Submicron dimensional calibration standards and methods of manufacture and use
    4.
    发明授权
    Submicron dimensional calibration standards and methods of manufacture and use 有权
    亚微米尺寸校准标准和制造和使用方法

    公开(公告)号:US06646737B2

    公开(公告)日:2003-11-11

    申请号:US09961629

    申请日:2001-09-24

    IPC分类号: G01R3126

    CPC分类号: G01Q40/02 H01J2237/30444

    摘要: A calibration standard which may be used to calibrate lateral dimensional measurement systems is provided. The calibration standard may include a first substrate spaced from a second substrate. In addition, the calibration standard may include at least one layer disposed between the first and second substrates. The layer may have a traceably measured thickness. For example, a thickness of the layer may be traceably measured using any measurement technique in which a measurement system may be calibrated with a standard reference material traceable to a national testing authority. The calibration standard may be cross-sectioned in a direction substantially perpendicular to an upper surface of the first substrate. The cross-sectioned portion of the calibration standard may form a viewing surface of the calibration standard. In this manner, a lateral dimensional artifact of the calibration standard may include the traceably measured thickness of at least the one layer.

    摘要翻译: 提供了可用于校准横向尺寸测量系统的校准标准。 校准标准可以包括与第二衬底间隔开的第一衬底。 此外,校准标准可以包括设置在第一和第二基板之间的至少一层。 该层可以具有可追溯测量的厚度。 例如,可以使用任何测量技术来可追溯地测量该层的厚度,其中可以使用可追溯到国家检测机构的标准参考材料校准测量系统。 校准标准可以在基本上垂直于第一衬底的上表面的方向上横截面。 校准标准的横截面部分可以形成校准标准的观察表面。 以这种方式,校准标准的横向尺寸伪影可以包括至少一层的可追溯测量的厚度。

    Dimensional calibration standards
    8.
    发明授权
    Dimensional calibration standards 有权
    尺寸校准标准

    公开(公告)号:US07301638B1

    公开(公告)日:2007-11-27

    申请号:US10770151

    申请日:2004-01-31

    IPC分类号: G01N21/84

    CPC分类号: G01B11/0616 G01B21/042

    摘要: A calibration standard, for calibrating lateral or angular dimensional measurement systems, is provided. The standard may include a first substrate spaced from a second substrate. The standard may be cross-sectioned in a direction substantially perpendicular or substantially non-perpendicular to an upper surface of the first substrate. The cross-sectioned portion of the standard may form a viewing surface of the calibration standard. The standard may include at least one layer disposed between the first and second substrates. The layer, or a feature etched into the first or second substrate or a feature etched into the layer may have a traceably measured thickness or may be oriented at a traceably measured angle with respect to the viewing surface. A thickness or angle of the layer or other feature may be traceably measured using any technique for calibrating a measurement system with a standard reference material traceable to a national testing authority.

    摘要翻译: 提供了用于校准横向或角度尺寸测量系统的校准标准。 标准可以包括与第二衬底间隔开的第一衬底。 标准可以在基本上垂直于或基本上不垂直于第一基板的上表面的方向上横截面。 标准的横截面部分可以形成校准标准的观察表面。 标准可以包括设置在第一和第二基板之间的至少一层。 蚀刻到第一或第二基底中的层或特征或蚀刻到该层中的特征可以具有可追溯测量的厚度,或者可相对于观察表面以可追溯测量的角度定向。 层或其他特征的厚度或角度可以使用用于校准具有可追溯到国家检测机构的标准参考材料的测量系统的任何技术来追溯地测量。