Method for forming Au-bump with clean surface
    1.
    发明申请
    Method for forming Au-bump with clean surface 审中-公开
    用清洁表面形成Au凸块的方法

    公开(公告)号:US20080131981A1

    公开(公告)日:2008-06-05

    申请号:US11950358

    申请日:2007-12-04

    IPC分类号: H01L21/66

    CPC分类号: H01L22/22

    摘要: A method for fabricating and testing a semiconductor wafer includes sputtering a TiW layer on a passivation layer and on pads, next sputtering a seed layer, made of gold, on the TiW layer, next forming a photoresist layer on the seed layer, next electroplating gold bumps on the seed layer exposed by openings in the photoresist layer, next removing the photoresist layer, next removing the seed layer not under the gold bumps, next etching the TiW layer not under the gold bumps with an etchant containing H2O2 at a temperature of between 35 and 50 degrees C, or with an etchant containing H2O2 and with ultrasonic waves applied to the etchant, next contacting probe tips of a probe card with some of the gold bumps, next cleaning the probe tips until repeating the step of contacting the probe tips with some of the gold bumps at greater than 100 times, and then after cleaning the probe tips, repeating the step of contacting the probe tips with some of the gold bumps.

    摘要翻译: 一种用于制造和测试半导体晶片的方法包括在钝化层和焊盘上溅射TiW层,接下来在TiW层上溅射由金构成的晶种层,接着在种子层上形成光致抗蚀剂层,接下来的电镀金 在光致抗蚀剂层中由开口暴露的晶种层上的突起,接下来去除光致抗蚀剂层,接下来除去不在金凸块之下的种子层,接着用含有H 2的蚀刻剂蚀刻不在金凸块之下的TiW层, 在35至50℃的温度下,或用含有H 2 O 2 O 2的蚀刻剂和超声波 应用于蚀刻剂,接下来将探针卡的探针尖端与一些金凸块接触,然后清洁探针尖端,直到重复将探针尖端与一些金凸块接触大于100次的步骤,然后清洁 探针尖端,重复探针尖端与其中一些接触的步骤 金块。

    MEMS with single use valve and method of operation
    3.
    发明授权
    MEMS with single use valve and method of operation 有权
    MEMS单用阀和操作方法

    公开(公告)号:US08779533B2

    公开(公告)日:2014-07-15

    申请号:US13180954

    申请日:2011-07-12

    申请人: Ando Feyh Po-Jui Chen

    发明人: Ando Feyh Po-Jui Chen

    IPC分类号: H01L29/84

    CPC分类号: F16K99/003 F16K99/0044

    摘要: In one embodiment, a method of opening a passageway to a cavity includes providing a donor portion, forming a heating element adjacent to the donor portion, forming a first sacrificial slab abutting the donor portion, wherein the donor portion and the sacrificial slab are a shrinkable pair, forming a first cavity, a portion of the first cavity bounded by the first sacrificial slab, generating heat with the heating element, forming a first reduced volume slab from the first sacrificial slab using the generated heat and the donor portion, and forming a passageway to the first cavity by forming the first reduced volume slab.

    摘要翻译: 在一个实施例中,将通道打开到空腔的方法包括提供供体部分,形成邻近供体部分的加热元件,形成邻接供体部分的第一牺牲板,其中供体部分和牺牲板是可收缩的 形成第一空腔,由第一牺牲板限定的第一空腔的一部分,用加热元件产生热量,使用产生的热量和供体部分从第一牺牲板形成第一减小体积的板坯,并形成 通过形成第一减小体积的板坯到第一空腔的通道。

    Implantable intraocular pressure drain
    5.
    发明授权
    Implantable intraocular pressure drain 有权
    植入式眼内压排水

    公开(公告)号:US08246569B1

    公开(公告)日:2012-08-21

    申请号:US11205757

    申请日:2005-08-16

    IPC分类号: A61M5/00

    摘要: An implanted parylene tube shunt relieves intra-ocular pressure. The device is implanted with an open end in the anterior chamber of the eye, allowing excess fluid to be drained through the tube out of the eye. In one embodiment, only a first end of the tube implanted into the anterior chamber of the eye is open. Intra-ocular pressure (IOP) is then monitored, for example utilizing an implanted sensor. When IOP exceeds a critical value, a practitioner intervenes, puncturing with a laser a thinned region of the tube lying outside the eye, thereby initiating drainage of fluid and relieving pressure. In accordance with alternative embodiments, the both ends of the tube are open, and the tube includes a one-way valve configured to permit drainage where IOP exceeds the critical value. The tube may include projecting barbs to anchor the tube in the eye without the need for sutures.

    摘要翻译: 植入的聚对二甲苯管分流器可减轻眼内压力。 该装置在眼睛的前房中植入开放端,允许多余的液体通过管排出眼睛。 在一个实施例中,仅植入眼睛前房的管的第一端是开放的。 然后监测眼内压(IOP),例如利用植入的传感器。 当眼压超过临界值时,从业人员介入,用激光穿刺位于眼睛外部的管的薄化区域,从而引起流体排出并释放压力。 根据替代实施例,管的两端是开放的,并且管包括被配置为允许IOP超过临界值的排水的单向阀。 管可以包括突出的倒钩以将管锚定在眼睛中而不需要缝线。