公开(公告)号：US20050275930A1

公开(公告)日：2005-12-15

申请号：US10869539

申请日：2004-06-15

申请人： Satyadev Patel ,  Andrew Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

发明人： Satyadev Patel ,  Andrew Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

IPC分类号： G02B26/00 ,  G02B26/08

CPC分类号： G02B26/0841 ,  B81C3/001 ,  Y10S359/90 ,  Y10T156/10

摘要： The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

摘要翻译： 本发明提供了一种微结构器件，其包括多个衬底，其中器件的部件形成在衬底上。 为了保持基板之间的间隙的均匀性，提供并分布在间隙中的多个支柱以防止间隙尺寸的减小。 可以通过将支柱结合到微结构的部件来防止间隙尺寸的增加。 或者，可以通过将间隙内的压力维持在微结构将在其中操作的压力以下来防止间隙尺寸的增加。 形成微反射镜和电极的基板的电接触可以通过许多方式制成，例如电接触区域，电接触焊盘和电接触弹簧。

公开(公告)号：US07787170B2

公开(公告)日：2010-08-31

申请号：US10869539

申请日：2004-06-15

申请人： Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

发明人： Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

IPC分类号： G02B26/00

CPC分类号： G02B26/0841 ,  B81C3/001 ,  Y10S359/90 ,  Y10T156/10

摘要： The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

摘要翻译： 本发明提供了一种微结构器件，其包括多个衬底，其中器件的部件形成在衬底上。 为了保持基板之间的间隙的均匀性，提供并分布在间隙中的多个支柱以防止间隙尺寸的减小。 可以通过将支柱结合到微结构的部件来防止间隙尺寸的增加。 或者，可以通过将间隙内的压力维持在微结构将在其中操作的压力以下来防止间隙尺寸的增加。 形成微反射镜和电极的基板的电接触可以通过许多方式制成，例如电接触区域，电接触焊盘和电接触弹簧。

公开(公告)号：US08693082B2

公开(公告)日：2014-04-08

申请号：US12853411

申请日：2010-08-10

申请人： Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

发明人： Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

IPC分类号： G02B26/00 ,  G02B26/08

CPC分类号： G02B26/0841 ,  B81C3/001 ,  Y10S359/90 ,  Y10T156/10

摘要： The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

摘要翻译： 本发明提供了一种微结构器件，其包括多个衬底，其中器件的部件形成在衬底上。 为了保持基板之间的间隙的均匀性，提供并分布在间隙中的多个支柱以防止间隙尺寸的减小。 可以通过将支柱结合到微结构的部件来防止间隙尺寸的增加。 或者，可以通过将间隙内的压力维持在微结构将在其中操作的压力以下来防止间隙尺寸的增加。 形成微反射镜和电极的基板的电接触可以通过许多方式制成，例如电接触区域，电接触焊盘和电接触弹簧。

公开(公告)号：US20100302618A1

公开(公告)日：2010-12-02

申请号：US12853411

申请日：2010-08-10

申请人： Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

发明人： Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

IPC分类号： G02B26/00 ,  B32B37/14 ,  B05D5/06

CPC分类号： G02B26/0841 ,  B81C3/001 ,  Y10S359/90 ,  Y10T156/10

摘要： The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

摘要翻译： 本发明提供了一种微结构器件，其包括多个衬底，其中器件的部件形成在衬底上。 为了保持基板之间的间隙的均匀性，提供并分布在间隙中的多个支柱以防止间隙尺寸的减小。 可以通过将支柱结合到微结构的部件来防止间隙尺寸的增加。 或者，可以通过将间隙内的压力维持在微结构将在其中操作的压力以下来防止间隙尺寸的增加。 形成微反射镜和电极的基板的电接触可以通过许多方式制成，例如电接触区域，电接触焊盘和电接触弹簧。

公开(公告)号：US20080096313A1

公开(公告)日：2008-04-24

申请号：US11954076

申请日：2007-12-11

申请人： Satayadev Patel ,  Andrew Huibers ,  Steve Chiang ,  Robert Duboc ,  Thomas Grobelny ,  Hung Nan Chen ,  Dietrich Dehlinger ,  Peter Richards ,  Hongqin Shi ,  Anthony Sun

发明人： Satayadev Patel ,  Andrew Huibers ,  Steve Chiang ,  Robert Duboc ,  Thomas Grobelny ,  Hung Nan Chen ,  Dietrich Dehlinger ,  Peter Richards ,  Hongqin Shi ,  Anthony Sun

IPC分类号： H01L21/48

CPC分类号： B81B7/0077 ,  B81B2201/042 ,  B81C1/00269 ,  B81C1/00904 ,  B81C2203/0118 ,  B82Y30/00 ,  G02B26/0833 ,  G02B26/0841 ,  H01L24/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01049 ,  H01L2924/01054 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01076 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/04953 ,  H01L2924/10329 ,  H01L2924/12036 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/1461 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/3025 ,  H01L2924/00

摘要： A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.

摘要翻译： 公开了投影系统，空间光调制器和用于形成MEMS器件的方法。 空间光调制器可以具有与包括微镜阵列的基板中的一个结合在一起的两个基板。 在一个或两个晶片上沉积吸气剂材料和/或固体或液体润滑剂之后，两个基底可以在晶片级粘结。 如果需要，晶片可以密封在一起，并且两个基板之间的压力可以低于大气。

公开(公告)号：US20050074919A1

公开(公告)日：2005-04-07

申请号：US10167361

申请日：2002-06-11

申请人： Satayadev Patel ,  Andrew Huibers ,  Steve Chiang ,  Robert Duboc ,  Thomas Grobelny ,  Hung Chen ,  Dietrich Dehlinger ,  Peter Richards ,  Hongqin Shi ,  Anthony Sun

发明人： Satayadev Patel ,  Andrew Huibers ,  Steve Chiang ,  Robert Duboc ,  Thomas Grobelny ,  Hung Chen ,  Dietrich Dehlinger ,  Peter Richards ,  Hongqin Shi ,  Anthony Sun

IPC分类号： B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C3/00 ,  B81C99/00 ,  G02B26/08 ,  H01L21/301 ,  H01L21/60 ,  H01L23/02 ,  H01L23/22 ,  H01L23/24 ,  H01L21/44

CPC分类号： B81B7/0077 ,  B81B2201/042 ,  B81C1/00269 ,  B81C1/00904 ,  B81C2203/0118 ,  B82Y30/00 ,  G02B26/0833 ,  G02B26/0841 ,  H01L24/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01049 ,  H01L2924/01054 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01076 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/04953 ,  H01L2924/10329 ,  H01L2924/12036 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/1461 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/3025 ,  H01L2924/00

摘要： A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material andlor solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.

摘要翻译： 公开了投影系统，空间光调制器和用于形成MEMS器件的方法。 空间光调制器可以具有与包括微镜阵列的基板中的一个结合在一起的两个基板。 在一个或两个晶片上沉积吸气材料和固体或液体润滑剂之后，两个基底可以在晶片级结合。 如果需要，晶片可以密封在一起，并且两个基板之间的压力可以低于大气。

公开(公告)号：US08202689B2

公开(公告)日：2012-06-19

申请号：US11914122

申请日：2006-05-11

申请人： Michael Heller ,  Benjamin Sullivan ,  Dietrich Dehlinger

发明人： Michael Heller ,  Benjamin Sullivan ,  Dietrich Dehlinger

IPC分类号： C12Q1/68

CPC分类号： G01N33/531 ,  B82Y30/00 ,  C12Q1/68 ,  G01N33/48721

摘要： The invention relates to processes and devices for the controlled fabrication of nanostructures from starting components that have high fidelity recognition properties and multiple binding groups. In one embodiment, the invention relates to the formation of nanostructures using controlled sequential addition of nanocomponents at regular intervials via sequential formation of binding pairs or other chemical binding reactions.

摘要翻译： 本发明涉及用于从具有高保真度识别特性和多个结合基团的起始组分控制制造纳米结构的方法和装置。 在一个实施方案中，本发明涉及使用通过连续形成结合对或其它化学结合反应在常规间隔区内以受控顺序添加纳米组分形成纳米结构。

公开(公告)号：US20050176029A1

公开(公告)日：2005-08-11

申请号：US10970756

申请日：2004-10-20

申请人： Michael Heller ,  Benjamin Sullivan ,  Sanja Zlatanovic ,  Sadik Esener ,  Dietrich Dehlinger

发明人： Michael Heller ,  Benjamin Sullivan ,  Sanja Zlatanovic ,  Sadik Esener ,  Dietrich Dehlinger

IPC分类号： C12Q1/68 ,  G01N20060101 ,  G01N33/00 ,  G01N33/53 ,  G01N33/543 ,  H01L21/00

CPC分类号： G01N33/54346 ,  B82Y5/00 ,  B82Y10/00 ,  B82Y15/00 ,  B82Y30/00

摘要： The present invention relates to nanoscale transduction systems that produce reversible signals to facilitate detection. In one respect, the invention relates to the analysis of molecular binding events using higher order signaling nanoscale constructs, or “nanomachines”, that allow nanostructures to be individually detectable, even in the midst of high background noise. Such systems are particularly useful for improving the performance of rare target detection methods, as well as being generally useful in any field in which sensitivity, discrimination and confidence in detection are important.

摘要翻译： 本发明涉及产生可逆信号以促进检测的纳米尺度转导系统。 在一个方面，本发明涉及使用更高级信号的纳米尺度构建体或“纳米机器”的分子结合事件的分析，即使在高背景噪声中也允许纳米结构单独检测。 这种系统对于改善稀有目标检测方法的性能特别有用，并且在敏感性，鉴别和检测置信度重要的任何领域中通常是有用的。

公开(公告)号：US08727129B2

公开(公告)日：2014-05-20

申请号：US13571640

申请日：2012-08-10

申请人： Klint A. Rose ,  Karl A. Fisher ,  Douglas A. Wajda ,  Raymond P. Mariella, Jr. ,  Christopher Bailey ,  Dietrich Dehlinger ,  Maxim Shusteff ,  Byoungsok Jung ,  Kevin D. Ness

发明人： Klint A. Rose ,  Karl A. Fisher ,  Douglas A. Wajda ,  Raymond P. Mariella, Jr. ,  Christopher Bailey ,  Dietrich Dehlinger ,  Maxim Shusteff ,  Byoungsok Jung ,  Kevin D. Ness

IPC分类号： B03B5/00

CPC分类号： B01L3/50273 ,  B01D21/28 ,  B01D21/283 ,  B01D2221/10 ,  B01L3/502761 ,  B01L2200/0631 ,  B01L2200/0636 ,  B01L2200/0652 ,  B01L2300/0816 ,  B01L2300/0864 ,  B01L2400/0439 ,  B01L2400/0487 ,  G01N1/4077 ,  G01N33/48728 ,  G01N33/491 ,  G01N2001/4094

摘要： An ultrasonic microfluidic system includes a separation channel for conveying a sample fluid containing small particles and large particles, flowing substantially parallel, adjacent to a recovery fluid, with which it is in contact. An acoustic transducer produces an ultrasound standing wave, that generates a pressure field having at least one node of minimum pressure amplitude. An acoustic extension structure is located proximate to said separation channel for positioning said acoustic node off center in said acoustic area and concentrating the large particles in said recovery fluid stream.

摘要翻译： 超声波微流体系统包括用于输送包含小颗粒和大颗粒的样品流体的分离通道，所述样品流体基本上平行于与其接触的回收流体相邻流动。 声换能器产生超声驻波，其产生具有至少一个最小压力振幅节点的压力场。 声学延伸结构位于所述分离通道附近，用于将所述声音节点偏离所述声学区域的中心，并将大颗粒集中在所述回收流体流中。

公开(公告)号：US20130043170A1

公开(公告)日：2013-02-21

申请号：US13571640

申请日：2012-08-10

申请人： Klint A. Rose ,  Karl A. Fisher ,  Douglas A. Wajda ,  Raymond P. Mariella, JR. ,  Christopher Bailey ,  Dietrich Dehlinger ,  Maxim Shusteff ,  Byoungsok Jung ,  Kevin D. Ness

发明人： Klint A. Rose ,  Karl A. Fisher ,  Douglas A. Wajda ,  Raymond P. Mariella, JR. ,  Christopher Bailey ,  Dietrich Dehlinger ,  Maxim Shusteff ,  Byoungsok Jung ,  Kevin D. Ness

IPC分类号： B03B5/60

CPC分类号： B01L3/50273 ,  B01D21/28 ,  B01D21/283 ,  B01D2221/10 ,  B01L3/502761 ,  B01L2200/0631 ,  B01L2200/0636 ,  B01L2200/0652 ,  B01L2300/0816 ,  B01L2300/0864 ,  B01L2400/0439 ,  B01L2400/0487 ,  G01N1/4077 ,  G01N33/48728 ,  G01N33/491 ,  G01N2001/4094

摘要： An ultrasonic microfluidic system includes a separation channel for conveying a sample fluid containing small particles and large particles, flowing substantially parallel, adjacent to a recovery fluid, with which it is in contact. An acoustic transducer produces an ultrasound standing wave, that generates a pressure field having at least one node of minimum pressure amplitude. An acoustic extension structure is located proximate to said separation channel for positioning said acoustic node off center in said acoustic area and concentrating the large particles in said recovery fluid stream.

摘要翻译： 超声波微流体系统包括用于输送包含小颗粒和大颗粒的样品流体的分离通道，所述样品流体基本上平行于与其接触的回收流体相邻流动。 声换能器产生超声驻波，其产生具有至少一个最小压力振幅节点的压力场。 声学延伸结构位于所述分离通道附近，用于将所述声音节点偏离所述声学区域的中心，并将大颗粒集中在所述回收流体流中。