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公开(公告)号：US08033772B2
公开(公告)日：2011-10-11
申请号：US11386257
申请日：2006-03-21
CPC分类号： H01L21/67196 , C23C14/566 , C23C16/54 , H01L21/67126 , H01L21/67739 , H01L21/67748 , Y10S414/135
摘要： A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body houses at least a portion of a robot adapted to transport a substrate between the processing chamber and the load lock chamber. A lid couples to and seals a top of the main body of the transfer chamber. The transfer chamber also has a domed bottom adapted to couple to and to seal a bottom portion of the main body of the transfer chamber.
摘要翻译： 用于基板处理工具的传送室包括具有适于耦合到至少一个处理室和至少一个装载锁定室的侧壁的主体。 主体容纳至少一部分适于在处理室和加载锁定室之间输送基板的机器人。 盖子连接到并密封传送室主体的顶部。 传送室还具有适于联接到传送室的主体的底部并且密封传送室的主体的底部的圆顶形底部。
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公开(公告)号：US07018517B2
公开(公告)日：2006-03-28
申请号：US10601185
申请日：2003-06-20
CPC分类号： H01L21/67196 , C23C14/566 , C23C16/54 , H01L21/67126 , H01L21/67739 , H01L21/67748 , Y10S414/135
摘要： A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body houses at least a portion of a robot adapted to transport a substrate between the processing chamber and the load lock chamber. A lid couples to and seals a top of the main body of the transfer chamber. The transfer chamber also has a domed bottom adapted to couple to and to seal a bottom portion of the main body of the transfer chamber.
摘要翻译： 用于基板处理工具的传送室包括具有适于耦合到至少一个处理室和至少一个装载锁定室的侧壁的主体。 主体容纳至少一部分适于在处理室和加载锁定室之间输送基板的机器人。 盖子连接到并密封传送室主体的顶部。 传送室还具有适于联接到传送室的主体的底部并且密封传送室的主体的底部的圆顶形底部。
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公开(公告)号：US07330021B2
公开(公告)日：2008-02-12
申请号：US11018236
申请日：2004-12-21
IPC分类号： G01R13/04
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A substrate table and method for supporting and transferring a substrate are provided. The substrate table includes a segmented stage having an upper surface for supporting a substrate, and an end effector. The end effector includes two or more spaced apart fingers and an upper surface for supporting a substrate. The end effector is at least partially disposed and moveable within the segmented stage such that the fingers of the end effector and the segmented stage interdigitate to occupy the same horizontal plane. The segmented stage is adapted to raise and lower about the end effector.
摘要翻译： 提供了用于支撑和转移衬底的衬底台和方法。 衬底台包括具有用于支撑衬底的上表面的分段段和端部执行器。 末端执行器包括两个或更多间隔开的指状物和用于支撑基底的上表面。 末端执行器至少部分地设置并在分段台内移动，使得末端执行器和分段台阶的指状物相互指向以占据相同的水平面。 分段段适于围绕末端执行器升高和降低。
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公开(公告)号：US07919972B2
公开(公告)日：2011-04-05
申请号：US12016834
申请日：2008-01-18
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A system and method for supporting and transferring a substrate relative to a plurality of testing columns are provided. The system includes a testing table adapted to support and move the substrate relative to the plurality of testing columns. The testing table may include an end effector disposed therein to transfer the substrate relative to an upper surface of the testing table. The method includes transferring the substrate to the testing table and moving the substrate relative to the plurality of testing columns. Signals indicative of electronic device performance are sensed to determine operability of the devices on the substrate.
摘要翻译： 提供了一种用于相对于多个测试柱支撑和传送衬底的系统和方法。 该系统包括适于相对于多个测试柱支撑和移动衬底的测试台。 测试台可以包括设置在其中的端部执行器，以相对于测试台的上表面传送衬底。 该方法包括将衬底转移到测试台并相对于多个测试柱移动衬底。 感测指示电子设备性能的信号以确定衬底上的器件的可操作性。
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公开(公告)号：US06833717B1
公开(公告)日：2004-12-21
申请号：US10778982
申请日：2004-02-12
IPC分类号： G01R31305
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A method and integrated system for electron beam testing a substrate is provided. In one aspect, the integrated system includes a transfer chamber having a substrate table disposed therein. The substrate table is capable of moving a substrate within the testing chamber in both horizontal and vertical directions. The substrate table includes a first stage moveable in a first dimension, a second stage moveable in a second dimension, and a third stage moveable in a third dimension. Each stage moves independently in its respective dimension. The system also includes a load lock chamber disposed adjacent a first side of the testing chamber, and a prober storage assembly disposed beneath the testing chamber. A prober stack assembly is disposed adjacent a second side of the testing chamber and arranged to transfer one or more probers between the prober storage assembly and the testing chamber. Further, one or more electron beam testing devices are disposed on an upper surface of the testing chamber.
摘要翻译： 提供了一种用于电子束测试衬底的方法和集成系统。 一方面，集成系统包括具有设置在其中的衬底台的传送室。 衬底台能够在水平和垂直方向上移动测试室内的衬底。 基板台包括可在第一维度上移动的第一阶段，可在第二维度中移动的第二阶段和可在第三维度上移动的第三阶段。 每个阶段在其各自的维度上独立地移动。 该系统还包括邻近测试室的第一侧设置的负载锁定室，以及设置在测试室下方的探测器存储组件。 探测器堆叠组件设置在测试室的第二侧附近，并布置成在探测器存储组件和测试室之间传送一个或多个探测器。 此外，一个或多个电子束测试装置设置在测试室的上表面上。
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公开(公告)号：US07847566B2
公开(公告)日：2010-12-07
申请号：US11940432
申请日：2007-11-15
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/26
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.
摘要翻译： 描述了一种在基板上测试电子器件的方法。 该方法包括将可配置的探测器放置在第一衬底上，测试第一衬底，重新配置可配置的探测器，将可配置的探测器放置在第二衬底上，以及测试第二衬底。
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公开(公告)号：US20090122099A1
公开(公告)日：2009-05-14
申请号：US12354759
申请日：2009-01-15
申请人： John M. White , Emanuel Beer , Hongbin Ji , Chang-Tsung Lin , Shinichi Kurita
发明人： John M. White , Emanuel Beer , Hongbin Ji , Chang-Tsung Lin , Shinichi Kurita
IPC分类号： B41J29/393
CPC分类号： B41J29/393
摘要： Methods and apparatus for inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.
摘要翻译： 提供了用于喷墨滴定位的方法和装置。 第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较 确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。 提供了许多其他方面。
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公开(公告)号：US20090090883A1
公开(公告)日：2009-04-09
申请号：US12333043
申请日：2008-12-11
申请人： Ke Ling Lee , Shinichi Kurita , Emanuel Beer
发明人： Ke Ling Lee , Shinichi Kurita , Emanuel Beer
IPC分类号： F16K25/00
CPC分类号： F16K3/0227 , F16K51/02 , H01J37/32844 , H01J2237/166 , H01L21/67126 , Y02C20/30 , Y02P70/605 , Y10S277/919 , Y10S277/92 , Y10T137/8242
摘要： Embodiments described herein provide a method and apparatus for grounding a chamber isolation valve. In one embodiment, a grounded chamber isolation valve for a plasma processing system is described. The chamber isolation valve includes a door and a bracing member movably attached to and opposing the door, and at least one electrically conductive member in electrical communication with the door, the at least one electrically conductive member comprising one or more reaction bumpers disposed on the bracing member that are adapted to contact at least one grounded component of the plasma processing system when the door is in the closed position.
摘要翻译： 本文描述的实施例提供了用于使腔室隔离阀接地的方法和装置。 在一个实施例中，描述了用于等离子体处理系统的接地室隔离阀。 室隔离阀包括门和可移动地附接到门并与其相对的支撑构件，以及至少一个与门电连通的导电构件，所述至少一个导电构件包括设置在支撑上的一个或多个反应缓冲器 当门处于关闭位置时，适于接触等离子体处理系统的至少一个接地部件的构件。
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公开(公告)号：US20050179451A1
公开(公告)日：2005-08-18
申请号：US10889695
申请日：2004-07-12
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Frank Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Frank Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/302 , G01R31/26 , G01R31/305 , G02F1/13 , G09G3/00 , H01L21/687
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.
摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。
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公开(公告)号：US07469715B2
公开(公告)日：2008-12-30
申请号：US11174229
申请日：2005-07-01
申请人： Ke Ling Lee , Shinichi Kurita , Emanuel Beer
发明人： Ke Ling Lee , Shinichi Kurita , Emanuel Beer
IPC分类号： H01J37/32
CPC分类号： F16K3/0227 , F16K51/02 , H01J37/32844 , H01J2237/166 , H01L21/67126 , Y02C20/30 , Y02P70/605 , Y10S277/919 , Y10S277/92 , Y10T137/8242
摘要： A method and apparatus for grounding a chamber isolation valve are provided. Generally, the method makes use of an electrically conductive elastomeric member or members to effectively ground a chamber isolation valve and/or isolation valve door while avoiding metal-to-metal contact between moving parts in the processing system. In one embodiment, the elastomeric member is attached to and in electrical communication with the door of the chamber isolation valve. The elastomeric member is brought into contact with a grounded component of the plasma processing system when the door is in the closed position. In another embodiment, the conductive elastomeric member is attached to a bracing member of the isolation valve and is brought into contact with a grounded component of the plasma processing system when the bracing member is deployed to hold the isolation valve door in place during substrate processing. Other configurations are also provided.
摘要翻译： 提供了一种用于使室隔离阀接地的方法和装置。 通常，该方法利用导电弹性体构件来有效地将室隔离阀和/或隔离阀门接地，同时避免处理系统中移动部件之间的金属与金属的接触。 在一个实施例中，弹性体构件附接到腔室隔离阀的门并且与腔室隔离阀的门电连通。 当门处于关闭位置时，弹性体构件与等离子体处理系统的接地部件接触。 在另一个实施例中，当支撑构件展开以在衬底处理期间将隔离阀门保持在适当位置时，导电弹性构件附接到隔离阀的支撑构件并与等离子体处理系统的接地构件接触。 还提供其他配置。
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