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1.发明授权Information recording/reproducing method for recording and/or reproducing information on information recording carrier by use of probe electrode 失效用于使用探针电极记录和/或再现关于信息记录载体的信息的信息记录/再现方法
公开(公告)号：US5610898A
公开(公告)日：1997-03-11
申请号：US483862
申请日：1995-06-07
CPC分类号： G11B9/1445 , G11B17/32 , G11B9/1409 , G11B9/1418 , G11B9/1436 , G11B9/1481 , B82Y10/00 , G01Q70/06 , G01Q80/00 , Y10S977/851 , Y10S977/874
摘要： An information recording/reproducing method and apparatus is for carrying out at least one of recording and reproducing information through a probe electrode or through a plurality of probe electrodes on an information recording medium. A probe electrode is disposed on an elastic member. A relative position is so adjusted between the recording medium and the probe electrode that a repulsive force between them is comparative to an elastic force of the elastic member. In case of plural probe electrodes, they are displaced to keep an equal spacing between the recording medium and the respective probe electrodes so that they may have either a zero average or a minimized square sum of displacement. A spacer layer will do for setting a spacing between a probe electrode and the recording medium.
摘要翻译： 信息记录/再现方法和装置用于通过探针电极或通过信息记录介质上的多个探针电极来执行记录和再现信息中的至少一个。 探针电极设置在弹性构件上。 在记录介质和探针电极之间如此调节相对位置，它们之间的排斥力与弹性构件的弹性力相比较。 在多个探针电极的情况下，它们被移位以在记录介质和各个探针电极之间保持相等的间隔，使得它们可以具有零平均值或最小化的平均移位和。 间隔层将用于设置探针电极和记录介质之间的间距。
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2.发明授权Atomic force microscope with a plurality of cantilevers for recording/reproducing information 失效具有用于记录/再现信息的多个悬臂的原子力显微镜
公开(公告)号：US5260926A
公开(公告)日：1993-11-09
申请号：US870335
申请日：1992-04-17
IPC分类号： G01B11/00 , G01B11/30 , G01B21/30 , G01Q20/02 , G01Q20/04 , G01Q30/04 , G01Q30/10 , G01Q60/24 , G01Q60/40 , G01Q70/06 , G01Q70/14 , G01Q80/00 , G11B9/00 , G11B9/14 , G11B7/00
CPC分类号： G11B9/1427 , G11B9/14 , B82Y10/00 , Y10S977/874 , Y10S977/947
摘要： An information processor comprises a plurality of probes disposed so as to face to a recording medium containing an information, and a plurality of elastic members such as cantilevers supporting the respective probes. The processor reads the information by detecting each displacement of the elastic members. For the detection of displacement, the processor has an optical system for radiating a scanning light beam to the elastic members together with an optical system for detecting a reflected light from the elastic members, or alternatively has a means for detecting each displacement individually such as optically integrated optical members or piezoelectric layers provided to the elastic members.
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3.发明授权Method of detecting positional displacement between mask and wafer, and exposure apparatus adopting the method 失效检测掩模和晶片之间的位置偏移的方法以及采用该方法的曝光装置
公开(公告)号：US5508527A
公开(公告)日：1996-04-16
申请号：US298316
申请日：1994-09-01
CPC分类号： G03F9/7061 , G01B7/003 , G03F9/7038 , H01L21/681 , B82Y10/00 , G01Q20/02 , G01Q30/02 , G01Q40/02 , G01Q60/38 , G01Q80/00
摘要： A method and apparatus for detecting the relative positional displacement between a mask and a wafer. The mask is provided with a cantilever. The position mark is provided on the wafer so as to face the cantilever. A relative positional displacement between the mask and the wafer is detected from a deformation amount of the cantilever based on a force acting between the position mark and the cantilever upon relative movement of the position mark and the cantilever.
摘要翻译： 一种用于检测掩模和晶片之间的相对位置偏移的方法和装置。 面罩配有悬臂。 在晶片上设置位置标记以面对悬臂。 基于在位置标记和悬臂的相对运动时基于在位置标记和悬臂之间作用的力，从悬臂的变形量检测掩模和晶片之间的相对位置偏移。
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4.发明授权Information recording/reproducing method, recording carrier and apparatus for recording and/or reproducing information on information recording carrier by use of probe electrode 失效信息记录/再现方法，记录载体和用于使用探针电极记录和/或再现关于信息记录载体的信息的装置
公开(公告)号：US5461605A
公开(公告)日：1995-10-24
申请号：US381289
申请日：1995-01-31
CPC分类号： G11B9/1445 , G11B17/32 , G11B9/1409 , G11B9/1418 , G11B9/1436 , G11B9/1481 , B82Y10/00 , G01Q70/06 , G01Q80/00 , Y10S977/851 , Y10S977/874
摘要： An information recording/reproducing method and apparatus is for carrying out at least one of recording and reproducing information through a probe electrode or through a plurality of probe electrodes on an information recording medium. A probe electrode is disposed on an elastic member. A relative position is so adjusted between the recording medium and the probe electrode that a repulsive force between them is comparative to an elastic force of the elastic member. In case of plural probe electrodes, they are displaced to keep an equal spacing between the recording medium and the respective probe electrodes so that they may have either a zero average or a minimized square sum of displacement. A spacer layer will do for setting a spacing between a probe electrode and the recording medium.
摘要翻译： 信息记录/再现方法和装置用于通过探针电极或通过信息记录介质上的多个探针电极来执行记录和再现信息中的至少一个。 探针电极设置在弹性构件上。 在记录介质和探针电极之间如此调节相对位置，它们之间的排斥力与弹性构件的弹性力相比较。 在多个探针电极的情况下，它们被移位以在记录介质和各个探针电极之间保持相等的间隔，使得它们可以具有零平均值或最小化的平均移位和。 间隔层将用于设置探针电极和记录介质之间的间距。
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5.发明授权Information processing apparatus provided with surface aligning mechanism between probe head substrate and recording medium substrate 失效信息处理装置，在探头头基板和记录介质基板之间具有表面对准机构
公开(公告)号：US5418771A
公开(公告)日：1995-05-23
申请号：US201430
申请日：1994-02-24
申请人： Yuji Kasanuki , Katsunori Hatanaka , Toshihiko Miyazaki , Kunihiro Sakai , Haruki Kawada , Tsutomi Ikeda , Ryo Kuroda , Takehiko Kawasaki , Akihiko Yamano , Masahiro Tagawa
发明人： Yuji Kasanuki , Katsunori Hatanaka , Toshihiko Miyazaki , Kunihiro Sakai , Haruki Kawada , Tsutomi Ikeda , Ryo Kuroda , Takehiko Kawasaki , Akihiko Yamano , Masahiro Tagawa
CPC分类号： G01B7/31 , G11B9/1436 , B82Y10/00 , Y10S977/849 , Y10S977/943 , Y10S977/947
摘要： An information processing apparatus includes first, second and third upper electrodes provided on a first substrate, and first, second and third lower electrodes provided on a second substrate opposed to the first, second and third upper electrodes, respectively. Also provided are first, second and third detectors for detecting a first capacitance between the first upper and lower electrodes, a second capacitance between the second upper and lower electrodes and a third capacitance between the third upper and lower electrodes. In addition, the apparatus also includes a first driver for moving the first and second substrates relative to each other in a first direction with respect to the substrate surfaces, a second driver for moving the first and second substrates relative to each other in a second direction perpendicular to the first direction, a third driver for rotating the first and second substrates relative to each other about an axis in a third direction perpendicular to the first and second directions, and a control unit.
摘要翻译： 信息处理装置包括设置在第一基板上的第一，第二和第三上电极以及分别设置在与第一，第二和第三上电极相对的第二基板上的第一，第二和第三下电极。 还提供了用于检测第一上电极和下电极之间的第一电容的第一，第二和第三检测器，第二上电极和下电极之间的第二电容以及第三上电极和下电极之间的第三电容。 此外，该装置还包括第一驱动器，用于相对于基板表面在第一方向上相对于彼此移动第一和第二基板;第二驱动器，用于沿第二方向相对于彼此移动第一和第二基板 垂直于第一方向的第三驱动器，用于使垂直于第一和第二方向的第三方向上的第一和第二基板相对于彼此旋转的第三驱动器，以及控制单元。
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6.发明授权Accessing method, and information processing method and information processing device utilizing the same 失效访问方法和信息处理方法以及利用该信息处理方法的信息处理设备
公开(公告)号：US5222060A
公开(公告)日：1993-06-22
申请号：US577551
申请日：1990-09-05
CPC分类号： G11B9/1481 , G11B9/063 , G11B9/14 , B82Y10/00 , Y10S977/849 , Y10S977/861 , Y10S977/872 , Y10S977/947
摘要： An accessing method which is a method for accessing a probe electrode to the standard position of the format pattern relative to a medium having a format pattern having a standard position includes the step of scanning the probe electrode so that the probe electrode crosses over the format pattern and detecting the change in tunnel current which occurs by such scanning, and the step of detecting the standard position of the format pattern based on the change in tunnel current detected and moving the probe electrode to the standard position detected. An information processing method containing the step of scanning the probe electrode along the format pattern and reading the information by detection of the tunnel current and an information processing device therefor are also disclosed.
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公开(公告)号：US5343460A
公开(公告)日：1994-08-30
申请号：US738427
申请日：1991-07-31
申请人： Toshihiko Miyazaki , Kunihiro Sakai , Hiroyasu Nose , Etsuro Kishi , Ryo Kuroda
发明人： Toshihiko Miyazaki , Kunihiro Sakai , Hiroyasu Nose , Etsuro Kishi , Ryo Kuroda
IPC分类号： G01Q10/00 , G01Q60/10 , G01Q60/18 , G01Q60/22 , G01Q70/14 , G01Q80/00 , G11B7/00 , G11B7/004 , G11B7/0045 , G11B7/005 , G11B7/12 , G11B7/135 , G11B9/00 , G11B9/14 , G11B11/00 , G11B11/08
CPC分类号： G11B7/005 , G11B11/00 , G11B7/00455 , G11B7/0052 , G11B7/12 , G11B7/1384 , G11B9/14 , B82Y10/00 , B82Y20/00 , G01Q80/00
摘要： Information is recorded by providing a recording medium having a recording layer on an electroconductive substrate transmitting an electromagnetic wave and an electroconductive optical probe arranged proximate to the recording medium, and applying a voltage between the substrate and the optical probe. The recorded information is read by irradiating an electromagnetic wave, preferably with a plurality of wavelengths, on the recording layer from the substrate side, and detecting with the optical probe an electromagnetic wave oozed out on the surface of the recording layer.
摘要翻译： 通过在传输电磁波的导电基片上提供具有记录层的记录介质和布置在记录介质附近的导电光学探针，并在基片和光学探针之间施加电压来记录信息。 通过从基板侧在记录层上照射优选具有多个波长的电磁波来读取所记录的信息，并用光学探针检测在记录层的表面上渗出的电磁波。
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公开(公告)号：US06640433B1
公开(公告)日：2003-11-04
申请号：US09076235
申请日：1998-05-12
申请人： Ryo Kuroda , Hiroshi Matsuda , Kiyoshi Takimoto
发明人： Ryo Kuroda , Hiroshi Matsuda , Kiyoshi Takimoto
IPC分类号： H05K302
CPC分类号： H01L21/76838 , B82Y10/00 , G01Q80/00 , H05K3/043 , H05K3/105 , H05K2201/0323 , Y10S977/856 , Y10T29/49117 , Y10T29/49155 , Y10T29/49167 , Y10T428/24975
摘要： The method of forming a micro-pattern comprising forming an organic thin film by building up monomolecular films on an insulating substrate; heating and baking the organic thin film to turn the organic thin film into an amorphous carbon or graphite film, thereby providing an electroconductive thin film; and processing the organic thin film by conducting a microcutting work on it while holding a probe in contact with the organic thin film by means of atomic force to produce the micro-pattern.
摘要翻译： 形成微图形的方法，包括通过在绝缘基板上形成单分子膜形成有机薄膜; 加热和烘烤有机薄膜以将有机薄膜转变成无定形碳或石墨薄膜，由此提供导电薄膜; 并通过在其上进行微切削加工来处理有机薄膜，同时通过原子力保持与有机薄膜接触的探针以产生微图案。
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9.发明授权Information recording method and apparatus recording two or more changes in topographical and electrical states 失效记录地形和电气状态两个或多个变化的信息记录方法和装置
公开(公告)号：US5446720A
公开(公告)日：1995-08-29
申请号：US180473
申请日：1994-01-12
CPC分类号： B82Y10/00 , G11B9/14 , G11B9/1481 , G11B13/00 , Y10S977/947
摘要： This specification discloses a method of recording information on a recording medium which has the relative scanning of the recording medium by a probe for information recording, the relative scanning being effected along the surface of the recording medium, the recording medium being capable of forming two or more kinds of state changes relative to the state of non-recording, and a recording process onto the recording medium through the probe effecting the relative scanning, the recording process being carried out by intermittently forming bits on the recording medium, each of the bits being formed with one of the two or more kinds of state changes in conformity with recording information. The specification also discloses a method of reproducing information recorded on a recording medium by such information recording method. The specification further discloses an apparatus for carrying out the information recording method, and an apparatus for carrying out the information reproducing method.
摘要翻译： 本说明书公开了一种在记录介质上记录信息的方法，该记录介质通过用于信息记录的探针具有记录介质的相对扫描，沿着记录介质的表面进行相对扫描，该记录介质能够形成两个或 相对于非记录状态的更多种类的状态变化，以及通过执行相对扫描的探针在记录介质上的记录处理，通过在记录介质上间歇地形成位来进行记录处理，每个位是 形成为符合记录信息的两种或多种状态变化中的一种。 本说明书还公开了一种通过这种信息记录方法再现记录在记录介质上的信息的方法。 本说明书还公开了一种用于执行信息记录方法的装置，以及用于执行信息再现方法的装置。
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10.发明授权Information recording medium, and information recording and/or reproducing method and apparatus 失效信息记录介质和信息记录和/或再现方法和装置
公开(公告)号：US5202879A
公开(公告)日：1993-04-13
申请号：US789321
申请日：1991-11-08
申请人： Takahiro Oguchi , Kunihiro Sakai , Hiroyasu Nose , Ryo Kuroda , Akihiko Yamano
发明人： Takahiro Oguchi , Kunihiro Sakai , Hiroyasu Nose , Ryo Kuroda , Akihiko Yamano
CPC分类号： G11B9/14 , G11B19/04 , G11B9/1418 , G11B9/1481 , B82Y10/00 , Y10S977/849 , Y10S977/947
摘要： In an information recording medium where information is recorded and/or reproduced by a probe performing relative scanning, an information region for detecting abnormality of the probe is provided separate from a region where information is recorded and/or reproduced. Also disclosed is an information recording and/or reproducing method for recording information on and/or reproducing information from an information recording medium while relatively scanning the recording medium by a probe, which includes a step of detecting abnormality of the probe by detecting a predetermined information region separated from a region where the information is recorded and/or reproduced on the information recording medium. Also disclosed is an information recording and/or reproducing apparatus for recording information on and/or reproducing information from an information recording medium while relatively scanning the information recording medium by a probe, which includes an abnormality detection device for detecting abnormality of the probe according to a result of a detection by the probe of a predetermined information region separated from a region where the information is recorded and/or reproduced on the information recording medium.
摘要翻译： 在通过执行相对扫描的探头记录和/或再现信息的信息记录介质中，与信息被记录和/或再现的区域分离地设置用于检测探测器的异常的信息区域。 还公开了一种用于在通过探针相对扫描记录介质的同时从信息记录介质记录信息和/或再现信息的信息记录和/或再现方法，其包括通过检测预定信息来检测探测器的异常的步骤 区域与在信息记录介质上记录和/或再现信息的区域分离。 还公开了一种信息记录和/或再现装置，用于在通过探针相对扫描信息记录介质的同时从信息记录介质记录信息和/或再现信息，该探针包括用于检测探针的异常的异常检测装置， 通过探测器检测与信息在信息记录介质上记录和/或再现的区域分离的预定信息区域的结果。
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