公开(公告)号：US20170125246A1

公开(公告)日：2017-05-04

申请号：US15158755

申请日：2016-05-19

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JOON-HWA BAE ,  BYOUNG KWON CHOO ,  JEONG KYUN NA ,  BYOUNG HO CHEONG ,  JOO WOAN CHO

IPC: H01L21/02 ,  H01L21/308 ,  H01L27/12 ,  H01L21/3105

CPC classification number: H01L21/02675 ,  H01L21/02532 ,  H01L21/02592 ,  H01L21/02672 ,  H01L21/3086 ,  H01L21/3105 ,  H01L21/32139 ,  H01L27/1281

Abstract: A laser crystallization method includes forming a plurality of first protrusions and depressions on a surface of an amorphous silicon layer, wherein a first protrusion and an adjacent first depression of the plurality of first protrusions and depressions, together, have a first pitch, and irradiating the amorphous silicon layer with a laser beam to form a polycrystalline silicon layer.

公开(公告)号：US20220188536A1

公开(公告)日：2022-06-16

申请号：US17538901

申请日：2021-11-30

Applicant: Samsung Display Co., Ltd.

Inventor： JOON-HWA BAE ,  BONGGU KANG ,  SEUNGBAE KANG ,  HEESUNG YANG ,  WOOJIN CHO ,  BYOUNG KWON CHOO

IPC: G06K9/00 ,  G06F1/16 ,  G06F3/041 ,  G06F21/32

Abstract: A method of manufacturing a detection sensor is disclosed. The method includes forming a biometric information sensing layer including a transistor on a base layer, forming an initial optical pattern layer on the biometric information sensing layer, patterning the initial optical pattern layer to form a plurality of transmissive portions spaced apart from each other and having a first zeta potential, coating a light blocking material to form an initial light blocking portion that covers a side surface and an upper surface of the transmissive portions and has a second zeta potential different from the first zeta potential, and polishing the initial light blocking portion such that the upper surface of the transmissive portions is exposed to form a light blocking portion. The initial light blocking portion is polished by the abrasive, which has the first zeta potential, using a pad.

公开(公告)号：US20170104015A1

公开(公告)日：2017-04-13

申请号：US15140725

申请日：2016-04-28

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JOON-HWA BAE ,  JONG CHAN LEE ,  WOONG HEE JEONG ,  IN SU HWANG

IPC: H01L27/12 ,  H01L29/04 ,  H01L29/16

CPC classification number: H01L27/1229 ,  H01L27/124 ,  H01L27/1274 ,  H01L29/04 ,  H01L29/1604 ,  H01L29/66765 ,  H01L29/78618 ,  H01L29/78678

Abstract: A manufacturing method of a thin film transistor array panel according to an exemplary embodiment of the present invention includes forming an amorphous silicon thin film on a substrate. A lower region of the amorphous silicon thin film is crystallized to form a polycrystalline silicon thin film by irradiating a laser beam with an energy density of from about 150 mj/cm2 to about 250 mj/cm2 to the amorphous silicon thin film.

公开(公告)号：US20170087664A1

公开(公告)日：2017-03-30

申请号：US15175649

申请日：2016-06-07

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JOO WOAN CHO ,  BYOUNG HO CHEONG ,  OLEG PRUDNIKOV ,  JEONG KYUN NA ,  JOON-HWA BAE ,  SEUNG HWAN LEE ,  BYOUNG KWON CHOO

IPC: B23K26/00 ,  G02B27/28 ,  B23K26/073 ,  G02B5/30 ,  G02B13/02 ,  B23K26/067 ,  G02B27/09 ,  G02B5/04

CPC classification number: B23K26/354 ,  B23K26/067 ,  B23K26/073 ,  G02B5/04 ,  G02B5/3083 ,  G02B13/02 ,  G02B27/0905 ,  G02B27/0955 ,  G02B27/283 ,  G02B27/286 ,  G03F7/70566

Abstract: A polarization module and a laser exposure apparatus have a polarization module including a first lens and a second lens that reduce a one-directional length of a cross-section of an incident laser beam having an optical axis. A polarization beam splitter divides the laser beam passing through the first and second lenses into two laser beams that are polarized in different directions with respect to each other. A first prism lens and a second prism lens emit an output laser beam by controlling the two laser beams that are divided by the polarization beam splitter to positions that are symmetrical with respect to the optical axis. At least one half wave plate is disposed between the polarization beam splitter and the first prism lens.