公开(公告)号：US20130250983A1

公开(公告)日：2013-09-26

申请号：US13394286

申请日：2009-09-04

Applicant: Stepan Essaian ,  Dzhakhangir Khaydarov ,  Andrei V. Shchegrov

Inventor： Stepan Essaian ,  Dzhakhangir Khaydarov ,  Andrei V. Shchegrov

IPC: H01S5/06

CPC classification number: H01S5/0605 ,  G02F1/3558 ,  G02F1/37 ,  G02F2001/3503 ,  G02F2202/20 ,  H01S3/025 ,  H01S3/0405 ,  H01S3/0612 ,  H01S3/0627 ,  H01S3/09415 ,  H01S3/109 ,  H01S3/1611 ,  H01S3/1673

Abstract: A compact, optically-pumped solid-state microchip laser device uses efficient nonlinear intracavity frequency conversion for obtaining low-cost green and blue laser sources. The laser includes a solid-state gain medium, such as Nd:YVO4, and a nonlinear crystal. The nonlinear crystal is formed of periodically poled lithium niobate or periodically poled lithium tantalate, and the crystal is either MgO-doped, ZnO-doped, or stoichiometric to ensure high reliability. The nonlinear crystal provides efficient frequency doubling to translate energy from an infrared pump laser beam into the visible wavelength range. The laser device is assembled in a package having an output aperture for the output beam and being integrated with an optical bench accommodating a laser assembly. The package encloses and provides heat sinking for the semiconductor diode pump laser, the microchip laser cavity assembly, the optical bench platform, and electrical leads.

Abstract translation: 紧凑的，光泵浦的固态微芯片激光装置使用有效的非线性腔内频率转换来获得低成本的绿色和蓝色激光源。 激光器包括诸如Nd：YVO4的固态增益介质和非线性晶体。 非线性晶体由周期性极化的铌酸锂或周期性极化的钽酸锂形成，并且该晶体是MgO掺杂的，ZnO掺杂的或化学计量的，以确保高可靠性。 非线性晶体提供有效的倍频以将来自红外泵浦激光束的能量转换到可见波长范围。 激光装置组装在具有用于输出光束的输出孔的封装中，并与容纳激光组件的光学台一体化。 封装封装并为半导体二极管泵浦激光器，微芯片激光器腔组件，光学平台和电引线提供散热。

公开(公告)号：US07413635B2

公开(公告)日：2008-08-19

申请号：US10741624

申请日：2003-12-19

Applicant: Stepan Essaian

Inventor： Stepan Essaian

IPC: B01J19/08

CPC classification number: G02F1/3558 ,  G02F2202/20

Abstract: A process for reducing the poling field of congruent LiNbO3 and LiTaO3 crystal-based nonlinear optical devices and for the production of domain structures with precise reproducibility of the main parameters by depositing a thin layer of a stoichiometric LiNbO3 film on the Z-face of a congruent LiNbO3 or LiTaO3 wafer. A new domain nucleation, evolution and stabilization process is provided to afford a uniform, short period domain superstructure for the conversion of near infra-red light to near ultraviolet, blue and green light.

Abstract translation: 一种用于减少一致的LiNbO 3和LiTaO 3 晶体的非线性光学器件的极化场的方法，并且通过沉积具有主要参数的精确再现性来制备畴结构 在一致的LiNbO 3或LiT 3 O 3晶片的Z面上的化学计量的LiNbO 3膜薄层。 提供了一个新的域成核，演化和稳定过程，以提供均匀的短周期域上层结构，用于将近红外光转换为近紫外线，蓝光和绿光。

公开(公告)号：US06674144B1

公开(公告)日：2004-01-06

申请号：US10269125

申请日：2002-10-11

Applicant: Stepan Essaian

Inventor： Stepan Essaian

IPC: H01L27095

CPC classification number: H01L29/66242 ,  H01L21/76224

Abstract: Isolation of a heterojunction bipolar transistor device in an integrated circuit is accomplished by forming the device within a trench in dielectric material overlying single crystal silicon. Precise control over the thickness of the initially-formed dielectric material ultimately determines the depth of the trench and hence the degree of isolation provided by the surrounding dielectric material. The shape and facility of etching of the trench may be determined through the use of etch-stop layers and unmasked photoresist regions of differing widths. Once the trench in the dielectric material is formed, the trench is filled with selectively and/or nonselectively grown epitaxial silicon. The process avoids complex and defect-prone deep trench masking, deep trench silicon etching, deep trench liner formation, and dielectric reflow steps associated with conventional processes.

Abstract translation: 集成电路中的异质结双极晶体管器件的隔离通过在覆盖单晶硅的介电材料的沟槽内形成器件来实现。 对初始形成的电介质材料的厚度的精确控制最终决定了沟槽的深度，从而确定了由周围介质材料提供的隔离度。 可以通过使用不同宽度的蚀刻停止层和未掩模的光致抗蚀剂区域来确定沟槽的蚀刻的形状和设施。 一旦形成了电介质材料中的沟槽，则沟槽被选择性地和/或非选择地生长的外延硅填充。 该工艺避免了与常规工艺相关的复杂且易出现的深沟槽掩模，深沟槽硅蚀刻，深沟槽衬垫形成和介电回流步骤。

公开(公告)号：US07724797B2

公开(公告)日：2010-05-25

申请号：US11788917

申请日：2007-04-23

Applicant: Stepan Essaian ,  Andrei Shchegrov

Inventor： Stepan Essaian ,  Andrei Shchegrov

IPC: H01S5/00

CPC classification number: H01S3/109 ,  H01S3/0405 ,  H01S3/042 ,  H01S3/0604 ,  H01S3/0606 ,  H01S3/0612 ,  H01S3/0627 ,  H01S3/0815 ,  H01S3/09415 ,  H01S3/1118 ,  H01S3/1611 ,  H01S3/1673

Abstract: A compact solid-state laser array for nonlinear intracavity frequency conversion into desired wavelengths using periodically poled nonlinear crystals. The crystals contain dopants such as MgO and/or have a specified stoichiometry. A preferred embodiment comprises a microchip laser cavity that includes a solid-state gain chip, such as Nd:YVO4, which also provides polarization control of the laser; and a periodically poled nonlinear crystal chip such as PPMgOLN, for efficient frequency doubling of a infrared laser pump beam into the visible wavelength range. The described designs are especially advantageous for obtaining low-cost green and blue laser sources. The use of such high-efficiency pumps and nonlinear materials allows scaling of a compact, low-cost architecture to provide high output power levels in the blue/green wavelength range.

Abstract translation: 使用周期性极化非线性晶体的非线性腔内频率转换成所需波长的紧凑型固态激光器阵列。 晶体含有诸如MgO的掺杂剂和/或具有指定的化学计量。 优选实施例包括微芯片激光腔，其包括固态增益芯片，例如Nd：YVO4，其还提供激光器的偏振控制; 以及诸如PPMgOLN的周期性极化非线性晶体芯片，用于将红外激光泵浦光束有效倍频到可见波长范围。 所描述的设计对于获得低成本的绿色和蓝色激光源是特别有利的。 使用这种高效泵和非线性材料可以缩放紧凑的低成本架构，以在蓝/绿波长范围内提供高输出功率水平。

公开(公告)号：US07570676B2

公开(公告)日：2009-08-04

申请号：US11788918

申请日：2007-04-23

Applicant: Stepan Essaian ,  Andrei Shchegrov

Inventor： Stepan Essaian ,  Andrei Shchegrov

IPC: H01S3/10

CPC classification number: H01S3/113 ,  G02F1/3534 ,  G02F2001/354 ,  H01S3/005 ,  H01S3/0627 ,  H01S3/0809 ,  H01S3/09415 ,  H01S3/109 ,  H01S3/1118 ,  H01S3/1611

Abstract: A compact and efficient ultraviolet laser source based on a optically-pumped solid-state or fiber laser that produces near-infrared output light suitable for nonlinear frequency conversion. The infrared laser output is frequency tripled or quadrupled to produce light in the ultraviolet wavelength range (200 nm to 400 nm). The novel technology is the use of highly efficient periodically poled nonlinear crystals, such as stoichiometric and MgO-doped lithium tantalate and lithium niobate. As opposed to conventional frequency-converted UV laser sources, which have high power consumption, high cost, and low efficiency, the laser sources of this invention utilize high efficiency nonlinear conversion provided by periodically poled materials and allow lower-cost architectures without additional focusing lenses, high power pump diodes, etc.

Abstract translation: 基于光泵浦固态或光纤激光器的紧凑而有效的紫外激光源，产生适用于非线性频率转换的近红外输出光。 红外激光输出频率为三倍或四倍，以产生紫外线波长范围（200nm至400nm）的光。 新技术是使用高效周期性极化非线性晶体，例如化学计量和MgO掺杂的钽酸锂和铌酸锂。 与传统的频率转换的UV激光源相比，本发明的激光源具有高功耗，高成本和低效率，它们采用周期性极化材料提供的高效率非线性转换，并允许低成本架构，而无需附加的聚焦透镜 ，大功率泵二极管等

公开(公告)号：US20070263693A1

公开(公告)日：2007-11-15

申请号：US11788918

申请日：2007-04-23

Applicant: Stepan Essaian ,  Andrei Shchegrov

Inventor： Stepan Essaian ,  Andrei Shchegrov

IPC: H01S3/11 ,  H01S3/10 ,  H01S3/093 ,  H01S3/094 ,  H01S3/091

CPC classification number: H01S3/113 ,  G02F1/3534 ,  G02F2001/354 ,  H01S3/005 ,  H01S3/0627 ,  H01S3/0809 ,  H01S3/09415 ,  H01S3/109 ,  H01S3/1118 ,  H01S3/1611

Abstract: A compact and efficient ultraviolet laser source based on a optically-pumped solid-state or fiber laser that produces near-infrared output light suitable for nonlinear frequency conversion. The infrared laser output is frequency tripled or quadrupled to produce light in the ultraviolet wavelength range (200 nm to 400 nm). The novel technology is the use of highly efficient periodically poled nonlinear crystals, such as stoichiometric and MgO-doped lithium tantalate and lithium niobate. As opposed to conventional frequency-converted UV laser sources, which have high power consumption, high cost, and low efficiency, the laser sources of this invention utilize high efficiency nonlinear conversion provided by periodically poled materials and allow lower-cost architectures without additional focusing lenses, high power pump diodes, etc.

Abstract translation: 基于光泵浦固态或光纤激光器的紧凑而有效的紫外激光源，产生适用于非线性频率转换的近红外输出光。 红外激光输出频率为三倍或四倍，以产生紫外线波长范围（200nm至400nm）的光。 新技术是使用高效周期性极化非线性晶体，例如化学计量和MgO掺杂的钽酸锂和铌酸锂。 与传统的频率转换的UV激光源相比，本发明的激光源具有高功耗，高成本和低效率，它们采用周期性极化材料提供的高效率非线性转换，并允许低成本架构，而无需附加的聚焦透镜 ，大功率泵二极管等

公开(公告)号：US6159872A

公开(公告)日：2000-12-12

申请号：US146720

申请日：1998-09-03

Applicant: Stepan Essaian ,  Daniel Henry Rosenblatt

Inventor： Stepan Essaian ,  Daniel Henry Rosenblatt

IPC: C23C14/48 ,  C23C16/40 ,  C23C16/56 ,  H01L21/314 ,  H01L21/316 ,  H01L21/31

CPC classification number: H01L21/02164 ,  C23C14/48 ,  C23C16/402 ,  C23C16/56 ,  H01L21/02131 ,  H01L21/022 ,  H01L21/02274 ,  H01L21/02321 ,  H01L21/02351 ,  H01L21/31629

Abstract: Ion implantation of fluorine into SiO.sub.2 films results in formation of a dielectric material having a dielectric constant K.ltoreq.3.2. High energies associated with ion implantation permit stable introduction of high concentrations of fluorine within silicon oxide, without giving rise to problems of fluorine outgassing and water absorption associated with conventional FSG deposition techniques. Relatively thick FSG layers conventionally formed by CVD may be sandwiched between implanted FSG liner films formed in accordance with the present invention. Such a combination would reduce the dielectric constant of the dielectric structure as a whole while providing a barrier to fluorine diffusion, without consuming the processing time required to implant an entire dielectric layer.

Abstract translation: 将氟离子注入SiO 2膜导致形成介电常数K <= 3.2的电介质材料。 与离子注入相关的高能量允许在氧化硅中稳定地引入高浓度的氟，而不会引起与常规FSG沉积技术相关的氟除气和吸水的问题。 通常通过CVD形成的较厚的FSG层可夹在根据本发明形成的植入式FSG衬垫膜之间。 这样的组合可以降低整个介质结构的介电常数，同时为氟扩散提供屏障，而不会消耗植入整个电介质层所需的处理时间。

公开(公告)号：US20120163403A1

公开(公告)日：2012-06-28

申请号：US13322778

申请日：2009-05-27

Applicant: Stepan Essaian ,  Dzhakhangir Khaydarov ,  Andrei Shchegrov

Inventor： Stepan Essaian ,  Dzhakhangir Khaydarov ,  Andrei Shchegrov

IPC: H01S5/06 ,  H01S3/10 ,  H01S5/065

CPC classification number: H01S3/109 ,  G02F1/3775 ,  H01S3/0617 ,  H01S3/0621 ,  H01S3/0623 ,  H01S3/0627 ,  H01S3/08045 ,  H01S3/08054 ,  H01S3/0815 ,  H01S3/09415 ,  H01S3/1115 ,  H01S3/1611 ,  H01S3/1618 ,  H01S3/1673 ,  H01S3/17

Abstract: A compact optically-pumped solid-state laser designed for efficient nonlinear intracavity frequency conversion into desired wavelengths using periodically poled nonlinear crystals. These crystals contain dopants such as MgO or ZnO and/or have a specified degree of stoichiometry that ensures high reliability. The laser includes a solid-state gain media chip, such as Nd:YVO4, which also provides polarization control of the laser; and a periodically poled nonlinear crystal chip such as PPMgOLN or PPZnOLT for efficient frequency doubling of the fundamental infrared laser beam into the visible wavelength range. The described designs are especially advantageous for obtaining low-cost green and blue laser sources. Also described design of the continuously operated laser with an electro-optic element for modulation of the intensity of the laser output at frequencies up to hundred of megahertz. Such modulation is desired for various applications, including compact projectors with high resolution.

Abstract translation: 一种紧凑的光泵浦固态激光器，设计用于使用周期性极化的非线性晶体将有效的非线性腔内频率转换成所需的波长。 这些晶体含有诸如MgO或ZnO的掺杂剂和/或具有确定高可靠性的特定化学计量的量。 激光器包括固态增益介质芯片，例如Nd：YVO4，其还提供激光器的偏振控制; 以及诸如PPMgOLN或PPZnOLT的周期性极化非线性晶体芯片，用于将基本红外激光束有效倍频到可见波长范围。 所描述的设计对于获得低成本的绿色和蓝色激光源是特别有利的。 还描述了具有用于调制高达百兆赫兹频率的激光输出强度的电光元件的连续操作的激光器的设计。 这种调制对于各种应用是期望的，包括具有高分辨率的紧凑型投影仪。

公开(公告)号：US07742510B2

公开(公告)日：2010-06-22

申请号：US11788916

申请日：2007-04-23

Applicant: Stepan Essaian ,  Andrei Shchegrov

Inventor： Stepan Essaian ,  Andrei Shchegrov

IPC: H01S3/10

CPC classification number: H01S3/109 ,  G02F1/3558 ,  G02F1/3775 ,  G02F2203/11 ,  H01S3/08036 ,  H01S3/0805 ,  H01S3/08054 ,  H01S3/1115 ,  H01S3/113 ,  H01S5/141

Abstract: A compact optically-pumped solid-state laser designed for efficient nonlinear intracavity frequency conversion into desired wavelengths using periodically poled nonlinear crystals. These crystals contain dopants such as MgO or ZnO and/or have a specified degree of stoichiometry that ensures high reliability. The laser includes a solid-state gain media chip, such as Nd:YVO4, which also provides polarization control of the laser; and a periodically poled nonlinear crystal chip such as PPMgOLN or PPZnOLT for efficient frequency doubling of the fundamental infrared laser beam into the visible wavelength range. The described designs are especially advantageous for obtaining low-cost green and blue laser sources.

Abstract translation: 一种紧凑的光泵浦固态激光器，设计用于使用周期性极化的非线性晶体将有效的非线性腔内频率转换成所需的波长。 这些晶体含有诸如MgO或ZnO的掺杂剂和/或具有确定高可靠性的特定化学计量的量。 激光器包括固态增益介质芯片，例如Nd：YVO4，其还提供激光器的偏振控制; 以及诸如PPMgOLN或PPZnOLT的周期性极化非线性晶体芯片，用于将基本红外激光束有效倍频到可见波长范围。 所描述的设计对于获得低成本的绿色和蓝色激光源是特别有利的。

公开(公告)号：US20090290605A1

公开(公告)日：2009-11-26

申请号：US12534745

申请日：2009-08-03

Applicant: Stepan Essaian ,  Andrei Shchegrov

Inventor： Stepan Essaian ,  Andrei Shchegrov

IPC: H01S3/11 ,  H01S3/10 ,  H01S5/187

CPC classification number: H01S3/113 ,  G02F1/3534 ,  G02F2001/354 ,  H01S3/005 ,  H01S3/0627 ,  H01S3/0809 ,  H01S3/09415 ,  H01S3/109 ,  H01S3/1118 ,  H01S3/1611

Abstract: A compact and efficient ultraviolet laser source based on a optically-pumped solid-state or fiber laser that produces near-infrared output light suitable for nonlinear frequency conversion. The infrared laser output is frequency tripled or quadrupled to produce light in the ultraviolet wavelength range (200 nm to 400 nm). The novel technology is the use of highly efficient periodically poled nonlinear crystals, such as stoichiometric and MgO-doped lithium tantalate and lithium niobate. As opposed to conventional frequency-converted UV laser sources, which have high power consumption, high cost, and low efficiency, the laser sources of this invention utilize high efficiency nonlinear conversion provided by periodically poled materials and allow lower-cost architectures without additional focusing lenses, high power pump diodes, etc.

Abstract translation: 基于光泵浦固态或光纤激光器的紧凑而有效的紫外激光源，产生适用于非线性频率转换的近红外输出光。 红外激光输出频率为三倍或四倍，以产生紫外线波长范围（200nm至400nm）的光。 新技术是使用高效周期性极化非线性晶体，例如化学计量和MgO掺杂的钽酸锂和铌酸锂。 与传统的频率转换的UV激光源相比，本发明的激光源具有高功率消耗，高成本和低效率，它们利用周期性极化材料提供的高效率非线性转换，并且允许低成本架构，而无需附加的聚焦透镜 ，大功率泵二极管等