公开(公告)号：US5127792A

公开(公告)日：1992-07-07

申请号：US676458

申请日：1991-03-26

申请人： Seigo Katsuta ,  Yoichi Kanemitsu ,  Masao Matsumura

发明人： Seigo Katsuta ,  Yoichi Kanemitsu ,  Masao Matsumura

IPC分类号： F04D15/00 ,  F04D29/04 ,  F04D29/048 ,  F04D29/049 ,  F16C39/06

CPC分类号： F04D29/048 ,  F04D29/049 ,  F16C32/0476 ,  F16C2360/42 ,  F16C2360/44

摘要： A cemtrifugal pump in which the thrust generated by an impeller is balanced by the operation of a balancing disc device. In the pump, a magnetic bearing is employed as an axial thrust bearing. The distance between the surface of a balancing disc and an axial displacement detecting surface which, together with the pump shaft, and the distance between such surface of a balancing disc seat is a fixed-side member which faces the balancing disc surface. The surface of a displacement sensor is another fixed-side member which faces the axial displacement detecting surface and are made equal to each other, or the latter distance is made slightly larger than the former distance. The neutral position of the magnetic thrust bearing is made to substantially coincide with the axial position of the rotator of the pump and is determined by the balancing disc device during running of the pump. By these arrangements, the position of the stator is determined by the balancing disc device during normal operation of the pump, whereas the position is determined by the magnetic thrust bearing when the pump is at rest or in a transient running state.

摘要翻译： 一种离心泵，其中由叶轮产生的推力通过平衡盘装置的操作来平衡。 在泵中，使用磁轴承作为轴向推力轴承。 平衡盘的表面与轴向位移检测表面之间的距离，其与泵轴一起以及平衡盘座的这种表面之间的距离是面向平衡盘表面的固定侧构件。 位移传感器的表面是面向轴向位移检测表面并且彼此相等的另一固定侧构件，或者将后一距离略大于前一距离。 磁力推力轴承的中立位置使其基本上与泵的旋转器的轴向位置一致，并且在泵运行期间由平衡盘装置确定。 通过这些布置，定子的位置由泵的正常操作期间的平衡盘装置确定，而当泵处于静止或处于暂时运行状态时，该位置由磁性推力轴承确定。

公开(公告)号：US5649425A

公开(公告)日：1997-07-22

申请号：US391762

申请日：1995-02-21

申请人： Masao Matsumura ,  Takao Takeuchi ,  Seigo Katsuta

发明人： Masao Matsumura ,  Takao Takeuchi ,  Seigo Katsuta

IPC分类号： F01K25/10 ,  F04D1/06 ,  F04D13/04

CPC分类号： F01K25/10 ,  F04D1/06 ,  F04D13/04

摘要： A turboexpander pump unit has a vertical or horizontal shaft, a pump connected to an end of the shaft for pressurizing a liquid fluid to a pressure higher than a predetermined delivery pressure, a heat exchanger for heating and converting the liquid fluid pressurized by the pump into a high-pressure gas, and an expander turbine connected to an opposite end of the shaft and actuatable by a thermal energy reduction produced when the high-pressure gas from the heat exchanger is lowered to the predetermined delivery pressure, for delivering the liquid fluid continuously under a predetermined pressure to an external installation. The pump having at least two outlet ports for discharging the liquid fluid at respective different pressures. One of the two outlet ports is connected to the heat exchanger, and the other to a liquid delivery line.

摘要翻译： 涡轮膨胀机泵单元具有垂直轴或水平轴，连接到轴的端部以将液体流体加压到高于预定输送压力的压力的泵，用于加热和将由泵加压的液体流体转换成 高压气体和膨胀涡轮，其连接到所述轴的相对端，并且当所述来自所述热交换器的高压气体降低到所述预定输送压力时通过产生的热能降低而致动，用于连续输送所述液体流体 在预定的压力下对外部的安装。 所述泵具有至少两个用于在各自不同压力下排出液体流体的出口。 两个出口之一连接到热交换器，另一个连接到液体输送管线。

公开(公告)号：US5641054A

公开(公告)日：1997-06-24

申请号：US362451

申请日：1995-03-07

申请人： Satoshi Mori ,  Masao Matsumura ,  Yoichi Kanemitsu ,  Takeshi Yoshioka ,  Masaaki Kajiyama ,  Fumio Kondo ,  Yuji Shirao ,  Masato Eguchi ,  Hiroyuki Shinozaki ,  Yukio Ikeda ,  Masayoshi Hirose ,  Masaru Nakaniwa ,  Norio Kimura ,  Katsuaki Usui ,  Katsuyuki Aoki

发明人： Satoshi Mori ,  Masao Matsumura ,  Yoichi Kanemitsu ,  Takeshi Yoshioka ,  Masaaki Kajiyama ,  Fumio Kondo ,  Yuji Shirao ,  Masato Eguchi ,  Hiroyuki Shinozaki ,  Yukio Ikeda ,  Masayoshi Hirose ,  Masaru Nakaniwa ,  Norio Kimura ,  Katsuaki Usui ,  Katsuyuki Aoki

IPC分类号： H01L21/00 ,  H01L21/677 ,  B65G35/00

CPC分类号： H01L21/67167 ,  H01L21/67184 ,  H01L21/67709 ,  H01L21/67736

摘要： A magnetic levitation conveyor apparatus has levitation electromagnets, linear motors, and displacement sensors which are disposed outside of a tunnel, and a carriage of simple structure which is movable in the tunnel. The carriage is of canned structure for preventing gases from being generated. The carriage of canned structure allows the tunnel to have a reduced cross-sectional area and to be filled with a highly purified atmosphere such as of a high vacuum. The tunnel has substantially orthogonal branches at a branched point. In the branched point, the carriage can move, while being lifted out of contact with the tunnel partition, with a directional change from a main conveyor passage into a branched conveyor passage. The magnetic levitation conveyor apparatus is highly practical as it can control the carriage to be lifted and moved as described above.

摘要翻译： PCT No.PCT / JP93 / 00930 Sec。 371日期：1995年3月7日 102（e）1995年3月7日PCT PCT 1993年7月6日PCT公布。 第WO94 / 01354号公报 日期1994年1月20日磁悬浮输送装置具有设置在隧道外部的悬浮电磁体，线性电动机和位移传感器，以及可在隧道中移动的简单结构的滑架。 滑架是用于防止产生气体的罐头结构。 罐头结构的支架允许隧道具有减小的横截面积，并且填充有高度净化的气氛，例如高真空。 隧道在分支点处具有大致正交的分支。 在分支点，托架可以在与主输送机通道分支输送通道的方向改变的同时被提升而不与隧道隔板接触。 磁悬浮输送装置是高度实用的，因为它可以如上所述地控制滑架被提升和移动。

公开(公告)号：US5678411A

公开(公告)日：1997-10-21

申请号：US636703

申请日：1996-04-23

申请人： Masao Matsumura ,  Takao Takeuchi ,  Tadahiko Kishikawa

发明人： Masao Matsumura ,  Takao Takeuchi ,  Tadahiko Kishikawa

IPC分类号： F17C9/02 ,  F17C9/04

CPC分类号： F17C9/02 ,  F17C2201/0109 ,  F17C2201/0119 ,  F17C2201/032 ,  F17C2201/052 ,  F17C2205/0326 ,  F17C2205/0335 ,  F17C2221/033 ,  F17C2221/035 ,  F17C2223/0153 ,  F17C2223/0161 ,  F17C2223/033 ,  F17C2225/0123 ,  F17C2227/0135 ,  F17C2227/0178 ,  F17C2227/0185 ,  F17C2227/0393 ,  F17C2250/032 ,  F17C2250/0636 ,  F17C2265/031 ,  F17C2265/037 ,  F17C2265/038 ,  F17C2265/05 ,  F17C2270/0147

摘要： A self-contained liquefied gas supply system has a tank for storing a liquefied gas, a primary pump for delivering the liquefied gas from the tank, a secondary pump for pressurizing the liquefied gas delivered from the primary pump, a vaporizer for vaporizing the liquefied gas discharged from the secondary pump into a vaporized gas, an expander for actuating the secondary pump with the vaporized gas produced by the vaporizer, and a back-pressure line connected to an outlet of the expander. A bypass pipe is connected between the primary pump and the vaporizer in bypassing relation to the secondary pump for supplying the liquefied gas from the primary pump to the vaporizer. A joint line is connected between the back-pressure line and a substantially atmospheric pressure line, the joint line having a first flow regulating valve for regulating a rate of flow of a gas from the back-pressure line to the substantially atmospheric pressure line. A bypass line is connected between the vaporizer and the back-pressure line in bypassing relation to the expander, the bypass line having a second flow regulating mechanism for regulating a rate of flow of the vaporized gas from the vaporizer to the back-pressure line. For starting the secondary pump, the liquefied gas is delivered from the primary pump through the bypass pipe to the vaporizer, which produces a vaporized gas supplied to the expander.

摘要翻译： 独立液化气供应系统具有用于储存液化气的罐，用于从罐中输送液化气的主泵，用于对从主泵输送的液化气加压的二次泵，用于使液化气体蒸发的蒸发器 从次级泵排出到蒸发气体中，用于利用由蒸发器产生的汽化气体致动二次泵的膨胀器，以及连接到膨胀机出口的背压管线。 旁通管连接在主泵和蒸发器之间，与副泵旁通，用于将液化气体从初级泵提供给蒸发器。 连接线连接在背压管线和基本上大气压力线之间，接头线具有第一流量调节阀，用于调节气体从背压管线到基本大气压力管线的流速。 旁通管线以与膨胀机旁通的方式连接在蒸发器和背压管线之间，旁通管线具有第二流量调节机构，用于调节气化气体从蒸发器到背压管线的流动速率。 为了启动次级泵，液化气从初级泵通过旁通管输送到蒸发器，蒸发器产生供应到膨胀机的汽化气体。

公开(公告)号：US5398481A

公开(公告)日：1995-03-21

申请号：US62853

申请日：1993-05-18

申请人： Noriyuki Takeuchi ,  Masaaki Kajiyama ,  Fumio Kondo ,  Masao Matsumura ,  Takeshi Yoshioka

发明人： Noriyuki Takeuchi ,  Masaaki Kajiyama ,  Fumio Kondo ,  Masao Matsumura ,  Takeshi Yoshioka

IPC分类号： H01L21/677 ,  H01L21/00 ,  B65B49/05

CPC分类号： H01L21/67772

摘要： Several vacuum process steps are applied to substrates such as a wafer using a vacuum container for storing and transporting the substrates under vacuum. The vacuum container comprises a container body having a main opening for inserting a substrate and taking out the substrate, a lid engageable with the container body for closing and sealing the main opening of the container body, and a gate provided on one of the container body and the lid for performing at least one of evacuating an interior of the vacuum container and raising the pressure of the interior of the vacuum container to ambient.

摘要翻译： 将几个真空处理步骤应用于诸如使用真空容器的晶片等基板，以在真空下储存和输送基板。 真空容器包括容器本体，其具有用于插入基板的主开口和取出基板，与容器主体接合的盖子，用于封闭和密封容器主体的主开口;以及门，其设置在容器主体中的一个上 以及用于执行至少一个抽真空容器的内部并将真空容器内部的压力提高到环境的盖子。

公开(公告)号：US5601027A

公开(公告)日：1997-02-11

申请号：US345809

申请日：1994-11-22

申请人： Hiroyuki Shinozaki ,  Fumio Kondo ,  Satoshi Mori ,  Masao Matsumura ,  Takeshi Yoshioka

发明人： Hiroyuki Shinozaki ,  Fumio Kondo ,  Satoshi Mori ,  Masao Matsumura ,  Takeshi Yoshioka

IPC分类号： B61K7/10 ,  H01L21/677 ,  B60L13/04 ,  B61K7/00

CPC分类号： H01L21/67709 ,  B61K7/10 ,  H01L21/67724

摘要： A positioning system stops a transport car traveling along a transport path at a predetermined stop position. The system includes a pair of members coupled together by a magnetic attraction force. One of the members is disposed at the stop position, while the other of the members is disposed on the transport car, and at least one of the members is attached to the stop position or the transport car through a damper. Alternatively, the system may include two pairs of members coupled together by a magnetic attraction force, in which one of each pair of the members is disposed at the stop position, while the other of each pair of the members is disposed on the transport car, and one member of one of the pairs of members is attached to a guide mechanism which restricts a direction of movement of the one member attached to the guide mechanism caused by the action of magnetic attraction force between the members. Thereby, vibration of the transport car upon stoppage at the stop position is transmitted to the damper or guide mechanism and damped by damping action of the damper or frictional loss in the guide mechanism.

摘要翻译： 定位系统停止在预定停止位置沿传送路径行进的运输车辆。 该系统包括通过磁力吸引力联接在一起的一对构件。 其中一个构件设置在停止位置，而另一个构件设置在运输车上，并且至少一个构件通过阻尼器附接到停止位置或运输车。 或者，系统可以包括通过磁吸引力联接在一起的两对构件，其中每对构件中的每一个设置在停止位置，而每对构件中的另一个设置在运输车上， 并且一对构件中的一个构件的一个构件附接到引导机构，该引导机构限制由构件之间的磁性吸引力的作用引起的附接到引导机构的一个构件的移动方向。 因此，在停止位置停止时，运输车辆的振动被传递到阻尼器或引导机构，并且通过阻尼器的阻尼作用或导向机构中的摩擦损失而被阻尼。

公开(公告)号：US5226713A

公开(公告)日：1993-07-13

申请号：US633855

申请日：1990-12-26

申请人： Masao Matsumura

发明人： Masao Matsumura

IPC分类号： B65G1/133 ,  B65G1/00 ,  B65G1/02 ,  B65G1/04 ,  B65G49/07 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67769

摘要： A storage vessel maintaining clean environment for storing articles such as semiconductor wafers includes a plurality of receiver fixed to a shaft for horizontal rotation. The receivers support carriers having the articles therein. Both thrust and radial bearings supporting the shaft are of a non-contacting magnetic type. The shaft is driven by a motor with a rotor fixed to the shaft and a stator facing the rotor. The vessel may have a vacuum or be charged with inert gas.

公开(公告)号：US20060186671A1

公开(公告)日：2006-08-24

申请号：US11349629

申请日：2006-02-07

申请人： Shuichiro Honda ,  Masao Matsumura

发明人： Shuichiro Honda ,  Masao Matsumura

IPC分类号： F03B13/00

CPC分类号： F03B13/10 ,  F05B2210/10 ,  F05B2240/97 ,  Y02E10/22 ,  Y02E10/223 ,  Y02E10/226

摘要： A submerged turbine generator is operated by a working fluid, such as liquid nitrogen, liquefied natural gas, or liquid ethylene, to generate electric power. The submerged turbine generator includes a shaft, a casing, a turbine having a runner fixed to the shaft, a generator having a rotor fixed to the shaft and a stator surrounding the rotor, and bearings for rotatably supporting the shaft. The runner is rotated integrally with the shaft by the pressure of the working fluid introduced into the casing. The shaft includes at least two members.

摘要翻译： 潜水涡轮发电机由工作流体如液氮，液化天然气或液态乙烯操作，以产生电力。 潜水涡轮发电机包括轴，壳体，具有固定到轴的流道的涡轮机，具有固定到轴的转子和围绕转子的定子的发电机以及用于可旋转地支撑轴的轴承。 流体通过引入壳体的工作流体的压力与轴一体地旋转。 轴包括至少两个构件。

公开(公告)号：US5515618A

公开(公告)日：1996-05-14

申请号：US284569

申请日：1994-08-09

申请人： Masao Matsumura ,  Masaaki Kajiyama ,  Takeshi Yoshioka

发明人： Masao Matsumura ,  Masaaki Kajiyama ,  Takeshi Yoshioka

IPC分类号： B65G49/07 ,  H01L21/677 ,  F26B13/30

CPC分类号： H01L21/67772 ,  H01L21/67173 ,  H01L21/67757

摘要： A substrate transporting system is presented which can prevent contamination within a sealed box, and which does not bring in contaminants from the outside environment when installing substrates in a processing apparatus connected to a clean tunnel. The substrate transporting apparatus according to the present invention includes a box for installing one or more substrates in a clean sealed atmosphere, and a box transporting apparatus for transporting the box by loading it on a carrier and through a clean sealed space of a tunnel shape, and further includes a box transfer apparatus arranged in the tunnel-shaped sealed space for transferring the box from the exterior of the sealed space to the carrier, and a substrate transfer apparatus for transferring substrates installed within the box to a substrate processing apparatus connected to the sealed space. It has a cleaning apparatus arranged within the tunnel-shaped sealed space for cleaning the outer surface of the box.

摘要翻译： PCT No.PCT / JP93 / 01804 Sec。 371日期1994年8月9日 102（e）日期1994年8月9日PCT 1993年12月13日PCT PCT。 WO94 / 14191 PCT出版物 日期：1994年6月3日。提供了一种可以防止密封箱内的污染的衬底输送系统，并且当将衬底安装在连接到清洁隧道的处理设备中时不会从外部环境中引起污染物。 根据本发明的基板输送装置包括用于在清洁的密封气氛中安装一个或多个基板的箱体，以及箱体输送装置，其通过将其装载在载体上并通过隧道形状的干净的密封空间来运送箱体， 并且还包括布置在隧道状密封空间中用于将盒从密封空间的外部传送到载体的箱传送装置，以及用于将安装在箱内的基板传送到连接到该基板处理装置的基板处理装置的基板传送装置 密封空间。 它具有布置在隧道形密封空间内的清洁装置，用于清洁盒的外表面。