公开(公告)号：US20050270175A1

公开(公告)日：2005-12-08

申请号：US11055558

申请日：2005-02-10

申请人： TImm Peddie ,  David Bim-Merle ,  Thomas Burnham ,  Daniel Santos ,  Lawrence Miller ,  Vineet Mehta ,  Johannes Van Niekerk

发明人： TImm Peddie ,  David Bim-Merle ,  Thomas Burnham ,  Daniel Santos ,  Lawrence Miller ,  Vineet Mehta ,  Johannes Van Niekerk

IPC分类号： E01F9/06 ,  G08G1/095 ,  G08G1/0967

CPC分类号： G08G1/096783 ,  E01F9/559

摘要： A traffic informational system provides information to traffic moving along a road and may include a plurality of traffic information devices mountable to the road, each having an integral power producing source, at least a first set of illumination sources, and a wireless communications subsystem. The traffic informational system may further include at least a first external control device comprising at least one antenna and a transmitter communication wirelessly with the traffic information devices and/or with one another. The traffic information device may communicate with one another, and may include sensor for sensing ambient conditions. The system employs various approaches to reducing power consumption and improving communications, and is suitable for a wide range of applications, including use in remote environments.

摘要翻译： 交通信息系统为沿着道路行驶的交通提供信息，并且可以包括可安装到道路的多个交通信息装置，每个具有整体的发电源，至少第一组照明源和无线通信子系统。 交通信息系统还可以包括至少第一外部控制装置，该第一外部控制装置包括与交通信息装置和/或彼此无线地相连接的至少一个天线和发射机通信。 交通信息装置可以彼此通信，并且可以包括用于感测环境条件的传感器。 该系统采用各种方法来降低功耗并改善通信，适用于各种应用，包括在远程环境中使用。

公开(公告)号：US07859431B2

公开(公告)日：2010-12-28

申请号：US12492143

申请日：2009-06-26

申请人： Timm Peddie ,  David P. Bim-Merle ,  Thomas A. Burnham ,  Daniel O. Santos ,  Lawrence E. Miller ,  Vineet Mehta ,  Johannes B. Van Niekerk

发明人： Timm Peddie ,  David P. Bim-Merle ,  Thomas A. Burnham ,  Daniel O. Santos ,  Lawrence E. Miller ,  Vineet Mehta ,  Johannes B. Van Niekerk

IPC分类号： G08B1/08

CPC分类号： G08G1/096783 ,  E01F9/559

摘要： A traffic informational system provides information to traffic moving along a road and may include a plurality of traffic information devices mountable to the road, each having an integral power producing source, at least a first set of illumination sources, and a wireless communications subsystem. The traffic informational system may further include at least a first external control device comprising at least one antenna and a transmitter communication wirelessly with the traffic information devices and/or with one another. The traffic information device may communicate with one another, and may include sensor for sensing ambient conditions. The system employs various approaches to reducing power consumption and improving communications, and is suitable for a wide range of applications, including use in remote environments.

摘要翻译： 交通信息系统为沿着道路行驶的交通提供信息，并且可以包括可安装到道路的多个交通信息装置，每个具有整体的发电源，至少第一组照明源和无线通信子系统。 交通信息系统还可以包括至少第一外部控制装置，该第一外部控制装置包括与交通信息装置和/或彼此无线地相连接的至少一个天线和发射机通信。 交通信息装置可以彼此通信，并且可以包括用于感测环境条件的传感器。 该系统采用各种方法来降低功耗并改善通信，适用于各种应用，包括在远程环境中使用。

公开(公告)号：US07688222B2

公开(公告)日：2010-03-30

申请号：US11055558

申请日：2005-02-10

申请人： Timm Peddie ,  David P. Bim-Merle ,  Thomas A. Burnham ,  Daniel O. Santos ,  Lawrence E. Miller ,  Vineet Mehta ,  Johannes B. Van Niekerk

发明人： Timm Peddie ,  David P. Bim-Merle ,  Thomas A. Burnham ,  Daniel O. Santos ,  Lawrence E. Miller ,  Vineet Mehta ,  Johannes B. Van Niekerk

IPC分类号： G08G1/09

CPC分类号： G08G1/096783 ,  E01F9/559

摘要： A traffic informational system provides information to traffic moving along a road and may include a plurality of traffic information devices mountable to the road, each having an integral power producing source, at least a first set of illumination sources, and a wireless communications subsystem. The traffic informational system may further include at least a first external control device comprising at least one antenna and a transmitter communication wirelessly with the traffic information devices and/or with one another. The traffic information device may communicate with one another, and may include sensor for sensing ambient conditions. The system employs various approaches to reducing power consumption and improving communications, and is suitable for a wide range of applications, including use in remote environments.

公开(公告)号：US20090256723A1

公开(公告)日：2009-10-15

申请号：US12492143

申请日：2009-06-26

申请人： Timm Peddie ,  David P. Bim-Merle ,  Thomas A. Burnham ,  Daniel O. Santos ,  Lawrence E. Miller ,  Vineet Mehta ,  Johannes B. Van Niekerk

发明人： Timm Peddie ,  David P. Bim-Merle ,  Thomas A. Burnham ,  Daniel O. Santos ,  Lawrence E. Miller ,  Vineet Mehta ,  Johannes B. Van Niekerk

IPC分类号： G08G1/095

CPC分类号： G08G1/096783 ,  E01F9/559

摘要： A traffic informational system provides information to traffic moving along a road and may include a plurality of traffic information devices mountable to the road, each having an integral power producing source, at least a first set of illumination sources, and a wireless communications subsystem. The traffic informational system may further include at least a first external control device comprising at least one antenna and a transmitter communication wirelessly with the traffic information devices and/or with one another. The traffic information device may communicate with one another, and may include sensor for sensing ambient conditions. The system employs various approaches to reducing power consumption and improving communications, and is suitable for a wide range of applications, including use in remote environments.

摘要翻译： 交通信息系统为沿着道路行驶的交通提供信息，并且可以包括可安装到道路的多个交通信息装置，每个具有整体的发电源，至少第一组照明源和无线通信子系统。 交通信息系统还可以包括至少第一外部控制装置，该第一外部控制装置包括与交通信息装置和/或彼此无线地相连接的至少一个天线和发射机通信。 交通信息装置可以彼此通信，并且可以包括用于感测环境条件的传感器。 该系统采用各种方法来降低功耗并改善通信，适用于各种应用，包括在远程环境中使用。

公开(公告)号：US20220415190A1

公开(公告)日：2022-12-29

申请号：US17781260

申请日：2020-12-04

申请人： Vineet Mehta ,  GE Aviation Systems LLC

发明人： Szabolcs Borgyos ,  Vineet Mehta ,  Kenneth Stewart

IPC分类号： G08G5/00 ,  H04L67/125

摘要： Systems and methods provide a services architecture. An air mobility platform locally stores a native application at. The air mobility platform receives a first request for a first service and data identifying the first user as a priority user type or a non-priority user type. A second request for a second service and data related to the second user identifies the user type is received. The air mobility platform calculates a priority for the first request. If the priority for the first request exceeds the priority for the second request, a third party application is accessed for the first request. The air mobility platform submits the data related to the first request from the third party application to at least one of the first unmanned aerial vehicle or the first user.

公开(公告)号：US08562798B2

公开(公告)日：2013-10-22

申请号：US11222231

申请日：2005-09-07

申请人： Karl M. Brown ,  John Pipitone ,  Vineet Mehta

发明人： Karl M. Brown ,  John Pipitone ,  Vineet Mehta

IPC分类号： C23C14/00 ,  C23C14/32 ,  C25B9/00 ,  C25B11/00 ,  C25B13/00 ,  H01B11/02 ,  H01B11/06 ,  H02G3/04 ,  H05K1/09

CPC分类号： H01J37/3408 ,  C23C14/046 ,  C23C14/345 ,  C23C14/358 ,  H01J37/32082 ,  H01J37/32706 ,  H01L21/2855 ,  H01L21/76843 ,  H01L21/76844

摘要： A physical vapor deposition reactor includes a metal sputter target, a D.C. sputter power source coupled to the metal sputter target and a wafer support pedestal facing the metal sputter target. A movable magnet array is adjacent a side of the metal sputter target opposite the wafer support pedestal. A solid metal RF feed rod engages the metal sputter target and extends from a surface of the target on a side opposite the wafer support pedestal. A VHF impedance match circuit is coupled to an end of the RF feed rod opposite the metal sputter target and a VHF RF power generator coupled to said VHF impedance match circuit. Preferably, the reactor of further includes a center axle about which the movable magnet array is rotatable, the center axle having an axially extending hollow passageway, the RF feed rod extending through the passageway.

摘要翻译： 物理气相沉积反应器包括金属溅射靶，耦合到金属溅射靶的直流溅射功率源和面向金属溅射靶的晶片支撑基座。 可移动磁体阵列与金属溅射靶的与晶片支撑基座相对的一侧相邻。 固体金属RF馈送杆接合金属溅射靶并且在与晶片支撑基座相对的一侧上从靶的表面延伸。 VHF阻抗匹配电路耦合到与金属溅射靶相对的RF馈电杆的端部以及耦合到所述VHF阻抗匹配电路的VHF RF发电发生器。 优选地，反应器还包括中心轴，可动磁体阵列围绕该中心轴可旋转，中心轴具有轴向延伸的中空通道，RF馈送杆延伸穿过通道。

公开(公告)号：US20080276958A1

公开(公告)日：2008-11-13

申请号：US11745451

申请日：2007-05-08

申请人： Vineet Mehta ,  Karl Brown ,  John A. Pipitone ,  Daniel J. Hoffman ,  Steven C. Shannon ,  Keith A. Miller ,  Vijay D. Parkhe

发明人： Vineet Mehta ,  Karl Brown ,  John A. Pipitone ,  Daniel J. Hoffman ,  Steven C. Shannon ,  Keith A. Miller ,  Vijay D. Parkhe

IPC分类号： C25F3/12 ,  C25F7/00

CPC分类号： B08B7/0035 ,  C25F7/00 ,  H01J37/32009 ,  H01J37/32541 ,  H01L21/02046 ,  H01L21/0206

摘要： A substrate cleaning chamber includes a contoured ceiling electrode having an arcuate surface that faces a substrate support and has a variable cross-sectional thickness to vary the gap size between the arcuate surface and the substrate support to provide a varying plasma density across the substrate support. A dielectric ring for the cleaning chamber comprises a base, a ridge, and a radially inward ledge that covers the peripheral lip of the substrate support. A base shield comprises a circular disc having at least one perimeter wall. Cleaning and conditioning processes for the cleaning chamber are also described.

摘要翻译： 衬底清洁室包括具有面向衬底支撑件的弓形表面的轮廓天花板电极，并且具有可变的横截面厚度以改变弧形表面和衬底支撑件之间的间隙尺寸，以在衬底支撑件上提供变化的等离子体密度。 用于清洁室的介电环包括覆盖基板支撑件的周缘的基部，脊和径向向内的凸缘。 底座包括具有至少一个周边壁的圆盘。 还描述了清洁室的清洁和调节过程。

公开(公告)号：US20060172517A1

公开(公告)日：2006-08-03

申请号：US11222230

申请日：2005-09-07

申请人： Karl Brown ,  John Pipitone ,  Vineet Mehta

发明人： Karl Brown ,  John Pipitone ,  Vineet Mehta

IPC分类号： H01L21/20

CPC分类号： H01J37/3408 ,  C23C14/046 ,  C23C14/345 ,  C23C14/358 ,  H01J37/32082 ,  H01J37/32706 ,  H01L21/2855 ,  H01L21/76843 ,  H01L21/76844

摘要： A method of performing physical vapor deposition of copper onto an integrated circuit in a vacuum chamber of a plasma reactor, includes providing a copper target near a ceiling of the chamber, placing an integrated circuit wafer on a wafer support pedestal facing the target, introducing a carrier gas into the vacuum chamber, and establishing a deposition rate on the wafer by applying D.C. power to the copper target while establishing a plasma ionization fraction by applying VHF power to the copper target. The method can further include promoting re-sputtering of copper on vertical surfaces on the wafer by coupling HF or LF power to the wafer. The method preferably includes maintaining a target magnetic field at the target and scanning the target magnetic field across the target.

摘要翻译： 在等离子体反应器的真空室中的集成电路上进行铜的物理蒸镀的方法包括：在室的顶板附近设置铜靶，将集成电路晶片放置在面向靶的晶片支撑台上，引入 载气进入真空室，并通过向铜靶施加直流电力，同时通过对铜靶施加甚高频电源建立等离子体电离分数，在晶片上建立沉积速率。 该方法还可以包括通过将HF或LF功率耦合到晶片来促进铜在晶片上的垂直表面上的再溅射。 该方法优选地包括维持目标磁场并扫描目标上的目标磁场。

公开(公告)号：US20060169584A1

公开(公告)日：2006-08-03

申请号：US11222245

申请日：2005-09-07

申请人： Karl Brown ,  John Pipitone ,  Vineet Mehta

发明人： Karl Brown ,  John Pipitone ,  Vineet Mehta

IPC分类号： C23C14/00

CPC分类号： H01J37/3408 ,  C23C14/046 ,  C23C14/345 ,  C23C14/358 ,  H01J37/32082 ,  H01J37/32706 ,  H01L21/2855 ,  H01L21/76843 ,  H01L21/76844

摘要： A physical vapor deposition reactor includes a vacuum chamber including a sidewall, a ceiling and a wafer support pedestal near a floor of the chamber, a vacuum pump coupled to the chamber, a process gas inlet coupled to the chamber and a process gas source coupled to the process gas inlet. A metal sputter target is located at the ceiling and a high voltage D.C. source coupled to the sputter target. An RF plasma source power generator is coupled to the metal sputter target and has a frequency suitable for exciting kinetic electrons. Preferably, the wafer support pedestal comprises an electrostatic chuck and an RF plasma bias power generator is coupled to the wafer support pedestal having a frequency suitable for coupling energy to plasma ions. Preferably, a solid metal RF feed rod having a diameter in excess of about 0.5 inches engages the metal sputter target, the RF feed rod extending axially above the target through the ceiling and being coupled to the RF plasma source power generator.

摘要翻译： 物理气相沉积反应器包括真空室，其包括侧壁，天花板和靠近室底部的晶片支撑台座，耦合到该室的真空泵，耦合到该室的工艺气体入口以及耦合到 工艺气体入口。 金属溅射靶位于天花板和耦合到溅射靶的高电压源极。 RF等离子体源功率发生器耦合到金属溅射靶并且具有适于激发动电子的频率。 优选地，晶片支撑基座包括静电卡盘，并且RF等离子体偏置功率发生器耦合到具有适于将能量耦合到等离子体离子的频率的晶片支撑基座。 优选地，具有超过约0.5英寸的直径的固体金属RF馈送棒与金属溅射靶接合，RF馈送杆通过天花板轴向延伸到目标上方并且耦合到RF等离子体源发电机。

公开(公告)号：US11336194B1

公开(公告)日：2022-05-17

申请号：US17221905

申请日：2021-04-05

申请人： Vikram Singh ,  Ankur Bal ,  Vineet Mehta ,  Jitender Singh

发明人： Vikram Singh ,  Ankur Bal ,  Vineet Mehta ,  Jitender Singh

IPC分类号： H02M7/42 ,  H02M3/335 ,  H02M1/12

摘要： Disclosed herein is a DC-AC converter, in accordance with some embodiments. Accordingly, the DC-AC converter comprises a transformer, a pulse generator, a pulse modulator, a switching element, and an analog low pass filtering stage. Further, the pulse generator is configured for generating pulses characterized by a pulse frequency. Further, the pulse modulator is configured for generating a pulse density modulated signal based on modulating the pulses using a sine wave signal of a fundamental frequency. Further, the switching element is connected in series with a primary winding of the transformer. Further, the switching element is configured to be switched between an on state and an off state based on the pulse density modulated signal. Further, the analog low pass filtering stage is configured for generating an AC voltage of the fundamental frequency based on attenuating higher frequency components of an unfiltered AC voltage at a secondary winding of the transformer.