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公开(公告)号:US06631645B1
公开(公告)日:2003-10-14
申请号:US09653165
申请日:2000-09-01
IPC分类号: G01L912
CPC分类号: G01L9/0073 , G01L9/125
摘要: An S/N ratio of an output of a semiconductor pressure sensor is improved, the sensor being of an electrostatic capacitance type pressure sensor for generating an output based upon a ratio between capacitances of a pressure sensitive capacitance element and a reference capacitance element. This semiconductor pressure sensor has: a pressure sensitive capacitance element having an electrostatic capacitance Cs changing with a pressure to be detected; a reference capacitance element having an electrostatic capacitance Cr not changing with the pressure; and a unit for detecting the pressure by outputting a signal corresponding to a ratio between the capacitances Cs and Cr, wherein an initial value Cr0 of the capacitance Cr and an initial value Cs0 of the capacitance Cs are defined by 1.2
摘要翻译: 提高半导体压力传感器的输出的S / N比,该传感器是用于根据压敏电容元件的电容与参考电容元件之间的比率产生输出的静电电容式压力传感器。 该半导体压力传感器具有:静电电容Cs随着要检测的压力而变化的压敏电容元件; 具有不随压力变化的静电电容Cr的参考电容元件; 以及用于通过输出对应于电容Cs和Cr之间的比率的信号来检测压力的单元,其中电容Cr的初始值Cr
0 SB> 和初始值Cs 电容Cs的 0 SB> 由1.2 0 SB> / Cs 0 SB> <1.8。 通过改变两个元件的电极面积等来调节CR 0 SB> / Cs 0 SB> 的比例。 以这种方式,可以获得较大的压力表输出DeltaV,降低放大器的放大系数,并提供传感器的高精度。 PTEXT> -
公开(公告)号:US20050132814A1
公开(公告)日:2005-06-23
申请号:US11049872
申请日:2005-02-04
申请人: Shinya Satou , Satoshi Shimada , Atsuo Watanabe , Yasuo Onose , Seiji Kuryu , Atsushi Miyazaki , Junichi Horie , Naohiro Momma
发明人: Shinya Satou , Satoshi Shimada , Atsuo Watanabe , Yasuo Onose , Seiji Kuryu , Atsushi Miyazaki , Junichi Horie , Naohiro Momma
CPC分类号: B81C1/00333 , B81B2201/0264 , B81B2203/0127 , B81C1/00293 , B81C2203/0145 , G01L9/0042 , G01L9/0073
摘要: The object of the present invention is to propose an etch channel sealing structure characterized by excellent impermeability to moisture and resistance to temporal change of the diaphragm in the pressure sensor produced according to the sacrificial layer etching technique, and to provide a pressure sensor characterized by excellent productivity and durability. After a very small gap is formed by the sacrificial layer etching technique, silicon oxide film is deposited by the CVD technique or the like, there by sealing the etch channel. Further, impermeable thin film of polysilicon or the like is formed to cover the oxide film. This allows an etch channel sealing structure to be simplified in the pressure sensor produced according to the sacrificial layer etching technique, and prevents entry of moisture into the cavity, thereby improving moisture resistance. Moreover, sealing material with small film stress reduces temporal deformation of the diaphragm.
摘要翻译: 本发明的目的是提出一种蚀刻通道密封结构,其特征在于对根据牺牲层蚀刻技术制造的压力传感器中的防潮性和抗隔膜的时间变化具有优异的防渗性,并且提供了一种特征在于优异的压力传感器 生产力和耐久性。 在通过牺牲层蚀刻技术形成非常小的间隙之后,通过密封蚀刻通道,通过CVD技术等沉积氧化硅膜。 此外,形成多晶硅等的不渗透性薄膜以覆盖氧化物膜。 这允许在根据牺牲层蚀刻技术产生的压力传感器中简化蚀刻通道密封结构,并且防止水分进入空腔,从而改善耐湿性。 此外,具有小膜应力的密封材料减小了隔膜的时间变形。
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公开(公告)号:US06892582B1
公开(公告)日:2005-05-17
申请号:US09936480
申请日:1999-08-20
申请人: Shinya Satou , Satoshi Shimada , Atsuo Watanabe , Yasuo Onose , Seiji Kuryu , Atsushi Miyazaki , Junichi Horie , Naohiro Momma
发明人: Shinya Satou , Satoshi Shimada , Atsuo Watanabe , Yasuo Onose , Seiji Kuryu , Atsushi Miyazaki , Junichi Horie , Naohiro Momma
CPC分类号: B81C1/00333 , B81B2201/0264 , B81B2203/0127 , B81C1/00293 , B81C2203/0145 , G01L9/0042 , G01L9/0073
摘要: The object of the present invention is to propose an etch channel sealing structure characterized by excellent impermeability to moisture and resistance to temporal change of the diaphragm in the pressure sensor produced according to the sacrificial layer etching technique, and to provide a pressure sensor characterized by excellent productivity and durability. After a very small gap is formed by the sacrificial layer etching technique, silicon oxide film is deposited by the CVD technique or the like, thereby sealing the etch channel. Further, impermeable thin film of polysilicon or the like is formed to cover the oxide film.This allows an etch channel sealing structure to be simplified in the pressure sensor produced according to the sacrificial layer etching technique, and prevents entry of moisture into the cavity, thereby improving moisture resistance. Moreover, sealing material with small film stress reduces temporal deformation of the diaphragm.
摘要翻译: 本发明的目的是提出一种蚀刻通道密封结构,其特征在于对根据牺牲层蚀刻技术制造的压力传感器中的防潮性和抗隔膜的时间变化具有优异的防渗性,并且提供一种特征在于优异的压力传感器 生产力和耐久性。 在通过牺牲层蚀刻技术形成非常小的间隙之后,通过CVD技术等沉积氧化硅膜,从而密封蚀刻通道。 此外,形成多晶硅等的不渗透性薄膜以覆盖氧化物膜。 这允许在根据牺牲层蚀刻技术产生的压力传感器中简化蚀刻通道密封结构,并且防止水分进入空腔,从而改善耐湿性。 此外,具有小膜应力的密封材料减小了隔膜的时间变形。
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公开(公告)号:US06640642B1
公开(公告)日:2003-11-04
申请号:US09653808
申请日:2000-09-01
申请人: Yasuo Onose , Atsuo Watanabe , Seiji Kuryu , Shinya Satou , Junichi Horie , Satoshi Shimada
发明人: Yasuo Onose , Atsuo Watanabe , Seiji Kuryu , Shinya Satou , Junichi Horie , Satoshi Shimada
IPC分类号: G01L912
CPC分类号: G01L9/0042 , G01L1/146 , G01L9/0073
摘要: A pressure sensor of electric capacitance type which includes a plurality of pressure sensor units connected in parallel with one another and each formed on a substrate by an electrode, a cavity region and a diaphragm having an electrically conductive film which is disposed in opposition to the electrode with the cavity region intervening between the electrode and the diaphragm, wherein diaphragm fixing portions are disposed internally of the cavity region so that a single sheet of the diaphragm is partitionarily and regionally allotted to regions of the plural pressure sensor units, respectively. With this structure of the capacitance-type pressure sensor, ineffective region for capacitance detection is minimized and hence the parasitic capacitance can be reduced with the detection accuracy of the sensor being improved.
摘要翻译: 一种电容式压力传感器,其包括彼此并联连接的多个压力传感器单元,每个压力传感器单元通过电极形成在基板上,空腔区域和具有导电膜的隔膜,所述导电膜设置成与电极相对设置 其中腔区插入在电极和隔膜之间,其中隔膜固定部分设置在空腔区域的内部,使得隔膜的单片分别地分区地分配到多个压力传感器单元的区域。 利用电容型压力传感器的这种结构,电容检测的无效区域被最小化,因此可以随着传感器的检测精度提高而降低寄生电容。
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公开(公告)号:US07744504B2
公开(公告)日:2010-06-29
申请号:US11940467
申请日:2007-11-15
申请人: Shinya Satou , Toshio Hori , Mamoru Nemoto
发明人: Shinya Satou , Toshio Hori , Mamoru Nemoto
CPC分类号: B60W10/02 , B60W10/06 , B60W30/18027 , B60W2510/0638 , B60W2710/0644 , Y10T477/753 , Y10T477/79
摘要: A vehicle control apparatus is provided which can detect a rotating speed drop of an engine generated together with a clutch connection so as to be set to a trigger of a control start. An engine rotating speed at a time of issuing the trigger is set to a target rotating speed, and a rotating speed feedback control having an engine torque as an operation amount is carried out. An ignition retard and a fuel cut are provided as an operator for engine torque in addition to an intake air amount operation by an electronically controlled throttle.
摘要翻译: 提供一种车辆控制装置,其可以检测与离合器连接一起产生的发动机的转速下降,以便被设定为控制开始的触发。 将发出触发时的发动机转速设定为目标转速,进行发动机转矩作为运转量的转速反馈控制。 除了通过电子控制节流阀的进气量操作之外,还提供点火延迟和燃料切断作为发动机扭矩的操作者。
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公开(公告)号:US20080050567A1
公开(公告)日:2008-02-28
申请号:US11881340
申请日:2007-07-26
申请人: Sayaka Kawashima , Minoru Komada , Shinya Satou
发明人: Sayaka Kawashima , Minoru Komada , Shinya Satou
IPC分类号: B32B7/02
CPC分类号: C23C16/30 , Y10T428/24942 , Y10T428/2495 , Y10T428/24992 , Y10T428/31504
摘要: The main object of the present invention is to provide a barrier film having an extremely high barrier property and a good transparency, a laminated material using the above-mentioned barrier film, a packaging container, and an image display medium. The above-mentioned object is achieved by providing a barrier film comprising a base material film and a barrier layer deposited on at least one side surface of the base material film, wherein the barrier layer comprises a water repellent layer and a dense layer, the water repellent layer is a silicon oxide carbide film having the atomic percent of Si:O:C in a range of 100:40 to 120:80 to 160, and the thickness in a range of 2 to 300 nm, and the dense layer is a silicon oxide carbide film having the atomic percent of Si:O:C in a range of 100:100 to 200:5 to 100, and the thickness in a range of 5 to 300 nm.
摘要翻译: 本发明的主要目的是提供一种具有极高的阻隔性和良好的透明性的阻挡膜,使用上述阻挡膜的层叠材料,包装容器和图像显示介质。 上述目的通过提供一种阻挡膜来实现,该阻挡膜包括沉积在基材膜的至少一个侧表面上的基材膜和阻挡层,其中阻挡层包括拒水层和致密层,水 驱避层是Si:O:C原子百分比为100:40〜120:80〜160,厚度在2〜300nm范围内的氧化硅碳化物膜,致密层为 Si:O:C的原子百分数为100:100〜200:5〜100的氧化硅碳化硅膜,厚度为5〜300nm的范围。
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公开(公告)号:US20070062485A1
公开(公告)日:2007-03-22
申请号:US11520740
申请日:2006-09-14
申请人: Shiro Yamaoka , Hiromu Kakuya , Kunihiko Suzuki , Shinya Satou , Atsushi Shimada
发明人: Shiro Yamaoka , Hiromu Kakuya , Kunihiko Suzuki , Shinya Satou , Atsushi Shimada
CPC分类号: F02D41/3035 , F02B11/00 , F02D41/3064
摘要: A control apparatus of an engine having a compression ignition combustion mode and a spark ignition combustion mode selects the spark ignition combustion mode when operation conditions fall within a spark ignition operation area set in a spark ignition operation area/compression ignition operation area setting map memory part and selects the compression ignition combustion mode when the operation conditions fall within a switching stable area set in the memory part upon operation by the spark ignition combustion mode. The control apparatus controls to continue the compression ignition combustion mode as long as the operation conditions fall within a compression ignition operation area set in the memory part upon operation by the compression ignition combustion mode.
摘要翻译: 具有压缩点火燃烧模式和火花点火燃烧模式的发动机的控制装置当操作条件落在设置在火花点火操作区域/压缩点火操作区域设置图存储器部分的火花点火操作区域内时,选择火花点火燃烧模式 并且当通过火花点火燃烧模式操作时,当操作条件落入设置在存储器部分中的开关稳定区域内时,选择压燃点火燃烧模式。 只要操作条件落在通过压缩点火燃烧模式操作的存储部分中设定的压缩点火操作区域内,控制装置控制继续压缩点火燃烧模式。
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公开(公告)号:US07516731B2
公开(公告)日:2009-04-14
申请号:US11520740
申请日:2006-09-14
申请人: Shiro Yamaoka , Hiromu Kakuya , Kunihiko Suzuki , Shinya Satou , Atsushi Shimada
发明人: Shiro Yamaoka , Hiromu Kakuya , Kunihiko Suzuki , Shinya Satou , Atsushi Shimada
IPC分类号: F02B17/00
CPC分类号: F02D41/3035 , F02B11/00 , F02D41/3064
摘要: A control apparatus of an engine having a compression ignition combustion mode and a spark ignition combustion mode selects the spark ignition combustion mode when operation conditions fall within a spark ignition operation area set in a spark ignition operation area/compression ignition operation area setting map memory part and selects the compression ignition combustion mode when the operation conditions fall within a switching stable area set in the memory part upon operation by the spark ignition combustion mode. The control apparatus controls to continue the compression ignition combustion mode as long as the operation conditions fall within a compression ignition operation area set in the memory part upon operation by the compression ignition combustion mode.
摘要翻译: 具有压缩点火燃烧模式和火花点火燃烧模式的发动机的控制装置当操作条件落在设置在火花点火操作区域/压缩点火操作区域设置图存储器部分的火花点火操作区域内时,选择火花点火燃烧模式 并且当通过火花点火燃烧模式操作时,当操作条件落入设置在存储器部分中的开关稳定区域内时,选择压燃点火燃烧模式。 只要操作条件落在通过压缩点火燃烧模式操作的存储部分中设定的压缩点火操作区域内,控制装置控制继续压缩点火燃烧模式。
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公开(公告)号:US07308961B2
公开(公告)日:2007-12-18
申请号:US10386548
申请日:2003-03-13
申请人: Shinya Satou , Toshio Hori
发明人: Shinya Satou , Toshio Hori
IPC分类号: B60K31/00
CPC分类号: F02D11/105 , B60K31/04 , B60W2540/12 , B60W2550/12 , B60W2550/20 , B60W2550/308 , B60W2710/0605 , B60W2720/106 , F02D31/002 , F02D2200/501
摘要: A maximum permissible acceleration is calculated so as to take into account vehicle stability, driver's comfort, road surface information and traffic information, driver's specific taste in acceleration and deceleration, and the like. An acceleration limiting process is carried out, in which a feedback gain in vehicle speed feedback control is corrected as may be necessary based on a relationship between the maximum permissible acceleration and actual acceleration information so as to keep the actual acceleration within the maximum permissible acceleration. The present invention thereby makes it possible to control a vehicle speed within a desired acceleration range even under conditions, in which there is a large vehicle speed deviation as in a resume mode, causing an excessively large acceleration or deceleration to tend to occur. Auto cruise control offering an outstanding safety and comfort can thus be implemented.
摘要翻译: 计算最大允许加速度,以便考虑车辆稳定性,驾驶员舒适度,路面信息和交通信息,驾驶员在加速和减速中的具体味道等。 执行加速度限制处理,其中基于最大允许加速度和实际加速度信息之间的关系可能需要校正车辆速度反馈控制中的反馈增益,以便将实际加速度保持在最大允许加速度内。 因此,即使在恢复模式下存在车速偏差大的条件下,本发明也能够将车速控制在期望的加速度范围内,导致趋于发生过大的加速或减速。 因此,可以实现提供卓越安全性和舒适性的自动巡航控制。
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公开(公告)号:US07869931B2
公开(公告)日:2011-01-11
申请号:US11740599
申请日:2007-04-26
申请人: Shinya Satou , Hitoshi Konno , Mamoru Nemoto
发明人: Shinya Satou , Hitoshi Konno , Mamoru Nemoto
CPC分类号: F02D41/1498 , F02D41/107 , F02D41/123 , F02D2250/22 , F02P5/1504 , Y02T10/46 , Y10T477/675
摘要: When an engine torque trace is set during acceleration or deceleration, the ratio of increase or decrease in the engine torque per unit time is restricted so that when the engine torque generated during acceleration or deceleration approaches an engine torque (balance torque) at which the engine is oriented upright with respect to the engine mount, the engine torque stays near the balance torque for a prescribed time.
摘要翻译: 当在加速或减速期间设定发动机扭矩曲线时,限制每单位时间的发动机扭矩的增加或减小的比例,使得当加速或减速时产生的发动机转矩接近发动机转矩(平衡扭矩)时,发动机 相对于发动机支架取向成直角,发动机扭矩保持在平衡扭矩附近规定时间。
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