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1.发明申请Doped silica glass articles and methods of forming doped silica glass boules and articles 有权掺杂的二氧化硅玻璃制品和形成掺杂的石英玻璃微珠和制品的方法公开(公告)号：US20070042892A1
公开(公告)日：2007-02-22
申请号：US11589584
申请日：2006-10-30
IPC分类号： C03C3/06
CPC分类号： C03B19/06 , C03B19/02 , C03B19/12 , C03B2201/42 , C03C3/06 , C03C2201/42 , C03C2203/20
摘要： The present invention provides doped titania-doped silica glass articles having low thermal expansions and low variations in thermal expansion. According to one embodiment of the invention, a titania-doped silica glass article has a titania content of between about 5 wt % and about 9 wt %; a coefficient of thermal expansion of between about −30 ppb/° C. and about +30 ppb/° C. at a temperature between 15° C. and 30° C.; and a variation in coefficient of thermal expansion of less than about 5 ppb/° C. at a temperature between 15° C and 30° C.
摘要翻译： 本发明提供了具有低热膨胀和低膨胀变化的掺杂二氧化钛掺杂二氧化硅玻璃制品。 根据本发明的一个实施方案，二氧化钛掺杂的石英玻璃制品的二氧化钛含量为约5重量％至约9重量％; 在15℃和30℃之间的温度下，热膨胀系数在约-30ppb /℃和约+ 30ppb /℃之间。 和在15℃至30℃之间的温度下热膨胀系数的变化小于约5ppb /℃。
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2.发明申请Doped silica glass articles and methods of forming doped silica glass boules and articles 有权掺杂的二氧化硅玻璃制品和形成掺杂的石英玻璃微珠和制品的方法公开(公告)号：US20050032622A1
公开(公告)日：2005-02-10
申请号：US10638004
申请日：2003-08-08
CPC分类号： C03B19/06 , C03B19/02 , C03B19/12 , C03B2201/42 , C03C3/06 , C03C2201/42 , C03C2203/20
摘要： The present invention provides doped titania-doped silica glass articles having low thermal expansions and low variations in thermal expansion. According to one embodiment of the invention, a titania-doped silica glass article has a titania content of between about 5 wt % and about 9 wt %; a coefficient of thermal expansion of between about −30 ppb/° C. and about +30 ppb/° C. at a temperature between 15° C. and 30° C.; and a variation in coefficient of thermal expansion of less than about 5 ppb/° C. at a temperature between 15° C. and 30° C.
摘要翻译： 本发明提供了具有低热膨胀和低膨胀变化的掺杂二氧化钛掺杂二氧化硅玻璃制品。 根据本发明的一个实施方案，二氧化钛掺杂的石英玻璃制品的二氧化钛含量为约5重量％至约9重量％; 在15℃和30℃之间的温度下，热膨胀系数在约-30ppb /℃和约+ 30ppb /℃之间。 和在15℃至30℃之间的温度下热膨胀系数的变化小于约5ppb /℃。
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公开(公告)号：US20060137397A1
公开(公告)日：2006-06-29
申请号：US11148504
申请日：2005-06-08
CPC分类号： C03C3/06 , C03B19/1453 , C03B19/1469 , C03B2201/03 , C03B2201/04 , C03B2201/07 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03C2201/11 , C03C2201/21 , C03C2201/23 , C03C2203/40 , C03C2203/54 , G03F7/70958
摘要： Disclosed are high purity synthetic silica material having an internal transmission at 193 nm of at least 99.65%/cm and method of preparing such material. The material is also featured by a high compositional homogeneity in a plane transverse to the intended optical axis. The soot-to-glass process for making the material includes a step of consolidating the soot preform in the presence of H2O and/or O2.
摘要翻译： 公开了具有193nm以上的内透射率为至少99.65％/ cm 3的高纯度合成二氧化硅材料及其制备方法。 该材料的特征还在于横向于预期光轴的平面中具有高的组成均匀性。 用于制造材料的烟灰对玻璃工艺包括在H 2 O 2和/或O 2 2的存在下固化烟灰预制件的步骤。
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公开(公告)号：US20060137398A1
公开(公告)日：2006-06-29
申请号：US11148764
申请日：2005-06-08
申请人： Daniel Bleaking , Dana Bookbinder , Richard Fiacco , Kenneth Hrdina , Pushkar Tandon , John Maxon , Kimberly Wilbert
发明人： Daniel Bleaking , Dana Bookbinder , Richard Fiacco , Kenneth Hrdina , Pushkar Tandon , John Maxon , Kimberly Wilbert
CPC分类号： C03C3/06 , C03B19/1453 , C03B2201/03 , C03B2201/04 , C03B2201/07 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03C2201/12 , C03C2201/21 , C03C2201/23
摘要： Disclosed are high purity synthetic silica glass material having a high OH concentration homogeneity in a plane perpendicular to the optical axis, and process of making the same. The glass has high refractive index homogeneity. The glass can have high internal transmission of at least 99.65%/cm at 193 nm. The process does not require a post-sintering homogenization step. The controlling factors for high compositional homogeneity, thus high refractive index homogeneity, include high initial local soot density uniformity in the soot preform and slow sintering, notably isothermal treatment during consolidation.
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5.发明申请Synthetic silica glass optical material having high resistance to laser induced damage 有权合成石英玻璃光学材料具有较高的抗激光损伤能力公开(公告)号：US20050187092A1
公开(公告)日：2005-08-25
申请号：US11064341
申请日：2005-02-22
CPC分类号： C03C3/06 , C03B19/1453 , C03B32/00 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03B2207/32 , C03C2201/21 , C03C2201/23
摘要： Disclosed is a synthetic silica glass optical material having high resistance to optical damage by ultraviolet radiation in the ultraviolet wavelength range, particularly in the wavelength less than about 250 nm and particularly, exhibiting a low laser induced wavefront distortion; specifically a laser induced wavefront distortion, measured at 633 nm, of between about −1.0 and 1.0 nm/cm when subjected to 10 billion pulses of a laser operating at approximately 193 nm and at a fluence of approximately 70 μJ/cm2. The synthetic silica glass optical material of the present invention comprises OH concentration levels of less than about 600 ppm, preferably less than 200 ppm, and H2 concentration levels less than about 5.0×1017 molecules/cm3,and preferably less than about 2.0×1017 molecules/cm3.
摘要翻译： 公开了一种合成石英玻璃光学材料，其特征在于波长小于约250nm，特别是具有低激光诱导波前失真的紫外线波长范围内具有高抗紫外线辐射的光学损伤， 特别是在经受100nm脉冲激光在约193nm下操作的激光诱导波前失真（在633nm处），介于约-1.0和1.0nm / cm之间，并且流量约为70μJ/ cm 2 。 本发明的合成石英玻璃光学材料包含小于约600ppm，优选小于200ppm的OH浓度水平和小于约5.0×10 17 H 2 O 2浓度水平， SUP>分子/ cm 3，优选小于约2.0×10 17分子/ cm 3。
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公开(公告)号：US20070104437A1
公开(公告)日：2007-05-10
申请号：US11583098
申请日：2006-10-18
IPC分类号： G02B6/032 , G02B6/02 , C03B37/023 , C03B37/028
CPC分类号： C03B37/02781 , C03B37/01446 , C03B2201/02 , C03B2201/31 , C03B2203/14 , C03B2203/42 , C03C13/00 , C03C13/04 , G02B1/048 , G02B6/02333 , G02B6/02357
摘要： Microstructured optical fiber and method of making. Glass soot is deposited and then consolidated under conditions which are effective to trap a portion of the consolidation gases in the glass to thereby produce a non-periodic array of voids which may then be used to form a void containing cladding region in an optical fiber. Preferred void producing consolidation gases include nitrogen, argon, CO2, oxygen, chlorine, CF4, CO, SO2 and mixtures thereof.
摘要翻译： 微结构光纤及其制造方法。 玻璃烟灰沉积，然后在有效地捕获玻璃中的一部分固结气体的条件下固化，从而产生非周期性的空隙阵列，然后可以将其用于在光纤中形成含有空隙的包层区域。 优选的产生空隙的固结气体包括氮，氩，CO 2，氧，氯，CF 4，CO，SO 2和它们的混合物。
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7.发明申请Deuteroxyl-doped silica glass, optical member and lithographic system comprising same and method of making same 有权含氧化锑的石英玻璃，光学构件和包括其的光刻系统及其制造方法公开(公告)号：US20070105704A1
公开(公告)日：2007-05-10
申请号：US11583619
申请日：2006-10-19
申请人： Dana Bookbinder , Richard Fiacco , Ulrich Neukirch
发明人： Dana Bookbinder , Richard Fiacco , Ulrich Neukirch
CPC分类号： C03C3/06 , C03B19/06 , C03B19/066 , C03B19/12 , C03B19/14 , C03B19/1453 , C03B20/00 , C03B32/00 , C03B2201/07 , C03B2201/075 , C03B2201/08 , C03B2201/12 , C03B2201/22 , C03B2201/23 , C03B2201/32 , C03B2201/42 , C03C4/0085 , C03C2201/11 , C03C2201/12 , C03C2201/22 , C03C2201/23
摘要： What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-doped synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.
摘要翻译： 公开的内容包括能够用于低于约300nm的光刻中的光学元件的OD掺杂合成石英玻璃。 发现OD掺杂的合成二氧化硅玻璃具有比具有相当浓度的OH的非OD掺杂的石英玻璃具有显着更低的偏振诱导双折射值。 还公开了制造掺杂OD的合成二氧化硅玻璃，包含这种玻璃的光学构件以及包括这种光学构件的光刻系统的方法。 由于在约193nm处极度低的偏振诱发双折射值，该玻璃特别适用于浸没式光刻系统。
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8.发明申请Deuteroxyle-doped silica glass, optical member and lithographic system comprising same and method of making same 审中-公开氘氧基掺杂石英玻璃，光学元件和包含其的光刻系统及其制造方法公开(公告)号：US20070105703A1
公开(公告)日：2007-05-10
申请号：US11348956
申请日：2006-02-06
申请人： Dana Bookbinder , Richard Fiacco
发明人： Dana Bookbinder , Richard Fiacco
CPC分类号： C03B19/12 , C03B19/1415 , C03B19/1453 , C03B2201/07 , C03B2201/12 , C03B2201/20 , C03B2201/21 , C03B2201/22 , C03B2201/23 , C03B2201/32 , C03B2201/42 , C03B2201/58 , C03B2207/30 , C03B2207/38
摘要： What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-dopes synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.
摘要翻译： 公开的内容包括能够用于低于约300nm的光刻中的光学元件的OD掺杂合成石英玻璃。 发现OD掺杂的合成二氧化硅玻璃具有比具有相当浓度的OH的非OD掺杂的石英玻璃具有显着更低的偏振诱导双折射值。 还公开了制备OD-掺杂合成二氧化硅玻璃，包括这种玻璃的光学部件以及包括这种光学部件的光刻系统的方法。 由于在约193nm处极度低的偏振诱发双折射值，该玻璃特别适用于浸没式光刻系统。
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公开(公告)号：US20050191019A1
公开(公告)日：2005-09-01
申请号：US11123920
申请日：2005-05-06
申请人： George Berkey , Dana Bookbinder , Richard Fiacco , Dale Powers
发明人： George Berkey , Dana Bookbinder , Richard Fiacco , Dale Powers
IPC分类号： C03B37/014 , C03C13/04 , C03C25/60 , G02B6/02 , G02B6/16
CPC分类号： C03C25/607 , C03B37/01446 , C03B37/0146 , C03B37/01486 , C03B2201/075 , C03B2201/22 , C03B2201/31 , C03C3/06 , C03C13/045 , C03C13/047 , C03C2201/21 , C03C2201/22 , C03C2203/54 , G02B6/02
摘要： Optical waveguide fiber having low water peak as well as optical waveguide fiber preforms and methods of making optical waveguide fiber preforms from which low water peak and/or low hydrogen aged attenuation optical waveguide fibers are formed, including optical waveguide fiber and preforms made via OVD. The fibers may be hydrogen resistant, i.e. exhibit low hydrogen aged attenuation. A low water peak, hydrogen resistant optical waveguide fiber is disclosed which exhibits an optical attenuation at a wavelength of about 1383 nm which is less than or equal to an optical attenuation exhibited at a wavelength of about 1310 nm.
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10.发明申请Optical fiber and preform, method of manufacturing same, and optical component made therefrom 失效光纤和预制件，其制造方法和由其制成的光学部件公开(公告)号：US20050163443A1
公开(公告)日：2005-07-28
申请号：US11074886
申请日：2005-03-07
申请人： A. Antos , Dana Bookbinder , Richard Fiacco , Kevin Sparks
发明人： A. Antos , Dana Bookbinder , Richard Fiacco , Kevin Sparks
IPC分类号： C03B37/014 , C03B37/018 , C03C13/04 , G02B6/02 , G02B6/036 , G02B6/28 , G02B6/34 , G02B6/16
CPC分类号： G02B6/03694 , C03B37/01446 , C03B37/01853 , C03B2201/07 , C03B2201/10 , C03B2201/12 , C03B2201/22 , C03B2201/23 , C03B2201/31 , C03B2203/22 , C03C13/045 , C03C13/047 , C03C2201/22 , G02B6/02 , G02B6/03622 , G02B6/2835 , Y02P40/57
摘要： An optical waveguide fiber or body having a doped outer region which can be utilized in an optical coupler, a preform which can serve as the precursor for the fiber, an optical coupler, and methods of making same. Water, for example in the form of H2O and/or D2O, may be added to the cladding of the optical waveguide fiber or body.
摘要翻译： 具有可用于光耦合器中的掺杂外部区域的光波导纤维或主体，可用作光纤的前体的预成型件，光耦合器及其制造方法。 例如可以将H 2 O 2和/或D 2 O的形式的水添加到光波导纤维或体的包层中。
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