a force acting between the position mark and the cantilever upon relative movement of the position mark and the cantilever.
摘要翻译： 一种用于检测掩模和晶片之间的相对位置偏移的方法和装置。 面罩配有悬臂。 在晶片上设置位置标记以面对悬臂。 基于在位置标记和悬臂的相对运动时基于在位置标记和悬臂之间作用的力，从悬臂的变形量检测掩模和晶片之间的相对位置偏移。
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4.发明授权Information recording/reproducing method, recording carrier and apparatus for recording and/or reproducing information on information recording carrier by use of probe electrode 失效信息记录/再现方法，记录载体和用于使用探针电极记录和/或再现关于信息记录载体的信息的装置
公开(公告)号：US5461605A
公开(公告)日：1995-10-24
申请号：US381289
申请日：1995-01-31
CPC分类号： G11B9/1445 , G11B17/32 , G11B9/1409 , G11B9/1418 , G11B9/1436 , G11B9/1481 , B82Y10/00 , G01Q70/06 , G01Q80/00 , Y10S977/851 , Y10S977/874
摘要： An information recording/reproducing method and apparatus is for carrying out at least one of recording and reproducing information through a probe electrode or through a plurality of probe electrodes on an information recording medium. A probe electrode is disposed on an elastic member. A relative position is so adjusted between the recording medium and the probe electrode that a repulsive force between them is comparative to an elastic force of the elastic member. In case of plural probe electrodes, they are displaced to keep an equal spacing between the recording medium and the respective probe electrodes so that they may have either a zero average or a minimized square sum of displacement. A spacer layer will do for setting a spacing between a probe electrode and the recording medium.
摘要翻译： 信息记录/再现方法和装置用于通过探针电极或通过信息记录介质上的多个探针电极来执行记录和再现信息中的至少一个。 探针电极设置在弹性构件上。 在记录介质和探针电极之间如此调节相对位置，它们之间的排斥力与弹性构件的弹性力相比较。 在多个探针电极的情况下，它们被移位以在记录介质和各个探针电极之间保持相等的间隔，使得它们可以具有零平均值或最小化的平均移位和。 间隔层将用于设置探针电极和记录介质之间的间距。
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公开(公告)号：US4939556A
公开(公告)日：1990-07-03
申请号：US71393
申请日：1987-07-09
申请人： Ken Eguchi , Haruki Kawada , Kunihiro Sakai , Yoshinori Tomida , Hiroshi Matsuda , Toshiaki Kimura , Kiyoshi Takimoto , Toshihiko Miyazaki , Yuko Morikawa
发明人： Ken Eguchi , Haruki Kawada , Kunihiro Sakai , Yoshinori Tomida , Hiroshi Matsuda , Toshiaki Kimura , Kiyoshi Takimoto , Toshihiko Miyazaki , Yuko Morikawa
CPC分类号： H01L51/0504 , B82Y10/00 , H01L51/0051 , H01L51/0064 , H01L51/0067 , H01L51/0068 , H01L51/0072 , H01L51/0075 , H01L51/0508 , H01L51/0595
摘要： A semiconductor device is provided and which comprises a semiconductor having insulating layers and conductive layers laminated alternately. The semiconductor comprises an organic film, and electrodes are provided on the semiconductor.
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公开(公告)号：US4780790A
公开(公告)日：1988-10-25
申请号：US51368
申请日：1987-05-19
申请人： Kiyoshi Takimoto , Haruki Kawada , Kunihiro Sakai , Yoshinori Tomida , Hiroshi Matsuda , Kenji Saito , Ken Eguchi , Toshihiko Miyazaki
发明人： Kiyoshi Takimoto , Haruki Kawada , Kunihiro Sakai , Yoshinori Tomida , Hiroshi Matsuda , Kenji Saito , Ken Eguchi , Toshihiko Miyazaki
CPC分类号： H01L51/0051 , H01C7/006 , H01G4/008 , H01G4/14 , H01L51/0075 , H01L51/05
摘要： An electronic device is provided which has a function of an organic film condensor. The device comprises a plural number of electroconductive layers each comprising a monomolecular film of an organic molecule having both of an electroconductive site and a hydrophobic site in combination or a built-up film thereof, and a dielectric layer of a monomolecular film of an organic molecule having both of a hydrophobic site in combination or a built-up film thereof between the electroconductive layers laminated on a substrate.
摘要翻译： 提供具有有机膜冷凝器功能的电子器件。 该装置包括多个导电层，每个导电层均包含具有导电部位和疏水部位的组合的有机分子的单分子膜或其组合膜，以及有机分子的单分子膜的电介质层 在层叠在基板上的导电层之间具有组合的疏水部位或其组合膜。
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公开(公告)号：US4929524A
公开(公告)日：1990-05-29
申请号：US099345
申请日：1987-09-10
申请人： Kunihiro Sakai , Toshihiko Miyazaki , Ken Eguchi , Haruki Kawada , Yoshinori Tomida , Toshiaki Kimura , Hiroshi Matsuda , Kiyoshi Takimoto , Kenji Saito
发明人： Kunihiro Sakai , Toshihiko Miyazaki , Ken Eguchi , Haruki Kawada , Yoshinori Tomida , Toshiaki Kimura , Hiroshi Matsuda , Kiyoshi Takimoto , Kenji Saito
IPC分类号： G03G5/06 , H01L31/0224 , H01L51/00 , H01L51/30
CPC分类号： H01L51/002 , H01L31/0224 , H01L51/0014 , H01L51/0051 , H01L51/0064 , H01L51/0075 , H01L51/0012 , H01L51/0067 , H01L51/0068 , H01L51/0071 , H01L51/0077 , H01L51/05 , H01L51/42
摘要： There is provided an organic conductive medium, comprising an organic conductive layer formed on the surface of a substrate having fine uneven shape.
摘要翻译： 提供了一种有机导电介质，其包括形成在具有微细凹凸形状的基板的表面上的有机导电层。
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8.发明授权
公开(公告)号：US4835083A
公开(公告)日：1989-05-30
申请号：US38722
申请日：1987-04-15
申请人： Kunihiro Sakai , Kenji Saitoh , Toshihiko Miyazaki , Ken Eguchi , Haruki Kawada , Toshiaki Kimura , Kiyoshi Takimoto , Hiroshi Matsuda , Yukuo Nishimura , Yoshinori Tomida
发明人： Kunihiro Sakai , Kenji Saitoh , Toshihiko Miyazaki , Ken Eguchi , Haruki Kawada , Toshiaki Kimura , Kiyoshi Takimoto , Hiroshi Matsuda , Yukuo Nishimura , Yoshinori Tomida
CPC分类号： H01B1/121 , B82Y10/00 , H01L51/0032
摘要： An electroconductive film is provided which has a first region constituted of a lamination layer comprising an electroconductive layer and an insulating layer, and a second layer having reduced or eliminated electroconductivity. Another type of electroconductive film is also provided having a first region constituted of a limination layer containing a compound having a polymerizable double bond and comprising an electroconductive layer and an insulating layer, and a second layer which is modified and having changed dissolution characteristics. The layer may be formed of a monomolecular film or monomolecular built-up film. A patterning method by use of the above electroconductive film is also provided.
摘要翻译： 提供一种导电膜，其具有由包括导电层和绝缘层的层叠层构成的第一区域和具有降低或消除的导电性的第二层。 还提供了另一种类型的导电膜，其具有第一区域，该第一区域由包含具有可聚合双键的化合物的限制层构成，并且包含导电层和绝缘层，以及第二层，其被改性并具有改变的溶解特性。 该层可以由单分子膜或单分子组合膜形成。 还提供了使用上述导电膜的图案化方法。
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公开(公告)号：US4798740A
公开(公告)日：1989-01-17
申请号：US030364
申请日：1987-03-26
申请人： Yoshinori Tomida , Kunihiro Sakai , Hiroshi Matsuda , Haruki Kawada , Ken Eguchi , Toshiaki Kimura , Kiyoshi Takimoto , Kenji Saitoh , Toshihiko Miyazaki
发明人： Yoshinori Tomida , Kunihiro Sakai , Hiroshi Matsuda , Haruki Kawada , Ken Eguchi , Toshiaki Kimura , Kiyoshi Takimoto , Kenji Saitoh , Toshihiko Miyazaki
摘要： A polymerizable film is provided which comprises a transition metal and a polymerizable compound, and having a solubility in a solvent which changes through a maximum and a minimum repeatedly with an increase in energy imparted for polymerization. The polymerized film may comprise a polymerizable compound represented by the formula:R--C.tbd.C--C.tbd.C--(R.sub.1).sub.n --Xwherein R and R.sub.1 are hydrophobic sites, X is a hydrophilic site, and n is 0 or 1. This polymerizable film is useful as recording materials and resist materials.
摘要翻译： 提供了一种可聚合膜，其包含过渡金属和可聚合化合物，并且在溶剂中具有溶解度，其随着聚合所施加的能量的增加而重复地发生最大和最小的变化。 聚合膜可以包含由下式表示的可聚合化合物：RC 3BOND CC 3BOND C-（R1）nX其中R和R 1是疏水性位点，X是亲水性位点，n是0或1.该可聚合膜可用作 记录材料和抗蚀剂材料。
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10.发明授权Information processing apparatus provided with surface aligning mechanism between probe head substrate and recording medium substrate 失效信息处理装置，在探头头基板和记录介质基板之间具有表面对准机构
公开(公告)号：US5418771A
公开(公告)日：1995-05-23
申请号：US201430
申请日：1994-02-24
申请人： Yuji Kasanuki , Katsunori Hatanaka , Toshihiko Miyazaki , Kunihiro Sakai , Haruki Kawada , Tsutomi Ikeda , Ryo Kuroda , Takehiko Kawasaki , Akihiko Yamano , Masahiro Tagawa
发明人： Yuji Kasanuki , Katsunori Hatanaka , Toshihiko Miyazaki , Kunihiro Sakai , Haruki Kawada , Tsutomi Ikeda , Ryo Kuroda , Takehiko Kawasaki , Akihiko Yamano , Masahiro Tagawa
CPC分类号： G01B7/31 , G11B9/1436 , B82Y10/00 , Y10S977/849 , Y10S977/943 , Y10S977/947
摘要： An information processing apparatus includes first, second and third upper electrodes provided on a first substrate, and first, second and third lower electrodes provided on a second substrate opposed to the first, second and third upper electrodes, respectively. Also provided are first, second and third detectors for detecting a first capacitance between the first upper and lower electrodes, a second capacitance between the second upper and lower electrodes and a third capacitance between the third upper and lower electrodes. In addition, the apparatus also includes a first driver for moving the first and second substrates relative to each other in a first direction with respect to the substrate surfaces, a second driver for moving the first and second substrates relative to each other in a second direction perpendicular to the first direction, a third driver for rotating the first and second substrates relative to each other about an axis in a third direction perpendicular to the first and second directions, and a control unit.
摘要翻译： 信息处理装置包括设置在第一基板上的第一，第二和第三上电极以及分别设置在与第一，第二和第三上电极相对的第二基板上的第一，第二和第三下电极。 还提供了用于检测第一上电极和下电极之间的第一电容的第一，第二和第三检测器，第二上电极和下电极之间的第二电容以及第三上电极和下电极之间的第三电容。 此外，该装置还包括第一驱动器，用于相对于基板表面在第一方向上相对于彼此移动第一和第二基板;第二驱动器，用于沿第二方向相对于彼此移动第一和第二基板 垂直于第一方向的第三驱动器，用于使垂直于第一和第二方向的第三方向上的第一和第二基板相对于彼此旋转的第三驱动器，以及控制单元。
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