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    ADHESIVE TAPE COMPOSITION FOR ELECTRONIC COMPONENTS
    3.
    发明申请
    ADHESIVE TAPE COMPOSITION FOR ELECTRONIC COMPONENTS 审中-公开
    电子部件用胶带组合物

    公开(公告)号：US20090011166A1

    公开(公告)日：2009-01-08

    申请号：US12190241

    申请日：2008-08-12

    申请人： Sang-Pil KIM ,  Hae-Sang Jun ,  Woo-Seok Kim ,  Se-Young Cha

    发明人： Sang-Pil KIM ,  Hae-Sang Jun ,  Woo-Seok Kim ,  Se-Young Cha

    IPC分类号： C09J109/02 ,  B32B33/00 ,  B32B27/06 ,  C08L63/10 ,  B32B27/32 ,  C09J7/02

    CPC分类号： C08L13/00 ,  C08L61/06 ,  C08L63/00 ,  C08L2666/04 ,  C09J163/00 ,  Y10T428/1476 ,  Y10T428/266 ,  Y10T428/31721 ,  Y10T428/31938 ,  C08L2666/02

    摘要： The present invention pertains to an adhesive tape composition for electronic components used for bonding electronic components used in semiconductor devices, e.g., leads, PRH, semiconductor chips, die pads, etc. In particular, the present invention concerns an adhesive tape composition excellent in electric reliability, adhesive strength and taping workability.The adhesive tape composition according to the present invention is characterized in that it contains acrylonitrile butadiene rubber (NBR) containing the carboxyl functional group at the end thereof, epoxy resin, phenol resin and one or more sorts of hardener selected from amine and acid anhydride hardeners.

    摘要翻译： 本发明涉及用于接合半导体器件（例如引线，PRH，半导体芯片，芯片焊盘等）的电子部件的电子部件用胶粘剂组合物。特别地，本发明涉及电气性优异的胶带组合物 可靠性，粘合强度和胶带加工性。 根据本发明的胶带组合物的特征在于它含有末端含有羧基官能团的丙烯腈丁二烯橡胶（NBR），环氧树脂，酚醛树脂和一种或多种选自胺和酸酐硬化剂的硬化剂 。

    Adhesive tape composition for electronic components
    4.
    发明申请
    Adhesive tape composition for electronic components 审中-公开
    电子元件用胶带组合物

    公开(公告)号：US20060089465A1

    公开(公告)日：2006-04-27

    申请号：US11107894

    申请日：2005-04-18

    申请人： Sang-Pil Kim ,  Hae-Sang Jun ,  Woo-Seok Kim ,  Se-Young Cha

    发明人： Sang-Pil Kim ,  Hae-Sang Jun ,  Woo-Seok Kim ,  Se-Young Cha

    IPC分类号： C08L63/00 ,  C08L9/02

    CPC分类号： C08L13/00 ,  C08L61/06 ,  C08L63/00 ,  C08L2666/04 ,  C09J163/00 ,  Y10T428/1476 ,  Y10T428/266 ,  Y10T428/31721 ,  Y10T428/31938 ,  C08L2666/02

    摘要： The present invention pertains to an adhesive tape composition for electronic components used for bonding electronic components used in semiconductor devices, e.g., leads, PRH, semiconductor chips, die pads, etc. In particular, the present invention concerns an adhesive tape composition excellent in electric reliability, adhesive strength and taping workability. The adhesive tape composition according to the present invention is characterized in that it contains acrylonitrile butadiene rubber (NBR) containing the carboxyl functional group at the end thereof, epoxy resin, phenol resin and one or more sorts of hardener selected from amine and acid anhydride hardeners.

    摘要翻译： 本发明涉及用于接合半导体器件（例如引线，PRH，半导体芯片，芯片焊盘等）的电子部件的电子部件用胶粘剂组合物。特别地，本发明涉及电气性优异的胶带组合物 可靠性，粘合强度和胶带加工性。 根据本发明的胶带组合物的特征在于它含有末端含有羧基官能团的丙烯腈丁二烯橡胶（NBR），环氧树脂，酚醛树脂和一种或多种选自胺和酸酐硬化剂的硬化剂 。

    Gas supply device and apparatus for processing a substrate
    5.
    发明申请
    Gas supply device and apparatus for processing a substrate 审中-公开
    用于处理衬底的气体供应装置和装置

    公开(公告)号：US20070087296A1

    公开(公告)日：2007-04-19

    申请号：US11581111

    申请日：2006-10-16

    申请人： Woo-Seok Kim ,  Jae-Hyun Han ,  Joo-Pyo Hong ,  No-Hyun Huh

    发明人： Woo-Seok Kim ,  Jae-Hyun Han ,  Joo-Pyo Hong ,  No-Hyun Huh

    IPC分类号： F23C5/08

    CPC分类号： C23C16/45508 ,  C23C16/4558

    摘要： A gas supply device may include a first gas supply member that may be disposed in a chamber and around a substrate loaded in the chamber. The first gas supply member may include nozzles for providing a gas onto the substrate. A second gas supply member that may provide the gas supplied from at least one gas supply line to the first gas supply member.

    摘要翻译： 气体供应装置可以包括第一气体供应构件，其可以设置在腔室中并且围绕装载在腔室中的衬底。 第一气体供给构件可以包括用于在基底上提供气体的喷嘴。 第二气体供应构件，其可以将从至少一个气体供应管线供应的气体提供给第一气体供应构件。

    PLASMA PROCESSING APPARATUS
    6.
    发明申请
    PLASMA PROCESSING APPARATUS 审中-公开
    等离子体加工设备

    公开(公告)号：US20110284163A1

    公开(公告)日：2011-11-24

    申请号：US13086475

    申请日：2011-04-14

    申请人： Jun-Ho Yoon ,  Kyoung-Sub Shin ,  Woo-Seok Kim ,  Dong-Kwon Kim ,  Hyung-Yong Kim ,  Yong-Ho Jeon

    发明人： Jun-Ho Yoon ,  Kyoung-Sub Shin ,  Woo-Seok Kim ,  Dong-Kwon Kim ,  Hyung-Yong Kim ,  Yong-Ho Jeon

    IPC分类号： H01L21/00 ,  C23F1/08

    CPC分类号： H01L21/67069 ,  H01J37/32935 ,  H01J37/32972

    摘要： A plasma processing apparatus includes a chamber for processing a substrate. A plasma generator is provided to generate plasma within the chamber. A window is provided in a sidewall of the chamber, and the window transmits light from the plasma within the chamber. A photocatalytic layer is provided on an inner surface of the window such that the photocatalytic layer is activated as a result of exposure to light from the plasma to decompose a residual product on the inner surface of the window.

    摘要翻译： 等离子体处理装置包括用于处理基板的室。 提供等离子体发生器以在腔室内产生等离子体。 窗口设置在室的侧壁中，并且窗口从腔室内的等离子体透射光。 在窗的内表面上提供光催化层，使得光催化层由于暴露于等离子体的光而被激活，从而在窗的内表面上分解残留产物。

    Duty correcting circuit, delay-locked loop circuit including the circuit, and method of correcting duty
    8.
    发明授权
    Duty correcting circuit, delay-locked loop circuit including the circuit, and method of correcting duty 失效
    负责校正电路，包括该电路的延迟锁定环路电路以及校正功能的方法

    公开(公告)号：US08456212B2

    公开(公告)日：2013-06-04

    申请号：US13050652

    申请日：2011-03-17

    申请人： Woo-Seok Kim ,  Do-Hyung Kim ,  Tae-Kwang Jang ,  Se-Hyung Jeon

    发明人： Woo-Seok Kim ,  Do-Hyung Kim ,  Tae-Kwang Jang ,  Se-Hyung Jeon

    IPC分类号： H03K3/017

    CPC分类号： H03K5/1565

    摘要： A duty correcting circuit includes a duty steerer circuit, a differential clock generator, and a charge pump circuit. The duty steerer circuit corrects a duty cycle of an input clock signal in response to a duty control signal and generates an output clock signal. The differential clock generator generates two internal clock signals having a phase difference of 180° from each other based on the output clock signal. The charge pump circuit performs a charge pump operation in a differential mode in response to the internal clock signals to generate a duty control signal.

    摘要翻译： 一个占空比校正电路包括占空比转子电路，差分时钟发生器和电荷泵电路。 占空比电路响应于占空比控制信号校正输入时钟信号的占空比，并产生输出时钟信号。 差分时钟发生器基于输出时钟信号产生彼此相位差为180°的两个内部时钟信号。 电荷泵电路响应于内部时钟信号在差分模式下执行电荷泵操作以产生占空比控制信号。

    APPARATUS AND METHOD FOR MONITORING CHAMBER STATUS IN SEMICONDUCTOR FABRICATION PROCESS
    10.
    发明申请
    APPARATUS AND METHOD FOR MONITORING CHAMBER STATUS IN SEMICONDUCTOR FABRICATION PROCESS 有权
    用于监测半导体制造工艺中的室状态的装置和方法

    公开(公告)号：US20110063128A1

    公开(公告)日：2011-03-17

    申请号：US12858691

    申请日：2010-08-18

    申请人： Sang-Wuk Park ,  Woo-Seok Kim ,  Yong-Jin Kim

    发明人： Sang-Wuk Park ,  Woo-Seok Kim ,  Yong-Jin Kim

    IPC分类号： H04J14/08

    CPC分类号： H04J14/08 ,  H01L21/67069 ,  H01L21/67253

    摘要： A chamber-status monitoring apparatus includes a plurality of chambers, a time-division multiplexer configured to receive, via optical fiber probes, optical signals from each chamber, to divide each optical signal into first time slots having a predetermined duration, and to multiplex the first time slots to generate an OTDM signal, a multi-input optical emission spectroscope configured to receive and disperse the OTDM signal according to wavelengths to measure spectrum information, and a controller configured to divide the spectrum information of the dispersed OTDM signal into second time slots with a predetermined time interval therebetween, to classify the second time slots according to the chambers to obtain spectrum information of the optical signals of the individual chambers, and to control endpoint detection in each of the chambers in accordance with the spectrum information of the optical signal of the corresponding chamber.

    摘要翻译： 室状态监视装置包括多个室，时分多路复用器，被配置为经由光纤探针从每个室接收光信号，以将每个光信号划分成具有预定持续时间的第一时隙，并将多路复用 用于产生OTDM信号的第一时隙;被配置为根据波长接收和分散OTDM信号以测量频谱信息的多输入光发射分光器;以及控制器，被配置为将分散的OTDM信号的频谱信息划分为第二时隙 以其间的预定时间间隔，根据室对第二时隙进行分类，以获得各个室的光信号的频谱信息，并且根据光信号的频谱信息来控制每个室中的端点检测 相应的房间。