公开(公告)号：US08497391B2

公开(公告)日：2013-07-30

申请号：US12864127

申请日：2009-01-20

申请人： Takahisa Ohno ,  Nobuo Tajima ,  Satoshi Hasaka ,  Minoru Inoue ,  Kaoru Sakoda ,  Yoshiaki Inaishi ,  Manabu Shinriki ,  Kazuhiro Miyazawa

发明人： Takahisa Ohno ,  Nobuo Tajima ,  Satoshi Hasaka ,  Minoru Inoue ,  Kaoru Sakoda ,  Yoshiaki Inaishi ,  Manabu Shinriki ,  Kazuhiro Miyazawa

IPC分类号： C23C16/00 ,  C07F7/08 ,  H01L21/31

CPC分类号： C07F7/0807 ,  C23C16/30 ,  H01L21/02167 ,  H01L21/02208 ,  H01L21/02274 ,  H01L21/3148 ,  H01L21/76829

摘要： An insulating film material for plasma CVD represented by a chemical formula (1) shown below, a method of film formation using the insulating film material, and an insulating film. According to the present invention, an insulating film having a low dielectric constant and a superior copper diffusion barrier property suitable for an interlayer insulating film or the like of a semiconductor device can be obtained. In the chemical formula (1), n represents an integer of 3 to 6, and each of R1 and R2 independently represents one of C2H, C2H3, C3H3, C3H5, C3H7, C4H5, C4H7, C4H9, C5H7, C5H9 and C5H11.

摘要翻译： 由下述化学式（1）表示的用于等离子体CVD的绝缘膜材料，使用绝缘膜材料的成膜方法和绝缘膜。 根据本发明，可以获得具有适合于半导体器件的层间绝缘膜等的低介电常数和优异的铜扩散阻挡性的绝缘膜。 在化学式（1）中，n表示3〜6的整数，R1和R2各自独立地表示C2H，C2H3，C3H3，C3H5，C3H7，C4H5，C4H7，C4H9，C5H7，C5H9和C5H11中的任一种。

公开(公告)号：US20110130584A1

公开(公告)日：2011-06-02

申请号：US12864127

申请日：2009-01-20

申请人： Takahisa Ohno ,  Nobuo Tajima ,  Satoshi Hasaka ,  Minoru Inoue ,  Kaoru Sakoda ,  Yoshiaki Inaishi ,  Manabu Shinriki ,  Kazuhiro Miyazawa

发明人： Takahisa Ohno ,  Nobuo Tajima ,  Satoshi Hasaka ,  Minoru Inoue ,  Kaoru Sakoda ,  Yoshiaki Inaishi ,  Manabu Shinriki ,  Kazuhiro Miyazawa

IPC分类号： C23C16/00 ,  C07F7/08

CPC分类号： C07F7/0807 ,  C23C16/30 ,  H01L21/02167 ,  H01L21/02208 ,  H01L21/02274 ,  H01L21/3148 ,  H01L21/76829

摘要： An insulating film material for plasma CVD represented by a chemical formula (1) shown below, a method of film formation using the insulating film material, and an insulating film. According to the present invention, an insulating film having a low dielectric constant and a superior copper diffusion barrier property suitable for an interlayer insulating film or the like of a semiconductor device can be obtained. In the chemical formula (1), n represents an integer of 3 to 6, and each of R1 and R2 independently represents one of C2H, C2H3, C3H3, C3H5, C3H7, C4H5, C4H7, C4H9, C5H7, C5H9 and C5H11.

摘要翻译： 由下述化学式（1）表示的用于等离子体CVD的绝缘膜材料，使用绝缘膜材料的成膜方法和绝缘膜。 根据本发明，可以获得具有适合于半导体器件的层间绝缘膜等的低介电常数和优异的铜扩散阻挡性的绝缘膜。 在化学式（1）中，n表示3〜6的整数，R1和R2各自独立地表示C2H，C2H3，C3H3，C3H5，C3H7，C4H5，C4H7，C4H9，C5H7，C5H9和C5H11中的任一种。

公开(公告)号：US07976806B2

公开(公告)日：2011-07-12

申请号：US11910126

申请日：2006-03-30

申请人： Osamu Misumi ,  Shinichi Yamamoto ,  Takayuki Watanabe ,  Takashi Kishimoto ,  Takashi Watanabe ,  Fumio Okada ,  Yoshio Ishihara ,  Katsumasa Suzuki ,  Kaoru Sakoda

发明人： Osamu Misumi ,  Shinichi Yamamoto ,  Takayuki Watanabe ,  Takashi Kishimoto ,  Takashi Watanabe ,  Fumio Okada ,  Yoshio Ishihara ,  Katsumasa Suzuki ,  Kaoru Sakoda

IPC分类号： B01J20/04 ,  C01F11/02 ,  B01D53/68

CPC分类号： B01J20/28057 ,  B01D53/508 ,  B01D53/685 ,  B01D2251/402 ,  B01D2251/404 ,  B01J20/041 ,  B01J20/28004 ,  B01J20/2803 ,  B01J20/28069 ,  B01J20/3078 ,  B01J2220/42 ,  C01F5/08 ,  C01F11/04 ,  C01P2004/80 ,  C01P2006/12 ,  Y02C20/30

摘要： A granular material having a high strength and a large BET specific surface area composed of porous particles comprising calcium oxide and calcium hydroxide wherein the calcium oxide is contained in an amount of 30 to 80 weight % based on a total amount of the calcium oxide and calcium hydroxide and the porous particles have a BET specific surface area of 40 m2/g or more, or composed of porous particles comprising calcium oxide, magnesium oxide, calcium hydroxide, and magnesium hydroxide wherein a ratio of an amount of magnesium to a total of an amount of calcium and an amount of magnesium is in the range of 0.05 to 0.80, a total hydroxide content in the whole particles is in the range of 1 to 20 weight % and the porous particles have a BET specific surface area of 50 m2/g or more.

摘要翻译： 一种具有高强度和大的BET比表面积的颗粒材料，其由包含氧化钙和氢氧化钙的多孔颗粒组成，其中氧化钙的含量相对于氧化钙和钙的总量为30至80重量％ 氢氧化物和多孔颗粒的BET比表面积为40m 2 / g以上，或由包含氧化钙，氧化镁，氢氧化钙和氢氧化镁的多孔颗粒组成，其中镁与总量的比例 钙的量和镁的量在0.05至0.80的范围内，整个颗粒中的总氢氧化物含量在1至20重量％的范围内，多孔颗粒的BET比表面积为50m 2 / g 或者更多。

公开(公告)号：US20090246524A1

公开(公告)日：2009-10-01

申请号：US12303005

申请日：2007-06-04

申请人： Tadahiro Ohmi ,  Yoshio Ishihara ,  Katsumasa Suzuki ,  Kaoru Sakoda ,  Osamu Misumi ,  Takayuki Watanabe

发明人： Tadahiro Ohmi ,  Yoshio Ishihara ,  Katsumasa Suzuki ,  Kaoru Sakoda ,  Osamu Misumi ,  Takayuki Watanabe

IPC分类号： C01F11/04 ,  B32B5/16

CPC分类号： C01F11/02 ,  B01D53/685 ,  B01D2251/602 ,  B01D2251/604 ,  B01D2257/2027 ,  B01J20/041 ,  B01J20/28057 ,  B01J20/28069 ,  B01J20/28078 ,  B01J20/28092 ,  C01F11/04 ,  C01P2006/12 ,  C01P2006/14 ,  C01P2006/16 ,  Y10T428/2982

摘要： Granular calcium oxide and calcium hydroxide which are highly reactive with a halide gas and its decomposition products and favorably employable for filling a gas-fixing unit (32) of an apparatus (3) for fixing a halide gas are, respectively, a granule of porous spherical calcium oxide particles, which has a BET specific surface area of 50 m2/g or more and a total pore volume of pores having a diameter of 2-100 nm in the range of 0.40-0.70 mL/g and a granule of porous spherical calcium hydroxide particles which has a BET specific surface area of 20 m2/g or more and a total pore volume of pores having a diameter of 2-100 nm in the range of 0.25-0.40 mL/g.

摘要翻译： 与卤化物气体及其分解产物高度反应的颗粒状氧化钙和氢氧化钙分别是用于填充用于固定卤化物气体的装置（3）的气体固定单元（32），并且适合用于填充多孔 BET比表面积为50m2 / g以上，直径为2〜100nm，孔径为0.40〜0.70mL / g的球状氧化钙粒子，多孔球状粒子 氢氧化钙粒子的BET比表面积为20m 2 / g以上，孔隙总体积为2〜100nm，孔径为0.25〜0.40mL / g。

公开(公告)号：US20090246089A1

公开(公告)日：2009-10-01

申请号：US12086132

申请日：2006-11-17

申请人： Kaoru Sakoda ,  Yoshio Ishihara

发明人： Kaoru Sakoda ,  Yoshio Ishihara

IPC分类号： G05B15/00 ,  A61L2/26

CPC分类号： B01D53/70 ,  B01D2257/2066 ,  Y02C20/30 ,  Y02P70/605

摘要： An exhaust gas-processing apparatus of the present invention includes a gas supplier 2 which supplies a gas such as C3F8 to gas-using equipment 1, a detoxification device 4 which detoxifies an exhaust gas accepted from the gas-using equipment 1, a detoxifying agent-packing and -ejecting device 5, and a controller 6. The data of the types, flow rates, and supply periods of gases, which are supplied from the gas supplier 2 to the gas-using equipment 1, are sent to the controller 6. The control section 6 predicts a point in time of the break of the detoxification column 41 of the detoxification device 4 based on the data, and issues the direction of exchange so as to direct the detoxifying agent-packing and -ejecting device 5 to eject and pack detoxifying agents at a point in time of the break.

摘要翻译： 本发明的废气处理装置包括向气体使用装置1供给C3F8等气体的气体供给装置2，对从气体使用装置1接收的废气进行解毒的解毒装置4，除臭剂 包装和喷射装置5以及控制器6.从气体供应器2向气体使用设备1供应的气体的类型，流量和供给周期的数据被发送到控制器6 控制部6基于数据预测解毒装置4的解毒柱41的断裂时间，并发布交换方向，以引导解毒剂包装和喷射装置5喷射 并在休息时间内包装排毒剂。

公开(公告)号：US20090215616A1

公开(公告)日：2009-08-27

申请号：US11910126

申请日：2006-03-30

申请人： Osamu Misumi ,  Shinichi Yamamoto ,  Takayuki Watanabe ,  Takashi Kishimoto ,  Takashi Watanabe ,  Fumio Okada ,  Yoshio Ishihara ,  Katsumasa Suzuki ,  Kaoru Sakoda

发明人： Osamu Misumi ,  Shinichi Yamamoto ,  Takayuki Watanabe ,  Takashi Kishimoto ,  Takashi Watanabe ,  Fumio Okada ,  Yoshio Ishihara ,  Katsumasa Suzuki ,  Kaoru Sakoda

IPC分类号： B01J20/04

CPC分类号： B01J20/28057 ,  B01D53/508 ,  B01D53/685 ,  B01D2251/402 ,  B01D2251/404 ,  B01J20/041 ,  B01J20/28004 ,  B01J20/2803 ,  B01J20/28069 ,  B01J20/3078 ,  B01J2220/42 ,  C01F5/08 ,  C01F11/04 ,  C01P2004/80 ,  C01P2006/12 ,  Y02C20/30

摘要： A granular material having a high strength and a large BET specific surface area composed of porous particles comprising calcium oxide and calcium hydroxide wherein the calcium oxide is contained in an amount of 30 to 80 weight % based on a total amount of the calcium oxide and calcium hydroxide and the porous particles have a BET specific surface area of 40 m2/g or more, or composed of porous particles comprising calcium oxide, magnesium oxide, calcium hydroxide, and magnesium hydroxide wherein a ratio of an amount of magnesium to a total of an amount of calcium and an amount of magnesium is in the range of 0.05 to 0.80, a total hydroxide content in the whole particles is in the range of 1 to 20 weight % and the porous particles have a BET specific surface area of 50 m2/g or more.

摘要翻译： 一种具有高强度和大的BET比表面积的颗粒材料，其由包含氧化钙和氢氧化钙的多孔颗粒组成，其中氧化钙的含量相对于氧化钙和钙的总量为30至80重量％ 氢氧化物和多孔颗粒的BET比表面积为40m 2 / g以上，或由包含氧化钙，氧化镁，氢氧化钙和氢氧化镁的多孔颗粒组成，其中镁与总量的比例 钙的量和镁的量在0.05至0.80的范围内，整个颗粒中的总氢氧化物含量在1至20重量％的范围内，多孔颗粒的BET比表面积为50m 2 / g 或者更多。