METHOD OF FABRICATING ZINC OXIDE THIN FILM
    2.
    发明申请
    METHOD OF FABRICATING ZINC OXIDE THIN FILM 审中-公开
    氧化锌薄膜的制备方法

    公开(公告)号:US20140144770A1

    公开(公告)日:2014-05-29

    申请号:US14089080

    申请日:2013-11-25

    IPC分类号: C23C14/00

    摘要: A method of fabricating a zinc oxide (ZnO) thin film in which the surface shape of the ZnO thin film can be controlled during deposition of the ZnO thin film. The method includes depositing the ZnO thin film on a substrate by chemical vapor deposition (CVD). The CVD feeds an etching gas that etches the ZnO thin film concurrently with a source gas and an oxidizer gas, thereby controlling the surface shape of the ZnO thin film that is being deposited.

    摘要翻译: 一种制造氧化锌(ZnO)薄膜的方法,其中可以在ZnO薄膜沉积期间控制ZnO薄膜的表面形状。 该方法包括通过化学气相沉积(CVD)将ZnO薄膜沉积在衬底上。 CVD将蚀刻气体与源气体和氧化剂气体同时蚀刻ZnO薄膜,从而控制正在沉积的ZnO薄膜的表面形状。

    Method of fabricating light extraction substrate for OLED
    3.
    发明授权
    Method of fabricating light extraction substrate for OLED 有权
    制造OLED的光提取基板的方法

    公开(公告)号:US09246137B2

    公开(公告)日:2016-01-26

    申请号:US14268291

    申请日:2014-05-02

    摘要: A method of fabricating a light extraction substrate for an OLE) by which the flatness of the light extraction substrate for an OLED can be increased. Particles of a first metal oxide and a sol of a second metal oxide are inputted and mixed into an organic solvent. A base substrate is coated with a mixture of the first and second metal oxides and the organic solvent. A resultant coating film on the base substrate is heat-treated. The coating film is coated with the second metal oxide to form a metal oxide thin film on the base substrate. In the metal oxide thin film, the particles of the first metal oxide are impregnated in a matrix of the second metal oxide.

    摘要翻译: 一种制造用于OLE的光提取衬底的方法),通过该方法可以增加用于OLED的光提取衬底的平坦度。 输入第一金属氧化物的颗粒和第二金属氧化物的溶胶并将其混合到有机溶剂中。 用第一和第二金属氧化物和有机溶剂的混合物涂覆基底基材。 对基底基板上的所得涂膜进行热处理。 用第二金属氧化物涂覆涂膜,以在基底上形成金属氧化物薄膜。 在金属氧化物薄膜中,将第一金属氧化物的颗粒浸渍在第二金属氧化物的基体中。

    Method Of Fabricating Light Extraction Substrate For OLED
    7.
    发明申请
    Method Of Fabricating Light Extraction Substrate For OLED 有权
    制造OLED的光提取衬底的方法

    公开(公告)号:US20140329004A1

    公开(公告)日:2014-11-06

    申请号:US14268291

    申请日:2014-05-02

    IPC分类号: H01L51/56

    摘要: A method of fabricating a light extraction substrate for an OLE) by which the flatness of the light extraction substrate for an OLED can be increased. Particles of a first metal oxide and a sol of a second metal oxide are inputted and mixed into an organic solvent. A base substrate is coated with a mixture of the first and second metal oxides and the organic solvent. A resultant coating film on the base substrate is heat-treated. The coating film is coated with the second metal oxide to form a metal oxide thin film on the base substrate. In the metal oxide thin film, the particles of the first metal oxide are impregnated in a matrix of the second metal oxide.

    摘要翻译: 一种制造用于OLE的光提取衬底的方法),通过该方法可以增加用于OLED的光提取衬底的平坦度。 输入第一金属氧化物的颗粒和第二金属氧化物的溶胶并将其混合到有机溶剂中。 用第一和第二金属氧化物和有机溶剂的混合物涂覆基底基材。 对基底基板上的所得涂膜进行热处理。 用第二金属氧化物涂覆涂膜,以在基底上形成金属氧化物薄膜。 在金属氧化物薄膜中,将第一金属氧化物的颗粒浸渍在第二金属氧化物的基体中。