公开(公告)号：US5492855A

公开(公告)日：1996-02-20

申请号：US364115

申请日：1994-12-27

申请人： Shoji Matsumoto ,  Hideo Nikou ,  Satoshi Nakagawa

发明人： Shoji Matsumoto ,  Hideo Nikou ,  Satoshi Nakagawa

IPC分类号： H01L21/02 ,  H01L21/3213 ,  H01L21/3065

CPC分类号： H01L28/60 ,  H01L21/32135 ,  Y10S148/014

摘要： A method of manufacturing a semiconductor device, where on top of a substrate having already-completed circuit elements and wiring, etc., an insulation underlayer a, Pt layer for a bottom electrode, a dielectric film and a Pt layer for a top electrode are shaped. A top electrode, capacitance insulation film and bottom electrode are formed by etching the Pt layer for the top electrode or the Pt layer for the bottom electrode using an etching gas contained a S component while composing a Pt and S compound. Alternatively the Pt and S compound can be composed first, and then the compound can be etched.

摘要翻译： 一种制造半导体器件的方法，其中在已经完成的电路元件和布线等的基板的顶部上，绝缘底层a，用于底部电极的Pt层，电介质膜和用于顶部电极的Pt层是 成形。 通过在构成Pt和S化合物的同时，使用包含S成分的蚀刻气体，蚀刻用于顶部电极的Pt层或底部电极的Pt层来形成顶部电极，电容绝缘膜和底部电极。 或者，可以首先组成Pt和S化合物，然后可以蚀刻化合物。

公开(公告)号：US5500386A

公开(公告)日：1996-03-19

申请号：US478340

申请日：1995-06-07

申请人： Shoji Matsumoto ,  Hideo Nikou ,  Satoshi Nakagawa

发明人： Shoji Matsumoto ,  Hideo Nikou ,  Satoshi Nakagawa

IPC分类号： H01L21/02 ,  H01L21/3213 ,  H01L21/70

CPC分类号： H01L28/60 ,  H01L21/32135 ,  Y10S148/014

摘要： A method of manufacturing a semiconductor device, where on top of a substrate having already-completed circuit elements and wiring, etc., an insulation underlayer a, Pt layer for a bottom electrode, a dielectric film and a Pt layer for a top electrode are shaped.A top electrode, capacitance insulation film and bottom electrode are formed by etching the Pt layer for the top electrode or the Pt layer for the bottom electrode using an etching gas contained an S component while composing a Pt and S compound. Alternatively the Pt and S compound can be composed first, and then the compound can be etched.

摘要翻译： 一种制造半导体器件的方法，其中在已经完成的电路元件和布线等的基板的顶部上，绝缘底层a，用于底部电极的Pt层，电介质膜和用于顶部电极的Pt层是 成形。 通过在构成Pt和S化合物的同时，使用包含S成分的蚀刻气体，蚀刻用于顶部电极的Pt层或底部电极的Pt层来形成顶部电极，电容绝缘膜和底部电极。 或者，可以首先组成Pt和S化合物，然后可以蚀刻化合物。

公开(公告)号：US6007673A

公开(公告)日：1999-12-28

申请号：US942441

申请日：1997-10-01

申请人： Shunsuke Kugo ,  Hideo Nikoh ,  Tomoyuki Sasaki ,  Hideo Ichimura ,  Daihei Kajiwara ,  Shoji Matsumoto ,  Satoshi Nakagawa

发明人： Shunsuke Kugo ,  Hideo Nikoh ,  Tomoyuki Sasaki ,  Hideo Ichimura ,  Daihei Kajiwara ,  Shoji Matsumoto ,  Satoshi Nakagawa

IPC分类号： H01J37/32 ,  H01L21/3065 ,  H01L21/311 ,  B44C1/22 ,  H01L21/00

CPC分类号： H01J37/32458 ,  H01J37/321 ,  H01L21/3065 ,  H01L21/31116 ,  H01J2237/022 ,  Y10S156/916

摘要： A semiconductor substrate which is placed on a bottom electrode inside a chamber is dry-etched by creating plasma inside the chamber. By making the average surface roughness Ra of the bottom surface of a quartz-top plate placed on the bottom electrode be in a range of 0.2 to 5 .mu.m, adhesion between the quartz-top plate and the deposits caused by the dry etching is enhanced, and the number of particles suspended in the chamber is reduced. Furthermore, the function of enhancing the adhesion of deposits can be maintained even after cleaning of the quartz-top plate. As a result, the number of particles which adhere onto the semiconductor substrate is reduced and the semiconductor substrate can be processed in an extremely clean atmosphere.

摘要翻译： 通过在腔室内产生等离子体，将放置在室内的底部电极上的半导体衬底进行干蚀刻。 通过使放置在底部电极上的石英板的底面的平均表面粗糙度Ra在0.2〜5μm的范围内，石英板与由干蚀刻引起的沉积物之间的粘附性增强 ，并且悬浮在室中的颗粒数量减少。 此外，即使在清洁石英板之后，也可以保持增加沉积物的附着力的功能。 结果，粘附到半导体衬底上的颗粒数量减少，半导体衬底可以在非常干净的气氛中进行处理。

公开(公告)号：US5989929A

公开(公告)日：1999-11-23

申请号：US119588

申请日：1998-07-21

申请人： Hideo Nikoh ,  Shinichi Imai ,  Nobuhiro Jiwari ,  Satoshi Nakagawa ,  Shoji Matsumoto ,  Yoji Bito

发明人： Hideo Nikoh ,  Shinichi Imai ,  Nobuhiro Jiwari ,  Satoshi Nakagawa ,  Shoji Matsumoto ,  Yoji Bito

IPC分类号： H01J37/32 ,  H01L21/00

CPC分类号： H01L21/67253 ,  H01J37/321 ,  H01J37/32422 ,  H01J37/32467 ,  H01J37/32871 ,  H01J37/3299 ,  H01L21/67069 ,  H01L21/67248

摘要： A reactor is composed of a lower frame of a chamber, a quartz dome, an upper electrode, an 0 ring, and the like. A lower electrode and a substrate as a workpiece to be processed thereon are disposed in the reactor. The temperature of the quartz dome is maintained at a temperature of 180.degree. C. or higher by means of a heater. Fluorocarbon gas such as C.sub.2 F.sub.6 gas or C.sub.4 F.sub.8 gas is introduced into the reactor through a gas inlet and RF power from a first RF power source is applied to an antenna coil to produce a plasma and thereby etch an oxide film on the substrate. By heating the quartz dome to a high temperature, a deposit which hinders the release of oxygen from a wall face is prevented from being attached and the deposit on the bottom of the hole which causes an etch stop during processing is removed with oxygen. This prevents the etch stop during an etching process for forming a deep hole.

摘要翻译： 反应器由室的下框架，石英圆顶，上电极，O形环等构成。 作为待加工的工件的下电极和基板设置在反应器中。 通过加热器将石英圆顶的温度保持在180℃或更高的温度。 将碳氟化合物气体如C 2 F 6气体或C 4 F 8气体通过气体入口引入反应器中，并且将来自第一RF电源的RF功率施加到天线线圈以产生等离子体，从而蚀刻衬底上的氧化物膜。 通过将石英圆顶加热到高温，防止阻碍氧从壁面释放的沉积物被附着，并且用氧气除去在加工过程中导致蚀刻停止的孔的沉积物。 这防止了在用于形成深孔的蚀刻工艺期间的蚀刻停止。

公开(公告)号：US20120301583A1

公开(公告)日：2012-11-29

申请号：US13576725

申请日：2011-03-16

申请人： Yuji Nakada ,  Shoji Matsumoto ,  Naoko Inaba ,  Masayoshi Sakaino ,  Ko Kimura ,  Hiroshi Shiramasa

发明人： Yuji Nakada ,  Shoji Matsumoto ,  Naoko Inaba ,  Masayoshi Sakaino ,  Ko Kimura ,  Hiroshi Shiramasa

IPC分类号： A23D9/007 ,  A23D9/04

CPC分类号： A23D9/007 ,  A23D9/013 ,  A23D9/06 ,  A23L5/11 ,  A23L5/19 ,  A23L5/41 ,  A23V2002/00 ,  C11B5/0028

摘要： The present invention provides an oil and fat composition that can prevent not only coloring caused by heating and cooked odor during heat cooking, but also increase in acid value, as well as that can endure long-term use. The oil and fat composition, which can prevent coloring caused by heating, cooked odor, and increase in acid value, can be obtained by incorporating 0.1 ppm or more and 10 ppm or less of a phosphorus component, and ascorbic acid and/or an ascorbic acid derivative in an ascorbic acid equivalent of 2 ppm or more and 130 ppm or less into an edible oil and fat.

摘要翻译： 本发明提供一种油和油脂组合物，其不仅可以防止在加热烹饪期间由加热和煮熟的气味引起的着色，而且还可以增加酸值，并且可以耐受长期使用。 可以通过加入0.1ppm以上10ppm以下的磷成分和抗坏血酸和/或抗坏血酸来获得能防止由加热引起的着色，煮熟的气味和酸值增加的油脂组合物 酸性衍生物的抗坏血酸当量为2ppm以上且130ppm以下，成为食用油脂。

公开(公告)号：US20100329417A1

公开(公告)日：2010-12-30

申请号：US12865285

申请日：2008-11-07

申请人： Seiji Abe ,  Kenji Chizuka ,  Shoji Matsumoto ,  Koji Kakumoto ,  Takenori Domon ,  Dai Iwasaki

发明人： Seiji Abe ,  Kenji Chizuka ,  Shoji Matsumoto ,  Koji Kakumoto ,  Takenori Domon ,  Dai Iwasaki

IPC分类号： G03G15/05

CPC分类号： D01F8/04 ,  D01F1/106 ,  D01F6/82 ,  D01F6/86 ,  D01F8/12 ,  D01F8/14 ,  Y10T428/2924 ,  Y10T428/2927 ,  Y10T428/2929 ,  Y10T428/2931

摘要： Disclosed is a monofilament allowing contrast X-ray radiography. At least part of the monofilament is formed of a thermoplastic resin containing a radiopaque agent. The monofilament contains the radiopaque agent in the thermoplastic resin in a content of 30 to 80% by mass, and has a Young's modulus of 0.1 to 5.0 cN/dtex and a fineness of 500 to 20000 dtex.

摘要翻译： 公开了允许对比X射线照相术的单丝。 单丝的至少一部分由含有不透射线剂的热塑性树脂形成。 单丝在热塑性树脂中含有30〜80质量％的不透射线剂，杨氏模量为0.1〜5.0cN / dtex，细度为500〜20000dtex。

公开(公告)号：US07531495B2

公开(公告)日：2009-05-12

申请号：US10296960

申请日：2001-05-08

申请人： Kazuo Kabashima ,  Kenichi Kato ,  Shoji Matsumoto

发明人： Kazuo Kabashima ,  Kenichi Kato ,  Shoji Matsumoto

IPC分类号： C11D7/50

CPC分类号： C11D7/28 ,  C11D7/24 ,  C11D7/26 ,  C11D7/5018 ,  C11D11/0005 ,  C11D11/0029 ,  C11D11/0041 ,  C11D11/0047 ,  C11D11/0076 ,  C23G5/02803 ,  C23G5/032 ,  C23G5/04

摘要： A cleaning agent or a rinsing agent having no flash point which comprises a chlorine-free fluorine-containing compound having a vapor pressure at 20° C. of 1.33×103 Pa or more and one or more components having a vapor pressure at 20° C. less than 1.33×103 Pa and optionally an additive such as an antioxidant; a method for cleaning which comprises cleaning with the cleaning agent and rinsing and/or vapor cleaning utilizing a vapor being generated by boiling the cleaning agent or a condensate thereof; a method for separating a soil which comprises contacting a cleaning agent in a cleaning tank with a condensate of the vapor of the cleaning agent in a soil separating tank, to thereby continuously separate and remove a soil contained in the cleaning agent; and a cleaning apparatus.

摘要翻译： 不含闪点的清洗剂或漂洗剂，其包含在20℃下蒸气压为1.33×10 3 Pa以上的无氯含氟化合物和蒸气压为20℃的一种或多种组分。 小于1.33×10 3 Pa和任选的添加剂如抗氧化剂; 一种清洁方法，其包括用清洗剂清洗，利用通过煮沸清洗剂或其冷凝物产生的蒸汽进行漂洗和/或蒸气清洗; 一种分离土壤的方法，包括使清洗槽中的清洁剂与污垢分离罐中的清洁剂的蒸气的冷凝物接触，从而连续分离和去除包含在清洁剂中的污垢; 和清洁装置。

公开(公告)号：US20070195473A1

公开(公告)日：2007-08-23

申请号：US11548431

申请日：2006-10-11

申请人： Shoji Matsumoto

发明人： Shoji Matsumoto

IPC分类号： H02H9/00

CPC分类号： H05K1/0216 ,  H01L2924/0002 ,  H05K1/0245 ,  H05K1/025 ,  H05K1/181 ,  H05K2201/09236 ,  H05K2201/09627 ,  H05K2201/10189 ,  H05K2201/10689 ,  H01L2924/00

摘要： Impedance mismatching points such as a VIA and a connector on a differential line between a differential driver element and a differential receiver element are arranged in predetermined positions. That is, the impedance mismatching points are arranged in such positions that a transmission time of a digital signal transmitted through a main differential line becomes (integral multiple of UI) ±0.5×Trf, whereby noises are generated within the rise and fall times of a signal to be able to maintain an excellent waveform of the signal.

摘要翻译： 诸如差分驱动器元件和差分接收器元件之间的差分线路上的VIA和连接器的阻抗不匹配点被布置在预定位置。 也就是说，阻抗失配点被布置在通过主差分线发送的数字信号的发送时间变为（UI的整数倍）±0.5×Trf的位置，从而在信号的上升和下降时间内产生噪声 能够保持良好的信号波形。

公开(公告)号：US3950166A

公开(公告)日：1976-04-13

申请号：US437902

申请日：1974-01-30

申请人： Kunio Obara ,  Yoshio Nishino ,  Shoji Matsumoto

发明人： Kunio Obara ,  Yoshio Nishino ,  Shoji Matsumoto

IPC分类号： B22F1/00 ,  B22F3/10 ,  B22F9/04 ,  C22C1/04 ,  C22C14/00 ,  B22F3/16

CPC分类号： C22C1/0458 ,  B22F2998/00

摘要： A sintered article of a titanium alloy is produced by powder metallurgy techniques, the alloy having uniform structure, and improved mechanical properties, machinability and weldability. The process comprises; partially sintering a powder mixture of (a) at least one selected from the group consisting of powdered titanium and titanium hydride having a particle size of minus 60 mesh and (b) at least one powdered additive selected from the group consisting of powdered Ni, Al, Cu, Sn, Pd, Co, Fe, Cr, Mn, and Si having a particle size of minus 60 mesh, to partially alloy the titanium with one or more additives employed; after furnace cooling the partially sintered mass to room temperature, pulverizing it to powder of minus 60 mesh in particle size to prepare mother alloy powder; mixing (a) the mother alloy powder having a particle size of minus 60 mesh, (b) at least one selected from the group consisting of powdered titanium and titanium hydride having a particle size of minus 60 mesh, and (c), if necessary, at least one additional element selected from the group consisting of powdered V, Mo, Zr and Al-V alloy, which are added for the purpose of avoiding excess formation of a liquid phase during the subsequent sintering; compacting the thus formed powder mixture into a compact having a predetermined shape; and sintering the compact at a temperature ranging from 1000.degree.C to 1500.degree.C in a non-oxidizing and non-nitriding atmosphere for from 30 minutes to 2 hours.

公开(公告)号：US09055674B2

公开(公告)日：2015-06-09

申请号：US13185692

申请日：2011-07-19

申请人： Shoji Matsumoto

发明人： Shoji Matsumoto

IPC分类号： H05K1/02 ,  H04B3/30 ,  H04B3/32 ,  H03H7/06 ,  H05K1/16

CPC分类号： H05K1/0231 ,  H03H7/06 ,  H04B3/30 ,  H04B3/32 ,  H05K1/0234 ,  H05K1/0243 ,  H05K1/162

摘要： A printed circuit board includes signal transmitting units that transmit signals, signal receiving units that receive signals, and a plurality of signal lines that connect the signal transmitting units and the signal receiving units. A resistor having a value Rp [Ω] of resistance with a first tolerance is provided between two signal lines that are adjacent to each other. In addition, a capacitor element that is connected in series to the resistor and that has a value Cp [F] of capacitance with a second tolerance is also connected between the two signal lines. In relation to the rise time tr [s] of the signals output from the signal transmitting units, the value Rp of resistance of the resistor and the value Cp of capacitance of the capacitor element are set such that an expression (Cp×Rp)×0.9≦tr/3≦(Cp×Rp)×1.1 is satisfied.

摘要翻译： 印刷电路板包括发送信号的信号发送单元，接收信号的信号接收单元和连接信号发送单元和信号接收单元的多个信号线。 在彼此相邻的两个信号线之间提供具有第一公差的电阻值Rp [＆OHgr]的电阻器。 此外，两个信号线之间连接有与电阻器串联连接并且具有第二容差的电容值Cp [F]的电容器元件。 关于从信号发送单元输出的信号的上升时间tr [s]，电阻器的电阻值Rp和电容器元件的电容值Cp被设定为使得表达式（Cp×Rp）× 0.9＆nlE; tr / 3＆nlE;（Cp×Rp）×1.1。