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公开(公告)号：US06670599B2
公开(公告)日：2003-12-30
申请号：US09813362
申请日：2001-03-20
申请人： Sigurd Wagner , Matthias Wagner , Eugene Y. Ma , Adam M. Payne
发明人： Sigurd Wagner , Matthias Wagner , Eugene Y. Ma , Adam M. Payne
IPC分类号： H01L3100
CPC分类号： H01S5/02284 , H01L31/12 , H01S5/02272 , H01S5/0264 , H01S5/0422 , H01S5/183 , H01S5/423 , H01S2301/176 , H04B10/40
摘要： Materials suitable for fabricating optical monitors include amorphous, polycrystalline and microcrystalline materials. Semitransparent photodetector materials may be based on silicon or silicon and germanium alloys. Conductors for connecting to and contacting the photodetector may be made from various transparent oxides, including zinc oxide, tin oxide and indium tin oxide. Optical monitor structures based on PIN diodes take advantage of the materials disclosed. Various contact, lineout, substrate and interconnect structures optimize the monitors for integration with various light sources, including vertical cavity surface emitting laser (VCSEL) arrays. Complete integrated structures include a light source, optical monitor and either a package or waveguide into which light is directed.
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2.发明授权Semitransparent optical detector including a polycrystalline layer and method of making 有权半透明光学检测器，包括多晶层及其制造方法公开(公告)号：US06879014B2
公开(公告)日：2005-04-12
申请号：US09813454
申请日：2001-03-20
申请人： Sigurd Wagner , Matthias Wagner , Eugene Y. Ma , Adam M. Payne
发明人： Sigurd Wagner , Matthias Wagner , Eugene Y. Ma , Adam M. Payne
IPC分类号： H01L29/04 , H01L31/036 , H01L31/0368 , H01L31/075 , H01L31/18
CPC分类号： H01L31/1872 , H01L31/03682 , H01L31/1016 , H01L2224/48091 , H01L2224/48465 , H01S5/02248 , H01S5/0683 , H01S5/423 , Y02E10/546 , Y02P70/521 , H01L2924/00014
摘要： Materials suitable for fabricating optical monitors include amorphous, polycrystalline and microcrystalline materials. Semitransparent photodetector materials may be based on silicon or silicon and germanium alloys. Conductors for connecting to and contacting the photodetector may be made from various transparent oxides, including zinc oxide, tin oxide and indium tin oxide. Optical monitor structures based on PIN diodes take advantage of the materials disclosed. Various contact, lineout, substrate and interconnect structures optimize the monitors for integration with various light sources, including vertical cavity surface emitting laser (VCSEL) arrays. Complete integrated structures include a light source, optical monitor and either a package or waveguide into which light is directed.
摘要翻译： 适用于制造光学显示器的材料包括无定形，多晶和微晶材料。 半透射光电探测器材料可以基于硅或硅和锗合金。 用于连接和接触光电检测器的导体可以由各种透明氧化物制成，包括氧化锌，氧化锡和氧化铟锡。 基于PIN二极管的光学监视器结构利用所公开的材料。 各种接触，线路，基板和互连结构优化了监视器，以与各种光源（包括垂直腔表面发射激光器（VCSEL）阵列）集成。 完整的集成结构包括光源，光学监视器以及光引导的封装或波导。
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公开(公告)号：US07002697B2
公开(公告)日：2006-02-21
申请号：US10211970
申请日：2002-08-02
申请人： Lawrence H. Domash , Adam M. Payne , Eugene Y. Ma , Nikolay Nemchuk , Ming Wu , Robert Murano , Steven Sherman , Matthias Wagner
发明人： Lawrence H. Domash , Adam M. Payne , Eugene Y. Ma , Nikolay Nemchuk , Ming Wu , Robert Murano , Steven Sherman , Matthias Wagner
IPC分类号： G01B9/02
CPC分类号： G02B6/4246 , G01J3/0286 , G01J3/26 , G01N21/251 , G02B6/29311 , G02B6/29358 , G02B6/29361 , G02B6/29367 , G02B6/29395 , G02B6/29398 , G02B6/4204 , G02B6/4206 , G02B6/4214 , G02B6/4215 , G02B6/4224 , G02B6/4225 , G02B6/4249 , G02B6/4251 , G02B6/4263 , G02B6/4266 , G02B6/4286 , G02F1/0121 , G02F1/0147 , G02F1/218 , G02F2001/213 , G02F2202/103 , G02F2202/104 , G02F2203/055
摘要： An optical instrument including: a thermo-optically tunable, thin film, free-space interference filter having a tunable passband which functions as a wavelength selector, the filter including a sequence of alternating layers of amorphous silicon and a dielectric material deposited one on top of the other and forming a Fabry-Perot cavity structure having: a first multi-layer thin film interference structure forming a first mirror; a thin-film spacer layer deposited on top of the first multi-layer interference structure, the thin-film spacer layer made of amorphous silicon; and a second multi-layer thin film interference structure deposited on top of the thin-film spacer layer and forming a second mirror; a lens for coupling an optical beam into the filter; an optical detector for receiving the optical beam after the optical beam has interacted with the interference filter; and circuitry for heating the thermo-optically tunable interference filter to control a location of the passband.
摘要翻译： 一种光学仪器，包括：具有用作波长选择器的可调谐通带的热光可调谐薄膜自由空间干涉滤光器，所述滤光器包括一系列交替的非晶硅层和介于第 另一个并形成法布里 - 珀罗腔结构，其具有：形成第一反射镜的第一多层薄膜干涉结构; 沉积在第一多层干涉结构之上的薄膜间隔层，由非晶硅制成的薄膜间隔层; 以及沉积在所述薄膜间隔层的顶部并形成第二反射镜的第二多层薄膜干涉结构; 用于将光束耦合到过滤器中的透镜; 光学检测器，用于在光束与干涉滤光器相互作用之后接收光束; 以及用于加热热光可调谐干涉滤光器以控制通带位置的电路。
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4.发明授权公开(公告)号：US07697192B2
公开(公告)日：2010-04-13
申请号：US12417430
申请日：2009-04-02
CPC分类号： G02F1/0147 , G02B5/284 , G02F1/21 , G02F2001/213
摘要： A thin-film interference filter structure has a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.
摘要翻译： 薄膜干涉滤光器结构对预定波长范围内的入射光能具有大致波长依赖的谐振响应。 薄膜干涉滤光器结构包括具有热可调谐光学特性的热可调谐层，使得热可调谐层的波长依赖性共振光学响应的范围由热可调谐层的相应热条件范围引起。 薄膜干涉滤光器结构被配置为（1）在热可调谐层处接收空间上变化的热能图案，以向热可调谐层的热可调谐特性赋予相应的空间变化图案，以及（2） 入射到光可调谐层中的光能，并且输出具有与热可调谐特性的空间变化图案相对应的空间调制的光能。
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公开(公告)号：US07829854B2
公开(公告)日：2010-11-09
申请号：US12176931
申请日：2008-07-21
申请人： Matthias Wagner , Shuyun Wu , Eugene Y. Ma
发明人： Matthias Wagner , Shuyun Wu , Eugene Y. Ma
CPC分类号： G01J5/58 , G01J5/00 , G01J2005/0077 , H01L27/14603 , H01L27/1462 , H01L27/14649 , H01L27/14687
摘要： A thermal imaging device including: a substrate; and an array of thermally tunable pixel elements for generating a thermal image, each thermally tunable pixel element including: a plurality of thermally tunable filter islands, each of which has a thermally tunable optical filter, wherein each of the plurality of tunable filter islands within that pixel element is thermally isolated from the other tunable filter islands within that tunable pixel element; an absorption structure for absorbing incident optical thermal energy; and a mechanical structure supporting the plurality of tunable filter islands and the absorption structure on the substrate.
摘要翻译： 一种热成像装置，包括：基板; 以及用于产生热图像的热可调节像素元件阵列，每个热可调谐像素元件包括：多个热可调谐滤光片岛，每个散热岛具有热可调光滤光器，其中该可调谐滤光片岛中的每一个在该可调谐滤光片岛内 像素元件与该可调谐像素元件内的其它可调谐滤光片岛热隔离; 用于吸收入射光学热能的吸收结构; 以及支撑多个可调谐滤光片岛和基片上的吸收结构的机械结构。
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公开(公告)号：US20080088906A1
公开(公告)日：2008-04-17
申请号：US11803044
申请日：2007-05-11
IPC分类号： G02F1/00
CPC分类号： G02F1/0147 , G02B5/284 , G02F1/21 , G02F2001/213
摘要： An apparatus includes a thin-film interference filter structure having a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.
摘要翻译： 一种装置包括对预定波长范围内的入射光能具有大致波长依赖的谐振响应的薄膜干涉滤波器结构。 薄膜干涉滤光器结构包括具有热可调谐光学特性的热可调谐层，使得热可调谐层的波长依赖性共振光学响应的范围由热可调谐层的相应热条件范围引起。 薄膜干涉滤光器结构被配置为（1）在热可调层处接收空间上变化的热能图案，以向热可调谐层的热可调谐特性赋予相应的空间变化图案，以及（2） 入射到光可调谐层中的光能，并且输出具有与热可调谐特性的空间变化图案相对应的空间调制的光能。
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公开(公告)号：US06985281B2
公开(公告)日：2006-01-10
申请号：US10306056
申请日：2002-11-27
IPC分类号： G02F1/29
CPC分类号： G02F1/218 , G01N21/251 , G02B6/29358 , G02B6/29395 , G02B6/29398 , G02B6/4204 , G02B6/4206 , G02B6/4214 , G02B6/4224 , G02B6/4225 , G02B6/4249 , G02B6/4251 , G02B6/4263 , G02B6/4265 , G02B6/4266 , G02F1/0121 , G02F1/0147 , G02F2001/213 , G02F2202/103 , G02F2202/104 , G02F2203/055 , H01L2224/48091 , H01L2924/00014
摘要： An optoelectronic device including a header having an upper surface and including a plurality of conducting pins extending up through the upper surface; an optical device; a tunable optical filter, wherein the optical device and the tunable optical filter are arranged in a vertical stack mounted on and extending above the upper surface of the header and wherein the tunable optical filter is electrically connected to the plurality of conducting pins; and a cap affixed to the header and along with the header defining a sealed interior containing the optical device and the tunable optical filter, wherein the cap has a top surface with a window formed therein, and wherein the window is aligned with the tunable optical filter and the optical device.
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8.发明申请公开(公告)号：US20090195859A1
公开(公告)日：2009-08-06
申请号：US12417430
申请日：2009-04-02
IPC分类号： G02F1/29
CPC分类号： G02F1/0147 , G02B5/284 , G02F1/21 , G02F2001/213
摘要： A thin-film interference filter structure has a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.
摘要翻译： 薄膜干涉滤光器结构对预定波长范围内的入射光能具有大致波长依赖的谐振响应。 薄膜干涉滤光器结构包括具有热可调谐光学特性的热可调谐层，使得热可调谐层的波长依赖性共振光学响应的范围由热可调谐层的相应热条件范围引起。 薄膜干涉滤光器结构被配置为（1）在热可调层处接收空间上变化的热能图案，以向热可调谐层的热可调谐特性赋予相应的空间变化图案，以及（2） 入射到光可调谐层中的光能，并且输出具有与热可调谐特性的空间变化图案相对应的空间调制的光能。
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公开(公告)号：US07522328B2
公开(公告)日：2009-04-21
申请号：US11803044
申请日：2007-05-11
CPC分类号： G02F1/0147 , G02B5/284 , G02F1/21 , G02F2001/213
摘要： An apparatus includes a thin-film interference filter structure having a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.
摘要翻译： 一种装置包括对预定波长范围内的入射光能具有大致波长依赖的谐振响应的薄膜干涉滤波器结构。 薄膜干涉滤光器结构包括具有热可调谐光学特性的热可调谐层，使得热可调谐层的波长依赖性共振光学响应的范围由热可调谐层的相应热条件范围引起。 薄膜干涉滤光器结构被配置为（1）在热可调层处接收空间上变化的热能图案，以向热可调谐层的热可调谐特性赋予相应的空间变化图案，以及（2） 入射到光可调谐层中的光能，并且输出具有与热可调谐特性的空间变化图案相对应的空间调制的光能。
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公开(公告)号：US07402803B1
公开(公告)日：2008-07-22
申请号：US11448450
申请日：2006-06-07
申请人： Matthias Wagner , Shuyun Wu , Eugene Y. Ma
发明人： Matthias Wagner , Shuyun Wu , Eugene Y. Ma
IPC分类号： G01J5/00
CPC分类号： G01J5/58 , G01J5/00 , G01J2005/0077 , H01L27/14603 , H01L27/1462 , H01L27/14649 , H01L27/14687
摘要： A thermally tunable pixel element includes a substrate; a thermally tunable filter island; a thermal absorption structure in direct thermal contact with and extending beyond the thermally tunable filter island; and a thermal isolation structure providing a thermally isolating path between the thermal absorption structure and the substrate.
摘要翻译： 热可调像素元件包括基板; 热可调过滤岛; 与热可调过滤岛直接热接触并延伸超过热可调过滤岛的热吸收结构; 以及提供热吸收结构和衬底之间的热隔离路径的热隔离结构。
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