Ceramic heating jig
    1.
    发明授权
    Ceramic heating jig 失效
    陶瓷加热夹具

    公开(公告)号:US06384383B2

    公开(公告)日:2002-05-07

    申请号:US09728082

    申请日:2000-12-04

    IPC分类号: H05B368

    CPC分类号: H01L21/67103

    摘要: There is disclosed a ceramic heating jig consisting of a susceptor 2 on which a work to be heated is placed, a ceramic heater 3 for heating the susceptor and at least one heat shielding plate 4 for shielding heat of the ceramic heater wherein the susceptor and the heat shielding plate are located so that each of them is located across the ceramic heater each leaving a certain space therefrom, a thickness of the susceptor is 0.5 m to 5 mm, a thickness of the ceramic heater is 0.5 mm to 3 mm, a thickness of the heat shielding plate is 0.5 mm to 3 mm. Preferably, an interval between the members is 0.5 mm to 10 mm, and the members are elastically held as an integration by the elastic means 6 and the restraint means 7. There can be provided a ceramic heating jig wherein defects such as thermal deformation, breakage or the like of the susceptor or the like are hardly caused, temperature can be raised or lowered rapidly, and flatness of a susceptor can be kept even at high temperature.

    摘要翻译: 公开了一种陶瓷加热夹具,其由待加热的工件的基座2,用于加热基座的陶瓷加热器3和用于屏蔽陶瓷加热器的热量的至少一个热屏蔽板4组成,其中基座和 隔热板的位置使得它们各自位于陶瓷加热器两侧,留下一定的空间,基座的厚度为0.5μm至5mm,陶瓷加热器的厚度为0.5mm至3mm,厚度为 的隔热板为0.5mm〜3mm。 优选地,构件之间的间隔为0.5mm至10mm,并且通过弹性装置6和约束装置7将构件弹性保持为一体。可以提供陶瓷加热夹具,其中诸如热变形,断裂的缺陷 感受器等不易引起温度的升高或降低,即使在高温下也能保持基座的平坦度。

    Heating apparatus which has electrostatic adsorption function, and method for producing it
    2.
    发明授权
    Heating apparatus which has electrostatic adsorption function, and method for producing it 有权
    具有静电吸附功能的加热装置及其制造方法

    公开(公告)号:US06953918B2

    公开(公告)日:2005-10-11

    申请号:US10695870

    申请日:2003-10-30

    摘要: There is disclosed a heating apparatus which has an electrostatic adsorption function and which comprises at least a supporting substrate, an electrode for electrostatic adsorption formed on a surface of one side of the supporting substrate, a heating layer formed on a surface of the other side of the supporting substrate, and an insulating layer formed so that it may cover the electrode for electrostatic adsorption and the heating layer wherein a volume resistivity of the insulating layer is varied in a plane. Thus, there can be provided a heating apparatus which has an electrostatic adsorption function wherein uniformity of a temperature distribution in a plane of the wafer when the wafer is heated can be improved, and the wafer can be heat-treated uniformly.

    摘要翻译: 公开了一种具有静电吸附功能的加热装置,其至少包括支撑基板,在支撑基板的一侧的表面上形成的用于静电吸附的电极,形成在另一侧的表面上的加热层 支撑基板和形成为能够覆盖静电吸附用电极的绝缘层和绝缘层的体积电阻率在平面内变化的加热层。 因此,可以提供一种具有静电吸附功能的加热装置,其中可以提高晶片加热时晶片的平面中的温度分布的均匀性,并且可以均匀地对晶片进行热处理。

    Multiple-layered ceramic heater
    3.
    发明授权
    Multiple-layered ceramic heater 失效
    多层陶瓷加热器

    公开(公告)号:US06242719B1

    公开(公告)日:2001-06-05

    申请号:US09328158

    申请日:1999-06-08

    IPC分类号: H05B368

    CPC分类号: H01L21/67103

    摘要: There is disclosed an integrated type multiple-layered ceramic heater based on resistance heating comprising an electrical insulating ceramic support substrate, a heater pattern composed of electroconductive ceramic or metal, which is adhered to a surface of the substrate, and an electrical insulating ceramic protective layer covering the heater pattern, wherein a feeding terminal of the heater is connected to a power source terminal member through a feeding member which generates heat when supplied with electric current. The feeding member preferably generates heat at a power density substantially equal to that of the heater. The multiple-layered ceramic heater of the present invention exhibits excellent thermal uniformity, and does not adversely affect thermal uniformity of an object to be heated even when the feeding terminal is present at a location facing the object to be heated.

    摘要翻译: 公开了一种基于电阻加热的集成型多层陶瓷加热器,其包括电绝缘陶瓷支撑基板,由导电陶瓷或金属组成的加热器图案,其粘附到基板的表面,以及电绝缘陶瓷保护层 覆盖加热器图案,其中加热器的馈电端子通过在被供应电流时产生热量的馈送部件连接到电源端子部件。 馈送构件优选地以基本上等于加热器的功率密度的功率密度产生热量。 本发明的多层陶瓷加热器具有优异的热均匀性,并且即使当馈电端子存在于面向待加热物体的位置时也不会不利地影响待加热物体的热均匀性。

    Method for manufacturing a fluid bearing device
    6.
    发明授权
    Method for manufacturing a fluid bearing device 有权
    制造流体轴承装置的方法

    公开(公告)号:US08826541B2

    公开(公告)日:2014-09-09

    申请号:US13307645

    申请日:2011-11-30

    申请人: Kenji Ito

    发明人: Kenji Ito

    摘要: A fluid bearing device is manufactured with a high adhesive strength in fixing another member by adhesion to a resin housing. A bearing sleeve is secured in position inside the resin housing, and a shaft member is radially supported in a non-contact fashion by a dynamic pressure action of lubricant generated in a radial bearing clearance between the shaft member and the bearing sleeve. A metal bracket for mounting the stator coil of a motor is fixed by adhesion to the outer periphery of the housing, in which the adhesion portion of the outer periphery of the housing to be fixed to the bracket is roughened, setting the surface roughness to 0.5 μmRa to 2.0 μmRa.

    摘要翻译: 通过粘附到树脂壳体上来固定另一构件,制造出具有高粘合强度的流体轴承装置。 轴承套被固定在树脂壳体内部的适当位置,并且轴构件通过在轴构件和轴承套筒之间的径向轴承间隙中产生的润滑剂的动态压力作用以非接触的方式径向支撑。 用于安装电动机的定子线圈的金属支架通过粘合固定在外壳的外周,外壳的外周的固定在支架上的粘合部分被粗糙化,将表面粗糙度设定为0.5 μmRa至2.0μmRa。

    Inorganic-organic hybrid composition and use thereof
    8.
    发明授权
    Inorganic-organic hybrid composition and use thereof 有权
    无机 - 有机杂化组合物及其用途

    公开(公告)号:US08399558B2

    公开(公告)日:2013-03-19

    申请号:US12305543

    申请日:2007-06-19

    IPC分类号: C08F136/00 C08F8/42 C08F8/40

    摘要: The present disclosure provides an inorganic-organic hybrid film which is excellent in transparency, adhesion, heat resistance, weatherability, and anti-rust property, whose refractive index may be controlled easily, and which is also excellent in hardness. Also provided are an inorganic-organic hybrid composition as a starting material for the film, and a hard coating material, an optical material, an anti-rust coating material, and a conductive coating material, all utilizing the composition. The composition is characterized by containing organic component (A) composed of monomer component (a1) containing a particular diol (meth)acrylate compound (U) having a urethane bond, or polymer component (a2) containing polymer (P) obtained by polymerization of monomer component (a1), and inorganic component (B), wherein the ratio of the organic component (A) to the inorganic component (B) is 1:99 to 99:1 by mass.

    摘要翻译: 本公开内容提供了透明性,粘合性,耐热性,耐候性和防锈性优异的无机 - 有机杂化膜,其折射率可以容易地控制,并且硬度也是优异的。 还提供了作为膜的起始材料的无机 - 有机杂化组合物,以及全部利用组合物的硬涂层材料,光学材料,防锈涂层材料和导电涂层材料。 该组合物的特征在于含有由含有具有氨基甲酸酯键的特定二醇(甲基)丙烯酸酯化合物(U)的单体成分(a1)构成的有机成分(A),或含有聚合物(P)的聚合物成分(a2) 单体成分(a1)和无机成分(B),其中有机成分(A)与无机成分(B)的比例为1:99〜99:1质量%。

    Semiconductor device having hetero junction
    9.
    发明授权
    Semiconductor device having hetero junction 有权
    具有异质结的半导体器件

    公开(公告)号:US08299498B2

    公开(公告)日:2012-10-30

    申请号:US12595253

    申请日:2008-04-07

    IPC分类号: H01L29/66

    摘要: A semiconductor device 10 is provided with a first hetero junction 40b configured with two types of nitride semiconductors having different bandgap energy from each other, a second hetero junction 50b configured with two types of nitride semiconductors having different bandgap energy from each other, and a gate electrode 58 facing the second hetero junction 50b. The second hetero junction 50b is configured to be electrically connected to the first hetero junction 40b. The first hetero junction 40b is a c-plane and the second hetero junction 50b is either an a-plane or an m-plane.

    摘要翻译: 半导体器件10设置有由彼此具有不同带隙能量的两种类型的氮化物半导体构成的第一异质结40b,由具有彼此具有不同带隙能量的两种类型的氮化物半导体构成的第二异质结50b,以及栅极 电极58面对第二异质结50b。 第二异质结50b被配置为电连接到第一异质结40b。 第一异质结40b是c面,第二异质结50b是a面或m面。

    Internal combustion engine
    10.
    发明授权
    Internal combustion engine 失效
    内燃机

    公开(公告)号:US07997244B2

    公开(公告)日:2011-08-16

    申请号:US12566666

    申请日:2009-09-25

    IPC分类号: F01M1/06

    摘要: An internal combustion engine includes a control shaft, an actuator, and an oil accumulation portion. The control shaft is configured to vary a lift amount of an engine valve in accordance with a rotational position of the control shaft. The actuator is configured to drive the control shaft to make the lift amount of the engine valve to be a start lift amount before the engine is started. The actuator includes a worm wheel and a worm. The worm wheel is provided at the control shaft and is disposed in an engine body. The worm is disposed below the control shaft and engages with the worm wheel. The oil accumulation portion is provided at at least one of the control shaft and the worm wheel and is configured to drop oil onto the worm in accordance with the rotation of the control shaft when the engine is started.

    摘要翻译: 内燃机包括控制轴,致动器和油积存部。 控制轴构造成根据控制轴的旋转位置来改变发动机气门的升程量。 致动器构造成驱动控制轴,以使发动机气门的升程量成为发动机起动前的起动提升量。 致动器包括蜗轮和蜗杆。 蜗轮设置在控制轴处,并设置在发动机主体中。 蜗杆设置在控制轴下方并与蜗轮啮合。 油积存部设置在控制轴和蜗轮中的至少一个上,并且构造成在发动机起动时根据控制轴的旋转将油滴落到蜗杆上。