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公开(公告)号:US20230290683A1
公开(公告)日:2023-09-14
申请号:US18318835
申请日:2023-05-17
发明人: Yi-Hsiung LIN , Yi-Hsun CHIU , Shang-Wen CHANG
IPC分类号: H01L21/768 , H01L23/528 , H01L23/535 , H01L29/08 , H01L29/78 , H01L29/66 , H01L29/06
CPC分类号: H01L21/76897 , H01L23/5283 , H01L23/535 , H01L29/0847 , H01L21/76895 , H01L29/7848 , H01L29/7851 , H01L29/66795 , H01L21/76805 , H01L29/0653
摘要: A semiconductor device structure is provided. The semiconductor device structure includes a first epitaxial structure and a second epitaxial structure spaced apart from the first epitaxial structure. The semiconductor device structure also includes a conductive contact electrically connected to the first epitaxial structure and a first conductive via over the conductive contact. The semiconductor device structure further includes a second conductive via directly above the second epitaxial structure. The second conductive via is longer than the first conductive via.
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公开(公告)号:US20220336325A1
公开(公告)日:2022-10-20
申请号:US17231527
申请日:2021-04-15
发明人: Chih-Yu LAI , Chih-Liang CHEN , Chi-Yu LU , Shang-Syuan CIOU , Hui-Zhong ZHUANG , Ching-Wei TSAI , Shang-Wen CHANG
IPC分类号: H01L23/48 , H01L21/768
摘要: A semiconductor device includes a substrate and a first transistor on a first side of the substrate. The semiconductor device further includes a first electrode contacting a first region of the first transistor. The semiconductor device further includes a spacer extending along a sidewall of the first transistor. The semiconductor device further includes a self-aligned interconnect structure (SIS) separated from at least a portion of the first electrode by the spacer, wherein the SIS extends through the substrate. The semiconductor device further includes a second electrode contacting a surface of the first electrode farthest from the substrate, wherein the second electrode directly contacts the SIS.
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公开(公告)号:US20240021606A1
公开(公告)日:2024-01-18
申请号:US18360539
申请日:2023-07-27
发明人: Chih-Yu LAI , Chih-Liang CHEN , Chi-Yu LU , Shang-Syuan CIOU , Hui-Zhong ZHUANG , Ching-Wei TSAI , Shang-Wen CHANG
IPC分类号: H01L27/06 , G06F30/394 , H01L23/528 , H01L29/06 , H01L29/423 , H01L29/417 , H01L29/786 , H01L21/02 , H01L21/768 , H01L21/822 , H01L21/8234 , H01L29/66 , G06F30/392 , H01L23/48
CPC分类号: H01L27/0694 , G06F30/394 , H01L23/5283 , H01L29/0665 , H01L29/42392 , H01L29/41733 , H01L29/78696 , H01L21/0259 , H01L21/76898 , H01L21/8221 , H01L21/823412 , H01L21/823475 , H01L29/66742 , G06F30/392 , H01L23/481
摘要: A method of making a semiconductor device includes forming a first active region on a first side of a substrate. The method further includes forming a first source/drain (S/D) electrode surrounding a first portion of the first active region. The method further includes forming an S/D connect via extending through the substrate. The method further includes flipping the substrate. The method further includes forming a second active region on a second side of the substrate, wherein the second side of the substrate is opposite to the first side of the substrate. The method further includes forming a second S/D electrode surrounding a first portion of the second active region, wherein the S/D connect directly contacts both the first S/D electrode and the second S/D electrode.
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4.
公开(公告)号:US20230387013A1
公开(公告)日:2023-11-30
申请号:US18361666
申请日:2023-07-28
发明人: Chih-Liang CHEN , Guo-Huei WU , Ching-Wei TSAI , Shang-Wen CHANG , Li-Chun TIEN
IPC分类号: H01L23/528 , H01L27/088 , H01L21/8234 , H01L29/06
CPC分类号: H01L23/5286 , H01L27/088 , H01L29/0665 , H01L29/0669 , H01L21/823475
摘要: An integrated circuit device includes a first-type transistor having a channel region in a first-type active-region semiconductor structure and a second-type transistor having a channel region in a second-type active-region semiconductor structure which is stacked with the first-type active-region semiconductor structure. In the integrated circuit, a front-side power rail and a front-side signal line in a front-side conductive layer extend in the first direction is, and a back-side power rail and a back-side signal line in a back-side conductive layer also extend in the first direction. The front-side conductive layer is above the first-type active-region semiconductor structure and the second-type active-region semiconductor structure, while the back-side conductive layer is below the first-type active-region semiconductor structure and the second-type active-region semiconductor structure.
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公开(公告)号:US20230036522A1
公开(公告)日:2023-02-02
申请号:US17390177
申请日:2021-07-30
发明人: Chih-Liang CHEN , Guo-Huei WU , Ching-Wei TSAI , Shang-Wen CHANG , Li-Chun TIEN
IPC分类号: H01L23/528 , H01L27/088 , H01L29/06 , H01L21/8234
摘要: An integrated circuit device includes a first-type active-region semiconductor structure, a first gate-conductor, a second-type active-region semiconductor structure that is stacked with the first-type active-region semiconductor structure, and a second gate-conductor. The integrated circuit device also includes a front-side conductive layer above the two active-region semiconductor structures and a back-side conductive layer below the two active-region semiconductor structures. The integrated circuit device also includes a front-side power rail and a front-side signal line in the front-side conductive layer and includes a back-side power rail and a back-side signal line in the back-side conductive layer. The integrated circuit device also includes a first source conductive segment connected to the front-side power rail and a second source conductive segment connected to the back-side power rail. The integrated circuit device further includes a drain conductive segment connected to either the front-side signal line or the back-side signal line.
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公开(公告)号:US20220310454A1
公开(公告)日:2022-09-29
申请号:US17833005
申请日:2022-06-06
发明人: Kuan-Ting PAN , Kuo-Cheng CHIANG , Shang-Wen CHANG , Ching-Wei TSAI , Kuan-Lun CHENG , Chih-Hao WANG
IPC分类号: H01L21/8234 , H01L27/088 , H01L21/768
摘要: A semiconductor device structure, along with methods of forming such, are described. The structure includes a first and second gate electrode layers, and a dielectric feature disposed between the first and second gate electrode layers. The dielectric feature has a first surface. The structure further includes a first conductive layer disposed on the first gate electrode layer. The first conductive layer has a second surface. The structure further includes a second conductive layer disposed on the second gate electrode layer. The second conductive layer has a third surface, and the first, second, and third surfaces are coplanar. The structure further includes a third conductive layer disposed over the first conductive layer, a fourth conductive layer disposed over the second conductive layer, and a dielectric layer disposed on the first surface of the dielectric feature. The dielectric layer is disposed between the third conductive layer and the fourth conductive layer.
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公开(公告)号:US20240347546A1
公开(公告)日:2024-10-17
申请号:US18755041
申请日:2024-06-26
发明人: Chih-Yu LAI , Chih-Liang CHEN , Ching-Wei TSAI , Shang-Wen CHANG , Li-Chun TIEN
IPC分类号: H01L27/12 , H01L21/768 , H01L23/48
CPC分类号: H01L27/124 , H01L21/76898 , H01L23/481 , H01L27/1259
摘要: A method of making a semiconductor device includes manufacturing a first bridge pillar; manufacturing a first transistor channel bar and first transistor source/drain electrode, the first transistor S/D electrode electrically connecting to the first bridge pillar; manufacturing a second transistor channel bar and second transistor S/D electrode; manufacturing a first metal electrode, the first bridge pillar connecting the first transistor S/D electrode and first metal electrode; manufacturing a first via connected to the first metal electrode; and manufacturing a first conductive line connected to the first via. The first transistor S/D electrode and the second transistor S/D electrode are spaced apart by a first height, the first metal electrode is separate from the second transistor S/D electrode, the first bridge pillar is separate from the second transistor S/D electrode, and the first bridge pillar has a height in the first direction substantially equal to the first height.
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公开(公告)号:US20240321881A1
公开(公告)日:2024-09-26
申请号:US18187989
申请日:2023-03-22
发明人: Yu-Xuan HUANG , Chi-Yu LU , Shang-Wen CHANG , Guan-Lin CHEN , Cheng-Chi CHUANG
IPC分类号: H01L27/092 , H01L23/528 , H01L29/40 , H01L29/66 , H01L29/78
CPC分类号: H01L27/092 , H01L23/5286 , H01L29/401 , H01L29/6653 , H01L29/66666 , H01L29/7827
摘要: A method includes forming an epitaxial stack including a first sacrificial layer, a channel layer, and a second sacrificial layer over a semiconductor substrate; patterning the epitaxial stack into a fin structure such that opposite first ends of the channel layer are exposed; recessing the opposite first ends of the channel layer; forming first dummy spacers on the recessed opposite first ends of the channel layer; forming an isolation structure in the fin structure; recessing a top surface of the isolation structure to a position lower than a bottom surface of the channel layer, such that opposite second ends of the channel layer are exposed; recessing the opposite second ends of the channel layer; forming second dummy spacers on the recessed opposite second ends of the channel layer; and replacing the first dummy spacers and the second dummy spacers with a metal gate structure.
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9.
公开(公告)号:US20240006318A1
公开(公告)日:2024-01-04
申请号:US18469309
申请日:2023-09-18
发明人: Chih-Liang CHEN , Guo-Huei WU , Ching-Wei TSAI , Shang-Wen CHANG , Li-Chun TIEN
IPC分类号: H01L23/528 , H01L27/088 , H01L21/8234 , H01L29/06
CPC分类号: H01L23/5286 , H01L27/088 , H01L29/0665 , H01L29/0669 , H01L21/823475
摘要: A method includes fabricating a first-type active-region semiconductor, depositing a layer of dielectric material covering the first-type active-region semiconductor structure, and fabricating a second-type active-region semiconductor structure atop the layer of dielectric material. The method includes forming a front-side power rail and a front-side signal line extending in the first direction in a front-side metal layer overlying a first insulating material that covers the first-type active-region semiconductor. The front-side power rail is conductively connected to a second source conductive segment intersecting the second-type active-region semiconductor structure. The method includes forming a back-side metal layer on a backside of the substrate, and forming a back-side power rail and a back-side signal line extending in the first direction in the back-side metal layer. The back-side power rail is conductively connected to a first source conductive segment intersecting the first-type active-region semiconductor structure.
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公开(公告)号:US20230369125A1
公开(公告)日:2023-11-16
申请号:US18224088
申请日:2023-07-20
发明人: Kuan-Ting PAN , Kuo-Cheng CHIANG , Shang-Wen CHANG , Ching-Wei TSAI , Kuan-Lun CHENG , Chih-Hao WANG
IPC分类号: H01L21/8234 , H01L27/088 , H01L21/768
CPC分类号: H01L21/823468 , H01L27/0886 , H01L21/823475 , H01L21/76802 , H01L21/76871 , H01L21/76843
摘要: A semiconductor device structure, along with methods of forming such, are described. The structure includes a first and second gate electrode layers, and a dielectric feature disposed between the first and second gate electrode layers. The dielectric feature has a first surface. The structure further includes a first conductive layer disposed on the first gate electrode layer. The first conductive layer has a second surface. The structure further includes a second conductive layer disposed on the second gate electrode layer. The second conductive layer has a third surface, and the first, second, and third surfaces are coplanar. The structure further includes a third conductive layer disposed over the first conductive layer, a fourth conductive layer disposed over the second conductive layer, and a dielectric layer disposed on the first surface of the dielectric feature. The dielectric layer is disposed between the third conductive layer and the fourth conductive layer.
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