公开(公告)号：US07463044B2

公开(公告)日：2008-12-09

申请号：US11531092

申请日：2006-09-12

申请人： Steffen Schott ,  Stefan Kreissig ,  Axel Becker ,  Dietmar Runge

发明人： Steffen Schott ,  Stefan Kreissig ,  Axel Becker ,  Dietmar Runge

IPC分类号： G01R31/02

CPC分类号： G01R1/06705 ,  G01R1/06772 ,  G01R1/07342

摘要： An adapter for positioning of contact tips has a location surface for locating a contact tip and a base element with a base for setting the adapter on a mounting surface. A positioning element is in mechanical contact with and mobile relative to the base element. The location surface can be positioned relative to the base, in at least one positioning direction, by the positioning element which includes a gearing for converting rotary movement to translational movement in the positioning direction.

摘要翻译： 用于定位接触尖端的适配器具有用于定位接触尖端的位置表面和具有用于将适配器设置在安装表面上的基座的基座元件。 定位元件相对于基座元件机械地接触和移动。 位置表面可以通过定位元件在至少一个定位方向上相对于基座定位，该定位元件包括用于将旋转运动转换成在定位方向上的平移运动的传动装置。

公开(公告)号：US20070296402A1

公开(公告)日：2007-12-27

申请号：US11531092

申请日：2006-09-12

申请人： Steffen Schott ,  Stefan Kreissig ,  Axel Becker ,  Dietmar Runge

发明人： Steffen Schott ,  Stefan Kreissig ,  Axel Becker ,  Dietmar Runge

IPC分类号： G01R31/28

CPC分类号： G01R1/06705 ,  G01R1/06772 ,  G01R1/07342

摘要： An adapter for positioning of contact tips has a location surface for locating a contact tip and a base element with a base for setting the adapter on a mounting surface. A positioning element is in mechanical contact with and mobile relative to the base element. The location surface can be positioned relative to the base, in at least one positioning direction, by the positioning element which includes a gearing for converting rotary movement to translational movement in the positioning direction.

摘要翻译： 用于定位接触尖端的适配器具有用于定位接触尖端的位置表面和具有用于将适配器设置在安装表面上的基座的基座元件。 定位元件相对于基座元件机械地接触和移动。 位置表面可以通过定位元件在至少一个定位方向上相对于基座定位，该定位元件包括用于将旋转运动转换成在定位方向上的平移运动的传动装置。

公开(公告)号：US07038441B2

公开(公告)日：2006-05-02

申请号：US10677524

申请日：2003-10-02

申请人： Karsten Stoll ,  Stefan Kreissig ,  Alf Wachtveitl ,  Michael Teich ,  Stefan Schneidewind ,  Claus Dietrich ,  Jorg Kiesewetter ,  Dietmar Runge

发明人： Karsten Stoll ,  Stefan Kreissig ,  Alf Wachtveitl ,  Michael Teich ,  Stefan Schneidewind ,  Claus Dietrich ,  Jorg Kiesewetter ,  Dietmar Runge

IPC分类号： G01R31/02

CPC分类号： G01R31/2865 ,  G01R31/2806 ,  G01R31/2831 ,  G01R31/2887

摘要： The invention, which relates to a test apparatus with loading device which has a chuck, which is provided with a bearing surface for a test substrate and with a chuck drive, by means of which the chuck can be displaced with a working area, and which has a receiving means for receiving test substrates, which can be displaced from a working area of the chuck to a receiving position outside the working area, is based on the object of increasing the accuracy of the movement of the chuck. Moreover, in the case of test apparatus with a controlled atmosphere, a further object is to prevent the chuck from being exposed to the open-air atmosphere. This is achieved by virtue of the fact that a carriage, which can be displaced between a position close to the chuck, in which the chuck is located in a position inside the working area, and the receiving position, is provided, which carriage is provided with a holder, in which the test substrate can be at least indirectly inserted in such a way that the test substrate, when the carriage is in the position close to the chuck, is located above the chuck. The holder and the chuck can move vertically relative to one another when the carriage is in the position close to the chuck.

摘要翻译： 本发明涉及具有卡盘的装载装置的测试装置，其具有用于测试基板的轴承表面和卡盘驱动装置，通过该卡盘驱动器卡盘可以移动工作区域，并且其中 具有用于接收可以从卡盘的工作区域移动到工作区域外部的接收位置的测试基板的接收装置，其基础是提高卡盘的运动精度的目的。 此外，在具有受控气氛的测试装置的情况下，另一个目的是防止卡盘暴露于露天气氛。 这是通过以下事实来实现的：提供了可以在卡盘位于工作区域内的位置的接近卡盘的位置之间移动的托架和接收位置，该托架被设置 具有保持器，其中测试基板可以至少间接地插入，使得当托架处于靠近卡盘的位置时，测试基板位于卡盘上方。 当托架位于靠近卡盘的位置时，托架和夹头可以相对于彼此垂直移动。

公开(公告)号：US07282930B2

公开(公告)日：2007-10-16

申请号：US11314624

申请日：2005-12-21

申请人： Uwe Beier ,  Dietmar Runge ,  Stefan Kreissig ,  Steffen Grauer ,  Matthias Rottka ,  Botho Hirschfeld ,  Joerg Kiesewetter

发明人： Uwe Beier ,  Dietmar Runge ,  Stefan Kreissig ,  Steffen Grauer ,  Matthias Rottka ,  Botho Hirschfeld ,  Joerg Kiesewetter

IPC分类号： G01R31/302

CPC分类号： G01R31/2831

摘要： A device for testing thin elements, such as wafers or individual substrates, while at the same time offering a facility for inspecting the reverse side of the thin elements is provided in which any deflection of the substrate as a consequence of high contact power of the probe card is avoided and which is also suitable for substrate diameters of 200 mm and above. The device includes a stable plate with a central opening positioned on the basic construction, a frame which can be moved and/or turned on the plate in an x/y direction and, if required, in a theta direction, a highly-rigid substrate support which can be mounted in the frame, and substrates which can be mounted on the substrate support, wherein the mounting is effected through a vacuum, using mechanical elements (clamping ring, clamping foil or other suitable clamping elements), gel pack pads, or adhesive etc.

摘要翻译： 提供了用于测试诸如晶片或单独基板的薄元件的装置，同时提供用于检查薄元件的反面的设备，其中作为探针的高接触功率的结果的基板的任何偏转 避免卡片，也适用于200mm及以上的基材直径。 该装置包括具有位于基本结构上的中心开口的稳定板，可在x / y方向上移动和/或转动板的框架，并且如果需要，在θ方向上可以是高度刚性的基板 可以安装在框架中的支撑件以及可以安装在基板支撑件上的基板，其中通过真空使用机械元件（夹紧环，夹紧箔或其它合适的夹紧元件），凝胶封装垫或 粘合剂等

公开(公告)号：US20070139067A1

公开(公告)日：2007-06-21

申请号：US11314624

申请日：2005-12-21

申请人： Uwe Beier ,  Dietmar Runge ,  Stefan Kreissig ,  Steffen Grauer ,  Matthias Rottka ,  Botho Hirschfeld ,  Joerg Kiesewetter

发明人： Uwe Beier ,  Dietmar Runge ,  Stefan Kreissig ,  Steffen Grauer ,  Matthias Rottka ,  Botho Hirschfeld ,  Joerg Kiesewetter

IPC分类号： G01R31/26

CPC分类号： G01R31/2831

摘要： A device for testing thin elements, such as wafers or individual substrates, while at the same time offering a facility for inspecting the reverse side of the thin elements is provided in which any deflection of the substrate as a consequence of high contact power of the probe card is avoided and which is also suitable for substrate diameters of 200 mm and above. The device includes a stable plate with a central opening positioned on the basic construction, a frame which can be moved and/or turned on the plate in an x/y direction and, if required, in a theta direction, a highly-rigid substrate support which can be mounted in the frame, and substrates which can be mounted on the substrate support, wherein the mounting is effected through a vacuum, using mechanical elements (clamping ring, clamping foil or other suitable clamping elements), gel pack pads, or adhesive etc.)

摘要翻译： 提供了用于测试诸如晶片或单独基板的薄元件的装置，同时提供用于检查薄元件的反面的设备，其中作为探针的高接触功率的结果的基板的任何偏转 避免卡片，也适用于200mm及以上的基材直径。 该装置包括具有位于基本结构上的中心开口的稳定板，可在x / y方向上移动和/或转动板的框架，并且如果需要，在θ方向上可以是高度刚性的基板 可以安装在框架中的支撑件以及可以安装在基板支撑件上的基板，其中通过真空使用机械元件（夹紧环，夹紧箔或其它合适的夹紧元件），凝胶封装垫或 粘合剂等）

公开(公告)号：US07652491B2

公开(公告)日：2010-01-26

申请号：US11940354

申请日：2007-11-15

申请人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

发明人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Karsten Stoll ,  Axel Schmidt ,  Andreas Kittlaus

IPC分类号： G10R31/28

CPC分类号： G01R31/2889 ,  G01R1/07342

摘要： A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes comprises a probe card holder, a probe card, and a probe card adapter, The probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed such that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from the holder. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component.

摘要翻译： 用于保持探头的探针支架用于探测器中的测试基板的电接触以用于测试目的包括探针卡夹，探针卡和探针卡适配器。探针卡和探针卡适配器彼此电连接为 以及导电材料的屏蔽件，并且被布置成使得探针卡位于屏蔽件的通道中。 屏蔽件设置在测试基板和探针卡座之间并且与保持器电绝缘。 为了测试测试基板，它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的， 由x分量和y分量组成直到第一个和每个附加的接触位置。

公开(公告)号：US07579849B2

公开(公告)日：2009-08-25

申请号：US11674430

申请日：2007-02-13

申请人： Jorg Kiesewetter ,  Stefan Kreissig ,  Stojan Kanev

发明人： Jorg Kiesewetter ,  Stefan Kreissig ,  Stojan Kanev

IPC分类号： G01R31/02

CPC分类号： G01R1/06705 ,  G01R1/0675

摘要： A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force, includes a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the probe holder to the carrier device. The holder arm and the fastening arm are connected to one another by an articulated joint, whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented by increasing the radius of the yielding movement of the probe needle.

摘要翻译： 探针支架，其中探针在垂直力的作用下具有轻微的水平偏移，包括用于探针的探针支架，其中该支架适于紧固和电接触连接在载体装置上 测试装置，并且具有在其自由端具有针保持器的保持臂，用于固定探针，以及用于将探针保持器连接到载体装置的紧固臂。 保持臂和紧固臂通过铰接接头彼此连接，由此可以通过增加探针的屈服运动的半径来减小或甚至防止由于外力引起的针尖的水平偏移。

公开(公告)号：US20090049944A1

公开(公告)日：2009-02-26

申请号：US12022261

申请日：2008-01-30

申请人： Jorg Kiesewetter ,  Stojan Kanev ,  Lutz Junker ,  Stefan Kreissig

发明人： Jorg Kiesewetter ,  Stojan Kanev ,  Lutz Junker ,  Stefan Kreissig

IPC分类号： B25J7/00

CPC分类号： B25J7/00 ,  B25J9/144 ,  G01R1/06705 ,  Y10T74/20207

摘要： A micromanipulator for moving a probe comprises two elements which are mechanically connected to one another in such a way that one element can be moved relative to other element. The movement of the element occurs as a result of the pressure change of a fluid which acts upon an actuator which is in mechanical contact to a mobile element or to an element moving on a surface segment.

摘要翻译： 用于移动探针的显微操纵器包括两个元件，这两个元件以相对于其它元件移动一个元件的方式彼此机械连接。 元件的运动是由于作用在致动器上的流体的压力变化的结果，该致动器机械地接触到移动元件或者在表面段上移动的元件。

公开(公告)号：US07741860B2

公开(公告)日：2010-06-22

申请号：US12145090

申请日：2008-06-24

申请人： Sebastian Giessmann ,  Stefan Kreissig ,  Stojan Kanev

发明人： Sebastian Giessmann ,  Stefan Kreissig ,  Stojan Kanev

IPC分类号： G01R1/02 ,  G01R31/28

CPC分类号： G11C29/56 ,  G01R31/2862 ,  G01R31/315 ,  G11C29/56016 ,  G11C2029/5602

摘要： A prober for testing components comprises a lower frame, over which a probe holder plate is disposed at a distance therefrom for receiving test probes that make contact with the components to be tested and to which a displacement device is connected. A substrate carrier is disposed in the space between the frame and the probe holder plate, and the probe holder plate is provided with an opening, below which the substrate carrier can be displaced. To expand the scope of application of probers used for testing components, all those components of the prober that surround the substrate are made from a non-magnetic material.

摘要翻译： 用于测试部件的检测器包括下框架，探针保持板在其上设置一段距离，用于接收与要测试的部件接触的测试探针，并且与其连接的位移装置。 衬底载体设置在框架和探针保持板之间的空间中，并且探针保持板设置有开口，在该开口下方可以移动衬底载体。 为了扩大用于测试组件的探测器的应用范围，围绕衬底的探测器的所有组件由非磁性材料制成。

公开(公告)号：US20080042679A1

公开(公告)日：2008-02-21

申请号：US11839899

申请日：2007-08-16

申请人： Carel van de Beek ,  Stefan Kreissig ,  Volker Hansel ,  Sebastian Giessmann ,  Frank-Michael Werner ,  Claus Dietrich ,  Jorg Kiesewetter

发明人： Carel van de Beek ,  Stefan Kreissig ,  Volker Hansel ,  Sebastian Giessmann ,  Frank-Michael Werner ,  Claus Dietrich ,  Jorg Kiesewetter

IPC分类号： G01R31/02

CPC分类号： G01R31/2874 ,  H01L21/67109

摘要： In a method and an apparatus for measuring temperature-controlled electronic components in a test station, a component to be measured is held and positioned using a chuck, has a temperature-controlled and directed fluid flow applied to it and is electrically contact-connected using probes and is measured. The setting of the temperature of the component to the temperature at which the measurement is intended to be carried out is effected solely using a directed fluid flow at a defined temperature.

摘要翻译： 在测试台中用于测量温度控制的电子部件的方法和装置中，使用卡盘来保持和定位要测量的部件，其中施加有受温度控制和定向的流体流动并且使用 探头并进行测量。 将组件的温度设定为要进行测量的温度仅仅使用在限定温度下的定向流体流进行。