Resist composition and method for forming resist pattern

    公开(公告)号:US10241406B2

    公开(公告)日:2019-03-26

    申请号:US15629035

    申请日:2017-06-21

    摘要: A resist composition containing a resin component having a structural unit represented by general formula (a0-1), and a compound represented by general formula (b1). In general formula (a0-1), R is a hydrogen atom, an alkyl group, or a halogenated alkyl group. Va1 is a divalent hydrocarbon group. na1 represents an integer of 0 to 2. Ra′12 and Ra′13 are a monovalent chain saturated hydrocarbon group having 1 to 10 carbon atoms or a hydrogen atom. Ra′14 is a phenyl group, a naphthyl group, or an anthryl group. In general formula (b1), Rb1 represents a cyclic hydrocarbon group. Yb1 represents a divalent linking group containing an ester bond. Vb1 represents an alkylene group, a fluorinated alkylene group, or a single bond. m is an integer of 1 or more, and Mm+ is an m-valent organic cation.

    Sulfonium salt and photo-acid generator
    7.
    发明授权
    Sulfonium salt and photo-acid generator 有权
    锍盐和光酸发生器

    公开(公告)号:US09045398B2

    公开(公告)日:2015-06-02

    申请号:US14289686

    申请日:2014-05-29

    摘要: Provided is a novel sulfonium salt that has high solubility in a solvent and has high light sensitivity to, especially, light having a wavelength not longer than deep-UV (254 nm) and a novel photo-acid generator comprising the sulfonium salt. The invention relates to a sulfonium salt represented by the following general formula (1) and a novel photo-acid generator comprising the sulfonium salt. wherein R1 represents an electron withdrawing group; R2 and R3 each independently represent an alkyl group having 1 to 5 carbon atoms, an alkoxy group, an acyl group, a halogenated alkyl group, a halogen atom, a hydroxyl group, a cyano group, or a nitro group; p and q each independently represent an integer of 0 to 5; and X−represents a monovalent counter anion.

    摘要翻译: 提供了一种在溶剂中具有高溶解度并对具有高于深UV(254nm)的波长的光,特别是具有不长于深UV(254nm)的光的光的高灵敏度的新型锍盐和包含锍盐的新型光酸产生剂。 本发明涉及由以下通式(1)表示的锍盐和包含锍盐的新型光酸产生剂。 其中R1表示吸电子基团; R2和R3各自独立地表示碳原子数1〜5的烷基,烷氧基,酰基,卤代烷基,卤素原子,羟基,氰基或硝基。 p和q各自独立地表示0〜5的整数, 并且X代表一价抗衡阴离子。

    SULFONIUM SALT AND PHOTO-ACID GENERATOR
    10.
    发明申请
    SULFONIUM SALT AND PHOTO-ACID GENERATOR 有权
    硫酸钠和光酸发生器

    公开(公告)号:US20140357896A1

    公开(公告)日:2014-12-04

    申请号:US14289686

    申请日:2014-05-29

    摘要: Provided is a novel sulfonium salt that has high solubility in a solvent and has high light sensitivity to, especially, light having a wavelength not longer than deep-UV (254 nm) and a novel photo-acid generator comprising the sulfonium salt. The invention relates to a sulfonium salt represented by the following general formula (1) and a novel photo-acid generator comprising the sulfonium salt. wherein R1 represents an electron withdrawing group; R2 and R3 each independently represent an alkyl group having 1 to 5 carbon atoms, an alkoxy group, an acyl group, a halogenated alkyl group, a halogen atom, a hydroxyl group, a cyano group, or a nitro group; p and q each independently represent an integer of 0 to 5; and X− represents a monovalent counter anion.

    摘要翻译: 提供了一种在溶剂中具有高溶解度并对具有高于深UV(254nm)的波长的光,特别是具有不长于深UV(254nm)的光的光的高灵敏度的新型锍盐和包含锍盐的新型光酸产生剂。 本发明涉及由以下通式(1)表示的锍盐和包含锍盐的新型光酸产生剂。 其中R1表示吸电子基团; R2和R3各自独立地表示碳原子数1〜5的烷基,烷氧基,酰基,卤代烷基,卤素原子,羟基,氰基或硝基。 p和q各自独立地表示0〜5的整数, X-表示一价抗衡阴离子。