摘要:
Disclosed are high purity synthetic silica glass material having a high OH concentration homogeneity in a plane perpendicular to the optical axis, and process of making the same. The glass has high refractive index homogeneity. The glass can have high internal transmission of at least 99.65%/cm at 193 nm. The process does not require a post-sintering homogenization step. The controlling factors for high compositional homogeneity, thus high refractive index homogeneity, include high initial local soot density uniformity in the soot preform and slow sintering, notably isothermal treatment during consolidation.
摘要:
Disclosed are high purity synthetic silica material having an internal transmission at 193 nm of at least 99.65%/cm and method of preparing such material. The material is also featured by a high compositional homogeneity in a plane transverse to the intended optical axis. The soot-to-glass process for making the material includes a step of consolidating the soot preform in the presence of H2O and/or O2.
摘要翻译:公开了具有193nm以上的内透射率为至少99.65%/ cm 3的高纯度合成二氧化硅材料及其制备方法。 该材料的特征还在于横向于预期光轴的平面中具有高的组成均匀性。 用于制造材料的烟灰对玻璃工艺包括在H 2 O 2和/或O 2 2的存在下固化烟灰预制件的步骤。
摘要:
Disclosed is a synthetic silica glass optical material having high resistance to optical damage by ultraviolet radiation in the ultraviolet wavelength range, particularly in the wavelength less than about 250 nm and particularly, exhibiting a low laser induced wavefront distortion; specifically a laser induced wavefront distortion, measured at 633 nm, of between about −1.0 and 1.0 nm/cm when subjected to 10 billion pulses of a laser operating at approximately 193 nm and at a fluence of approximately 70 μJ/cm2. The synthetic silica glass optical material of the present invention comprises OH concentration levels of less than about 600 ppm, preferably less than 200 ppm, and H2 concentration levels less than about 5.0×1017 molecules/cm3,and preferably less than about 2.0×1017 molecules/cm3.
摘要翻译:公开了一种合成石英玻璃光学材料,其特征在于波长小于约250nm,特别是具有低激光诱导波前失真的紫外线波长范围内具有高抗紫外线辐射的光学损伤, 特别是在经受100nm脉冲激光在约193nm下操作的激光诱导波前失真(在633nm处),介于约-1.0和1.0nm / cm之间,并且流量约为70μJ/ cm 2 SUP>。 本发明的合成石英玻璃光学材料包含小于约600ppm,优选小于200ppm的OH浓度水平和小于约5.0×10 17 H 2 O 2浓度水平, SUP>分子/ cm 3,优选小于约2.0×10 17分子/ cm 3。
摘要:
Disclosed in the application are a synthetic silica glass having low fluence-dependent transmission, particularly at about 193 nm, and a process for making the same. The glass may desirably exhibit a low level of fluorescence at 290 and 390 nm when activated at about 248 nm. The glass may desirably exhibit low level of LIWFD, [SiH*] and/or [ODC].
摘要:
The present invention provides doped titania-doped silica glass articles having low thermal expansions and low variations in thermal expansion. According to one embodiment of the invention, a titania-doped silica glass article has a titania content of between about 5 wt % and about 9 wt %; a coefficient of thermal expansion of between about −30 ppb/° C. and about +30 ppb/° C. at a temperature between 15° C. and 30° C.; and a variation in coefficient of thermal expansion of less than about 5 ppb/° C. at a temperature between 15° C and 30° C.
摘要:
The present invention provides doped titania-doped silica glass articles having low thermal expansions and low variations in thermal expansion. According to one embodiment of the invention, a titania-doped silica glass article has a titania content of between about 5 wt % and about 9 wt %; a coefficient of thermal expansion of between about −30 ppb/° C. and about +30 ppb/° C. at a temperature between 15° C. and 30° C.; and a variation in coefficient of thermal expansion of less than about 5 ppb/° C. at a temperature between 15° C. and 30° C.
摘要:
Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.
摘要:
Disclosed are methods for hydrogen loading silica glass and silica glass comprising loaded H2. The methods can lead to H2 gradient in the glass material. Alternatively, the method may involve the use of varying H2 partial pressure of H2 in the atmosphere. Both can result in expedited hydrogen loading process.
摘要翻译:公开了用于氢气加载石英玻璃和包含加载H 2 N 2的二氧化硅玻璃的方法。 这些方法可导致玻璃材料中的H 2 2梯度。 或者,该方法可以涉及在气氛中使用H 2 H 2 H 2 H 2分压的变化。 两者都可以产生加速氢气加载过程。
摘要:
Disclosed are process and apparatus for making oxide soot particles where an atomizing burner is used as well as process for making densified silica-containing glass bodies by using soot particles having specific surface area of less than about 50 m2/g. Large glass bodies can be produced with less drying time and less binders by using such particles. The invention is particularly advantageous for the production of TiO2-doped silica glass.
摘要:
A process for preparing uniform, agglomerate free, submicron/nanosize ceramic powders from a polymeric foam comprising metal cations homogeneously incorporated within a foam cell structure of the polymeric foam. The polymeric foam is heated to remove any solvent, and calcined at a temperature of about 400.degree. C. to about 1200.degree. C. for about 1/2 to about 8 hours to produce the desired ceramic or metal powder.