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公开(公告)号：US07176457B2
公开(公告)日：2007-02-13
申请号：US11218425
申请日：2005-09-06
申请人： Shih-Yi Wen , Hsiao-Wen Lee , Jui-Ping Weng , Ming-Hung Chen
发明人： Shih-Yi Wen , Hsiao-Wen Lee , Jui-Ping Weng , Ming-Hung Chen
IPC分类号： G21K7/00
CPC分类号： G01Q10/045 , G01Q70/10 , Y10S977/872
摘要： A MEMS differential actuated nano probe includes four suspension beams arranged in parallel, a connecting base connecting to the suspension beams, a nano probe. Two of the suspension beams elongate due to thermal expansion to allow the deflection of the probe. By heating the suspension beams at different positions, the MEMS differential actuated nano probe can move in two directions with two degrees of freedom. The deflection of the MEMS differential actuated nano probe can be also achieved in piezoelectric or electrostatic way.
摘要翻译： MEMS差分致动纳米探针包括平行布置的四个悬架梁，连接到悬架梁的连接底座，纳米探针。 悬挂梁中的两个由于热膨胀而伸长以允许探针的偏转。 通过将悬架梁加热到不同位置，MEMS微分致动纳米探针可以在两个方向上以两个自由度移动。 MEMS差分致动纳米探针的偏转也可以以压电或静电方式实现。
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公开(公告)号：US07521724B2
公开(公告)日：2009-04-21
申请号：US11147185
申请日：2005-06-08
申请人： Ming-Hung Chen , Shih-Yi Wen , Wu-Cheng Kuo , Bing-Ru Chen , Jui-Ping Weng , Hsiao-Wen Lee
发明人： Ming-Hung Chen , Shih-Yi Wen , Wu-Cheng Kuo , Bing-Ru Chen , Jui-Ping Weng , Hsiao-Wen Lee
CPC分类号： H01L33/486 , H01L33/60 , H01L33/62 , H01L33/641 , H01L2224/16225 , H01L2224/48227 , H01L2924/00011 , H01L2924/00014 , H01L2924/3011 , H01L2924/3025 , H01L2224/48091 , H01L2924/00 , H01L2224/0401
摘要： A light emitting diode (LED) package and process of making the same includes a silicon-on-insulator (SOI) substrate that is composed of two silicon based materials and an insulation layer interposed therebetween. The two silicon based materials of silicon-on-insulator substrate are etched to form a reflective cavity and an insulation trench, respectively, for dividing the silicon-on-insulator substrate into contact surfaces of positive and negative electrodes. A plurality of metal lines are then formed to electrically connect the two silicon based materials such that the LED chip can be mounted on the reflective cavity and electrically connected to the corresponding electrodes of the silicon-on-insulator substrate by the metal lines. Thus the properties of heat resistance and heat dispersal can be improved and the process can be simplified.
摘要翻译： 发光二极管（LED）封装及其制造方法包括由两个硅基材料和介于其间的绝缘层组成的绝缘体上硅（SOI）衬底。 蚀刻绝缘体上硅衬底的两种硅基材料，以分别形成反射腔和绝缘沟槽，以将绝缘体上硅衬底分成阳极和负电极的接触表面。 然后形成多个金属线以电连接两个硅基材料，使得LED芯片可以安装在反射腔上并且通过金属线电连接到绝缘体上硅衬底的相应电极。 因此，可以提高耐热性和热分散性，并且可以简化工艺。
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公开(公告)号：US20050082474A1
公开(公告)日：2005-04-21
申请号：US10795407
申请日：2004-03-09
申请人： Shih-Yi Wen , Hsiao-Wen Lee , Jui-Ping Weng , Ming-Hung Chen
发明人： Shih-Yi Wen , Hsiao-Wen Lee , Jui-Ping Weng , Ming-Hung Chen
CPC分类号： G01Q10/045 , G01Q70/10 , Y10S977/872
摘要： A MEMS differential actuated nano probe includes four suspension beams arranged in parallel, a connecting base connecting to the suspension beams, a nano probe. Two of the suspension beams elongate due to thermal expansion to allow the deflection of the probe. By heating the suspension beams at different positions, the MEMS differential actuated nano probe can move in two directions with two degrees of freedom. The deflection of the MEMS differential actuated nano probe can be also achieved in piezoelectric or electrostatic way.
摘要翻译： MEMS差分致动纳米探针包括平行布置的四个悬架梁，连接到悬架梁的连接底座，纳米探针。 悬挂梁中的两个由于热膨胀而伸长以允许探针的偏转。 通过将悬架梁加热到不同位置，MEMS微分致动纳米探针可以在两个方向上以两个自由度移动。 MEMS差分致动纳米探针的偏转也可以以压电或静电方式实现。
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公开(公告)号：US20060138436A1
公开(公告)日：2006-06-29
申请号：US11147185
申请日：2005-06-08
申请人： Ming-Hung Chen , Shih-Yi Wen , Wu-Cheng Kuo , Bing-Ru Chen , Jui-Ping Weng , Hsiao-Wen Lee
发明人： Ming-Hung Chen , Shih-Yi Wen , Wu-Cheng Kuo , Bing-Ru Chen , Jui-Ping Weng , Hsiao-Wen Lee
CPC分类号： H01L33/486 , H01L33/60 , H01L33/62 , H01L33/641 , H01L2224/16225 , H01L2224/48227 , H01L2924/00011 , H01L2924/00014 , H01L2924/3011 , H01L2924/3025 , H01L2224/48091 , H01L2924/00 , H01L2224/0401
摘要： A light emitting diode (LED) package and process of making the same includes a silicon-on-insulator (SOI) substrate that is composed of two silicon based materials and an insulation layer interposed therebetween. The two silicon based materials of silicon-on-insulator substrate are etched to form a reflective cavity and an insulation trench, respectively, for dividing the silicon-on-insulator substrate into contact surfaces of positive and negative electrodes. A plurality of metal lines are then formed to electrically connect the two silicon based materials such that the LED chip can be mounted on the reflective cavity and electrically connected to the corresponding electrodes of the silicon-on-insulator substrate by the metal lines. Thus the properties of heat resistance and heat dispersal can be improved and the process can be simplified.
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公开(公告)号：US06995368B2
公开(公告)日：2006-02-07
申请号：US10795407
申请日：2004-03-09
申请人： Shih-Yi Wen , Hsiao-Wen Lee , Jui-Ping Weng , Ming-Hung Chen
发明人： Shih-Yi Wen , Hsiao-Wen Lee , Jui-Ping Weng , Ming-Hung Chen
IPC分类号： G21K7/00
CPC分类号： G01Q10/045 , G01Q70/10 , Y10S977/872
摘要： A MEMS differential actuated nano probe includes four suspension beams arranged in parallel, a connecting base connecting to the suspension beams, a nano probe. Two of the suspension beams elongate due to thermal expansion to allow the deflection of the probe. By heating the suspension beams at different positions, the MEMS differential actuated nano probe can move in two directions with two degrees of freedom. The deflection of the MEMS differential actuated nano probe can be also achieved in piezoelectric or electrostatic way.
摘要翻译： MEMS差分致动纳米探针包括平行布置的四个悬架梁，连接到悬架梁的连接底座，纳米探针。 悬挂梁中的两个由于热膨胀而伸长以允许探针的偏转。 通过将悬架梁加热到不同位置，MEMS微分致动纳米探针可以在两个方向上以两个自由度移动。 MEMS差分致动纳米探针的偏转也可以以压电或静电方式实现。
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公开(公告)号：US20060016986A1
公开(公告)日：2006-01-26
申请号：US11218425
申请日：2005-09-06
申请人： Shih-Yi Wen , Hsiao-Wen Lee , Jui-Ping Weng , Ming-Hung Chen
发明人： Shih-Yi Wen , Hsiao-Wen Lee , Jui-Ping Weng , Ming-Hung Chen
CPC分类号： G01Q10/045 , G01Q70/10 , Y10S977/872
摘要： A MEMS differential actuated nano probe includes four suspension beams arranged in parallel, a connecting base connecting to the suspension beams, a nano probe. Two of the suspension beams elongate due to thermal expansion to allow the deflection of the probe. By heating the suspension beams at different positions, the MEMS differential actuated nano probe can move in two directions with two degrees of freedom. The deflection of the MEMS differential actuated nano probe can be also achieved in piezoelectric or electrostatic way.
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公开(公告)号：US07133185B2
公开(公告)日：2006-11-07
申请号：US10929074
申请日：2004-08-27
申请人： Shih-Yi Wen , Hsiao-Wen Lee , Jui-Ping Weng , Wu-Cheng Kuo , Chen-Yu Weng , Yu-Han Chien
发明人： Shih-Yi Wen , Hsiao-Wen Lee , Jui-Ping Weng , Wu-Cheng Kuo , Chen-Yu Weng , Yu-Han Chien
CPC分类号： G02B6/3572 , G02B6/3516 , G02B6/3518 , G02B6/3566 , G02B6/3576 , G02B6/3584 , G02B26/085
摘要： A self-assembly structure of micro electromechanical optical switch utilizes residual stresses of three curved beams. The first curved beam pushes the base plate away from the substrate. The second curved beam lifts up the mirror slightly. Then, the third curved beam rotates the mirror vertical to the base plate and achieves self-assembly. In another embodiment, magnetic force and magnetic-activated elements are used.
摘要翻译： 微机电光开关的自组装结构利用三个弯曲梁的残余应力。 第一弯曲梁将基板推离基板。 第二弯曲梁稍微升起镜子。 然后，第三弯曲梁将镜子垂直于基板旋转并实现自组装。 在另一个实施例中，使用磁力和磁激元件。
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公开(公告)号：US20050286110A1
公开(公告)日：2005-12-29
申请号：US10929074
申请日：2004-08-27
申请人： Shih-Yi Wen , Hsiao-Wen Lee , Jui-Ping Weng , Wu-Cheng Kuo , Chen-Yu Weng , Yu-Han Chieh
发明人： Shih-Yi Wen , Hsiao-Wen Lee , Jui-Ping Weng , Wu-Cheng Kuo , Chen-Yu Weng , Yu-Han Chieh
CPC分类号： G02B6/3572 , G02B6/3516 , G02B6/3518 , G02B6/3566 , G02B6/3576 , G02B6/3584 , G02B26/085
摘要： A self-assembly structure of micro electromechanical optical switch utilizes residual stresses of three curved beams. The first curved beam pushes the base plate away from the substrate. The second curved beam lifts up the mirror slightly. Then, the third curved beam rotates the mirror vertical to the base plate and achieves self-assembly. In another embodiment, magnetic force and magnetic-activated elements are used.
摘要翻译： 微机电光开关的自组装结构利用三个弯曲梁的残余应力。 第一弯曲梁将基板推离基板。 第二弯曲梁稍微升起镜子。 然后，第三弯曲梁将镜子垂直于基板旋转并实现自组装。 在另一个实施例中，使用磁力和磁激元件。
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公开(公告)号：US06771158B2
公开(公告)日：2004-08-03
申请号：US10307367
申请日：2002-12-02
申请人： Hsiao-Wen Lee , Wen-I Wu , Shih-Yi Wen , Wu-Cheng Kuo , Jui-Ping Weng
发明人： Hsiao-Wen Lee , Wen-I Wu , Shih-Yi Wen , Wu-Cheng Kuo , Jui-Ping Weng
IPC分类号： H01P110
CPC分类号： B81B3/0051 , B81B2201/038 , B81B2201/045 , B81B2203/053 , G02B26/001 , G02B26/0808
摘要： A micro electromechanical differential actuator is comprised of a suspension arm structure and/or a bridge structure to make a two-degree-of-freedom and bi-directional motion. The actuator support base can make out-of-plane or in-plane vertical and horizontal motions. The invention is applicable in optical micro electromechanical devices such as optical switches, variable optical attenuators, optical tunable filters, modulators, tunable VCSEL's, grating modulators, micro displays, and RF switches.
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公开(公告)号：US06597828B2
公开(公告)日：2003-07-22
申请号：US10038904
申请日：2002-01-08
申请人： Hsiao-Wen Lee , Li-Ding Wei , Shih-Yi Wen , Chieh Hu
发明人： Hsiao-Wen Lee , Li-Ding Wei , Shih-Yi Wen , Chieh Hu
IPC分类号： G02B626
CPC分类号： G02B6/358 , G02B6/3512 , G02B6/3546 , G02B6/3572
摘要： An optical switch is disclosed. A lock magnetic field is provided on the sides of a rotator with a magnetic surface. The magnetic field has a potential with two minima as reflective and non-reflective positions. At the reflective position, the reflective mirror on the rotator reflects light beams. The beam goes through when the rotator is at the non-reflective position. At the same time, the magnetic field firmly locks the rotator at its position. When a driving force is imposed on the rotator; it rotates from its current position to the other position and gets locked at the new position.
摘要翻译： 公开了一种光开关。 在具有磁性表面的转子的侧面上设置锁定磁场。 磁场具有两个最小值的电位作为反射和非反射位置。 在反射位置，旋转体上的反射镜反射光束。 当旋转体处于非反射位置时，光束通过。 同时，磁场将转子牢固地锁定在其位置。 当对转子施加驱动力时; 它从当前位置旋转到另一个位置，并锁定在新位置。
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