Inter-metal dielectric of semiconductor device and manufacturing method thereof including plasma treating a plasma enhanced fluorosilicate glass
    5.
    发明授权
    Inter-metal dielectric of semiconductor device and manufacturing method thereof including plasma treating a plasma enhanced fluorosilicate glass 失效
    半导体器件的金属间电介质及其制造方法包括等离子体处理等离子体增强氟硅酸盐玻璃

    公开(公告)号:US07442653B2

    公开(公告)日:2008-10-28

    申请号:US11316634

    申请日:2005-12-20

    申请人: Tae-Young Lee

    发明人: Tae-Young Lee

    IPC分类号: H01L21/31

    摘要: An exemplary manufacturing method of an inter-metal dielectric of a semiconductor device according to an embodiment of the present invention includes forming a first silicon-rich oxide (SRO) layer on a silicon substrate provided with or otherwise having a copper line layer therein, forming a plasma enhanced fluorosilicate glass (PEFSG) layer on the first SRO layer, plasma-treating the PEFSG layer, and forming a second SRO layer on the plasma-treated PEFSG layer. According to the present invention, the thickness of the second SRO layer of the inter-metal dielectric can be reduced. Consequently, process cost can be reduced, and the total thickness of the inter-metal dielectric can be reduced so as to lower the dielectric constant thereof, reduce the aspect ratio of any via holes that are subsequently formed in the inter-metal dielectric, and potentially increase the yield as a result of the reduced via hole aspect ratio.

    摘要翻译: 根据本发明实施例的半导体器件的金属间电介质的示例性制造方法包括在其上设置有或具有铜线层的硅衬底上形成第一富硅氧化物(SRO)层,形成 在第一SRO层上的等离子体增强氟硅酸盐玻璃(PEFSG)层,等离子体处理PEFSG层,以及在等离子体处理的PEFSG层上形成第二SRO层。 根据本发明,可以减少金属间电介质的第二SRO层的厚度。 因此,可以降低工艺成本,并且可以减小金属间电介质的总厚度以降低其介电常数,减小随后在金属间电介质中形成的任何通孔的纵横比,以及 由于通孔长径比减小,潜在地提高了产量。

    Print paper separating apparatus and method thereof
    6.
    发明申请
    Print paper separating apparatus and method thereof 审中-公开
    打印纸分离装置及其方法

    公开(公告)号:US20060180993A1

    公开(公告)日:2006-08-17

    申请号:US11320299

    申请日:2005-12-29

    申请人: Tae-Young Lee

    发明人: Tae-Young Lee

    IPC分类号: B65H3/52

    摘要: A method and apparatus are provided for separating a top print paper from a stack of print papers using print paper buckling. The print paper separating method and apparatus include a transporting element for transporting the print paper by contacting the top of the stack of print papers. A plurality of elastic fibers are provided to induce buckling of the print paper using an elastic force. The elastic fibers may be provided with an electrical ground.

    摘要翻译: 提供了一种用于使用打印纸弯曲将顶部打印纸与一叠打印纸分离的方法和装置。 打印纸分离方法和装置包括用于通过接触打印纸堆叠的顶部来传送打印纸的传送元件。 提供多个弹性纤维以利用弹力来引起打印纸的弯曲。 弹性纤维可以设置有电接地。

    Method and apparatus for compensating phase errors in a base station system
    7.
    发明申请
    Method and apparatus for compensating phase errors in a base station system 审中-公开
    用于补偿基站系统中的相位误差的方法和装置

    公开(公告)号:US20050181749A1

    公开(公告)日:2005-08-18

    申请号:US10995417

    申请日:2004-11-24

    申请人: Tae-Young Lee

    发明人: Tae-Young Lee

    摘要: An apparatus and a method for compensating phase errors in a wireless BSS. The invention compensates I/Q signal imbalances and phase errors occurring in base station systems each having a direct conversion transmitter according to the respective systems as well as continuously monitor and compensate the degree of the I/Q signal imbalances through its own feedback path in order to overcome phase distortion and I/Q signal imbalance occurring at RF terminals of the respective wireless base station systems each having a direct conversion transmitter, thereby ensuring phase linearity to the base station systems using the direct conversion transmitter while improving its performance.

    摘要翻译: 一种用于补偿无线BSS中的相位误差的装置和方法。 本发明补偿基站系统中发生的I / Q信号不平衡和相位误差,每个基站系统具有根据各个系统的直接转换发射机,并且通过其自己的反馈路径按顺序连续监视和补偿I / Q信号不平衡的程度 以克服在具有直接转换发射机的各个无线基站系统的RF终端处发生的相位失真和I / Q信号不平衡,由此在改善其性能的同时确保使用直接转换发射机的基站系统的相位线性。

    Tape feeder for component mounter having a pressure-activated discharge door opening
    8.
    发明授权
    Tape feeder for component mounter having a pressure-activated discharge door opening 有权
    用于具有压力激活排放门开口的部件安装器的带式进料器

    公开(公告)号:US08291580B2

    公开(公告)日:2012-10-23

    申请号:US12582894

    申请日:2009-10-21

    申请人: Tae-Young Lee

    发明人: Tae-Young Lee

    IPC分类号: B23P19/00 B65H20/00

    摘要: A tape feeder for supplying components to a component mounter via a carrier tape on which the components are disposed at predetermined intervals, wherein the carrier tape and components are covered with a cover tape, is described. The tape feeder may comprise a frame including a receptacle. The receptacle may have an inlet port for receiving the cover tape separated from the carrier tape, a space for containing the cover tape received through the inlet port, and a door opening through which the cover tape is discharged. The tape feeder may additionally comprise a door configured to open or close the door opening and an opening/closing member configured to fasten the door closed and thereafter open the door when an inner pressure of at least a predetermined value is applied by the cover tape received in the receptacle.

    摘要翻译: 描述了一种带式馈送器,用于经由其上以预定间隔布置组件的载带将部件提供给部件安装器,其中载带和部件被盖带覆盖。 带式给料器可以包括包括容器的框架。 容器可以具有用于接收从载带分离的盖带的入口端口,用于容纳通过入口端口容纳的盖带的空间,以及盖带从其中排出的门开口。 带式馈送器可以另外包括构造成打开或关闭门开口的门,以及打开/关闭构件,其构造成当所接收的盖带施加至少预定值的内部压力时将门闭合并且随后打开门 在容器中。

    Back-up table for chip mounter
    9.
    发明授权
    Back-up table for chip mounter 有权
    芯片贴片机备用桌

    公开(公告)号:US08037588B2

    公开(公告)日:2011-10-18

    申请号:US12082032

    申请日:2008-04-08

    申请人: Tae-Young Lee

    发明人: Tae-Young Lee

    IPC分类号: B25B27/14

    摘要: A back-up table for a chip mounter. The back-up table for a chip mounter includes a base plate, a back-up plate spaced a predetermined distance from the base plate to support a back-up pin that supports a printed circuit board, and at least one set of link units installed between the base plate and the back-up plate and facing opposite to each other. The back-up table further comprises a first driving part installed between the opposite facing link units and operating the link units to raise and lower the back-up plate, and a second driving part serially connected to the first driving part.

    摘要翻译: 芯片贴片机的备用桌。 用于芯片安装器的备用台包括基板,与基板隔开预定距离的支撑板,以支撑支撑印刷电路板的支撑销,以及安装有至少一组连接单元 在基板和支撑板之间并且彼此面对。 备用桌还包括安装在相对的相对的连杆单元之间的第一驱动部分,并且操作连杆单元以升高和降低支撑板;以及与第一驱动部分串联连接的第二驱动部。

    HEAD NOZZLE UNIT, AND APPARATUS AND METHOD FOR MOUNTING ELECTRONIC PARTS
    10.
    发明申请
    HEAD NOZZLE UNIT, AND APPARATUS AND METHOD FOR MOUNTING ELECTRONIC PARTS 有权
    头喷嘴单元,以及用于安装电子部件的装置和方法

    公开(公告)号:US20110214286A1

    公开(公告)日:2011-09-08

    申请号:US13011048

    申请日:2011-01-21

    IPC分类号: H05K3/30 B23P19/00

    摘要: A head nozzle unit includes a pair of motion guides located parallel to each other, a pair of movable blocks disposed on the pair of motion guides and movable independently of each other, a guide member transversely connected to the pair of motion guides via the pair of movable blocks, a pair of head nozzle parts disposed on opposite lateral surfaces of the guide member, the pair of head nozzle parts movable independently of each other and operable to pick up and mount electronic parts, and a driver that moves the pair of movable blocks in cooperation with one another and that moves the pair of head nozzle parts in predetermined directions. Further, an apparatus and method for mounting electronic parts includes the head nozzle unit. The pair of head nozzle parts alternately and sequentially performs a series of mounting processes of picking up the electronic parts and mounting the picked up electronic parts.

    摘要翻译: 头喷嘴单元包括彼此平行布置的一对运动引导件,一对可移动块,其设置在所述一对运动引导件上并且可彼此独立地移动;引导构件,其经由所述一对运动引导件横向地连接到所述一对运动引导件 可移动块,设置在引导构件的相对侧表面上的一对头喷嘴部分,一对头部喷嘴部分可彼此独立地移动并可操作以拾取和安装电子部件;以及驱动器,其将一对可移动块 彼此协作,并使预定方向的一对头部喷嘴部分移动。 此外,用于安装电子部件的装置和方法包括头喷嘴单元。 一对头喷嘴部件交替地并且顺序地执行拾取电子部件并安装拾取的电子部件的一系列安装处理。