公开(公告)号：US07345268B2

公开(公告)日：2008-03-18

申请号：US10541411

申请日：2003-12-26

Applicant: Takeharu Etoh ,  Hideki Muto

Inventor： Takeharu Etoh ,  Hideki Muto

IPC: H01L27/00

CPC classification number: H04N5/335 ,  H01L27/14623 ,  H01L27/1464 ,  H01L27/14806 ,  H01L27/14831 ,  H01L27/14843 ,  H01L27/14875 ,  H01L27/14887 ,  H01L31/02164

Abstract: A back-illuminated image sensor has a converting layer 21, charge collecting portions 24, and suppressing regions 23 and 29. The converting layer 21 for converting an incident beam into signal charges is formed on one side of an incident face 8 on which an incident beam is irradiated. The converting layer 21 is provided for each of pixels arranged in two dimensions. The charge collecting portions 24 for collecting signal charges generated in the converting layer 21 extends from the converting layer 21 to a surface 22 opposite to the incident face 8. The suppressing regions 23 and 29 for suppressing the flow of the signal charges from the converting layer 21 to peripheral circuits 26 is formed between the converting layer 21 and the peripheral circuits 26.

Abstract translation: 背照式图像传感器具有转换层21，电荷收集部分24和抑制区域23和29。 用于将入射光束转换为信号电荷的转换层21形成在入射光束被照射的入射面8的一侧。 为二维排列的像素提供转换层21。 用于收集在转换层21中产生的信号电荷的电荷收集部分24从转换层21延伸到与入射面8相对的表面22。 用于抑制从转换层21到外围电路26的信号电荷的流动的抑制区23和29形成在转换层21和外围电路26之间。

公开(公告)号：US07176972B2

公开(公告)日：2007-02-13

申请号：US10240108

申请日：2001-03-28

Applicant: Hideki Mutoh ,  Takeharu Etoh

Inventor： Hideki Mutoh ,  Takeharu Etoh

IPC: H04N3/14 ,  H04N5/335

CPC classification number: H04N5/372 ,  H01L27/14812 ,  H01L27/14843

Abstract: A fast imaging device 32 has a charge signal converter 33, a charge signal accumulator 36 and a charge signal transporter 37. A charge signal accumulator 36 is provided to each charge signal converter 33. A charge signal accumulator 36 extends linearly while inclining with respect to a line L2 connecting charge signal converter 33. The other end of a charge signal accumulator 36, connected at one end thereof to a charge signal converter 33 constituting a corresponding column, merges to a charge signal transporter 37. This construction reduces noise and increases a frame rate.

Abstract translation: 快速成像装置32具有充电信号转换器33，充电信号累加器36和充电信号传送器37。 充电信号累加器36被提供给每个充电信号转换器33。 充电信号累加器36线性地延伸，同时相对于连接充电信号转换器33的线路L2倾斜。 在其一端连接到构成相应列的电荷信号转换器33的充电信号累加器36的另一端与充电信号传送器37并联。 这种结构降低噪声并增加帧速率。

公开(公告)号：US07518170B2

公开(公告)日：2009-04-14

申请号：US11663263

申请日：2005-09-21

Applicant: Takeharu Etoh

Inventor： Takeharu Etoh

IPC: H01L27/00

CPC classification number: H01L27/1464 ,  H01L27/14812 ,  H01L27/14831

Abstract: A back illuminated imaging device 1 comprises a plurality charge blocking regions 19 which are arranged on a front surface 12 side, embedded in CCD charge transferring paths 21, and in which a first thickness T1 measured from the front surface 12 of first portions 19a extending along the CCD charge transferring paths 21 is larger than a first thickness T2 of second portions 19b extending along channel stops 20.

Abstract translation: 背照明成像装置1包括多个电荷阻挡区域19，其被布置在嵌入CCD电荷转移路径21中的前表面12侧，并且其中从第一部分19a的前表面12测量的第一厚度T1沿着 CCD电荷转移路径21大于沿着通道停止件20延伸的第二部分19b的第一厚度T2。

公开(公告)号：US07031556B1

公开(公告)日：2006-04-18

申请号：US10089601

申请日：2000-09-28

Applicant: Takeharu Etoh

Inventor： Takeharu Etoh

IPC: G06K7/00

CPC classification number: H01L27/14806

Abstract: An ultra-high speed image sensor is a frame transfer type. A charge corresponding to an intensity of a incident ray is generated at an element of a charge transfer path corresponding to each window. The generated charge is transferred on the charge transfer path by voltages applied from the charge transfer electrodes to. Each of the charge transfer electrodes to has a larger size in a charge transfer direction at portions corresponding to the window than that at portions covered with the intercepting film.

Abstract translation: 超高速图像传感器是帧传送型。 在对应于每个窗口的电荷传输路径的元素处产生与入射光线强度相对应的电荷。 所产生的电荷通过从电荷转移电极施加的电压在电荷转移路径上转移到。 每个电荷转移电极在电荷转移方向上的与窗口相对应的部分处的尺寸大于被截留膜覆盖的部分。

公开(公告)号：US06972795B1

公开(公告)日：2005-12-06

申请号：US09554882

申请日：1999-09-21

Applicant: Takeharu Etoh ,  Hideki Mutoh

Inventor： Takeharu Etoh ,  Hideki Mutoh

IPC: H01L21/339 ,  H01L27/146 ,  H01L27/148 ,  H01L29/762 ,  H01L31/02 ,  H04N5/335 ,  H04N5/341 ,  H04N5/359 ,  H04N5/369 ,  H04N5/372 ,  H04N5/374 ,  H04N5/3745 ,  H04N3/14

CPC classification number: H01L27/14812 ,  H01L27/14806 ,  H01L27/14831 ,  H01L31/02005 ,  H04N5/372

Abstract: A high-speed image sensor has a plurality of signal converting means (30) for generating electric signals corresponding to an incident light intensity and a plurality of electric signal recording means (33) for recording electric signals output from corresponding signal converting means (30). The electric signal recording means (33) is linearly shaped and has a read-out line (58a) for each of longitudinal sections thereof. The read-out line (58) is used for directly reading out the electric signals out of a light receptive area.

Abstract translation: 高速图像传感器具有用于产生对应于入射光强度的电信号的多个信号转换装置（30）和用于记录从对应的信号转换装置（30）输出的电信号的多个电信号记录装置（33） 。 电信号记录装置（33）是线形的，并且具有用于其每个纵向部分的读出线（58a）。 读出线（58）用于从光接收区域直接读出电信号。

公开(公告)号：US11222910B2

公开(公告)日：2022-01-11

申请号：US16866699

申请日：2020-05-05

Applicant: Takeharu Etoh

Inventor： Takeharu Etoh

IPC: H01L27/14 ,  H01L27/146 ,  H04N5/378 ,  H01L27/148

Abstract: A backside-illuminated multi-collection-gate image sensor is expected to achieve ultra-high-speed imaging. Signal electrons generated by incident light are collected to the pixel center of the front side and distributed to multiple collection gates placed around the center at a very short time interval. The temporal resolution is measured by the spread of arrival times of signal electrons to a collection gate. The major cause of the spread is mixing of signal electrons generated near the pixel border travelling a longer horizontal distance to the pixel center and those generated near the pixel center. Suppression of the horizontal travel time effectively decreases the standard deviation of the distribution of the arrival time. Therefore, devices to suppress the effects of the horizontal motion are introduced, such as a pipe-like photoelectron conversion layer with a much narrower cross section than the pixel area and a funnel-like photoelectron conversion layer.

公开(公告)号：US07858937B2

公开(公告)日：2010-12-28

申请号：US12303037

申请日：2006-05-30

Applicant: Kiyoshi Ogawa ,  Takeharu Etoh

Inventor： Kiyoshi Ogawa ,  Takeharu Etoh

IPC: H01J37/252

CPC classification number: H01J49/0004 ,  H01J49/061

Abstract: A sample S is irradiated with a two-dimensionally spread ray of laser light to simultaneously ionize substances within a two-dimensional area on the sample. The resultant ions are mass-separated by a TOF mass separator 4 without changing the interrelationship of the emission points of the ions. The separated ions are then directed to a two-dimensional detector section 7 through a deflection electric field created by deflection electrodes 61 and 62. The two-dimensional detector section 7 consists of a plurality of detection units 7a arranged in parallel, each unit including an MCP 8a, fluorescent plate 9a and two-dimensional array detector 10a. The magnitude of deflecting the flight path of the ions by the deflection electric field is changed in a stepwise manner with the lapse of time from the generation of the ions so that a plurality of mass analysis images are sequentially projected on each detection unit 7. When the mass analysis image shifts from one detection unit to another, the data acquisition operation by the two-dimensional array detector in the previous detection unit is discontinued. As a result, a predetermined number of the latest images are held inside the detector. Thus, the measurement time can be extended to widen the measurable mass-to-charge ratio range, while ensuring a high mass resolution.

Abstract translation: 用二维扩散的激光照射样品S，以同时电离样品二维区域内的物质。 通过TOF质量分离器4将所得离子质量分离，而不改变离子的发射点的相互关系。 分离的离子然后通过由偏转电极61和62产生的偏转电场被引导到二维检测器部分7.二维检测器部分7由多个并联布置的检测单元7a组成，每个单元包括一个 MCP 8a，荧光板9a和二维阵列检测器10a。 通过偏转电场使离子的飞行路径偏转的大小随着离子的产生经过时间而逐步改变，使得多个质量分析图像顺序投影在每个检测单元7上。当 质量分析图像从一个检测单元移动到另一个检测单元，则中止了先前检测单元中的二维阵列检测器的数据获取操作。 结果，预定数量的最新图像被保持在检测器内部。 因此，可以延长测量时间，以扩大可测量的质荷比范围，同时确保高质量分辨率。

公开(公告)号：US20090272890A1

公开(公告)日：2009-11-05

申请号：US12303037

申请日：2006-05-30

Applicant: Kiyoshi Ogawa ,  Takeharu Etoh

Inventor： Kiyoshi Ogawa ,  Takeharu Etoh

IPC: H01J49/00

CPC classification number: H01J49/0004 ,  H01J49/061

Abstract: A sample S is irradiated with a two-dimensionally spread ray of laser light to simultaneously ionize substances within a two-dimensional area on the sample. The resultant ions are mass-separated by a TOF mass separator 4 without changing the interrelationship of the emission points of the ions. The separated ions are then directed to a two-dimensional detector section 7 through a deflection electric field created by deflection electrodes 61 and 62. The two-dimensional detector section 7 consists of a plurality of detection units 7a arranged in parallel, each unit including an MCP 8a, fluorescent plate 9a and two-dimensional array detector 10a. The magnitude of deflecting the flight path of the ions by the deflection electric field is changed in a stepwise manner with the lapse of time from the generation of the ions so that a plurality of mass analysis images are sequentially projected on each detection unit 7. When the mass analysis image shifts from one detection unit to another, the data acquisition operation by the two-dimensional array detector in the previous detection unit is discontinued. As a result, a predetermined number of the latest images are held inside the detector. Thus, the measurement time can be extended to widen the measurable mass-to-charge ratio range, while ensuring a high mass resolution.

Abstract translation: 用二维扩散的激光照射样品S，以同时电离样品二维区域内的物质。 通过TOF质量分离器4将所得离子质量分离，而不改变离子的发射点的相互关系。 分离的离子然后通过由偏转电极61和62产生的偏转电场被引导到二维检测器部分7.二维检测器部分7由多个并联布置的检测单元7a组成，每个单元包括一个 MCP 8a，荧光板9a和二维阵列检测器10a。 通过偏转电场使离子的飞行路径偏转的大小随着离子的产生经过时间而逐步改变，使得多个质量分析图像顺序投影在每个检测单元7上。当 质量分析图像从一个检测单元移动到另一个检测单元，则中止了先前检测单元中的二维阵列检测器的数据获取操作。 结果，预定数量的最新图像被保持在检测器内部。 因此，可以延长测量时间，以扩大可测量的质荷比范围，同时确保高质量分辨率。

公开(公告)号：US06873361B1

公开(公告)日：2005-03-29

申请号：US09647219

申请日：2000-01-27

Applicant: Takeharu Etoh

Inventor： Takeharu Etoh

IPC: H01L25/04 ,  H01L25/16 ,  H01L27/148 ,  H04N3/15 ,  H04N3/14 ,  H04N5/335

CPC classification number: H01L27/1485 ,  H01L25/043 ,  H01L25/167 ,  H01L27/14618 ,  H01L27/148 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An image sensor (21) has a plurality of chips (31). Each chip (31) has a plurality of converter (33) for converting incident beams into electric signals and a plurality of electric signal storages (35). The converters (33) are arranged in one row or a plurality of rows in the vicinity of the first end portion (31a) of the chip (31). Each electric signal storage (35) extends from the converter (33) to the second end portion (31b) opposite to the first end portion (31a). The first end portion (31a) of each chip (31) is shifted relative to the first end portion (31a) of an adjacent chip (31) so that the row of the converters (33) of the respective chips (31) are stepwise exposed.

Abstract translation: 图像传感器（21）具有多个芯片（31）。 每个芯片（31）具有用于将入射光束转换为电信号的多个转换器（33）和多个电信号存储器（35）。 转换器（33）在芯片（31）的第一端部（31a）附近排列成一行或多列。 每个电信号存储器（35）从转换器（33）延伸到与第一端部（31a）相对的第二端部（31b）。 每个芯片（31）的第一端部（31a）相对于相邻芯片（31）的第一端部（31a）移动，使得各个芯片（31）的转换器（33）的行是逐步的 裸露。

公开(公告)号：US08576319B2

公开(公告)日：2013-11-05

申请号：US12929004

申请日：2010-12-22

Applicant: Masatoshi Kureta ,  Masatoshi Arai ,  Takeharu Etoh ,  Konoe Etoh ,  Toshiaki Akino

Inventor： Masatoshi Kureta ,  Masatoshi Arai ,  Takeharu Etoh ,  Konoe Etoh ,  Toshiaki Akino

IPC: H04N3/14 ,  H04N5/335 ,  H04N9/04

CPC classification number: H04N5/335 ,  H01L27/14806 ,  H04N5/3592 ,  H04N5/37213 ,  H04N5/3728

Abstract: An image sensor and an image sensing method can obtain image signals with a high S/N ratio in a high-speed image pickup operation. Signal charges are input to input transfer stage 31 of CCD memory 30. Final transfer stage 32 is formed so as to be connected to the input transfer stage 31 and able to transfer signal charges to the input transfer stage 31. In an accumulation mode, read gate 42 and drain gate 40 are not turned on and the next transfer operation of the CCD memory 30 is conducted. The accumulated signal charges are transferred on a stage by stage basis and the signal charges obtained at the first image pickup timing are transferred again straightly to the input transfer stage 31. In this state, the signal charges obtained newly at photoelectric conversion section 20 at the next image pickup timing are injected into the input transfer stage 31 by way of input gate 21. As a result of this operation, the signal charges obtained at the last image pickup timing are added to the signal charges accumulated in the input transfer stage 31 so that integrated signal charges obtained by adding the two sets of signal charges are accumulated in the input transfer stage 31.

Abstract translation: 图像传感器和图像感测方法可以在高速图像拾取操作中获得具有高S / N比的图像信号。 信号电荷被输入到CCD存储器30的输入传送级31.最终传送级32被形成为连接到输入传送级31并且能够将信号电荷传送到输入传送级31.在累加模式下，读取 门42和漏极门40不导通，并且进行CCD存储器30的下一个传送操作。 累积的信号电荷逐级传送，并且在第一摄像定时获得的信号电荷被直接传送到输入传送级31.在这种状态下，在光电转换部20新获得的信号电荷 下一个图像拾取定时通过输入门21被注入到输入传送级31.作为该操作的结果，在最后图像拾取定时获得的信号电荷被加到累积在输入传送级31中的信号电荷 通过添加两组信号电荷而获得的积分信号电荷被积累在输入传送级31中。