公开(公告)号：US5367429A

公开(公告)日：1994-11-22

申请号：US962508

申请日：1992-10-16

申请人： Shigeki Tsuchitani ,  Seiko Suzuki ,  Satoshi Shimada ,  Masayuki Miki ,  Masahiro Matsumoto ,  Susumu Murakami ,  Akira Koide ,  Masahiro Kurita ,  Hiromichi Ebine

发明人： Shigeki Tsuchitani ,  Seiko Suzuki ,  Satoshi Shimada ,  Masayuki Miki ,  Masahiro Matsumoto ,  Susumu Murakami ,  Akira Koide ,  Masahiro Kurita ,  Hiromichi Ebine

IPC分类号： B60K23/00 ,  B81B3/00 ,  G01P15/125 ,  H01G7/00 ,  G01P15/08 ,  H01G13/00

CPC分类号： B81B3/0008 ,  B81B3/001 ,  G01P15/125 ,  G01P2015/0828 ,  H01H2059/0018 ,  H01H2059/0072

摘要： An electrostatic type micro accelerometer comprising means for preventing permanent sticking between a movable electrode and a stationary electrode due to residual dielectric polarization, resisual electric charges and water adsorption and condensation around possible contacting portions therebetween when the movable electrode excessively displaces. The sticking preventing means is realized by disposing one of electric field reducing means, water adsorption and condensation reducing means and contacting area limiting means around the possible contacting portions.

摘要翻译： 一种静电型微加速度计，包括当可移动电极过度位移时，由于残余电介质极化，电阻和残余电荷以及在其间可能的接触部分的水吸附和冷凝而防止可动电极和固定电极之间的永久性粘附的装置。 防粘装置通过在可能的接触部分周围设置电场减小装置，水吸附和冷凝减少装置和接触区域限制装置来实现。

公开(公告)号：US5243861A

公开(公告)日：1993-09-14

申请号：US755838

申请日：1991-09-06

申请人： Benjamin Kloeck ,  Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto ,  Kazuo Sato ,  Akira Koide ,  Norio Ichikawa ,  Yukiko Kawai ,  Hiromichi Ebine

发明人： Benjamin Kloeck ,  Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto ,  Kazuo Sato ,  Akira Koide ,  Norio Ichikawa ,  Yukiko Kawai ,  Hiromichi Ebine

IPC分类号： B81B3/00 ,  B81B7/00 ,  G01P15/08 ,  G01P15/125

CPC分类号： B81B7/007 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0828 ,  H01L2224/45144 ,  H01L2224/48463

摘要： A capacitive type semiconductor accelerometer has an intermediate silicon plate of n type conductivity including a movable electrode constituting a pendulum mass formed within the intermediate silicon plate and supported thereby via a beam so as to permit movement in a direction perpendicular to its plane. A first conductive island is formed within the intermediate plate and is immovably supported thereby via a first insulating leg so as to be isolated therefrom, and an upper glass plate is anodic bonded to the intermediate silicon plate. A first stationary electrode is formed on the upper glass plate at the position facing one face of the movable electrode with a predetermined gap. A lower glass plate is anodic bonded to the intermediate silicon plate and a second stationary electrode is formed on the lower glass plate at the position facing the other face of the movable electrode with a predetermined gap. First, second and third pads are disposed in common on the lower glass plate at the outside of the intermediate silicon plate, the first pad being electrically connected to the first stationary electrode via a first thin film lead formed on the lower glass plate and the first conductive island, the second pad being electrically connected to the movable electrode via a second thin film lead formed on the lower glass plate and the intermediate silicon plate and the third pad being electrically connected to the second stationary electrode via a third thin film lead formed on the lower glass plate.

摘要翻译： 电容式半导体加速度计具有n型导电性的中间硅板，其包括形成在中间硅板内的摆锤块的可动电极，并通过光束被支撑，以允许沿垂直于其平面的方向移动。 第一导电岛形成在中间板内，并通过第一绝缘腿不可移动地支撑，以便与之隔离，并且上玻璃板阳极接合到中间硅板。 第一固定电极形成在上玻璃板上，以与预定间隙相对的可移动电极的一个面的位置。 下玻璃板阳极接合到中间硅板上，并且在与可移动电极的另一面相对的位置处以预定间隙形成在下玻璃板上的第二固定电极。 首先，第二和第三焊盘共同设置在中间硅板的外侧的下玻璃板上，第一焊盘通过形成在下玻璃板上的第一薄膜引线和第一焊盘电连接到第一固定电极 所述第二焊盘通过形成在所述下玻璃板上的第二薄膜引线电连接到所述可动电极，并且所述中间硅板和所述第三焊盘通过形成在所述导电岛上的第三薄膜引线电连接到所述第二固定电极， 下玻璃板。

公开(公告)号：US5707077A

公开(公告)日：1998-01-13

申请号：US479451

申请日：1995-06-07

申请人： Yoshihiro Yokota ,  Akira Koide ,  Masahiro Matsumoto ,  Masahide Hayashi

发明人： Yoshihiro Yokota ,  Akira Koide ,  Masahiro Matsumoto ,  Masahide Hayashi

IPC分类号： G01P15/125 ,  G01P15/18 ,  B60R21/32

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/084

摘要： A three-dimensional acceleration sensor capable of detecting a small acceleration value and even an acceleration value amounting up to 100 G occurring in the event of a collision has a diaphragm for linking a frame and a massive part, and diaphragms and beams for linking the massive part and a central part. These elements are formed by working a single crystalline silicon plate. Gaps between the massive part and opposing electrodes are changed by acceleration applied to the massive part. A circuit connected to terminals detects the changes in gaps as changes in capacitances and determines direction and level of the applied acceleration.

摘要翻译： 能够检测碰撞时发生的加速度小，加速度高达100G的三维加速度传感器具有用于连接框架和块体的隔膜，以及用于连接大块的隔膜和梁 部分和中心部分。 这些元件通过加工单晶硅板形成。 大块部件和相对电极之间的间隙由施加在大块部件上的加速度而改变。 连接到端子的电路检测间隙的变化，作为电容的变化，并确定施加的加速度的方向和水平。

公开(公告)号：US5441300A

公开(公告)日：1995-08-15

申请号：US978397

申请日：1992-11-18

申请人： Yoshihiro Yokota ,  Akira Koide ,  Masahiro Matsumoto ,  Masahide Hayashi

发明人： Yoshihiro Yokota ,  Akira Koide ,  Masahiro Matsumoto ,  Masahide Hayashi

IPC分类号： B60R21/0136 ,  B60R21/16 ,  B81B3/00 ,  G01P15/125 ,  G01P15/18 ,  B60R21/32

CPC分类号： G01P15/18 ,  G01P15/125 ,  G01P2015/0828 ,  G01P2015/084 ,  G01P2015/0842

摘要： A three-dimensional acceleration sensor capable of detecting a small acceleration value and even an acceleration value amounting up to 100G occurring in the event of a collision comprises a diaphragm for linking a frame and a massive part and diaphragms and beams for linking the massive part and a central part. These elements are formed by working a single crystalline silicon plate. Gaps between the massive part and opposing electrodes are changed by acceleration applied to the massive part. A circuit connected to terminals detects the changes in gaps as changes in capacitances and determines direction and level of the applied acceleration.

摘要翻译： 能够检测碰撞时发生的加速度小，加速度高达100G的三维加速度传感器包括用于连接框架和块状部件的隔膜以及用于连接块状部件的隔膜和梁 中心部分。 这些元件通过加工单晶硅板形成。 大块部件和相对电极之间的间隙由施加在大块部件上的加速度而改变。 连接到端子的电路检测间隙的变化，作为电容的变化，并确定施加的加速度的方向和水平。

公开(公告)号：US5389198A

公开(公告)日：1995-02-14

申请号：US763519

申请日：1991-09-23

申请人： Akira Koide ,  Kazuo Sato ,  Seiko Suzuki ,  Norio Ichikawa ,  Hidehito Obayashi ,  Masahide Hayashi

发明人： Akira Koide ,  Kazuo Sato ,  Seiko Suzuki ,  Norio Ichikawa ,  Hidehito Obayashi ,  Masahide Hayashi

IPC分类号： G01P15/125 ,  B81B3/00 ,  H01L21/306 ,  H01L21/308 ,  H01L29/84 ,  H01L21/00

CPC分类号： H01L21/30608 ,  H01L21/3086 ,  G01P2015/0828

摘要： A method of manufacturing structures such as a pressure gauge, an accelerometer and the like with a single crystal material such as silicon uses etching techniques where the shape of a part subjected to stress concentration has a curvature, another part is formed in a plane body and a polyhedron is constituted by combining both.To attain the above constitution, a wafer of single crystal material is formed with a stepped surface having a value corresponding to at least the depth of the curvature in a first anisotropic etching process using a prescribed etching mask, and in a second anisotropic etching process, an etching mask is used by removing at least a part of the etching mask used in the first anisotropic etching process.

摘要翻译： 使用诸如硅的单晶材料制造诸如压力计，加速度计等的结构的方法使用蚀刻技术，其中经受应力集中的部分的形状具有曲率，另一部分形成在平面体中， 多面体是通过组合两者构成的。 为了实现上述结构，在使用规定的蚀刻掩模的第一各向异性蚀刻工艺中，形成具有至少与曲率深度相对应的值的阶梯面的单晶材料晶片，在第二各向异性蚀刻工艺中， 通过去除在第一各向异性蚀刻工艺中使用的蚀刻掩模的至少一部分来使用蚀刻掩模。

公开(公告)号：US07413713B2

公开(公告)日：2008-08-19

申请号：US10283215

申请日：2002-10-30

申请人： Tadashi Sano ,  Ryo Miyake ,  Akira Koide ,  Norihide Saho ,  Akiomi Kono ,  Takeshi Harada

发明人： Tadashi Sano ,  Ryo Miyake ,  Akira Koide ,  Norihide Saho ,  Akiomi Kono ,  Takeshi Harada

IPC分类号： B01J10/00 ,  B01J10/02 ,  B01J12/00 ,  B01J12/02 ,  B01J14/00

CPC分类号： B01F15/00149 ,  B01F3/04503 ,  B01F5/0471 ,  B01F13/0059 ,  B01F15/00123 ,  B01F15/00344 ,  B01J4/001 ,  B01J10/002 ,  B01J14/00 ,  Y10T436/11 ,  Y10T436/117497 ,  Y10T436/118339 ,  Y10T436/25 ,  Y10T436/2575 ,  Y10T436/25875

摘要： A reaction apparatus comprises a first supply flow channel having a fine flow channel cross sectional area for a liquid pressurized by a pressurizing device, a gas supply flow channel having a fine flow channel cross sectional area for supplying a gas, a two-phase flow channel having a fine flow channel cross sectional area in communication with a joined portion for the first supply flow channel and the second supply flow channel for flowing a gas/liquid two-phase fluid, a gas bubble reaction flow channel in communication with the exit of the gas/liquid two-phase channel and having a flow channel cross sectional area larger than that of the gas/liquid two-phase flow channel, and a liquid discharge flow channel for discharging the liquid in the gas bubble reaction flow channel. Therefore, in the reaction apparatus, a stable mixing ratio of a gas to a liquid can be obtained and the mixing speed of the gas to the liquid is increased.

摘要翻译： 反应装置包括：第一供给流路，其具有用于由加压装置加压的液体的细流路截面积;气体供给流路，具有用于供给气体的细流路截面积;二相流路 具有与用于第一供给流动通道的接合部分和用于使气体/液体两相流体流动的第二供应流动通道的细流动通道横截面积，与气体/液体两相流体流动的气泡反应流动通道， 气体/液体两相通道，并且具有大于气/液二相流动通道的流动通道横截面积，以及用于排出气泡反应流动通道中的液体的液体排出流动通道。 因此，在反应装置中，可以获得气体与液体的稳定的混合比，并且气体与液体的混合速度提高。

公开(公告)号：US20060275180A1

公开(公告)日：2006-12-07

申请号：US11439821

申请日：2006-05-15

申请人： Akira Koide ,  Yoshishige Endo ,  Yuzuru Ito

发明人： Akira Koide ,  Yoshishige Endo ,  Yuzuru Ito

IPC分类号： B01L3/00

CPC分类号： B01F13/0059 ,  B01F3/0807 ,  B01F5/0475 ,  B01F5/0478 ,  B01F13/1013 ,  B01F13/1022

摘要： A dent is formed on a side surface of a first substrate. A second substrate faces to the side surface of the first substrate. A third substrate is arranged so that the first and second substrates contact each other closely. A micro flow path and a micro chamber are formed between the first and second substrates. The micro flow path and the micro chamber communicate with each other and including an inlet and outlet respectively. A fifth substrate contains the first, second and third substrates. A fourth substrate fits in the fifth substrate. The first and second substrates are pressed against each other by thread fastening (pressing means) for the fourth and fifth substrates.

摘要翻译： 在第一基板的侧表面上形成有凹痕。 第二基板面向第一基板的侧表面。 第三基板被布置成使得第一和第二基板彼此紧密接触。 微流路和微室形成在第一和第二基板之间。 微流路和微室分别相互连通并包括入口和出口。 第五衬底包含第一衬底，第二衬底和第三衬底。 第四衬底适合于第五衬底。 通过第四和第五基板的螺纹紧固（按压装置）将第一和第二基板彼此挤压。

公开(公告)号：US20050087562A1

公开(公告)日：2005-04-28

申请号：US10855431

申请日：2004-05-28

申请人： Akira Koide ,  Ryo Miyake ,  Yasuo Ito ,  Yoshishige Endo

发明人： Akira Koide ,  Ryo Miyake ,  Yasuo Ito ,  Yoshishige Endo

IPC分类号： A61K8/02 ,  A61K8/00 ,  B01F5/04 ,  B01F5/06 ,  B01F13/00 ,  B01F13/10 ,  B65B3/26 ,  B65C3/08 ,  B65C9/46 ,  B67C3/02 ,  B67D1/00 ,  B67D7/02 ,  B67D7/74 ,  B67D1/16

CPC分类号： B01F13/0066 ,  B01F5/0453 ,  B01F5/0456 ,  B01F5/0458 ,  B01F5/0475 ,  B01F5/0646 ,  B01F5/0647 ,  B01F13/1055 ,  B01F2215/0031 ,  B65C3/08 ,  B65C9/46 ,  B67D1/0044 ,  B67D1/005 ,  B67D7/02 ,  B67D7/743

摘要： A mixed liquid manufacturing apparatus comprises: an information input unit, in which information of an object, to which a mixed liquid is offered, is input; a material storage system that stores a plurality of materials for a mixed liquid; a product information system that selects kinds and quantities of the stored materials on the basis of the input information of the object, to which a mixed liquid is offered; a liquid transfer unit, by which the selected materials are taken out from the material storage system; a mixing unit, in which the materials supplied from the liquid transfer unit are mixed; an injection unit, by which the mixed liquid is injected into a mixed liquid container; an input unit, by which matters being declared on a label of the mixed liquid container are input; and a label formation unit, in which the input matters are printed on the label and the label is stuck on the mixed liquid container, and wherein the label formation unit begins printing before the injection unit completes injection of the mixed liquid into the container.

摘要翻译： 混合液体制造装置包括：信息输入单元，其中输入有提供混合液体的物体的信息; 存储用于混合液体的多种材料的材料储存系统; 产品信息系统，其基于提供混合液体的对象的输入信息来选择所存储的材料的种类和数量; 液体转移单元，通过所述液体转移单元将所选择的材料从所述材料储存系统中取出; 混合单元，其中从所述液体转移单元供应的材料混合; 注射单元，通过该注射单元将混合液体注入混合液体容器中; 输入在混合液体容器的标签上声明事项的输入单元; 以及标签形成单元，其中将输入物品印刷在标签上并且标签粘贴在混合液体容器上，并且其中标签形成单元在注射单元完成将混合液体注入容器之前开始印刷。

公开(公告)号：US5284179A

公开(公告)日：1994-02-08

申请号：US890711

申请日：1992-05-29

申请人： Mitsuhiro Shikida ,  Kazuo Sato ,  Yoshio Kawamura ,  Shinji Tanaka ,  Yasuaki Horiuchi ,  Akira Koide ,  Toshimitsu Miyada

发明人： Mitsuhiro Shikida ,  Kazuo Sato ,  Yoshio Kawamura ,  Shinji Tanaka ,  Yasuaki Horiuchi ,  Akira Koide ,  Toshimitsu Miyada

IPC分类号： F16K31/02 ,  F04B43/04 ,  F15C5/00 ,  F16K99/00 ,  H01L21/205 ,  F16K11/24 ,  F16K31/06

CPC分类号： F16K99/0001 ,  F04B43/043 ,  F15C5/00 ,  F16K99/0015 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/0082 ,  Y10S251/901 ,  Y10T137/6416 ,  Y10T137/87249

摘要： Disclosed is a gas valve capable of switching gases to be introduced within a vacuum chamber with high speed thereby enhancing the controllability of the composion of a semiconducting thin film growing on a substrate and shortening the time required for growth of the thin film. The gas valve comprises a bendable film between a pair of parallel plate electrodes whereby operating the film by an electrostatic force and opening and closing a port for releasing gas to a substrate mounted on the wall surface of a gas chamber and a port for exhausting an unnecessary gas to an exhaust passage. The gas valve is mounted in the vicinity of the substrate within the vacuum chamber for supplying a working gas in a minimum amount required for the film growth.

摘要翻译： 公开了一种能够以高速切换在真空室内被引入的气体的气阀，从而提高了生长在基板上的半导体薄膜的组合的可控性，并缩短了薄膜生长所需的时间。 气阀包括一对平行板电极之间的可弯曲膜，由此通过静电力操作膜，并且打开和关闭用于将气体释放到安装在气室的壁表面上的基板的端口和用于排出不必要的端口 气体到排气通道。 气体阀安装在真空室内的基板附近，用于以薄膜生长所需的最小量供应工作气体。

公开(公告)号：US20130068020A1

公开(公告)日：2013-03-21

申请号：US13699235

申请日：2011-05-20

申请人： Takanori Aono ,  Kengo Suzuki ,  Akira Koide ,  Masahide Hayashi

发明人： Takanori Aono ,  Kengo Suzuki ,  Akira Koide ,  Masahide Hayashi

IPC分类号： G01P3/44 ,  H05K3/30 ,  H05K3/28 ,  B23P11/00

CPC分类号： G01P15/0802 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/0315 ,  B81B2207/095 ,  B81C1/00293 ,  B81C2203/031 ,  G01C19/56 ,  G01C19/5783 ,  G01P15/125 ,  H01L21/561 ,  H01L23/315 ,  H01L24/94 ,  H01L2924/12042 ,  H01L2924/15788 ,  H01L2924/16235 ,  Y10T29/49146 ,  Y10T29/49826 ,  H01L2924/00

摘要： An acceleration sensor and an angular velocity sensor are sealed in respective pressure atmospheres suitable therefor in the process of a series of bonding steps, thereby improving the detection sensibilities of the sensors.A movable member 111 of an acceleration sensor 11 and a vibrator 121 of an angular velocity sensor 12 are fabricated on the same sensor wafer 10 with a wall 16 interposed therebetween. A cap wafer 20 is formed in which gaps 21, 22 corresponding to the movable member 111 of the acceleration sensor 11 and the vibrator 121 of the angular velocity sensor 12 are provided. Bumps 23 are disposed near the gap 22 of the angular velocity sensor 12. The acceleration sensor 11 is sealed at atmospheric pressure. Then, the angular velocity sensor 12 is subjected to high temperature and a high-load and is vacuum-sealed. Thereafter, cutting with a diamond grindstone and mounting of circuit substrates and a wiring substrate are performed to form a combined sensor.

摘要翻译： 加速度传感器和角速度传感器在一系列接合步骤的过程中被密封在适合于其的相应的压力环境中，从而提高传感器的检测灵敏度。 加速度传感器11的可动部件111和角速度传感器12的振动器121被制造在相同的传感器晶片10上，壁16插入其中。 形成盖片20，其中设置有与加速度传感器11的可动构件111对应的间隙21,22和角速度传感器12的振子121。 凸起23设置在角速度传感器12的间隙22附近。加速度传感器11在大气压下被密封。 然后，对角速度传感器12进行高温高负荷的真空密封。 此后，进行用金刚石磨石切割并安装电路基板和布线基板以形成组合的传感器。