公开(公告)号：US20200243466A1

公开(公告)日：2020-07-30

申请号：US16527323

申请日：2019-07-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jin Nam Kim ,  Tae Seong Kim ,  Hoon Joo Na ,  Kwang Jin Moon

IPC: H01L23/00 ,  H01L23/48 ,  H01L25/18 ,  H01L23/522 ,  H01L23/528

Abstract: A semiconductor device includes a first semiconductor chip having a first bonding layer and a second semiconductor chip stacked on the first semiconductor chip and having a second bonding layer. The first bonding layer includes a first bonding pad, a plurality of first internal vias, and a first interconnection connecting the first bonding pad and the plurality of first internal vias. The second bonding layer includes a second bonding pad bonded to the first bonding pad. An upper surface of the first interconnection and an upper surface of the first bonding pad are coplanar with an upper surface of the first bonding layer. The first interconnection is electrically connected to the plurality of different first internal lines through the plurality of first internal vias.

公开(公告)号：US12170259B2

公开(公告)日：2024-12-17

申请号：US17715103

申请日：2022-04-07

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ju Bin Seo ,  Seok Ho Kim ,  Kwang Jin Moon

IPC: H01L23/00 ,  H01L21/66 ,  H01L25/065 ,  H01L23/498

Abstract: A semiconductor package that include first and second semiconductor chips bonded together, wherein the first semiconductor chip includes a first semiconductor substrate, a first semiconductor element layer and a first wiring structure sequentially stacked on a first surface of the first semiconductor substrate, first connecting pads and first test pads on the first wiring structure, and first front-side bonding pads, which are connected to the first connecting pads, wherein the second semiconductor chip includes a second semiconductor substrate, a second semiconductor element layer and a second wiring structure sequentially stacked on a third surface of the second semiconductor substrate, and first back-side bonding pads bonded to the first front-side bonding pads on the fourth surface of the second semiconductor substrate, and wherein the first test pads are not electrically connected to the second semiconductor chip.

公开(公告)号：US20220384311A1

公开(公告)日：2022-12-01

申请号：US17581084

申请日：2022-01-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung Ha Oh ,  Kwang Jin Moon ,  Ho-Jin Lee

IPC: H01L23/48 ,  H01L21/768

Abstract: A semiconductor device comprises a substrate that including a frontside comprising an active region and a backside opposite to the frontside, an electronic element on the active region, a frontside wiring structure electrically connected to the electronic element on the frontside of the substrate, and a backside wiring structure electrically connected to the electronic element on the backside of the substrate. The backside wiring structure includes a plurality of backside wiring patterns sequentially stacked on the backside of the substrate, and a super via pattern that intersects and extends through at least one layer of the plurality of backside wiring patterns.

公开(公告)号：US20200168471A1

公开(公告)日：2020-05-28

申请号：US16439211

申请日：2019-06-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： JOO HEE JANG ,  Seok Ho Kim ,  Hoon Joo NA ,  Kwang Jin Moon ,  Jae Hyung Park ,  Kyu Ha Lee

IPC: H01L21/321 ,  H01L27/146

Abstract: A method for wafer planarization includes forming a second insulating layer and a polishing layer on a substrate having a chip region and a scribe lane region; forming a first through-hole in the polishing layer in the chip region and the scribe lane region and a second through-hole in the second insulating layer in the chip region, wherein the second through-hole and the first through-hole meet in the chip region; forming a pad metal layer inside the first through-hole and the second through-hole and on an upper surface of the polishing layer; and polishing the polishing layer and the pad metal layer by a chemical mechanical polishing (CMP) process to expose an upper surface of the second insulating layer in the chip region and the scribe lane region

公开(公告)号：US11417536B2

公开(公告)日：2022-08-16

申请号：US16439211

申请日：2019-06-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Joo Hee Jang ,  Seok Ho Kim ,  Hoon Joo Na ,  Kwang Jin Moon ,  Jae Hyung Park ,  Kyu Ha Lee

IPC: H01L21/321 ,  H01L27/146 ,  H01L23/00

Abstract: A method for wafer planarization includes forming a second insulating layer and a polishing layer on a substrate having a chip region and a scribe lane region; forming a first through-hole in the polishing layer in the chip region and the scribe lane region and a second through-hole in the second insulating layer in the chip region, wherein the second through-hole and the first through-hole meet in the chip region; forming a pad metal layer inside the first through-hole and the second through-hole and on an upper surface of the polishing layer; and polishing the polishing layer and the pad metal layer by a chemical mechanical polishing (CMP) process to expose an upper surface of the second insulating layer in the chip region and the scribe lane region.

公开(公告)号：US10770447B2

公开(公告)日：2020-09-08

申请号：US16400465

申请日：2019-05-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ho Jin Lee ,  Seok Ho Kim ,  Kwang Jin Moon ,  Byung Lyul Park ,  Nae In Lee

IPC: H01L25/00 ,  H01L23/00 ,  H01L25/065 ,  H01L21/308 ,  H01L21/3065 ,  H01L21/768 ,  H01L21/67

Abstract: There is provided a method for fabricating a substrate structure capable of enhancing process reproducibility and process stability by trimming a bevel region of a substrate using a wafer level process. The method includes providing a first substrate including first and second surfaces opposite each other and a first device region formed at the first surface, providing a second substrate including third and fourth surfaces opposite each other and a second device region at the third surface, bonding the first substrate and the second substrate to electrically connect the first device region and the second device region, and forming a trimmed substrate. The forming the trimmed substrate includes etching an edge region of the second substrate bonded to the first substrate.

公开(公告)号：US10468400B2

公开(公告)日：2019-11-05

申请号：US15869808

申请日：2018-01-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Pil Kyu Kang ,  Seok Ho Kim ,  Tae Yeong Kim ,  Kwang Jin Moon ,  Ho Jin Lee

IPC: H01L25/00 ,  H01L25/065 ,  H01L21/768 ,  H01L21/18 ,  H01L23/00

Abstract: A method of manufacturing a substrate structure includes providing a first substrate including a first device region on a first surface, providing a second substrate including a second device region on a second surface, such that a width of the first device region is greater than a width of the second device region, and bonding the first substrate and the second substrate, such that the first and second device regions are facing each other and are electrically connected to each other.

公开(公告)号：US10325897B2

公开(公告)日：2019-06-18

申请号：US15705427

申请日：2017-09-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ho Jin Lee ,  Seok Ho Kim ,  Kwang Jin Moon ,  Byung Lyul Park ,  Nae In Lee

IPC: H01L21/768 ,  H01L23/00 ,  H01L25/00 ,  H01L25/065 ,  H01L21/3065 ,  H01L21/308 ,  H01L21/67

Abstract: There is provided a method for fabricating a substrate structure capable of enhancing process reproducibility and process stability by trimming a bevel region of a substrate using a wafer level process. The method includes providing a first substrate including first and second surfaces opposite each other and a first device region formed at the first surface, providing a second substrate including third and fourth surfaces opposite each other and a second device region at the third surface, bonding the first substrate and the second substrate to electrically connect the first device region and the second device region, and forming a trimmed substrate. The forming the trimmed substrate includes etching an edge region of the second substrate bonded to the first substrate.

公开(公告)号：US12249557B2

公开(公告)日：2025-03-11

申请号：US17581084

申请日：2022-01-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung Ha Oh ,  Kwang Jin Moon ,  Ho-Jin Lee

IPC: H01L23/48 ,  H01L21/768 ,  H01L21/8234 ,  H01L23/50 ,  H01L23/522 ,  H01L23/528 ,  H01L23/535 ,  H01L23/538 ,  H01L27/088

Abstract: A semiconductor device comprises a substrate that including a frontside comprising an active region and a backside opposite to the frontside, an electronic element on the active region, a frontside wiring structure electrically connected to the electronic element on the frontside of the substrate, and a backside wiring structure electrically connected to the electronic element on the backside of the substrate. The backside wiring structure includes a plurality of backside wiring patterns sequentially stacked on the backside of the substrate, and a super via pattern that intersects and extends through at least one layer of the plurality of backside wiring patterns.

公开(公告)号：US20240006362A1

公开(公告)日：2024-01-04

申请号：US18155988

申请日：2023-01-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ju Bin Seo ,  Seok Ho Kim ,  Kwang Jin Moon ,  Ho-Jin Lee

IPC: H01L23/00

CPC classification number: H01L24/14 ,  H01L24/05 ,  H01L24/13 ,  H01L2224/14519 ,  H01L2224/1403 ,  H01L2224/0401 ,  H01L2224/05546 ,  H01L2224/13083 ,  H01L2224/05655 ,  H01L2224/13155 ,  H01L2224/13147 ,  H01L2224/13111 ,  H01L2224/13139 ,  H01L2224/13164 ,  H01L2224/13169 ,  H01L2224/13144

Abstract: A semiconductor device including a substrate, a wiring pattern in the substrate, a passivation layer on the substrate, the passivation layer and the substrate including a first recess penetrating a part of each of the passivation layer and the substrate and extending toward the wiring pattern, a post connected to the wiring pattern and including a first portion within the first recess and a second portion on the first portion and protruding from a top surface of the passivation layer, a signal bump including a seed layer on the post, a lower bump on the seed layer, and an upper bump on the lower bump, and a heat transfer bump apart from the signal bump, electrically insulated from the wiring pattern, and including another seed layer on the passivation layer, another lower bump on the another seed layer, and another upper bump on the another lower bump may be provided.